Robert H. Kim

Array ( [id] => 4008081 [patent_doc_number] => 05923426 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-07-13 [patent_title] => 'Bi-lateral shearing interferometer' [patent_app_type] => 1 [patent_app_number] => 9/121985 [patent_app_country] => US [patent_app_date] => 1998-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 19 [patent_no_of_words] => 2606 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/923/05923426.pdf [firstpage_image] =>[orig_patent_app_number] => 121985 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4192262 [patent_doc_number] => 06020964 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-02-01 [patent_title] => 'Interferometer system and lithograph apparatus including an interferometer system' [patent_app_type] => 1 [patent_app_number] => 9/114747 [patent_app_country] => US [patent_app_date] => 1998-07-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 20 [patent_no_of_words] => 19358 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 217 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/020/06020964.pdf [firstpage_image] =>[orig_patent_app_number] => 114747 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4214549 [patent_doc_number] => 06078386 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-06-20 [patent_title] => 'Inspection system simultaneously utilizing monochromatic darkfield and broadband brightfield illumination sources' [patent_app_type] => 1 [patent_app_number] => 9/114427 [patent_app_country] => US [patent_app_date] => 1998-07-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 14 [patent_no_of_words] => 7372 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 280 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/078/06078386.pdf [firstpage_image] =>[orig_patent_app_number] => 114427 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 3959360 [patent_doc_number] => 05999261 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-12-07 [patent_title] => 'Split phase high performance, high frequency, high dynamic range interferometer' [patent_app_type] => 1 [patent_app_number] => 9/113668 [patent_app_country] => US [patent_app_date] => 1998-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2583 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 42 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/999/05999261.pdf [firstpage_image] =>[orig_patent_app_number] => 113668 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4425188 [patent_doc_number] => 06178000 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-01-23 [patent_title] => 'Monolithic symmetric interferometer for generation of variable-periodicity patterns for lithography' [patent_app_type] => 1 [patent_app_number] => 9/111878 [patent_app_country] => US [patent_app_date] => 1998-07-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 9 [patent_no_of_words] => 3650 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 364 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/178/06178000.pdf [firstpage_image] =>[orig_patent_app_number] => 111878 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4189819 [patent_doc_number] => 06038026 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-03-14 [patent_title] => 'Apparatus and method for the determination of grain size in thin films' [patent_app_type] => 1 [patent_app_number] => 9/110886 [patent_app_country] => US [patent_app_date] => 1998-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 14 [patent_no_of_words] => 9940 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/038/06038026.pdf [firstpage_image] =>[orig_patent_app_number] => 110886 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 3967809 [patent_doc_number] => 05936733 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-08-10 [patent_title] => 'Endpoint detector and method for measuring a change in wafer thickness in chemical-mechanical polishing of semiconductor wafers' [patent_app_type] => 1 [patent_app_number] => 9/107353 [patent_app_country] => US [patent_app_date] => 1998-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2818 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/936/05936733.pdf [firstpage_image] =>[orig_patent_app_number] => 107353 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4228890 [patent_doc_number] => 06088100 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-07-11 [patent_title] => 'Three-dimensional light absorption spectroscopic imaging' [patent_app_type] => 1 [patent_app_number] => 9/106247 [patent_app_country] => US [patent_app_date] => 1998-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 3949 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/088/06088100.pdf [firstpage_image] =>[orig_patent_app_number] => 106247 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4118474 [patent_doc_number] => 06057921 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-05-02 [patent_title] => 'Two piece mirror arrangement for interferometrically controlled stage' [patent_app_type] => 1 [patent_app_number] => 9/106917 [patent_app_country] => US [patent_app_date] => 1998-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 3084 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/057/06057921.pdf [firstpage_image] =>[orig_patent_app_number] => 106917 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4195278 [patent_doc_number] => 06160622 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-12-12 [patent_title] => 'Alignment device and lithographic apparatus comprising