Search

Ricardo J. Palabrica

Examiner (ID: 14635)

Most Active Art Unit
3663
Art Unit(s)
3646, 3641, 3663
Total Applications
599
Issued Applications
375
Pending Applications
14
Abandoned Applications
210

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18718210 [patent_doc_number] => 11795545 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-24 [patent_title] => Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same [patent_app_type] => utility [patent_app_number] => 17/167820 [patent_app_country] => US [patent_app_date] => 2021-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3780 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 273 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17167820 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/167820
Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same Feb 3, 2021 Issued
Array ( [id] => 18193520 [patent_doc_number] => 20230047039 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-16 [patent_title] => EDGE RING TRANSFER WITH AUTOMATED ROTATIONAL PRE-ALIGNMENT [patent_app_type] => utility [patent_app_number] => 17/793715 [patent_app_country] => US [patent_app_date] => 2021-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8359 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17793715 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/793715
EDGE RING TRANSFER WITH AUTOMATED ROTATIONAL PRE-ALIGNMENT Jan 19, 2021 Pending
Array ( [id] => 19168384 [patent_doc_number] => 11984296 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-05-14 [patent_title] => Substrate support with improved process uniformity [patent_app_type] => utility [patent_app_number] => 17/151366 [patent_app_country] => US [patent_app_date] => 2021-01-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 4665 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17151366 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/151366
Substrate support with improved process uniformity Jan 17, 2021 Issued
Array ( [id] => 16966150 [patent_doc_number] => 20210217649 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-15 [patent_title] => EDGE RING AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/145171 [patent_app_country] => US [patent_app_date] => 2021-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3730 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 55 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17145171 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/145171
EDGE RING AND SUBSTRATE PROCESSING APPARATUS Jan 7, 2021 Abandoned
Array ( [id] => 18192673 [patent_doc_number] => 20230046192 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-16 [patent_title] => Device For Generating A Dielectric Barrier Discharge And Method For Treating An Object To Be Activated [patent_app_type] => utility [patent_app_number] => 17/758546 [patent_app_country] => US [patent_app_date] => 2020-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5846 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17758546 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/758546
Device for generating a dielectric barrier discharge and method for treating an object to be activated Dec 16, 2020 Issued
Array ( [id] => 17007580 [patent_doc_number] => 20210238741 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-05 [patent_title] => COVER RING AND GROUND SHIELD FOR PHYSICAL VAPOR DEPOSITION CHAMBER [patent_app_type] => utility [patent_app_number] => 17/119436 [patent_app_country] => US [patent_app_date] => 2020-12-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6337 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17119436 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/119436
COVER RING AND GROUND SHIELD FOR PHYSICAL VAPOR DEPOSITION CHAMBER Dec 10, 2020 Pending
Array ( [id] => 18147178 [patent_doc_number] => 20230021035 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-19 [patent_title] => LINEARLY MOVING MECHANISM AND METHOD OF SUPPRESSING PARTICLE SCATTERING [patent_app_type] => utility [patent_app_number] => 17/757173 [patent_app_country] => US [patent_app_date] => 2020-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12621 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 280 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17757173 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/757173
LINEARLY MOVING MECHANISM AND METHOD OF SUPPRESSING PARTICLE SCATTERING Dec 6, 2020 Pending
Array ( [id] => 16723789 [patent_doc_number] => 20210090936 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-25 [patent_title] => CARRIER PLATE FOR USE IN PLASMA PROCESSING SYSTEMS [patent_app_type] => utility [patent_app_number] => 17/113848 [patent_app_country] => US [patent_app_date] => 2020-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13396 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 244 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17113848 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/113848
Carrier plate for use in plasma processing systems Dec 6, 2020 Issued
Array ( [id] => 19701861 [patent_doc_number] => 12195877 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-14 [patent_title] => Substrate support device for a reaction chamber of an epitaxial reactor with gas flow rotation, reaction chamber and epitaxial reactor [patent_app_type] => utility [patent_app_number] => 17/778923 [patent_app_country] => US [patent_app_date] => 2020-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 3938 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 294 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17778923 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/778923
Substrate support device for a reaction chamber of an epitaxial reactor with gas flow rotation, reaction chamber and epitaxial reactor Nov 22, 2020 Issued
Array ( [id] => 20389229 [patent_doc_number] => 12488963 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-02 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/778757 [patent_app_country] => US [patent_app_date] => 2020-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 0 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 246 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17778757 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/778757
