Robert A. Wax

Array ( [id] => 13629653 [patent_doc_number] => 20180366379 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-20 [patent_title] => Edge Seal Configurations For A Lower Electrode Assembly [patent_app_type] => utility [patent_app_number] => 16/115627 [patent_app_country] => US [patent_app_date] => 2018-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4636 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16115627 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14752935 [patent_doc_number] => 20190259641 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-22 [patent_title] => LIQUID CHEMICAL RECYCLE SYSTEM, LIQUID CHEMICAL SUPPLY SYSTEM, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE LIQUID CHEMICAL RECYCLE SYSTEM [patent_app_type] => utility [patent_app_number] => 16/115943 [patent_app_country] => US [patent_app_date] => 2018-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7285 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 135 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16115943 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 14865929 [patent_doc_number] => 20190283206 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-09-19 [patent_title] => POLISHING PAD, SEMICONDUCTOR FABRICATING DEVICE AND FABRICATING METHOD OF SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 16/109665 [patent_app_country] => US [patent_app_date] => 2018-08-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4782 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16109665 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15154235 [patent_doc_number] => 20190355595 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-21 [patent_title] => System and Method for Improved Chemical Etching [patent_app_type] => utility [patent_app_number] => 16/046039 [patent_app_country] => US [patent_app_date] => 2018-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4428 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16046039 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13528141 [patent_doc_number] => 20180315613 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-11-01 [patent_title] => CLEANING APPARATUS, CHEMICAL MECHANICAL POLISHING SYSTEM INCLUDING THE SAME, CLEANING METHOD AFTER CHEMICAL MECHANICAL POLISHING, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 16/020585 [patent_app_country] => US [patent_app_date] => 2018-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8934 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16020585 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13785329 [patent_doc_number] => 20190006203 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-01-03 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 16/012814 [patent_app_country] => US [patent_app_date] => 2018-06-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 16070 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 34 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16012814 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17267628 [patent_doc_number] => 11193043 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-12-07 [patent_title] => System for chemical mechanical polishing of Ge-based materials and devices [patent_app_type] => utility [patent_app_number] => 16/004763 [patent_app_country] => US [patent_app_date] => 2018-06-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 20 [patent_no_of_words] => 8294 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16004763 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13470341 [patent_doc_number] => 20180286713 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-10-04 [patent_title] => Apparatus and Method for Decapsulating Packaged Integrated Circuits [patent_app_type] => utility [patent_app_number] => 15/997373 [patent_app_country] => US [patent_app_date] => 2018-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4934 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15997373 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13598167 [patent_doc_number] => 20180350632 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-06 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 15/992252 [patent_app_country] => US [patent_app_date] => 2018-05-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 26152 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15992252 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16020777 [patent_doc_number] => 20200185232 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-11 [patent_title] => GETTERING LAYER FORMING APPARATUS, GETTERING LAYER FORMING METHOD AND COMPUTER-READABLE RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 16/617536 [patent_app_country] => US [patent_app_date] => 2018-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10608 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16617536 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16264507 [patent_doc_number] => 10755951 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-08-25 [patent_title] => Substrate processing apparatus and substrate processing method [patent_app_type] => utility [patent_app_number] => 15/980257 [patent_app_country] => US [patent_app_date] => 2018-05-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 16 [patent_no_of_words] => 18659 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 259 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15980257 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16862110 [patent_doc_number] => 11020837 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-06-01 [patent_title] => Monolithic platen [patent_app_type] => utility [patent_app_number] => 15/965685 [patent_app_country] => US [patent_app_date] => 2018-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6139 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15965685 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13514397 [patent_doc_number] => 20180308741 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-10-25 [patent_title] => CONFIGURABLE HIGH TEMPERATURE CHUCK FOR USE IN A SEMICONDUCTOR WAFER PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 15/960037 [patent_app_country] => US [patent_app_date] => 2018-04-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 20619 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -35 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15960037 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16928249 [patent_doc_number] => 11049738 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-06-29 [patent_title] => Substrate heating device [patent_app_type] => utility [patent_app_number] => 15/955208 [patent_app_country] => US [patent_app_date] => 2018-04-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 33 [patent_no_of_words] => 8151 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 237 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15955208 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17364632 [patent_doc_number] => 11231651 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-01-25 [patent_title] => Peripheral processing apparatus and peripheral processing method [patent_app_type] => utility [patent_app_number] => 15/952281 [patent_app_country] => US [patent_app_date] => 2018-04-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 18 [patent_no_of_words] => 10835 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 379 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15952281 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15641099 [patent_doc_number] => 10593554 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-03-17 [patent_title] => Method and apparatus for within-wafer profile localized tuning [patent_app_type] => utility [patent_app_number] => 15/941839 [patent_app_country] => US [patent_app_date] => 2018-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 22 [patent_no_of_words] => 9866 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 349 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15941839 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19704888 [patent_doc_number] => 12198935 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-14 [patent_title] => Atmospheric plasma in wafer processing system optimization [patent_app_type] => utility [patent_app_number] => 16/496796 [patent_app_country] => US [patent_app_date] => 2018-03-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 8398 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16496796 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16536474 [patent_doc_number] => 10879087 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-29 [patent_title] => Substrate treatment apparatus and manufacturing method of semiconductor device [patent_app_type] => utility [patent_app_number] => 15/920956 [patent_app_country] => US [patent_app_date] => 2018-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 36 [patent_no_of_words] => 8079 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15920956 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15369571 [patent_doc_number] => 20200020550 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-16 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 16/495142 [patent_app_country] => US [patent_app_date] => 2018-03-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7535 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16495142 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 13405313 [patent_doc_number] => 20180254199 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-09-06 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 15/907394 [patent_app_country] => US [patent_app_date] => 2018-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9855 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15907394 [rel_patent_id] =>[rel_patent_doc_number] =>)