Search

Robert A. Wax

Supervisory Patent Examiner (ID: 4181, Phone: (571)272-0623 , Office: P/1615 )

Most Active Art Unit
1615
Art Unit(s)
1615, 1656, 1506, 1805, 1652, 1808, 1507, 1814, 1653, 1105, 1807
Total Applications
1622
Issued Applications
930
Pending Applications
418
Abandoned Applications
279

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18434963 [patent_doc_number] => 20230182257 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-15 [patent_title] => SYSTEM AND METHOD FOR MONITORING CHEMICAL MECHANICAL POLISHING [patent_app_type] => utility [patent_app_number] => 18/103321 [patent_app_country] => US [patent_app_date] => 2023-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7115 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 264 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18103321 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/103321
System and method for monitoring chemical mechanical polishing Jan 29, 2023 Issued
Array ( [id] => 20534929 [patent_doc_number] => 12551982 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-02-17 [patent_title] => Polishing pad and substrate processing apparatus including the same [patent_app_type] => utility [patent_app_number] => 18/100937 [patent_app_country] => US [patent_app_date] => 2023-01-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 1236 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 201 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18100937 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/100937
Polishing pad and substrate processing apparatus including the same Jan 23, 2023 Issued
Array ( [id] => 20598163 [patent_doc_number] => 12581903 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-03-17 [patent_title] => Centering device, centering method, and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 18/157970 [patent_app_country] => US [patent_app_date] => 2023-01-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 8 [patent_no_of_words] => 2373 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 506 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18157970 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/157970
Centering device, centering method, and substrate processing apparatus Jan 22, 2023 Issued
Array ( [id] => 18469385 [patent_doc_number] => 20230203669 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD [patent_app_type] => utility [patent_app_number] => 18/145138 [patent_app_country] => US [patent_app_date] => 2022-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12588 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18145138 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/145138
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD Dec 21, 2022 Issued
Array ( [id] => 18377619 [patent_doc_number] => 20230152706 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-18 [patent_title] => IRRADIATING MODULE, AND APPARATUS FOR TREATING SUBSTRATE WITH THE SAME [patent_app_type] => utility [patent_app_number] => 17/988811 [patent_app_country] => US [patent_app_date] => 2022-11-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12804 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17988811 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/988811
IRRADIATING MODULE, AND APPARATUS FOR TREATING SUBSTRATE WITH THE SAME Nov 16, 2022 Pending
Array ( [id] => 19176034 [patent_doc_number] => 20240162008 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-16 [patent_title] => METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/988083 [patent_app_country] => US [patent_app_date] => 2022-11-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9265 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17988083 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/988083
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE Nov 15, 2022 Pending
Array ( [id] => 19157543 [patent_doc_number] => 20240150250 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-09 [patent_title] => SYSTEMS AND METHODS FOR PRODUCING SILICON CARBIDE POWDER [patent_app_type] => utility [patent_app_number] => 18/053031 [patent_app_country] => US [patent_app_date] => 2022-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3560 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18053031 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/053031
SYSTEMS AND METHODS FOR PRODUCING SILICON CARBIDE POWDER Nov 6, 2022 Pending
Array ( [id] => 19746144 [patent_doc_number] => 20250034709 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-01-30 [patent_title] => DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUBSTRATE BY MEANS OF THE PROCESS GAS [patent_app_type] => utility [patent_app_number] => 18/713532 [patent_app_country] => US [patent_app_date] => 2022-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6553 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18713532 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/713532
DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUBSTRATE BY MEANS OF THE PROCESS GAS Nov 6, 2022 Pending
Array ( [id] => 19305525 [patent_doc_number] => 20240234105 [patent_country] => US [patent_kind] => A9 [patent_issue_date] => 2024-07-11 [patent_title] => IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOSITION THEREON IN A LARGE PECVD CHAMBER [patent_app_type] => utility [patent_app_number] => 17/971205 [patent_app_country] => US [patent_app_date] => 2022-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4571 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17971205 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/971205
Impedance control of local areas of a substrate during plasma deposition thereon in a large PECVD chamber Oct 20, 2022 Issued
