Search

Robert A. Wax

Supervisory Patent Examiner (ID: 4181, Phone: (571)272-0623 , Office: P/1615 )

Most Active Art Unit
1615
Art Unit(s)
1615, 1656, 1506, 1805, 1652, 1808, 1507, 1814, 1653, 1105, 1807
Total Applications
1622
Issued Applications
930
Pending Applications
418
Abandoned Applications
279

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16088207 [patent_doc_number] => 20200198090 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-25 [patent_title] => CMP APPARATUS AND METHOD OF PERFORMING CERIA-BASED CMP PROCESS [patent_app_type] => utility [patent_app_number] => 16/692721 [patent_app_country] => US [patent_app_date] => 2019-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3935 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16692721 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/692721
CMP APPARATUS AND METHOD OF PERFORMING CERIA-BASED CMP PROCESS Nov 21, 2019 Abandoned
Array ( [id] => 15991501 [patent_doc_number] => 20200171621 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-04 [patent_title] => POLISHING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/692092 [patent_app_country] => US [patent_app_date] => 2019-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7858 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16692092 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/692092
Polishing apparatus Nov 21, 2019 Issued
Array ( [id] => 18548206 [patent_doc_number] => 11721565 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-08 [patent_title] => Multi-chamber apparatus [patent_app_type] => utility [patent_app_number] => 16/690498 [patent_app_country] => US [patent_app_date] => 2019-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 13 [patent_no_of_words] => 8390 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16690498 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/690498
Multi-chamber apparatus Nov 20, 2019 Issued
Array ( [id] => 17890150 [patent_doc_number] => 11453097 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-09-27 [patent_title] => Chemical mechanical polishing apparatus and methods [patent_app_type] => utility [patent_app_number] => 16/691581 [patent_app_country] => US [patent_app_date] => 2019-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 16 [patent_no_of_words] => 6440 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 138 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16691581 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/691581
Chemical mechanical polishing apparatus and methods Nov 20, 2019 Issued
Array ( [id] => 16987913 [patent_doc_number] => 11075096 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-07-27 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 16/675551 [patent_app_country] => US [patent_app_date] => 2019-11-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 34 [patent_no_of_words] => 11352 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 228 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16675551 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/675551
Substrate processing apparatus Nov 5, 2019 Issued
Array ( [id] => 16421119 [patent_doc_number] => 20200346317 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-05 [patent_title] => CONDITIONER, CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE APPARATUS [patent_app_type] => utility [patent_app_number] => 16/662439 [patent_app_country] => US [patent_app_date] => 2019-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9291 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16662439 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/662439
Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus Oct 23, 2019 Issued
Array ( [id] => 16098445 [patent_doc_number] => 20200203209 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-25 [patent_title] => APPARATUS AND SYSTEM FOR WAFER SPIN PROCESS [patent_app_type] => utility [patent_app_number] => 16/661962 [patent_app_country] => US [patent_app_date] => 2019-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1874 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 51 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16661962 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/661962
APPARATUS AND SYSTEM FOR WAFER SPIN PROCESS Oct 22, 2019 Abandoned
Array ( [id] => 18446976 [patent_doc_number] => 11682552 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-06-20 [patent_title] => Apparatus for chemical mechanical polishing process [patent_app_type] => utility [patent_app_number] => 16/659293 [patent_app_country] => US [patent_app_date] => 2019-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 16 [patent_no_of_words] => 8977 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 198 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16659293 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/659293
Apparatus for chemical mechanical polishing process Oct 20, 2019 Issued
Array ( [id] => 19229578 [patent_doc_number] => 12009221 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-06-11 [patent_title] => Performing planarization process controls in semiconductor fabrication [patent_app_type] => utility [patent_app_number] => 16/656393 [patent_app_country] => US [patent_app_date] => 2019-10-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 25 [patent_no_of_words] => 8616 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16656393 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/656393
Performing planarization process controls in semiconductor fabrication Oct 16, 2019 Issued
Array ( [id] => 20111408 [patent_doc_number] => 12362143 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-15 [patent_title] => Plasma processing apparatus and plasma processing method [patent_app_type] => utility [patent_app_number] => 17/288415 [patent_app_country] => US [patent_app_date] => 2019-10-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 12 [patent_no_of_words] => 4510 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 272 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17288415 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/288415
Plasma processing apparatus and plasma processing method Oct 14, 2019 Issued
