Search

Robert A. Wax

Supervisory Patent Examiner (ID: 4181, Phone: (571)272-0623 , Office: P/1615 )

Most Active Art Unit
1615
Art Unit(s)
1615, 1656, 1506, 1805, 1652, 1808, 1507, 1814, 1653, 1105, 1807
Total Applications
1622
Issued Applications
930
Pending Applications
418
Abandoned Applications
279

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16803268 [patent_doc_number] => 10998220 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-05-04 [patent_title] => Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method [patent_app_type] => utility [patent_app_number] => 15/901960 [patent_app_country] => US [patent_app_date] => 2018-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 37 [patent_no_of_words] => 24388 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 624 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15901960 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/901960
Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method Feb 21, 2018 Issued
Array ( [id] => 15488241 [patent_doc_number] => 10559480 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-02-11 [patent_title] => Substrate treatment apparatus and substrate treatment method [patent_app_type] => utility [patent_app_number] => 15/890434 [patent_app_country] => US [patent_app_date] => 2018-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 7743 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15890434 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/890434
Substrate treatment apparatus and substrate treatment method Feb 6, 2018 Issued
Array ( [id] => 15359617 [patent_doc_number] => 20200015573 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-16 [patent_title] => SYSTEM FOR APPLYING AT LEAST TWO KINDS OF LIQUID ONTO RESPECTIVE TARGETED AREAS OF A SUBSTRATE AND METHOD THEREFOR [patent_app_type] => utility [patent_app_number] => 16/489621 [patent_app_country] => US [patent_app_date] => 2018-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5764 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16489621 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/489621
System for applying at least two kinds of liquid onto respective targeted areas of a substrate and method therefor Jan 30, 2018 Issued
Array ( [id] => 13320589 [patent_doc_number] => 20180211832 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-07-26 [patent_title] => COATED FILM REMOVING APPARATUS, COATED FILM REMOVING METHOD AND STORAGE MEDIUM [patent_app_type] => utility [patent_app_number] => 15/876283 [patent_app_country] => US [patent_app_date] => 2018-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12854 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15876283 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/876283
Coated film removing apparatus Jan 21, 2018 Issued
Array ( [id] => 16267896 [patent_doc_number] => 20200269383 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-27 [patent_title] => SUBSTRATE POLISHING DEVICE AND SUBSTRATE POLISHING METHOD [patent_app_type] => utility [patent_app_number] => 16/495010 [patent_app_country] => US [patent_app_date] => 2018-01-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12553 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16495010 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/495010
SUBSTRATE POLISHING DEVICE AND SUBSTRATE POLISHING METHOD Jan 9, 2018 Abandoned
Array ( [id] => 15177781 [patent_doc_number] => 20190359482 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-11-28 [patent_title] => METHOD AND APPARATUS FOR ETCHING A SUBSTRATE [patent_app_type] => utility [patent_app_number] => 16/476669 [patent_app_country] => US [patent_app_date] => 2018-01-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7691 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16476669 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/476669
METHOD AND APPARATUS FOR ETCHING A SUBSTRATE Jan 4, 2018 Abandoned
Array ( [id] => 12882043 [patent_doc_number] => 20180185856 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-07-05 [patent_title] => LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 15/857693 [patent_app_country] => US [patent_app_date] => 2017-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9350 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 246 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15857693 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/857693
LIQUID PROCESSING APPARATUS AND LIQUID PROCESSING METHOD Dec 28, 2017 Abandoned
Array ( [id] => 13607837 [patent_doc_number] => 20180355468 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-12-13 [patent_title] => MASK PLATE, MANUFACTURING METHOD THEREOF AND METHOD OF EVAPORATION BY USING THE SAME [patent_app_type] => utility [patent_app_number] => 15/840301 [patent_app_country] => US [patent_app_date] => 2017-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5259 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15840301 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/840301
Mask plate for evaporation Dec 12, 2017 Issued
Array ( [id] => 12263665 [patent_doc_number] => 20180082860 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-03-22 [patent_title] => 'SUBSTRATE PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/827077 [patent_app_country] => US [patent_app_date] => 2017-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 19658 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15827077 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/827077
Substrate processing apparatus Nov 29, 2017 Issued
Array ( [id] => 12872410 [patent_doc_number] => 20180182645 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-28 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 15/823704 [patent_app_country] => US [patent_app_date] => 2017-11-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12072 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15823704 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/823704
