Search

Robert A. Wax

Supervisory Patent Examiner (ID: 4181, Phone: (571)272-0623 , Office: P/1615 )

Most Active Art Unit
1615
Art Unit(s)
1615, 1656, 1506, 1805, 1652, 1808, 1507, 1814, 1653, 1105, 1807
Total Applications
1622
Issued Applications
930
Pending Applications
418
Abandoned Applications
279

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18178021 [patent_doc_number] => 20230038750 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-09 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/876385 [patent_app_country] => US [patent_app_date] => 2022-07-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4777 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 240 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17876385 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/876385
PLASMA PROCESSING APPARATUS Jul 27, 2022 Pending
Array ( [id] => 18126270 [patent_doc_number] => 20230011890 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-12 [patent_title] => ETCHING APPARATUS AND METHOD OF CONTROLLING SAME [patent_app_type] => utility [patent_app_number] => 17/859723 [patent_app_country] => US [patent_app_date] => 2022-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2750 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17859723 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/859723
ETCHING APPARATUS AND METHOD OF CONTROLLING SAME Jul 6, 2022 Pending
Array ( [id] => 19120394 [patent_doc_number] => 11964357 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-23 [patent_title] => Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus [patent_app_type] => utility [patent_app_number] => 17/857289 [patent_app_country] => US [patent_app_date] => 2022-07-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 22 [patent_figures_cnt] => 25 [patent_no_of_words] => 9316 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17857289 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/857289
Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus Jul 4, 2022 Issued
Array ( [id] => 18882788 [patent_doc_number] => 20240006157 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-04 [patent_title] => METHODS AND SYSTEMS FOR DRY ETCHING [patent_app_type] => utility [patent_app_number] => 17/856901 [patent_app_country] => US [patent_app_date] => 2022-07-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5404 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17856901 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/856901
Methods and systems for dry etching Jun 30, 2022 Issued
Array ( [id] => 18110003 [patent_doc_number] => 20230002883 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-05 [patent_title] => Holder for Holding a Substrate, in Particular a Spectacle Lens, During Vacuum Coating Thereof in a Box Coating Apparatus and Device for Loading/Unloading the Substrate into/from such Holder [patent_app_type] => utility [patent_app_number] => 17/853507 [patent_app_country] => US [patent_app_date] => 2022-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11988 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 345 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17853507 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/853507
Holder for Holding a Substrate, in Particular a Spectacle Lens, During Vacuum Coating Thereof in a Box Coating Apparatus and Device for Loading/Unloading the Substrate into/from such Holder Jun 28, 2022 Issued
Array ( [id] => 19311884 [patent_doc_number] => 12037687 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-07-16 [patent_title] => Gas tube, gas supply system and manufacturing method of semiconductor device using the same [patent_app_type] => utility [patent_app_number] => 17/853841 [patent_app_country] => US [patent_app_date] => 2022-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 10 [patent_no_of_words] => 5343 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 233 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17853841 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/853841
Gas tube, gas supply system and manufacturing method of semiconductor device using the same Jun 28, 2022 Issued
Array ( [id] => 19440368 [patent_doc_number] => 12090600 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-09-17 [patent_title] => Face-up wafer electrochemical planarization apparatus [patent_app_type] => utility [patent_app_number] => 17/833422 [patent_app_country] => US [patent_app_date] => 2022-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 8539 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17833422 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/833422
Face-up wafer electrochemical planarization apparatus Jun 5, 2022 Issued
Array ( [id] => 18833777 [patent_doc_number] => 20230402304 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-14 [patent_title] => METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/748270 [patent_app_country] => US [patent_app_date] => 2022-05-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4650 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17748270 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/748270
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE May 18, 2022 Pending
Array ( [id] => 20229242 [patent_doc_number] => 12417897 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-09-16 [patent_title] => Plasma processing apparatus and plasma processing method using the same [patent_app_type] => utility [patent_app_number] => 17/744624 [patent_app_country] => US [patent_app_date] => 2022-05-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2283 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17744624 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/744624
Plasma processing apparatus and plasma processing method using the same May 13, 2022 Issued
