Robert A. Wax

Array ( [id] => 20375232 [patent_doc_number] => 12482676 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-11-25 [patent_title] => Research wet etching fully automatic system and machine [patent_app_type] => utility [patent_app_number] => 19/082602 [patent_app_country] => US [patent_app_date] => 2025-03-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 15 [patent_no_of_words] => 11988 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 428 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 19082602 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19879802 [patent_doc_number] => 20250112059 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-04-03 [patent_title] => ROTATABLE ELECTROCHEMICAL ETCHING CELL [patent_app_type] => utility [patent_app_number] => 18/980720 [patent_app_country] => US [patent_app_date] => 2024-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11194 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18980720 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19684521 [patent_doc_number] => 20250003066 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-01-02 [patent_title] => SUBSTRATE PROCESSING APPARATUS, GAS NOZZLE, METHOD OF PROCESSING SUBSTRATE, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 18/886407 [patent_app_country] => US [patent_app_date] => 2024-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11711 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18886407 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19555494 [patent_doc_number] => 20240367286 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-11-07 [patent_title] => PLATEN ROTATION DEVICE [patent_app_type] => utility [patent_app_number] => 18/771782 [patent_app_country] => US [patent_app_date] => 2024-07-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7249 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18771782 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20144337 [patent_doc_number] => 12378668 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-05 [patent_title] => Gas tube, gas supply system and manufacturing method of semiconductor device using the same [patent_app_type] => utility [patent_app_number] => 18/740531 [patent_app_country] => US [patent_app_date] => 2024-06-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 10 [patent_no_of_words] => 0 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18740531 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20150844 [patent_doc_number] => 20250250682 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-08-07 [patent_title] => Systems and Methods for Depositing Alternating Layers for a Diamond-Like Coating [patent_app_type] => utility [patent_app_number] => 18/665999 [patent_app_country] => US [patent_app_date] => 2024-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6217 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18665999 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19349173 [patent_doc_number] => 20240258137 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-01 [patent_title] => SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED FOOTPRINT [patent_app_type] => utility [patent_app_number] => 18/632509 [patent_app_country] => US [patent_app_date] => 2024-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6421 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18632509 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19216894 [patent_doc_number] => 20240181598 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-06 [patent_title] => MONOLITHIC PLATEN [patent_app_type] => utility [patent_app_number] => 18/438148 [patent_app_country] => US [patent_app_date] => 2024-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6176 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18438148 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20143201 [patent_doc_number] => 12377520 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-05 [patent_title] => Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing [patent_app_type] => utility [patent_app_number] => 18/412399 [patent_app_country] => US [patent_app_date] => 2024-01-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 2316 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 196 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18412399 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19082362 [patent_doc_number] => 20240109163 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-04-04 [patent_title] => METHOD FOR CMP TEMPERATURE CONTROL [patent_app_type] => utility [patent_app_number] => 18/537574 [patent_app_country] => US [patent_app_date] => 2023-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6395 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18537574 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19069016 [patent_doc_number] => 20240103442 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-28 [patent_title] => SUPPORT MEMBER FOR SUPPORTING A WAFER DURING A HEAT TREATMENT [patent_app_type] => utility [patent_app_number] => 18/533303 [patent_app_country] => US [patent_app_date] => 2023-12-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2356 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18533303 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19871547 [patent_doc_number] => 12264396 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-04-01 [patent_title] => Substrate processing method [patent_app_type] => utility [patent_app_number] => 18/517341 [patent_app_country] => US [patent_app_date] => 2023-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4966 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18517341 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19161085 [patent_doc_number] => 20240153792 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-09 [patent_title] => APPARATUS AND METHOD FOR PROCESSING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 18/387713 [patent_app_country] => US [patent_app_date] => 2023-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9004 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18387713 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19964784 [patent_doc_number] => 12334301 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-17 [patent_title] => Plasma source and method for removing materials from substrates utilizing pressure waves [patent_app_type] => utility [patent_app_number] => 18/383943 [patent_app_country] => US [patent_app_date] => 2023-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 14 [patent_no_of_words] => 1167 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 51 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18383943 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19054689 [patent_doc_number] => 20240096658 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-21 [patent_title] => ETCHING CONTROL DEVICE, ETCHING CONTROL METHOD, AND ETCHING CONTROL SYSTEM [patent_app_type] => utility [patent_app_number] => 18/469673 [patent_app_country] => US [patent_app_date] => 2023-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5849 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -1 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18469673 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19054700 [patent_doc_number] => 20240096669 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-21 [patent_title] => SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 18/460759 [patent_app_country] => US [patent_app_date] => 2023-09-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16718 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18460759 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18845075 [patent_doc_number] => 20230407479 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-21 [patent_title] => SUBSTRATE HOLDER, SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 18/458491 [patent_app_country] => US [patent_app_date] => 2023-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14161 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18458491 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19038103 [patent_doc_number] => 20240087918 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-14 [patent_title] => SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 18/458034 [patent_app_country] => US [patent_app_date] => 2023-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10129 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18458034 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19004013 [patent_doc_number] => 20240068084 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-29 [patent_title] => DEPOSITION APPARATUS [patent_app_type] => utility [patent_app_number] => 18/239101 [patent_app_country] => US [patent_app_date] => 2023-08-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8355 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18239101 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19976384 [patent_doc_number] => 12343841 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-01 [patent_title] => High-throughput, precise semiconductor slurry blending tool [patent_app_type] => utility [patent_app_number] => 18/446816 [patent_app_country] => US [patent_app_date] => 2023-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 1118 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18446816 [rel_patent_id] =>[rel_patent_doc_number] =>)