Search

Richard M. Camby

Examiner (ID: 10376, Phone: (571)272-6958 , Office: P/3661 )

Most Active Art Unit
3661
Art Unit(s)
3661, 3104, 3618, 3106, 3611, 2899
Total Applications
3661
Issued Applications
3297
Pending Applications
159
Abandoned Applications
236

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 833194 [patent_doc_number] => 07396483 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-07-08 [patent_title] => 'Uniform chemical etching method' [patent_app_type] => utility [patent_app_number] => 11/214589 [patent_app_country] => US [patent_app_date] => 2005-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 3025 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/396/07396483.pdf [firstpage_image] =>[orig_patent_app_number] => 11214589 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/214589
Uniform chemical etching method Aug 28, 2005 Issued
Array ( [id] => 5738648 [patent_doc_number] => 20060009039 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-12 [patent_title] => 'Etching method, etching apparatus, and method for manufacturing semiconductor device' [patent_app_type] => utility [patent_app_number] => 11/203110 [patent_app_country] => US [patent_app_date] => 2005-08-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 10227 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0009/20060009039.pdf [firstpage_image] =>[orig_patent_app_number] => 11203110 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/203110
Etching method, etching apparatus, and method for manufacturing semiconductor device Aug 14, 2005 Abandoned
Array ( [id] => 910163 [patent_doc_number] => 07329610 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-02-12 [patent_title] => 'Method of high selectivity SAC etching' [patent_app_type] => utility [patent_app_number] => 11/203211 [patent_app_country] => US [patent_app_date] => 2005-08-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 5803 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/329/07329610.pdf [firstpage_image] =>[orig_patent_app_number] => 11203211 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/203211
Method of high selectivity SAC etching Aug 14, 2005 Issued
Array ( [id] => 5765108 [patent_doc_number] => 20050263483 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-01 [patent_title] => 'Modifying the viscosity of etchants' [patent_app_type] => utility [patent_app_number] => 11/196034 [patent_app_country] => US [patent_app_date] => 2005-08-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 813 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0263/20050263483.pdf [firstpage_image] =>[orig_patent_app_number] => 11196034 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/196034
Modifying the viscosity of etchants Aug 2, 2005 Abandoned
11/161309 ETCHING APPARATUS AND ETCHING PROCESS Jul 28, 2005 Abandoned
Array ( [id] => 5892102 [patent_doc_number] => 20060000808 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-05 [patent_title] => 'Polishing solution of metal and chemical mechanical polishing method' [patent_app_type] => utility [patent_app_number] => 11/169577 [patent_app_country] => US [patent_app_date] => 2005-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 15160 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20060000808.pdf [firstpage_image] =>[orig_patent_app_number] => 11169577 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/169577
Polishing solution of metal and chemical mechanical polishing method Jun 29, 2005 Abandoned
Array ( [id] => 5768050 [patent_doc_number] => 20060019452 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-26 [patent_title] => 'METHOD FOR PATTERNING HFO2-CONTAINING DIELECTRIC' [patent_app_type] => utility [patent_app_number] => 11/160629 [patent_app_country] => US [patent_app_date] => 2005-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 1849 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0019/20060019452.pdf [firstpage_image] =>[orig_patent_app_number] => 11160629 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/160629
Method for patterning HfO2-containing dielectric Jun 29, 2005 Issued
Array ( [id] => 6978096 [patent_doc_number] => 20050287814 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-29 [patent_title] => 'H2O plasma for simultaneous resist removal and charge releasing' [patent_app_type] => utility [patent_app_number] => 11/140115 [patent_app_country] => US [patent_app_date] => 2005-05-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 2406 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 11 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0287/20050287814.pdf [firstpage_image] =>[orig_patent_app_number] => 11140115 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/140115
H2O plasma for simultaneous resist removal and charge releasing May 26, 2005 Abandoned
Array ( [id] => 7248282 [patent_doc_number] => 20050272267 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-08 [patent_title] => 'Method suitable for batch ion etching of copper' [patent_app_type] => utility [patent_app_number] => 11/131369 [patent_app_country] => US [patent_app_date] => 2005-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3881 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0272/20050272267.pdf [firstpage_image] =>[orig_patent_app_number] => 11131369 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/131369
Method suitable for batch ion etching of copper May 17, 2005 Issued
Array ( [id] => 806311 [patent_doc_number] => 07419612 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-09-02 [patent_title] => 'Method of creating pores in a thin sheet of polyimide' [patent_app_type] => utility [patent_app_number] => 11/131943 [patent_app_country] => US [patent_app_date] => 2005-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 14 [patent_no_of_words] => 3618 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 55 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/419/07419612.pdf [firstpage_image] =>[orig_patent_app_number] => 11131943 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/131943
Method of creating pores in a thin sheet of polyimide May 17, 2005 Issued
