
Ricardo J. Palabrica
Examiner (ID: 14635)
| Most Active Art Unit | 3663 |
| Art Unit(s) | 3646, 3641, 3663 |
| Total Applications | 599 |
| Issued Applications | 375 |
| Pending Applications | 14 |
| Abandoned Applications | 210 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
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[patent_title] => Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same
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