such a device' [patent_app_type] => 1 [patent_app_number] => 9/099505 [patent_app_country] => US [patent_app_date] => 1998-06-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 22 [patent_no_of_words] => 13364 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/160/06160622.pdf [firstpage_image] =>[orig_patent_app_number] => 099505 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 3934812 [patent_doc_number] => 05946082 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-08-31 [patent_title] => 'Interference removal' [patent_app_type] => 1 [patent_app_number] => 9/097840 [patent_app_country] => US [patent_app_date] => 1998-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3515 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/946/05946082.pdf [firstpage_image] =>[orig_patent_app_number] => 097840 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4009476 [patent_doc_number] => 05986760 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-11-16 [patent_title] => 'Shape measurement method and high-precision lens manufacturing process' [patent_app_type] => 1 [patent_app_number] => 9/097578 [patent_app_country] => US [patent_app_date] => 1998-06-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3050 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 24 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/986/05986760.pdf [firstpage_image] =>[orig_patent_app_number] => 097578 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 3895039 [patent_doc_number] => 05894350 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-04-13 [patent_title] => 'Method of in line intra-field correction of overlay alignment' [patent_app_type] => 1 [patent_app_number] => 9/097143 [patent_app_country] => US [patent_app_date] => 1998-06-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 5 [patent_no_of_words] => 2312 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 278 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/894/05894350.pdf [firstpage_image] =>[orig_patent_app_number] => 097143 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4044976 [patent_doc_number] => 05995223 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-11-30 [patent_title] => 'Apparatus for rapid phase imaging interferometry and method therefor' [patent_app_type] => 1 [patent_app_number] => 9/087967 [patent_app_country] => US [patent_app_date] => 1998-06-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 13783 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 294 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/995/05995223.pdf [firstpage_image] =>[orig_patent_app_number] => 087967 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4195915 [patent_doc_number] => 06151127 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-11-21 [patent_title] => 'Confocal microscopy' [patent_app_type] => 1 [patent_app_number] => 9/086117 [patent_app_country] => US [patent_app_date] => 1998-05-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4989 [patent_no_of_claims] => 50 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/151/06151127.pdf [firstpage_image] =>[orig_patent_app_number] => 086117 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4062201 [patent_doc_number] => 05933237 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-08-03 [patent_title] => 'Interferometric instrument' [patent_app_type] => 1 [patent_app_number] => 9/083337 [patent_app_country] => US [patent_app_date] => 1998-05-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 2 [patent_no_of_words] => 2411 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 291 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/933/05933237.pdf [firstpage_image] =>[orig_patent_app_number] => 083337 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4043782 [patent_doc_number] => 05943131 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 1999-08-24 [patent_title] => 'Method for checking authenticity of a hologram and a reading device for the performance of the method' [patent_app_type] => 1 [patent_app_number] => 9/082668 [patent_app_country] => US [patent_app_date] => 1998-05-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 2 [patent_no_of_words] => 2176 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/05/943/05943131.pdf [firstpage_image] =>[orig_patent_app_number] => 082668 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4249963 [patent_doc_number] => 06166820 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-12-26 [patent_title] => 'Laser interferometric lithographic system providing automatic change of fringe spacing' [patent_app_type] => 1 [patent_app_number] => 9/080214 [patent_app_country] => US [patent_app_date] => 1998-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 8 [patent_no_of_words] => 2576 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/166/06166820.pdf [firstpage_image] =>[orig_patent_app_number] => 080214 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4227588 [patent_doc_number] => 06111645 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2000-08-29 [patent_title] => 'Grating based phase control optical delay line' [patent_app_type] => 1 [patent_app_number] => 9/079687 [patent_app_country] => US [patent_app_date] => 1998-05-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 23 [patent_no_of_words] => 7279 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/111/06111645.pdf [firstpage_image] =>[orig_patent_app_number] => 079687 [rel_patent_id] =>[rel_patent_doc_number] =>)