Substrate processing apparatus Nov 18, 2020 Issued
Array ( [id] => 19121291 [patent_doc_number] => 11965262 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-23 [patent_title] => Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method [patent_app_type] => utility [patent_app_number] => 17/092599 [patent_app_country] => US [patent_app_date] => 2020-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 15 [patent_no_of_words] => 6018 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17092599 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/092599
Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method Nov 8, 2020 Issued
Array ( [id] => 16601481 [patent_doc_number] => 20210028012 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-28 [patent_title] => PLASMA ENHANCED CVD WITH PERIODIC HIGH VOLTAGE BIAS [patent_app_type] => utility [patent_app_number] => 17/070821 [patent_app_country] => US [patent_app_date] => 2020-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5990 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17070821 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/070821
Plasma enhanced CVD with periodic high voltage bias Oct 13, 2020 Issued
Array ( [id] => 19717637 [patent_doc_number] => 12203161 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-21 [patent_title] => Component for plasma processing apparatus and plasma processing apparatus including component [patent_app_type] => utility [patent_app_number] => 17/764141 [patent_app_country] => US [patent_app_date] => 2020-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 4961 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17764141 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/764141
Component for plasma processing apparatus and plasma processing apparatus including component Sep 28, 2020 Issued
Array ( [id] => 18562891 [patent_doc_number] => 11728143 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-15 [patent_title] => Process kit with adjustable tuning ring for edge uniformity control [patent_app_type] => utility [patent_app_number] => 17/033177 [patent_app_country] => US [patent_app_date] => 2020-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 25 [patent_no_of_words] => 10226 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 224 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17033177 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/033177
Process kit with adjustable tuning ring for edge uniformity control Sep 24, 2020 Issued
Array ( [id] => 19943564 [patent_doc_number] => 12315700 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-05-27 [patent_title] => Plasma processing apparatus and ceiling wall [patent_app_type] => utility [patent_app_number] => 17/766379 [patent_app_country] => US [patent_app_date] => 2020-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 12 [patent_no_of_words] => 3313 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17766379 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/766379
Plasma processing apparatus and ceiling wall Sep 24, 2020 Issued
Array ( [id] => 18360767 [patent_doc_number] => 20230142358 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-11 [patent_title] => STRUCTURAL BODY AND HEATING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/768814 [patent_app_country] => US [patent_app_date] => 2020-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7602 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17768814 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/768814
Structural body and heating apparatus Sep 24, 2020 Issued
Array ( [id] => 18507530 [patent_doc_number] => 11705357 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-18 [patent_title] => Substrate processing system including electrostatic chuck and method for manufacturing electrostatic chuck [patent_app_type] => utility [patent_app_number] => 17/032099 [patent_app_country] => US [patent_app_date] => 2020-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6094 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17032099 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/032099
Substrate processing system including electrostatic chuck and method for manufacturing electrostatic chuck Sep 24, 2020 Issued
Array ( [id] => 16557606 [patent_doc_number] => 20210002754 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-07 [patent_title] => COMPONENT FOR USE IN PLASMA PROCESSING APPARATUS, PLASMA PROCESSING APPARATUS, AND METHOD FOR MANUFACTURING THE COMPONENT [patent_app_type] => utility [patent_app_number] => 17/021643 [patent_app_country] => US [patent_app_date] => 2020-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6227 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 210 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17021643 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/021643
Component for use in plasma processing apparatus, plasma processing apparatus, and method for manufacturing the component Sep 14, 2020 Issued
Array ( [id] => 17115499 [patent_doc_number] => 20210296096 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-23 [patent_title] => EDGE RING AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/017487 [patent_app_country] => US [patent_app_date] => 2020-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3732 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17017487 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/017487
Edge ring and plasma processing apparatus Sep 9, 2020 Issued
Array ( [id] => 16673572 [patent_doc_number] => 20210062335 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-04 [patent_title] => APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/010541 [patent_app_country] => US [patent_app_date] => 2020-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8157 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17010541 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/010541
APPARATUS FOR MANUFACTURING SEMICONDUCTOR DEVICE Sep 1, 2020 Pending
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