Search

Robert A. Sorey

Examiner (ID: 6840, Phone: (571)270-3606 , Office: P/3626 )

Most Active Art Unit
3626
Art Unit(s)
3682, 3626
Total Applications
520
Issued Applications
238
Pending Applications
55
Abandoned Applications
236

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 1441107 [patent_doc_number] => 06335293 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-01-01 [patent_title] => 'Systems and methods for two-sided etch of a semiconductor substrate' [patent_app_type] => B1 [patent_app_number] => 09/351259 [patent_app_country] => US [patent_app_date] => 1999-07-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 20 [patent_no_of_words] => 10162 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/335/06335293.pdf [firstpage_image] =>[orig_patent_app_number] => 09351259 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/351259
Systems and methods for two-sided etch of a semiconductor substrate Jul 11, 1999 Issued
Array ( [id] => 6899501 [patent_doc_number] => 20010009177 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-07-26 [patent_title] => 'SYSTEMS AND METHODS FOR TWO-SIDED ETCH OF A SEMICONDUCTOR SUBSTRATE' [patent_app_type] => new [patent_app_number] => 09/351257 [patent_app_country] => US [patent_app_date] => 1999-07-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 10263 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 198 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0009/20010009177.pdf [firstpage_image] =>[orig_patent_app_number] => 09351257 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/351257
SYSTEMS AND METHODS FOR TWO-SIDED ETCH OF A SEMICONDUCTOR SUBSTRATE Jul 11, 1999 Abandoned
Array ( [id] => 4360383 [patent_doc_number] => 06274058 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-08-14 [patent_title] => 'Remote plasma cleaning method for processing chambers' [patent_app_type] => 1 [patent_app_number] => 9/347236 [patent_app_country] => US [patent_app_date] => 1999-07-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 13485 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 191 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/274/06274058.pdf [firstpage_image] =>[orig_patent_app_number] => 347236 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/347236
Remote plasma cleaning method for processing chambers Jul 1, 1999 Issued
Array ( [id] => 4320307 [patent_doc_number] => 06319355 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-11-20 [patent_title] => 'Plasma processor with coil responsive to variable amplitude rf envelope' [patent_app_type] => 1 [patent_app_number] => 9/343246 [patent_app_country] => US [patent_app_date] => 1999-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 6735 [patent_no_of_claims] => 39 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/319/06319355.pdf [firstpage_image] =>[orig_patent_app_number] => 343246 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/343246
Plasma processor with coil responsive to variable amplitude rf envelope Jun 29, 1999 Issued
Array ( [id] => 1476679 [patent_doc_number] => 06344105 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-02-05 [patent_title] => 'Techniques for improving etch rate uniformity' [patent_app_type] => B1 [patent_app_number] => 09/345639 [patent_app_country] => US [patent_app_date] => 1999-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 6146 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/344/06344105.pdf [firstpage_image] =>[orig_patent_app_number] => 09345639 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/345639
Techniques for improving etch rate uniformity Jun 29, 1999 Issued
Array ( [id] => 4238943 [patent_doc_number] => 06221203 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-04-24 [patent_title] => 'Apparatus and method for controlling temperature of a chamber' [patent_app_type] => 1 [patent_app_number] => 9/323344 [patent_app_country] => US [patent_app_date] => 1999-06-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 3749 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/221/06221203.pdf [firstpage_image] =>[orig_patent_app_number] => 323344 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/323344
Apparatus and method for controlling temperature of a chamber May 31, 1999 Issued
Array ( [id] => 4402239 [patent_doc_number] => 06299723 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-10-09 [patent_title] => 'Anti-airlock apparatus for filters' [patent_app_type] => 1 [patent_app_number] => 9/321659 [patent_app_country] => US [patent_app_date] => 1999-05-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 8 [patent_no_of_words] => 4356 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/299/06299723.pdf [firstpage_image] =>[orig_patent_app_number] => 321659 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/321659
Anti-airlock apparatus for filters May 27, 1999 Issued
Array ( [id] => 4286042 [patent_doc_number] => 06197150 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-03-06 [patent_title] => 'Apparatus for wafer treatment for the manufacture of semiconductor devices' [patent_app_type] => 1 [patent_app_number] => 9/320139 [patent_app_country] => US [patent_app_date] => 1999-05-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 4724 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/197/06197150.pdf [firstpage_image] =>[orig_patent_app_number] => 320139 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/320139
Apparatus for wafer treatment for the manufacture of semiconductor devices May 25, 1999 Issued
Array ( [id] => 1505543 [patent_doc_number] => 06440261 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-08-27 [patent_title] => 'Dual buffer chamber cluster tool for semiconductor wafer processing' [patent_app_type] => B1 [patent_app_number] => 09/318233 [patent_app_country] => US [patent_app_date] => 1999-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 10435 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/440/06440261.pdf [firstpage_image] =>[orig_patent_app_number] => 09318233 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/318233
Dual buffer chamber cluster tool for semiconductor wafer processing May 24, 1999 Issued
Array ( [id] => 4284273 [patent_doc_number] => 06179955 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-01-30 [patent_title] => 'Dry etching apparatus for manufacturing semiconductor devices' [patent_app_type] => 1 [patent_app_number] => 9/317138 [patent_app_country] => US [patent_app_date] => 1999-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 2464 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/179/06179955.pdf [firstpage_image] =>[orig_patent_app_number] => 317138 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/317138
Dry etching apparatus for manufacturing semiconductor devices May 23, 1999 Issued
