Search

Robert A. Sorey

Examiner (ID: 6840, Phone: (571)270-3606 , Office: P/3626 )

Most Active Art Unit
3626
Art Unit(s)
3682, 3626
Total Applications
520
Issued Applications
238
Pending Applications
55
Abandoned Applications
236

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 4200815 [patent_doc_number] => 06027606 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-02-22 [patent_title] => 'Center gas feed apparatus for a high density plasma reactor' [patent_app_type] => 1 [patent_app_number] => 9/108950 [patent_app_country] => US [patent_app_date] => 1998-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 8 [patent_no_of_words] => 2626 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/027/06027606.pdf [firstpage_image] =>[orig_patent_app_number] => 108950 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/108950
Center gas feed apparatus for a high density plasma reactor Jun 29, 1998 Issued
Array ( [id] => 3927449 [patent_doc_number] => 05980688 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-11-09 [patent_title] => 'Plasma reactors and method of cleaning a plasma reactor' [patent_app_type] => 1 [patent_app_number] => 9/107928 [patent_app_country] => US [patent_app_date] => 1998-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 2322 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/980/05980688.pdf [firstpage_image] =>[orig_patent_app_number] => 107928 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/107928
Plasma reactors and method of cleaning a plasma reactor Jun 29, 1998 Issued
Array ( [id] => 4286269 [patent_doc_number] => 06268224 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-07-31 [patent_title] => 'Method and apparatus for detecting an ion-implanted polishing endpoint layer within a semiconductor wafer' [patent_app_type] => 1 [patent_app_number] => 9/108091 [patent_app_country] => US [patent_app_date] => 1998-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 10 [patent_no_of_words] => 6701 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/268/06268224.pdf [firstpage_image] =>[orig_patent_app_number] => 108091 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/108091
Method and apparatus for detecting an ion-implanted polishing endpoint layer within a semiconductor wafer Jun 29, 1998 Issued
Array ( [id] => 1458645 [patent_doc_number] => 06426232 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-07-30 [patent_title] => 'Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment' [patent_app_type] => B1 [patent_app_number] => 09/097429 [patent_app_country] => US [patent_app_date] => 1998-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 24 [patent_no_of_words] => 9079 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 138 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/426/06426232.pdf [firstpage_image] =>[orig_patent_app_number] => 09097429 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/097429
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment Jun 14, 1998 Issued
Array ( [id] => 4419882 [patent_doc_number] => 06177356 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-01-23 [patent_title] => 'Semiconductor cleaning apparatus' [patent_app_type] => 1 [patent_app_number] => 9/090742 [patent_app_country] => US [patent_app_date] => 1998-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 11 [patent_no_of_words] => 3831 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/177/06177356.pdf [firstpage_image] =>[orig_patent_app_number] => 090742 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/090742
Semiconductor cleaning apparatus Jun 3, 1998 Issued
Array ( [id] => 4096295 [patent_doc_number] => 06051073 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-04-18 [patent_title] => 'Perforated shield for plasma immersion ion implantation' [patent_app_type] => 1 [patent_app_number] => 9/089883 [patent_app_country] => US [patent_app_date] => 1998-06-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 14 [patent_no_of_words] => 4876 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/051/06051073.pdf [firstpage_image] =>[orig_patent_app_number] => 089883 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/089883
Perforated shield for plasma immersion ion implantation Jun 2, 1998 Issued
Array ( [id] => 4185906 [patent_doc_number] => 06093625 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-07-25 [patent_title] => 'Apparatus for and methods of implanting desired chemical species in semiconductor substrates' [patent_app_type] => 1 [patent_app_number] => 9/081517 [patent_app_country] => US [patent_app_date] => 1998-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 3143 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/093/06093625.pdf [firstpage_image] =>[orig_patent_app_number] => 081517 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/081517
Apparatus for and methods of implanting desired chemical species in semiconductor substrates May 19, 1998 Issued
Array ( [id] => 4332230 [patent_doc_number] => 06332962 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-12-25 [patent_title] => 'Thin-film magnetic recording head manufacture using selective imaging' [patent_app_type] => 1 [patent_app_number] => 9/070559 [patent_app_country] => US [patent_app_date] => 1998-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 7977 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 321 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/332/06332962.pdf [firstpage_image] =>[orig_patent_app_number] => 070559 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/070559
Thin-film magnetic recording head manufacture using selective imaging Apr 29, 1998 Issued
Array ( [id] => 4145763 [patent_doc_number] => 06106660 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-08-22 [patent_title] => 'Etching machine having lower electrode bias voltage source' [patent_app_type] => 1 [patent_app_number] => 9/062116 [patent_app_country] => US [patent_app_date] => 1998-04-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2060 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 259 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/106/06106660.pdf [firstpage_image] =>[orig_patent_app_number] => 062116 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/062116
Etching machine having lower electrode bias voltage source Apr 16, 1998 Issued
Array ( [id] => 4207278 [patent_doc_number] => 06110322 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-08-29 [patent_title] => 'Prevention of ground fault interrupts in a semiconductor processing system' [patent_app_type] => 1 [patent_app_number] => 9/036536 [patent_app_country] => US [patent_app_date] => 1998-03-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5902 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/110/06110322.pdf [firstpage_image] =>[orig_patent_app_number] => 036536 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/036536
