Search

Ricardo J. Palabrica

Examiner (ID: 14635)

Most Active Art Unit
3663
Art Unit(s)
3646, 3641, 3663
Total Applications
599
Issued Applications
375
Pending Applications
14
Abandoned Applications
210

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 15315321 [patent_doc_number] => 10522374 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-12-31 [patent_title] => Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same [patent_app_type] => utility [patent_app_number] => 15/857047 [patent_app_country] => US [patent_app_date] => 2017-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 13 [patent_no_of_words] => 6952 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15857047 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/857047
Electrostatic chuck, substrate processing apparatus, and method of manufacturing semiconductor device using the same Dec 27, 2017 Issued
Array ( [id] => 16697034 [patent_doc_number] => 10947617 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-03-16 [patent_title] => Tune able masks for PVD deposit thickness uniformity management [patent_app_type] => utility [patent_app_number] => 15/829928 [patent_app_country] => US [patent_app_date] => 2017-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 12 [patent_no_of_words] => 2699 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15829928 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/829928
Tune able masks for PVD deposit thickness uniformity management Dec 2, 2017 Issued
Array ( [id] => 16347982 [patent_doc_number] => 20200312633 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-01 [patent_title] => BOTTOM AND MIDDLE EDGE RINGS [patent_app_type] => utility [patent_app_number] => 16/487703 [patent_app_country] => US [patent_app_date] => 2017-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12167 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -22 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16487703 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/487703
Bottom and middle edge rings Nov 20, 2017 Issued
Array ( [id] => 16981452 [patent_doc_number] => 20210225689 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-22 [patent_title] => PROXIMITY PIN, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF PROCESSING SUBSTRATE IN SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/302772 [patent_app_country] => US [patent_app_date] => 2017-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4996 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16302772 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/302772
PROXIMITY PIN, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF PROCESSING SUBSTRATE IN SUBSTRATE PROCESSING APPARATUS Nov 20, 2017 Abandoned
Array ( [id] => 12154660 [patent_doc_number] => 20180025925 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-01-25 [patent_title] => 'WAFER HOLDER AND TEMPERATURE CONDITIONING ARRANGEMENT AND METHOD OF MANUFACTURING A WAFER' [patent_app_type] => utility [patent_app_number] => 15/723266 [patent_app_country] => US [patent_app_date] => 2017-10-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3974 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15723266 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/723266
Wafer holder and temperature conditioning arrangement and method of manufacturing a wafer Oct 2, 2017 Issued
Array ( [id] => 14103073 [patent_doc_number] => 20190093212 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-03-28 [patent_title] => System and Method for Controlling the Elemental Composition of Films Produced by Pulsed Laser Deposition [patent_app_type] => utility [patent_app_number] => 15/718202 [patent_app_country] => US [patent_app_date] => 2017-09-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2726 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15718202 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/718202
System and method for controlling the elemental composition of films produced by pulsed laser deposition Sep 27, 2017 Issued
Array ( [id] => 14079261 [patent_doc_number] => 20190088518 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-03-21 [patent_title] => SUBSTRATE SUPPORT WITH COOLED AND CONDUCTING PINS [patent_app_type] => utility [patent_app_number] => 15/710683 [patent_app_country] => US [patent_app_date] => 2017-09-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4946 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15710683 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/710683
SUBSTRATE SUPPORT WITH COOLED AND CONDUCTING PINS Sep 19, 2017 Abandoned
Array ( [id] => 14079265 [patent_doc_number] => 20190088520 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-03-21 [patent_title] => SUBSTRATE SUPPORT WITH MULTIPLE EMBEDDED ELECTRODES [patent_app_type] => utility [patent_app_number] => 15/710753 [patent_app_country] => US [patent_app_date] => 2017-09-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3746 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15710753 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/710753
Substrate support with multiple embedded electrodes Sep 19, 2017 Issued
Array ( [id] => 14049687 [patent_doc_number] => 20190080951 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-03-14 [patent_title] => SUBSTRATE SUPPORT FOR REDUCED DAMAGE SUBSTRATE BACKSIDE [patent_app_type] => utility [patent_app_number] => 15/703961 [patent_app_country] => US [patent_app_date] => 2017-09-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3822 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15703961 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/703961
Substrate support for reduced damage substrate backside Sep 12, 2017 Issued
Array ( [id] => 17163262 [patent_doc_number] => 11149351 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-19 [patent_title] => Apparatus and method for chemical vapor deposition process for semiconductor substrates [patent_app_type] => utility [patent_app_number] => 15/700232 [patent_app_country] => US [patent_app_date] => 2017-09-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 30 [patent_no_of_words] => 12419 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 550 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15700232 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/700232
