Robert A. Wax

Array ( [id] => 18931528 [patent_doc_number] => 11883926 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-01-30 [patent_title] => Polishing pad, semiconductor fabricating device and fabricating method of semiconductor device [patent_app_type] => utility [patent_app_number] => 17/319637 [patent_app_country] => US [patent_app_date] => 2021-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 4792 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17319637 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19012221 [patent_doc_number] => 11919126 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-03-05 [patent_title] => Monolithic platen [patent_app_type] => utility [patent_app_number] => 17/318765 [patent_app_country] => US [patent_app_date] => 2021-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6156 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17318765 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18436588 [patent_doc_number] => 20230183882 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-15 [patent_title] => SOFT MASK TECHNOLOGY FOR ENGINE SURFACE TEXTURING [patent_app_type] => utility [patent_app_number] => 17/924907 [patent_app_country] => US [patent_app_date] => 2021-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7198 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 28 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17924907 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19199058 [patent_doc_number] => 11996307 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-05-28 [patent_title] => Semiconductor processing tool platform configuration with reduced footprint [patent_app_type] => utility [patent_app_number] => 17/317566 [patent_app_country] => US [patent_app_date] => 2021-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 6345 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17317566 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17040600 [patent_doc_number] => 20210257236 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-19 [patent_title] => SUBSTRATE PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/242709 [patent_app_country] => US [patent_app_date] => 2021-04-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 20335 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17242709 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17025404 [patent_doc_number] => 20210249276 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-12 [patent_title] => Retaining Ring Having Inner Surfaces with Facets [patent_app_type] => utility [patent_app_number] => 17/242162 [patent_app_country] => US [patent_app_date] => 2021-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4465 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 182 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17242162 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17021452 [patent_doc_number] => 20210245323 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-12 [patent_title] => Method of Making Carrier Head Membrane With Regions of Different Roughness [patent_app_type] => utility [patent_app_number] => 17/240917 [patent_app_country] => US [patent_app_date] => 2021-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2631 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17240917 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16981430 [patent_doc_number] => 20210225667 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-22 [patent_title] => SUBSTRATE PROCESSING DEVICE [patent_app_type] => utility [patent_app_number] => 17/223115 [patent_app_country] => US [patent_app_date] => 2021-04-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11168 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 29 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17223115 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19428127 [patent_doc_number] => 12087560 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-09-10 [patent_title] => Apparatus and method for treating substrate [patent_app_type] => utility [patent_app_number] => 17/216972 [patent_app_country] => US [patent_app_date] => 2021-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 7122 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 258 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17216972 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20303839 [patent_doc_number] => 12449825 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-10-21 [patent_title] => Gas supply control device [patent_app_type] => utility [patent_app_number] => 17/642324 [patent_app_country] => US [patent_app_date] => 2021-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 10 [patent_no_of_words] => 5393 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 218 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17642324 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18747544 [patent_doc_number] => 11806835 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-11-07 [patent_title] => Slurry distribution device for chemical mechanical polishing [patent_app_type] => utility [patent_app_number] => 17/209034 [patent_app_country] => US [patent_app_date] => 2021-03-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 6293 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17209034 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17448150 [patent_doc_number] => 20220068655 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => APPARATUS AND METHOD FOR PLANARIZING A SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/206528 [patent_app_country] => US [patent_app_date] => 2021-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6221 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17206528 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18326469 [patent_doc_number] => 20230124597 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-20 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/912415 [patent_app_country] => US [patent_app_date] => 2021-03-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7871 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17912415 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17085432 [patent_doc_number] => 20210280439 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-09 [patent_title] => ETCHING TOOL FOR DEMOUNTABLY ETCHING MULTIPLE PIECES OF SILICON CARBIDE [patent_app_type] => utility [patent_app_number] => 17/191453 [patent_app_country] => US [patent_app_date] => 2021-03-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2387 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17191453 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16899634 [patent_doc_number] => 20210178550 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-17 [patent_title] => WORKPIECE PROCESSING DEVICE AND METHOD [patent_app_type] => utility [patent_app_number] => 17/187538 [patent_app_country] => US [patent_app_date] => 2021-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12311 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17187538 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19523948 [patent_doc_number] => 12125688 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-10-22 [patent_title] => L-motion slit door for substrate processing chamber [patent_app_type] => utility [patent_app_number] => 17/183595 [patent_app_country] => US [patent_app_date] => 2021-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 5527 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17183595 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18252612 [patent_doc_number] => 20230079651 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-16 [patent_title] => Susceptor for a Chemical Vapor Deposition Reactor [patent_app_type] => utility [patent_app_number] => 17/795067 [patent_app_country] => US [patent_app_date] => 2021-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4869 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17795067 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18751436 [patent_doc_number] => 11810756 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-11-07 [patent_title] => Plasma source and method for removing materials from substrates utilizing pressure waves [patent_app_type] => utility [patent_app_number] => 17/162681 [patent_app_country] => US [patent_app_date] => 2021-01-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 14 [patent_no_of_words] => 6111 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 240 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17162681 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18105470 [patent_doc_number] => 11545367 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-03 [patent_title] => Substrate processing apparatus, substrate processing method, and chemical liquid [patent_app_type] => utility [patent_app_number] => 17/154049 [patent_app_country] => US [patent_app_date] => 2021-01-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 12 [patent_no_of_words] => 6266 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17154049 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18178941 [patent_doc_number] => 20230039670 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-09 [patent_title] => MIXED METAL BASEPLATES FOR IMPROVED THERMAL EXPANSION MATCHING WITH THERMAL OXIDE SPRAYCOAT [patent_app_type] => utility [patent_app_number] => 17/790009 [patent_app_country] => US [patent_app_date] => 2021-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8217 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17790009 [rel_patent_id] =>[rel_patent_doc_number] =>)