Array ( [id] => 19796237 [patent_doc_number] => 12237206 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-25 [patent_title] => Device for etching the periphery edge of a substrate [patent_app_type] => utility [patent_app_number] => 17/729036 [patent_app_country] => US [patent_app_date] => 2022-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 4052 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 283 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17729036 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/729036
Device for etching the periphery edge of a substrate Apr 25, 2022 Issued
Array ( [id] => 17795522 [patent_doc_number] => 20220254614 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-11 [patent_title] => Confinement Ring for Use in a Plasma Processing System [patent_app_type] => utility [patent_app_number] => 17/729967 [patent_app_country] => US [patent_app_date] => 2022-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4394 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17729967 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/729967
Confinement ring for use in a plasma processing system Apr 25, 2022 Issued
Array ( [id] => 17735141 [patent_doc_number] => 20220220600 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-14 [patent_title] => VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD, AND METHOD FOR MANUFACTURING ORGANIC EL DISPLAY APPARATUS [patent_app_type] => utility [patent_app_number] => 17/709864 [patent_app_country] => US [patent_app_date] => 2022-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12742 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17709864 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/709864
Vapor deposition apparatus, vapor deposition method, and method for manufacturing organic EL display apparatus Mar 30, 2022 Issued
Array ( [id] => 17917419 [patent_doc_number] => 20220319815 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => UPPER ELECTRODE ASSEMBLY [patent_app_type] => utility [patent_app_number] => 17/708600 [patent_app_country] => US [patent_app_date] => 2022-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7806 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 55 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17708600 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/708600
Upper electrode assembly Mar 29, 2022 Issued
Array ( [id] => 19428158 [patent_doc_number] => 12087591 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-09-10 [patent_title] => Plasma processing apparatus and system [patent_app_type] => utility [patent_app_number] => 17/707537 [patent_app_country] => US [patent_app_date] => 2022-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 8221 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17707537 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/707537
Plasma processing apparatus and system Mar 28, 2022 Issued
Array ( [id] => 17985908 [patent_doc_number] => 20220351945 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-03 [patent_title] => SEMICONDUCTOR MANUFACTURING APPARATUS MEMBER AND SEMICONDUCTOR MANUFACTURING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/701844 [patent_app_country] => US [patent_app_date] => 2022-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18891 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17701844 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/701844
Semiconductor manufacturing apparatus member and semiconductor manufacturing apparatus Mar 22, 2022 Issued
Array ( [id] => 19234917 [patent_doc_number] => 20240192111 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-13 [patent_title] => SUBSTRATE LIQUID-TREATMENT DEVICE [patent_app_type] => utility [patent_app_number] => 18/552108 [patent_app_country] => US [patent_app_date] => 2022-03-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17012 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18552108 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/552108
SUBSTRATE LIQUID-TREATMENT DEVICE Mar 21, 2022 Pending
Array ( [id] => 18649959 [patent_doc_number] => 20230295789 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-21 [patent_title] => DENSE VERTICALLY SEGMENTED SILICON COATING FOR LOW DEFECTIVITY IN HIGH-TEMPERATURE RAPID THERMAL PROCESSING [patent_app_type] => utility [patent_app_number] => 17/695475 [patent_app_country] => US [patent_app_date] => 2022-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4879 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17695475 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/695475
DENSE VERTICALLY SEGMENTED SILICON COATING FOR LOW DEFECTIVITY IN HIGH-TEMPERATURE RAPID THERMAL PROCESSING Mar 14, 2022 Abandoned
Array ( [id] => 18224668 [patent_doc_number] => 20230063662 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-02 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/693605 [patent_app_country] => US [patent_app_date] => 2022-03-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8055 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17693605 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/693605
Substrate processing apparatus for manufacturing semiconductor device Mar 13, 2022 Issued
Array ( [id] => 17676615 [patent_doc_number] => 20220189782 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-16 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/689803 [patent_app_country] => US [patent_app_date] => 2022-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 51731 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17689803 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/689803
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD Mar 7, 2022 Abandoned
Array ( [id] => 18271094 [patent_doc_number] => 20230092336 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-23 [patent_title] => SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF PROCESSING OBJECT [patent_app_type] => utility [patent_app_number] => 17/652986 [patent_app_country] => US [patent_app_date] => 2022-03-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4440 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17652986 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/652986
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF PROCESSING OBJECT Feb 28, 2022 Pending
Menu