Apparatus and method for chemical vapor deposition process for semiconductor substrates Sep 10, 2017 Issued
Array ( [id] => 13451727 [patent_doc_number] => 20180277406 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-09-27 [patent_title] => SUBSTRATE TREATMENT APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 15/699727 [patent_app_country] => US [patent_app_date] => 2017-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2997 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15699727 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/699727
SUBSTRATE TREATMENT APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE Sep 7, 2017 Abandoned
Array ( [id] => 14502331 [patent_doc_number] => 20190194820 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-27 [patent_title] => SUSCEPTOR FOR A CHEMICAL VAPOUR DEPOSITION REACTOR [patent_app_type] => utility [patent_app_number] => 16/327298 [patent_app_country] => US [patent_app_date] => 2017-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8251 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16327298 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/327298
Susceptor for a chemical vapour deposition reactor Aug 21, 2017 Issued
Array ( [id] => 12989875 [patent_doc_number] => 20170345691 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-11-30 [patent_title] => SUBSTRATE SUPPORT ASSEMBLY [patent_app_type] => utility [patent_app_number] => 15/679099 [patent_app_country] => US [patent_app_date] => 2017-08-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7694 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 115 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15679099 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/679099
SUBSTRATE SUPPORT ASSEMBLY Aug 15, 2017 Abandoned
Array ( [id] => 16293481 [patent_doc_number] => 10770336 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-09-08 [patent_title] => Substrate lift mechanism and reactor including same [patent_app_type] => utility [patent_app_number] => 15/672096 [patent_app_country] => US [patent_app_date] => 2017-08-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3984 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15672096 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/672096
Substrate lift mechanism and reactor including same Aug 7, 2017 Issued
Array ( [id] => 18606370 [patent_doc_number] => 11747834 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-09-05 [patent_title] => Increasing the gas efficiency for an electrostatic chuck [patent_app_type] => utility [patent_app_number] => 15/667708 [patent_app_country] => US [patent_app_date] => 2017-08-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 8001 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 262 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15667708 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/667708
Increasing the gas efficiency for an electrostatic chuck Aug 2, 2017 Issued
Array ( [id] => 12054444 [patent_doc_number] => 20170330788 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-11-16 [patent_title] => 'Control Of The Incidence Angle Of An Ion Beam On A Substrate' [patent_app_type] => utility [patent_app_number] => 15/666548 [patent_app_country] => US [patent_app_date] => 2017-08-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7332 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15666548 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/666548
Control Of The Incidence Angle Of An Ion Beam On A Substrate Jul 31, 2017 Abandoned
Array ( [id] => 15915987 [patent_doc_number] => 10655225 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-05-19 [patent_title] => Substrate pedestal module including backside gas delivery tube and method of making [patent_app_type] => utility [patent_app_number] => 15/662553 [patent_app_country] => US [patent_app_date] => 2017-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3925 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15662553 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/662553
Substrate pedestal module including backside gas delivery tube and method of making Jul 27, 2017 Issued
Array ( [id] => 16142155 [patent_doc_number] => 10704142 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-07-07 [patent_title] => Quick disconnect resistance temperature detector assembly for rotating pedestal [patent_app_type] => utility [patent_app_number] => 15/661441 [patent_app_country] => US [patent_app_date] => 2017-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 3834 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 164 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15661441 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/661441
Quick disconnect resistance temperature detector assembly for rotating pedestal Jul 26, 2017 Issued
Array ( [id] => 12159352 [patent_doc_number] => 20180030617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-02-01 [patent_title] => 'APPARATUS FOR MANUFACTURING A SECOND SUBSTRATE ON A FIRST SUBSTRATE INCLUDING REMOVAL OF THE FIRST SUBSTRATE' [patent_app_type] => utility [patent_app_number] => 15/641746 [patent_app_country] => US [patent_app_date] => 2017-07-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 9063 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15641746 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/641746
Apparatus for manufacturing a second substrate on a first substrate including removal of the first substrate Jul 4, 2017 Issued
Array ( [id] => 17529867 [patent_doc_number] => 11302565 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-04-12 [patent_title] => Device for handling a semiconductor wafer in an epitaxy reactor and method for producing a semiconductor wafer having an epitaxial layer [patent_app_type] => utility [patent_app_number] => 16/309014 [patent_app_country] => US [patent_app_date] => 2017-07-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 2322 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16309014 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/309014
Device for handling a semiconductor wafer in an epitaxy reactor and method for producing a semiconductor wafer having an epitaxial layer Jul 2, 2017 Issued
Menu