Prevention of ground fault interrupts in a semiconductor processing system Mar 5, 1998 Issued
Array ( [id] => 4279340 [patent_doc_number] => 06210594 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-04-03 [patent_title] => 'Near substrate reactant homogenization apparatus' [patent_app_type] => 1 [patent_app_number] => 9/031130 [patent_app_country] => US [patent_app_date] => 1998-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 1895 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 45 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/210/06210594.pdf [firstpage_image] =>[orig_patent_app_number] => 031130 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/031130
Near substrate reactant homogenization apparatus Feb 25, 1998 Issued
Array ( [id] => 4172677 [patent_doc_number] => 06036878 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-03-14 [patent_title] => 'Low density high frequency process for a parallel-plate electrode plasma reactor having an inductive antenna' [patent_app_type] => 1 [patent_app_number] => 9/023365 [patent_app_country] => US [patent_app_date] => 1998-02-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 74 [patent_figures_cnt] => 118 [patent_no_of_words] => 29313 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 212 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/036/06036878.pdf [firstpage_image] =>[orig_patent_app_number] => 023365 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/023365
Low density high frequency process for a parallel-plate electrode plasma reactor having an inductive antenna Feb 12, 1998 Issued
Array ( [id] => 3925956 [patent_doc_number] => 05972163 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-10-26 [patent_title] => 'Plasma cleaning device for substrate' [patent_app_type] => 1 [patent_app_number] => 9/019618 [patent_app_country] => US [patent_app_date] => 1998-02-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3614 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/972/05972163.pdf [firstpage_image] =>[orig_patent_app_number] => 019618 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/019618
Plasma cleaning device for substrate Feb 5, 1998 Issued
Array ( [id] => 1535061 [patent_doc_number] => 06337030 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-01-08 [patent_title] => 'Wafer processing apparatus, wafer processing method, and SOI wafer fabrication method' [patent_app_type] => B1 [patent_app_number] => 09/015809 [patent_app_country] => US [patent_app_date] => 1998-01-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 14 [patent_no_of_words] => 6577 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/337/06337030.pdf [firstpage_image] =>[orig_patent_app_number] => 09015809 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/015809
Wafer processing apparatus, wafer processing method, and SOI wafer fabrication method Jan 28, 1998 Issued
Array ( [id] => 4077893 [patent_doc_number] => 06024800 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-02-15 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => 1 [patent_app_number] => 9/013521 [patent_app_country] => US [patent_app_date] => 1998-01-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 4358 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/024/06024800.pdf [firstpage_image] =>[orig_patent_app_number] => 013521 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/013521
Plasma processing apparatus Jan 25, 1998 Issued
Array ( [id] => 4072585 [patent_doc_number] => 06095159 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-08-01 [patent_title] => 'Method of modifying an RF circuit of a plasma chamber to increase chamber life and process capabilities' [patent_app_type] => 1 [patent_app_number] => 9/012155 [patent_app_country] => US [patent_app_date] => 1998-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 2393 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/095/06095159.pdf [firstpage_image] =>[orig_patent_app_number] => 012155 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/012155
Method of modifying an RF circuit of a plasma chamber to increase chamber life and process capabilities Jan 21, 1998 Issued
Array ( [id] => 4166535 [patent_doc_number] => 06083412 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-07-04 [patent_title] => 'Plasma etch apparatus with heated scavenging surfaces' [patent_app_type] => 1 [patent_app_number] => 9/003867 [patent_app_country] => US [patent_app_date] => 1998-01-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3243 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/083/06083412.pdf [firstpage_image] =>[orig_patent_app_number] => 003867 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/003867
Plasma etch apparatus with heated scavenging surfaces Jan 6, 1998 Issued
Array ( [id] => 4227918 [patent_doc_number] => 06165376 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-12-26 [patent_title] => 'Work surface treatment method and work surface treatment apparatus' [patent_app_type] => 1 [patent_app_number] => 9/003035 [patent_app_country] => US [patent_app_date] => 1998-01-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 4692 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/165/06165376.pdf [firstpage_image] =>[orig_patent_app_number] => 003035 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/003035
Work surface treatment method and work surface treatment apparatus Jan 4, 1998 Issued
Array ( [id] => 3916784 [patent_doc_number] => 05944901 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-08-31 [patent_title] => 'Indirect plasmatron' [patent_app_type] => 1 [patent_app_number] => 8/994091 [patent_app_country] => US [patent_app_date] => 1997-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 6 [patent_no_of_words] => 3726 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 213 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/944/05944901.pdf [firstpage_image] =>[orig_patent_app_number] => 994091 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/994091
Indirect plasmatron Dec 18, 1997 Issued
Array ( [id] => 4030036 [patent_doc_number] => 05994224 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-11-30 [patent_title] => 'IC mechanical planarization process incorporating two slurry compositions for faster material removal times' [patent_app_type] => 1 [patent_app_number] => 8/992399 [patent_app_country] => US [patent_app_date] => 1997-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 1953 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/994/05994224.pdf [firstpage_image] =>[orig_patent_app_number] => 992399 [rel_patent_id] =>[rel_patent_doc_number] =>)
08/992399
IC mechanical planarization process incorporating two slurry compositions for faster material removal times Dec 16, 1997 Issued
Menu