Array ( [id] => 6909618 [patent_doc_number] => 20050173376 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-08-11 [patent_title] => 'Method for etching a wafer in a plasma etch reactor' [patent_app_type] => utility [patent_app_number] => 11/101730 [patent_app_country] => US [patent_app_date] => 2005-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3209 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0173/20050173376.pdf [firstpage_image] =>[orig_patent_app_number] => 11101730 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/101730
Method for etching a wafer in a plasma etch reactor Apr 7, 2005 Abandoned
Array ( [id] => 7194071 [patent_doc_number] => 20050163928 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-07-28 [patent_title] => 'Production method for producing gallium nitride film semiconductor and method of cleaning an exhaust gas' [patent_app_type] => utility [patent_app_number] => 11/080427 [patent_app_country] => US [patent_app_date] => 2005-03-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4207 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0163/20050163928.pdf [firstpage_image] =>[orig_patent_app_number] => 11080427 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/080427
Production apparatus for producing gallium nitride semiconductor film and cleaning apparatus for exhaust gas Mar 15, 2005 Issued
Array ( [id] => 612676 [patent_doc_number] => 07148073 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2006-12-12 [patent_title] => 'Methods and systems for preparing a copper containing substrate for analysis' [patent_app_type] => utility [patent_app_number] => 11/082039 [patent_app_country] => US [patent_app_date] => 2005-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 22 [patent_no_of_words] => 16497 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/148/07148073.pdf [firstpage_image] =>[orig_patent_app_number] => 11082039 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/082039
Methods and systems for preparing a copper containing substrate for analysis Mar 14, 2005 Issued
Array ( [id] => 6963447 [patent_doc_number] => 20050230344 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-20 [patent_title] => 'Method for cleaning the surface of a substrate' [patent_app_type] => utility [patent_app_number] => 11/072139 [patent_app_country] => US [patent_app_date] => 2005-03-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4647 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0230/20050230344.pdf [firstpage_image] =>[orig_patent_app_number] => 11072139 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/072139
Method for cleaning the surface of a substrate Mar 3, 2005 Issued
Array ( [id] => 270486 [patent_doc_number] => 07563722 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-07-21 [patent_title] => 'Method of making a textured surface' [patent_app_type] => utility [patent_app_number] => 11/071907 [patent_app_country] => US [patent_app_date] => 2005-03-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 1347 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/563/07563722.pdf [firstpage_image] =>[orig_patent_app_number] => 11071907 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/071907
Method of making a textured surface Mar 3, 2005 Issued
Array ( [id] => 6965423 [patent_doc_number] => 20050232320 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-20 [patent_title] => 'Method of manufacturing optical crystal element of laser' [patent_app_type] => utility [patent_app_number] => 11/049879 [patent_app_country] => US [patent_app_date] => 2005-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3185 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0232/20050232320.pdf [firstpage_image] =>[orig_patent_app_number] => 11049879 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/049879
Method of manufacturing optical crystal element of laser Feb 3, 2005 Issued
Array ( [id] => 5868913 [patent_doc_number] => 20060163530 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-07-27 [patent_title] => 'Corrosion-resistant barrier polishing solution' [patent_app_type] => utility [patent_app_number] => 11/044769 [patent_app_country] => US [patent_app_date] => 2005-01-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 6078 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0163/20060163530.pdf [firstpage_image] =>[orig_patent_app_number] => 11044769 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/044769
Corrosion-resistant barrier polishing solution Jan 25, 2005 Issued
Array ( [id] => 329074 [patent_doc_number] => 07509962 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-03-31 [patent_title] => 'Method and control system for treating a hafnium-based dielectric processing system' [patent_app_type] => utility [patent_app_number] => 11/038129 [patent_app_country] => US [patent_app_date] => 2005-01-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 8278 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/509/07509962.pdf [firstpage_image] =>[orig_patent_app_number] => 11038129 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/038129
Method and control system for treating a hafnium-based dielectric processing system Jan 20, 2005 Issued
Array ( [id] => 6958585 [patent_doc_number] => 20050214955 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-09-29 [patent_title] => 'Method to control a management system to control semiconductor manufacturing equipment' [patent_app_type] => utility [patent_app_number] => 11/006543 [patent_app_country] => US [patent_app_date] => 2004-12-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2713 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0214/20050214955.pdf [firstpage_image] =>[orig_patent_app_number] => 11006543 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/006543
Method to control a management system to control semiconductor manufacturing equipment Dec 7, 2004 Issued
Array ( [id] => 7074920 [patent_doc_number] => 20050148188 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-07-07 [patent_title] => 'System and method for monitoring particles contamination in semiconductor manufacturing facilities' [patent_app_type] => utility [patent_app_number] => 11/004099 [patent_app_country] => US [patent_app_date] => 2004-12-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2733 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0148/20050148188.pdf [firstpage_image] =>[orig_patent_app_number] => 11004099 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/004099
System and method for monitoring particles contamination in semiconductor manufacturing facilities Dec 5, 2004 Issued
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