Ricardo J. Palabrica

Array ( [id] => 13718079 [patent_doc_number] => 20170369994 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-12-28 [patent_title] => APPARATUS FOR PROCESSING A WAFER AND METHOD OF DEPOSITING A THIN FILM USING THE SAME [patent_app_type] => utility [patent_app_number] => 15/624255 [patent_app_country] => US [patent_app_date] => 2017-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2340 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 185 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15624255 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13598201 [patent_doc_number] => 20180350649 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-06 [patent_title] => ELECTROSTATIC CHUCK FOR USE IN SEMICONDUCTOR PROCESSING [patent_app_type] => utility [patent_app_number] => 15/612423 [patent_app_country] => US [patent_app_date] => 2017-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4288 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15612423 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11854799 [patent_doc_number] => 20170229291 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-08-10 [patent_title] => 'METHODS AND SYSTEMS TO ENHANCE PROCESS UNIFORMITY' [patent_app_type] => utility [patent_app_number] => 15/581446 [patent_app_country] => US [patent_app_date] => 2017-04-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8200 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15581446 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14938237 [patent_doc_number] => 20190304757 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-03 [patent_title] => PLASMA ETCH CHAMBER AND METHOD OF PLASMA ETCHING [patent_app_type] => utility [patent_app_number] => 16/306043 [patent_app_country] => US [patent_app_date] => 2017-04-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6085 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -28 [patent_words_short_claim] => 237 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16306043 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11990178 [patent_doc_number] => 20170294333 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-10-12 [patent_title] => 'VACUUM CHUCK PRESSURE CONTROL SYSTEM' [patent_app_type] => utility [patent_app_number] => 15/464519 [patent_app_country] => US [patent_app_date] => 2017-03-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 3210 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15464519 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11732685 [patent_doc_number] => 20170194128 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-07-06 [patent_title] => 'INDUCTIVE PLASMA SOURCE WITH METALLIC SHOWER HEAD USING B-FIELD CONCENTRATOR' [patent_app_type] => utility [patent_app_number] => 15/462507 [patent_app_country] => US [patent_app_date] => 2017-03-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4007 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15462507 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13428869 [patent_doc_number] => 20180265977 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-09-20 [patent_title] => DEPOSITION SYSTEM WITH VACUUM PRE-LOADED DEPOSITION HEAD [patent_app_type] => utility [patent_app_number] => 15/458250 [patent_app_country] => US [patent_app_date] => 2017-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 27007 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 294 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15458250 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16928270 [patent_doc_number] => 11049760 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-06-29 [patent_title] => Universal process kit [patent_app_type] => utility [patent_app_number] => 15/436936 [patent_app_country] => US [patent_app_date] => 2017-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3967 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 260 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15436936 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16832414 [patent_doc_number] => 11008655 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-05-18 [patent_title] => Components such as edge rings including chemical vapor deposition (CVD) diamond coating with high purity SP3 bonds for plasma processing systems [patent_app_type] => utility [patent_app_number] => 15/428744 [patent_app_country] => US [patent_app_date] => 2017-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 5680 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 55 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15428744 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11836795 [patent_doc_number] => 20170218514 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-08-03 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/420352 [patent_app_country] => US [patent_app_date] => 2017-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 31 [patent_figures_cnt] => 31 [patent_no_of_words] => 15271 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15420352 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14011505 [patent_doc_number] => 10224228 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-03-05 [patent_title] => Electrostatic chucks and substrate processing apparatus including the same [patent_app_type] => utility [patent_app_number] => 15/420211 [patent_app_country] => US [patent_app_date] => 2017-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5183 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 276 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15420211 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11824770 [patent_doc_number] => 20170213707 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-07-27 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/413521 [patent_app_country] => US [patent_app_date] => 2017-01-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 8813 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15413521 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 11824821 [patent_doc_number] => 20170213758 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-07-27 [patent_title] => 'WAFER EDGE RING LIFTING SOLUTION' [patent_app_type] => utility [patent_app_number] => 15/399809 [patent_app_country] => US [patent_app_date] => 2017-01-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 8482 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15399809 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16609182 [patent_doc_number] => 10910195 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-02-02 [patent_title] => Substrate support with improved process uniformity [patent_app_type] => utility [patent_app_number] => 15/399244 [patent_app_country] => US [patent_app_date] => 2017-01-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 4630 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15399244 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13785235 [patent_doc_number] => 20190006156 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-01-03 [patent_title] => Plasma Processing Apparatus [patent_app_type] => utility [patent_app_number] => 16/067811 [patent_app_country] => US [patent_app_date] => 2017-01-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3691 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 280 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16067811 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18073659 [patent_doc_number] => 11532497 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-12-20 [patent_title] => High power electrostatic chuck design with radio frequency coupling [patent_app_type] => utility [patent_app_number] => 15/383035 [patent_app_country] => US [patent_app_date] => 2016-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 7306 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 213 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15383035 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13958617 [patent_doc_number] => 20190055652 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-02-21 [patent_title] => INJECTOR OF SILICON FOR THE SEMICONDUCTOR INDUSTRY [patent_app_type] => utility [patent_app_number] => 16/065227 [patent_app_country] => US [patent_app_date] => 2016-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2437 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16065227 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12033719 [patent_doc_number] => 20170323818 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-11-09 [patent_title] => 'ROTATING AND HOLDING APPARATUS FOR SEMICONDUCTOR SUBSTRATE AND CONVEYING APPARATUS OF ROTATING AND HOLDING APPARATUS FOR SEMICONDUCTOR SUBSTRATE' [patent_app_type] => utility [patent_app_number] => 15/382184 [patent_app_country] => US [patent_app_date] => 2016-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 8657 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15382184 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16184745 [patent_doc_number] => 10718052 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-07-21 [patent_title] => Rotating disk reactor with ferrofluid seal for chemical vapor deposition [patent_app_type] => utility [patent_app_number] => 15/382216 [patent_app_country] => US [patent_app_date] => 2016-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 8584 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 274 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15382216 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17822987 [patent_doc_number] => 11427929 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-08-30 [patent_title] => Wafer supporting mechanism, chemical vapor deposition apparatus, and epitaxial wafer manufacturing method [patent_app_type] => utility [patent_app_number] => 16/063391 [patent_app_country] => US [patent_app_date] => 2016-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 15 [patent_no_of_words] => 8435 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 233 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16063391 [rel_patent_id] =>[rel_patent_doc_number] =>)