Array ( [id] => 19305525 [patent_doc_number] => 20240234105 [patent_country] => US [patent_kind] => A9 [patent_issue_date] => 2024-07-11 [patent_title] => IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOSITION THEREON IN A LARGE PECVD CHAMBER [patent_app_type] => utility [patent_app_number] => 17/971205 [patent_app_country] => US [patent_app_date] => 2022-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4571 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17971205 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/971205
Impedance control of local areas of a substrate during plasma deposition thereon in a large PECVD chamber Oct 20, 2022 Issued
Array ( [id] => 18655138 [patent_doc_number] => 20230300989 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-21 [patent_title] => CIRCUIT BOARD ETCHING DEVICE AND METHOD FOR IMPROVING ETCHING FACTOR [patent_app_type] => utility [patent_app_number] => 18/046742 [patent_app_country] => US [patent_app_date] => 2022-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3291 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18046742 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/046742
CIRCUIT BOARD ETCHING DEVICE AND METHOD FOR IMPROVING ETCHING FACTOR Oct 13, 2022 Abandoned
Array ( [id] => 19778821 [patent_doc_number] => 12227845 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-18 [patent_title] => Vapor deposition device capable of reciprocating rotation and lifting [patent_app_type] => utility [patent_app_number] => 18/699313 [patent_app_country] => US [patent_app_date] => 2022-09-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 14 [patent_no_of_words] => 6047 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 457 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18699313 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/699313
Vapor deposition device capable of reciprocating rotation and lifting Sep 21, 2022 Issued
Array ( [id] => 18286003 [patent_doc_number] => 20230101475 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-30 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/947747 [patent_app_country] => US [patent_app_date] => 2022-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 27676 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17947747 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/947747
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS Sep 18, 2022 Pending
Array ( [id] => 18250578 [patent_doc_number] => 20230077617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-16 [patent_title] => SUPPLY TANK, SUPPLY DEVICE AND SUPPLY SYSTEM [patent_app_type] => utility [patent_app_number] => 17/942520 [patent_app_country] => US [patent_app_date] => 2022-09-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6520 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 220 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17942520 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/942520
Supply tank, supply device and supply system Sep 11, 2022 Issued
Array ( [id] => 18653070 [patent_doc_number] => 20230298910 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-21 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/929923 [patent_app_country] => US [patent_app_date] => 2022-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4667 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17929923 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/929923
Substrate processing apparatus Sep 5, 2022 Issued
Array ( [id] => 18240923 [patent_doc_number] => 20230073234 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-09 [patent_title] => EFEM [patent_app_type] => utility [patent_app_number] => 17/902148 [patent_app_country] => US [patent_app_date] => 2022-09-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7594 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17902148 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/902148
EFEM Sep 1, 2022 Pending
Array ( [id] => 20416795 [patent_doc_number] => 12500088 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-16 [patent_title] => Tools for chemical planarization [patent_app_type] => utility [patent_app_number] => 17/823857 [patent_app_country] => US [patent_app_date] => 2022-08-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 11 [patent_no_of_words] => 2015 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17823857 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/823857
Tools for chemical planarization Aug 30, 2022 Issued
Array ( [id] => 19180350 [patent_doc_number] => 11986926 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-05-21 [patent_title] => Slurry distribution device for chemical mechanical polishing [patent_app_type] => utility [patent_app_number] => 17/897088 [patent_app_country] => US [patent_app_date] => 2022-08-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 6309 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17897088 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/897088
Slurry distribution device for chemical mechanical polishing Aug 25, 2022 Issued
Array ( [id] => 18024276 [patent_doc_number] => 20220375775 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-24 [patent_title] => SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/881508 [patent_app_country] => US [patent_app_date] => 2022-08-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 40533 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17881508 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/881508
Substrate processing apparatus, substrate processing system, and substrate processing method Aug 3, 2022 Issued
Array ( [id] => 18278846 [patent_doc_number] => 20230094318 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-30 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/880907 [patent_app_country] => US [patent_app_date] => 2022-08-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15988 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 193 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17880907 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/880907
SUBSTRATE PROCESSING APPARATUS Aug 3, 2022 Abandoned
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