Substrate processing apparatus and substrate processing method Nov 27, 2017 Issued
Array ( [id] => 12650139 [patent_doc_number] => 20180108544 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-04-19 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 15/823691 [patent_app_country] => US [patent_app_date] => 2017-11-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9755 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15823691 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/823691
Substrate processing apparatus and substrate processing method Nov 27, 2017 Issued
Array ( [id] => 16789150 [patent_doc_number] => 10991588 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-04-27 [patent_title] => Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus [patent_app_type] => utility [patent_app_number] => 15/803876 [patent_app_country] => US [patent_app_date] => 2017-11-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 3770 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15803876 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/803876
Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus Nov 5, 2017 Issued
Array ( [id] => 12188644 [patent_doc_number] => 20180047580 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-02-15 [patent_title] => 'PHOTORESIST REMOVAL' [patent_app_type] => utility [patent_app_number] => 15/797057 [patent_app_country] => US [patent_app_date] => 2017-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 3348 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15797057 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/797057
Photoresist removal Oct 29, 2017 Issued
Array ( [id] => 12122268 [patent_doc_number] => 20180005854 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-01-04 [patent_title] => 'CHEMICAL LIQUID TREATMENT APPARATUS AND CHEMICAL LIQUID TREATMENT METHOD' [patent_app_type] => utility [patent_app_number] => 15/708171 [patent_app_country] => US [patent_app_date] => 2017-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 5053 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15708171 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/708171
Chemical liquid treatment apparatus and chemical liquid treatment method Sep 18, 2017 Issued
Array ( [id] => 13428893 [patent_doc_number] => 20180265989 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-09-20 [patent_title] => SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD [patent_app_type] => utility [patent_app_number] => 15/700694 [patent_app_country] => US [patent_app_date] => 2017-09-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3886 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 45 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15700694 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/700694
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD Sep 10, 2017 Abandoned
Array ( [id] => 16249420 [patent_doc_number] => 10748795 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-08-18 [patent_title] => Substrate processing method and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 15/699196 [patent_app_country] => US [patent_app_date] => 2017-09-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 30 [patent_no_of_words] => 11751 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15699196 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/699196
Substrate processing method and substrate processing apparatus Sep 7, 2017 Issued
Array ( [id] => 15139281 [patent_doc_number] => 10483126 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-11-19 [patent_title] => Semiconductor manufacturing apparatus and manufacturing method of semiconductor device [patent_app_type] => utility [patent_app_number] => 15/697615 [patent_app_country] => US [patent_app_date] => 2017-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 5659 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 296 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15697615 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/697615
Semiconductor manufacturing apparatus and manufacturing method of semiconductor device Sep 6, 2017 Issued
Array ( [id] => 16148049 [patent_doc_number] => 10707101 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-07-07 [patent_title] => Substrate treating apparatus and substrate treating method [patent_app_type] => utility [patent_app_number] => 15/677321 [patent_app_country] => US [patent_app_date] => 2017-08-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 5569 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 201 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15677321 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/677321
Substrate treating apparatus and substrate treating method Aug 14, 2017 Issued
Array ( [id] => 12061753 [patent_doc_number] => 20170338097 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-11-23 [patent_title] => 'SUBSTRATE TREATMENT METHOD AND SUBSTRATE TREATMENT APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/674262 [patent_app_country] => US [patent_app_date] => 2017-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 14612 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15674262 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/674262
Substrate treatment method and substrate treatment apparatus Aug 9, 2017 Issued
Array ( [id] => 16186978 [patent_doc_number] => 10720314 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-07-21 [patent_title] => Confinement ring for use in a plasma processing system [patent_app_type] => utility [patent_app_number] => 15/669742 [patent_app_country] => US [patent_app_date] => 2017-08-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4325 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 255 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15669742 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/669742
Confinement ring for use in a plasma processing system Aug 3, 2017 Issued
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