Robert A. Wax

Array ( [id] => 17574087 [patent_doc_number] => 11322361 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-05-03 [patent_title] => Selective etching of silicon wafer [patent_app_type] => utility [patent_app_number] => 16/539597 [patent_app_country] => US [patent_app_date] => 2019-08-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 7021 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 255 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16539597 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17538483 [patent_doc_number] => 20220117092 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-14 [patent_title] => CONTINUOUS ETCHING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/268839 [patent_app_country] => US [patent_app_date] => 2019-07-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3690 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 75 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17268839 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17085422 [patent_doc_number] => 20210280429 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-09 [patent_title] => SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/260584 [patent_app_country] => US [patent_app_date] => 2019-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8076 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17260584 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16578660 [patent_doc_number] => 20210013061 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-14 [patent_title] => TOXIC OUTGAS CONTROL POST PROCESS [patent_app_type] => utility [patent_app_number] => 16/509915 [patent_app_country] => US [patent_app_date] => 2019-07-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7992 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16509915 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18891004 [patent_doc_number] => 11869781 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-01-09 [patent_title] => Substrate processing apparatus and substrate processing method [patent_app_type] => utility [patent_app_number] => 16/454236 [patent_app_country] => US [patent_app_date] => 2019-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 9 [patent_no_of_words] => 9163 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 291 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16454236 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17807891 [patent_doc_number] => 20220259726 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-18 [patent_title] => PLASMA IN A SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/621805 [patent_app_country] => US [patent_app_date] => 2019-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4261 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 39 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17621805 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18623784 [patent_doc_number] => 11756840 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-09-12 [patent_title] => Reflectance measurement system and method thereof [patent_app_type] => utility [patent_app_number] => 16/444792 [patent_app_country] => US [patent_app_date] => 2019-06-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 9249 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 226 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16444792 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18402095 [patent_doc_number] => 11664243 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-30 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 16/440201 [patent_app_country] => US [patent_app_date] => 2019-06-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 9248 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 262 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16440201 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18341507 [patent_doc_number] => 11638978 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-02 [patent_title] => Low-debris fluopolymer composite CMP polishing pad [patent_app_type] => utility [patent_app_number] => 16/435990 [patent_app_country] => US [patent_app_date] => 2019-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 8991 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 123 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16435990 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17700152 [patent_doc_number] => 11373885 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-06-28 [patent_title] => Wet etching apparatus [patent_app_type] => utility [patent_app_number] => 16/607734 [patent_app_country] => US [patent_app_date] => 2019-06-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 4518 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 201 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16607734 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19741145 [patent_doc_number] => 12217990 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-04 [patent_title] => Method for treating objects and apparatus for carrying out the method [patent_app_type] => utility [patent_app_number] => 16/972258 [patent_app_country] => US [patent_app_date] => 2019-06-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 6069 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 363 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16972258 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17750055 [patent_doc_number] => 20220228260 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-21 [patent_title] => A CHEMICAL VAPOR DEPOSITION CHAMBER ARTICLE [patent_app_type] => utility [patent_app_number] => 17/614805 [patent_app_country] => US [patent_app_date] => 2019-05-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4034 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17614805 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15184803 [patent_doc_number] => 20190362993 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-28 [patent_title] => APPARATUS AND METHOD FOR PROCESSING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 16/421918 [patent_app_country] => US [patent_app_date] => 2019-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5708 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16421918 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18688322 [patent_doc_number] => 11784065 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-10 [patent_title] => Method for etching etch layer [patent_app_type] => utility [patent_app_number] => 16/404533 [patent_app_country] => US [patent_app_date] => 2019-05-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 6504 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16404533 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19494237 [patent_doc_number] => 12112959 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-10-08 [patent_title] => Processing systems and platforms for roughness reduction of materials using illuminated etch solutions [patent_app_type] => utility [patent_app_number] => 16/402634 [patent_app_country] => US [patent_app_date] => 2019-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 15 [patent_no_of_words] => 8814 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16402634 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15939029 [patent_doc_number] => 20200161148 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-05-21 [patent_title] => Processing System and Platform for Wet Atomic Layer Etching Using Self-Limiting and Solubility-Limited Reactions [patent_app_type] => utility [patent_app_number] => 16/402611 [patent_app_country] => US [patent_app_date] => 2019-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7914 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16402611 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17239544 [patent_doc_number] => 11183435 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-23 [patent_title] => Endpointing detection for chemical mechanical polishing based on spectrometry [patent_app_type] => utility [patent_app_number] => 16/397870 [patent_app_country] => US [patent_app_date] => 2019-04-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 24 [patent_no_of_words] => 8649 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 163 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16397870 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14685337 [patent_doc_number] => 20190241783 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-08 [patent_title] => COMPOSITION AND METHOD FOR POLISHING SILICON CARBIDE [patent_app_type] => utility [patent_app_number] => 16/389097 [patent_app_country] => US [patent_app_date] => 2019-04-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7420 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16389097 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18665360 [patent_doc_number] => 11772226 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-03 [patent_title] => Polishing apparatus [patent_app_type] => utility [patent_app_number] => 16/376274 [patent_app_country] => US [patent_app_date] => 2019-04-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 6210 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 241 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16376274 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14631249 [patent_doc_number] => 20190228994 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-07-25 [patent_title] => FLATTENING METHOD AND FLATTENING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/371796 [patent_app_country] => US [patent_app_date] => 2019-04-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13381 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -3 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16371796 [rel_patent_id] =>[rel_patent_doc_number] =>)