Robert A. Lynch

Array ( [id] => 11528971 [patent_doc_number] => 20170088948 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-03-30 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS AND FURNACE OPENING COVER' [patent_app_type] => utility [patent_app_number] => 15/128139 [patent_app_country] => US [patent_app_date] => 2015-02-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 9008 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15128139 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10259266 [patent_doc_number] => 20150144263 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-05-28 [patent_title] => 'SUBSTRATE HEATING PEDESTAL HAVING CERAMIC BALLS' [patent_app_type] => utility [patent_app_number] => 14/613219 [patent_app_country] => US [patent_app_date] => 2015-02-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 7498 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14613219 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10277173 [patent_doc_number] => 20150162170 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-06-11 [patent_title] => 'PLASMA PROCESSING APPARATUS AND FOCUS RING' [patent_app_type] => utility [patent_app_number] => 14/564371 [patent_app_country] => US [patent_app_date] => 2014-12-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6641 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14564371 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10270142 [patent_doc_number] => 20150155139 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-06-04 [patent_title] => 'DIELECTRIC WINDOW, ANTENNA AND PLASMA PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/556596 [patent_app_country] => US [patent_app_date] => 2014-12-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 10364 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14556596 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10296685 [patent_doc_number] => 20150181684 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-06-25 [patent_title] => 'EXTREME EDGE AND SKEW CONTROL IN ICP PLASMA REACTOR' [patent_app_type] => utility [patent_app_number] => 14/543316 [patent_app_country] => US [patent_app_date] => 2014-11-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 3629 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14543316 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10225979 [patent_doc_number] => 20150110973 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-04-23 [patent_title] => 'PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD' [patent_app_type] => utility [patent_app_number] => 14/518101 [patent_app_country] => US [patent_app_date] => 2014-10-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7038 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14518101 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9898355 [patent_doc_number] => 20150053553 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-02-26 [patent_title] => 'PLASMA PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/465837 [patent_app_country] => US [patent_app_date] => 2014-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 20593 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 10 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14465837 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10923257 [patent_doc_number] => 20140326277 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-11-06 [patent_title] => 'APPARATUS AND METHOD FOR PLASMA TREATMENT OF SURFACES' [patent_app_type] => utility [patent_app_number] => 14/333217 [patent_app_country] => US [patent_app_date] => 2014-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 7372 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14333217 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9801963 [patent_doc_number] => 20150013907 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-01-15 [patent_title] => 'MICROWAVE PLASMA PROCESSING APPARATUS, SLOT ANTENNA, AND SEMICONDUCTOR DEVICE' [patent_app_type] => utility [patent_app_number] => 14/326656 [patent_app_country] => US [patent_app_date] => 2014-07-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 14019 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14326656 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9801967 [patent_doc_number] => 20150013912 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-01-15 [patent_title] => 'MICROWAVE PLASMA PROCESSING APPARATUS, SLOT ANTENNA, AND SEMICONDUCTOR DEVICE' [patent_app_type] => utility [patent_app_number] => 14/326755 [patent_app_country] => US [patent_app_date] => 2014-07-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 14862 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14326755 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10486808 [patent_doc_number] => 20150371828 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-12-24 [patent_title] => 'LOW COST WIDE PROCESS RANGE MICROWAVE REMOTE PLASMA SOURCE WITH MULTIPLE EMITTERS' [patent_app_type] => utility [patent_app_number] => 14/313173 [patent_app_country] => US [patent_app_date] => 2014-06-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 3332 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14313173 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10476540 [patent_doc_number] => 20150361557 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-12-17 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD' [patent_app_type] => utility [patent_app_number] => 14/306593 [patent_app_country] => US [patent_app_date] => 2014-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4645 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14306593 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9835293 [patent_doc_number] => 20150027374 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-01-29 [patent_title] => 'VAPOR DEPOSITION APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/302646 [patent_app_country] => US [patent_app_date] => 2014-06-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6200 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14302646 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10954037 [patent_doc_number] => 20140357058 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-12-04 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM' [patent_app_type] => utility [patent_app_number] => 14/293469 [patent_app_country] => US [patent_app_date] => 2014-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 24 [patent_no_of_words] => 24463 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14293469 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10217018 [patent_doc_number] => 20150102011 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-04-16 [patent_title] => 'PLASMA ETCHING APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/285727 [patent_app_country] => US [patent_app_date] => 2014-05-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4367 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14285727 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10949867 [patent_doc_number] => 20140352889 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-12-04 [patent_title] => 'APPARATUS FOR PROCESSING A SEMICONDUCTOR WORKPIECE' [patent_app_type] => utility [patent_app_number] => 14/285730 [patent_app_country] => US [patent_app_date] => 2014-05-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3565 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14285730 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 10217018 [patent_doc_number] => 20150102011 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-04-16 [patent_title] => 'PLASMA ETCHING APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/285727 [patent_app_country] => US [patent_app_date] => 2014-05-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4367 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14285727 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17270272 [patent_doc_number] => 11195700 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-12-07 [patent_title] => Etching apparatus [patent_app_type] => utility [patent_app_number] => 14/277295 [patent_app_country] => US [patent_app_date] => 2014-05-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 26 [patent_no_of_words] => 6559 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 335 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14277295 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13140407 [patent_doc_number] => 10087524 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-10-02 [patent_title] => Showerhead support structure for improved gas flow [patent_app_type] => utility [patent_app_number] => 14/275835 [patent_app_country] => US [patent_app_date] => 2014-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 17 [patent_no_of_words] => 8599 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14275835 [rel_patent_id] =>[rel_patent_doc_number] =>)