Array ( [id] => 17816403 [patent_doc_number] => 11422008 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-08-23 [patent_title] => Rotation angle detection apparatus and rotation angle detection method, and substrate processing apparatus and substrate processing method using same [patent_app_type] => utility [patent_app_number] => 16/596001 [patent_app_country] => US [patent_app_date] => 2019-10-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 14 [patent_no_of_words] => 8009 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16596001 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/596001
Rotation angle detection apparatus and rotation angle detection method, and substrate processing apparatus and substrate processing method using same Oct 7, 2019 Issued
Array ( [id] => 16010521 [patent_doc_number] => 20200180103 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-11 [patent_title] => APPARATUS AND METHOD FOR MONITORING CHEMICAL MECHANICAL POLISHING [patent_app_type] => utility [patent_app_number] => 16/582658 [patent_app_country] => US [patent_app_date] => 2019-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5555 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16582658 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/582658
APPARATUS AND METHOD FOR MONITORING CHEMICAL MECHANICAL POLISHING Sep 24, 2019 Abandoned
Array ( [id] => 19627047 [patent_doc_number] => 12165896 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-12-10 [patent_title] => Substrate support and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/273009 [patent_app_country] => US [patent_app_date] => 2019-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5707 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 279 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17273009 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/273009
Substrate support and substrate processing apparatus Sep 2, 2019 Issued
Array ( [id] => 15687785 [patent_doc_number] => 20200098556 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-26 [patent_title] => ATOMIC OXYGEN AND OZONE DEVICE FOR CLEANING AND SURFACE TREATMENT [patent_app_type] => utility [patent_app_number] => 16/556562 [patent_app_country] => US [patent_app_date] => 2019-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2773 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16556562 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/556562
Atomic oxygen and ozone device for cleaning and surface treatment Aug 29, 2019 Issued
Array ( [id] => 18747542 [patent_doc_number] => 11806833 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-11-07 [patent_title] => Chemical mechanical planarization system and a method of using the same [patent_app_type] => utility [patent_app_number] => 16/554441 [patent_app_country] => US [patent_app_date] => 2019-08-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 8862 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 250 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16554441 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/554441
Chemical mechanical planarization system and a method of using the same Aug 27, 2019 Issued
Array ( [id] => 15647853 [patent_doc_number] => 20200086456 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-19 [patent_title] => METHODS FOR A WEB-BASED CMP SYSTEM [patent_app_type] => utility [patent_app_number] => 16/552901 [patent_app_country] => US [patent_app_date] => 2019-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4569 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16552901 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/552901
Methods for a web-based CMP system Aug 26, 2019 Issued
Array ( [id] => 17210644 [patent_doc_number] => 11171020 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-09 [patent_title] => Substrate treatment apparatus [patent_app_type] => utility [patent_app_number] => 16/548263 [patent_app_country] => US [patent_app_date] => 2019-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 3306 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 389 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16548263 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/548263
Substrate treatment apparatus Aug 21, 2019 Issued
Array ( [id] => 18235938 [patent_doc_number] => 11600502 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-03-07 [patent_title] => Substrate liquid processing apparatus, substrate liquid processing method and recording medium [patent_app_type] => utility [patent_app_number] => 16/546653 [patent_app_country] => US [patent_app_date] => 2019-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 11171 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 450 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16546653 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/546653
Substrate liquid processing apparatus, substrate liquid processing method and recording medium Aug 20, 2019 Issued
Array ( [id] => 16272239 [patent_doc_number] => 20200273727 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-27 [patent_title] => SUBSTRATE TREATMENT APPARATUS [patent_app_type] => utility [patent_app_number] => 16/542831 [patent_app_country] => US [patent_app_date] => 2019-08-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3306 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 58 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16542831 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/542831
Substrate treatment apparatus Aug 15, 2019 Issued
Array ( [id] => 16020775 [patent_doc_number] => 20200185231 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-11 [patent_title] => CHEMICAL MECHANICAL POLISHING APPARATUS FOR CONTROLLING POLISHING UNIFORMITY [patent_app_type] => utility [patent_app_number] => 16/540466 [patent_app_country] => US [patent_app_date] => 2019-08-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8122 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16540466 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/540466
Chemical mechanical polishing apparatus for controlling polishing uniformity Aug 13, 2019 Issued
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