Array ( [id] => 4358892 [patent_doc_number] => 06273956 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-08-14 [patent_title] => 'Synchronous multiplexed near zero overhead architecture for vacuum processes' [patent_app_type] => 1 [patent_app_number] => 9/314193 [patent_app_country] => US [patent_app_date] => 1999-05-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 27 [patent_figures_cnt] => 36 [patent_no_of_words] => 8773 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 180 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/273/06273956.pdf [firstpage_image] =>[orig_patent_app_number] => 314193 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/314193
Synchronous multiplexed near zero overhead architecture for vacuum processes May 18, 1999 Issued
Array ( [id] => 4282930 [patent_doc_number] => 06235146 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-05-22 [patent_title] => 'Vacuum treatment system and its stage' [patent_app_type] => 1 [patent_app_number] => 9/313253 [patent_app_country] => US [patent_app_date] => 1999-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 3903 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/235/06235146.pdf [firstpage_image] =>[orig_patent_app_number] => 313253 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/313253
Vacuum treatment system and its stage May 17, 1999 Issued
Array ( [id] => 4219268 [patent_doc_number] => 06040245 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-03-21 [patent_title] => 'IC mechanical planarization process incorporating two slurry compositions for faster material removal times' [patent_app_type] => 1 [patent_app_number] => 9/310506 [patent_app_country] => US [patent_app_date] => 1999-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 1951 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/040/06040245.pdf [firstpage_image] =>[orig_patent_app_number] => 310506 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/310506
IC mechanical planarization process incorporating two slurry compositions for faster material removal times May 11, 1999 Issued
Array ( [id] => 4400373 [patent_doc_number] => 06171513 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-01-09 [patent_title] => 'Chemical-mechanical polishing system having a bi-material wafer backing film and two-piece wafer carrier' [patent_app_type] => 1 [patent_app_number] => 9/303471 [patent_app_country] => US [patent_app_date] => 1999-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 3264 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/171/06171513.pdf [firstpage_image] =>[orig_patent_app_number] => 303471 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/303471
Chemical-mechanical polishing system having a bi-material wafer backing film and two-piece wafer carrier Apr 29, 1999 Issued
Array ( [id] => 4415601 [patent_doc_number] => 06176969 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-01-23 [patent_title] => 'Baffle plate of dry etching apparatus for manufacturing semiconductor devices' [patent_app_type] => 1 [patent_app_number] => 9/296532 [patent_app_country] => US [patent_app_date] => 1999-04-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 16 [patent_no_of_words] => 4469 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/176/06176969.pdf [firstpage_image] =>[orig_patent_app_number] => 296532 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/296532
Baffle plate of dry etching apparatus for manufacturing semiconductor devices Apr 21, 1999 Issued
Array ( [id] => 4284259 [patent_doc_number] => 06179954 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-01-30 [patent_title] => 'Apparatus and method for etching printed circuit board' [patent_app_type] => 1 [patent_app_number] => 9/295519 [patent_app_country] => US [patent_app_date] => 1999-04-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 22 [patent_no_of_words] => 12910 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/179/06179954.pdf [firstpage_image] =>[orig_patent_app_number] => 295519 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/295519
Apparatus and method for etching printed circuit board Apr 20, 1999 Issued
Array ( [id] => 4402159 [patent_doc_number] => 06228210 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-05-08 [patent_title] => 'Surface wave coupled plasma etching apparatus' [patent_app_type] => 1 [patent_app_number] => 9/295629 [patent_app_country] => US [patent_app_date] => 1999-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 2035 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/228/06228210.pdf [firstpage_image] =>[orig_patent_app_number] => 295629 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/295629
Surface wave coupled plasma etching apparatus Apr 19, 1999 Issued
Array ( [id] => 4200386 [patent_doc_number] => 06077452 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-06-20 [patent_title] => 'Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment' [patent_app_type] => 1 [patent_app_number] => 9/291831 [patent_app_country] => US [patent_app_date] => 1999-04-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 24 [patent_no_of_words] => 8921 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 13 [patent_words_short_claim] => 19 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/077/06077452.pdf [firstpage_image] =>[orig_patent_app_number] => 291831 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/291831
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment Apr 13, 1999 Issued
Array ( [id] => 1576505 [patent_doc_number] => 06447691 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-09-10 [patent_title] => 'Method for detecting end point of plasma etching, and plasma etching apparatus' [patent_app_type] => B1 [patent_app_number] => 09/287611 [patent_app_country] => US [patent_app_date] => 1999-04-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 3778 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/447/06447691.pdf [firstpage_image] =>[orig_patent_app_number] => 09287611 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/287611
Method for detecting end point of plasma etching, and plasma etching apparatus Apr 6, 1999 Issued
Array ( [id] => 1457184 [patent_doc_number] => 06391145 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-05-21 [patent_title] => 'Solar cell, a method of producing the same and a semiconductor producing apparatus' [patent_app_type] => B1 [patent_app_number] => 09/285264 [patent_app_country] => US [patent_app_date] => 1999-04-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 14 [patent_no_of_words] => 9598 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/391/06391145.pdf [firstpage_image] =>[orig_patent_app_number] => 09285264 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/285264
Solar cell, a method of producing the same and a semiconductor producing apparatus Apr 1, 1999 Issued
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