| Application number | Title of the application | Filing Date | Status |
|---|
Array
(
[id] => 3631198
[patent_doc_number] => 05602643
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-02-11
[patent_title] => 'Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface'
[patent_app_type] => 1
[patent_app_number] => 8/597796
[patent_app_country] => US
[patent_app_date] => 1996-02-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 9
[patent_no_of_words] => 3353
[patent_no_of_claims] => 24
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 172
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/602/05602643.pdf
[firstpage_image] =>[orig_patent_app_number] => 597796
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/597796 | Method and apparatus for correcting surface profiles determined by phase-shifting interferometry according to optical parameters of test surface | Feb 6, 1996 | Issued |
Array
(
[id] => 3627703
[patent_doc_number] => 05642194
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-06-24
[patent_title] => 'White light velocity interferometer'
[patent_app_type] => 1
[patent_app_number] => 8/597082
[patent_app_country] => US
[patent_app_date] => 1996-02-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 41
[patent_no_of_words] => 12506
[patent_no_of_claims] => 24
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 257
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/642/05642194.pdf
[firstpage_image] =>[orig_patent_app_number] => 597082
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/597082 | White light velocity interferometer | Feb 4, 1996 | Issued |
Array
(
[id] => 3665075
[patent_doc_number] => 05659391
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-08-19
[patent_title] => 'Earth monitoring satellite system with combined infrared interferometry and photopolarimetry for chemical and biological sensing'
[patent_app_type] => 1
[patent_app_number] => 8/592257
[patent_app_country] => US
[patent_app_date] => 1996-01-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 2
[patent_figures_cnt] => 3
[patent_no_of_words] => 3002
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 100
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/659/05659391.pdf
[firstpage_image] =>[orig_patent_app_number] => 592257
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/592257 | Earth monitoring satellite system with combined infrared interferometry and photopolarimetry for chemical and biological sensing | Jan 25, 1996 | Issued |
Array
(
[id] => 3710169
[patent_doc_number] => 05646730
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-07-08
[patent_title] => 'Relative movement detecting apparatus using a detector positioned in a region of natural interference'
[patent_app_type] => 1
[patent_app_number] => 8/590203
[patent_app_country] => US
[patent_app_date] => 1996-01-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 36
[patent_figures_cnt] => 57
[patent_no_of_words] => 16231
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 7
[patent_words_short_claim] => 15
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/646/05646730.pdf
[firstpage_image] =>[orig_patent_app_number] => 590203
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/590203 | Relative movement detecting apparatus using a detector positioned in a region of natural interference | Jan 22, 1996 | Issued |
| 08/589805 | PARTICLE MEASUREMENT SYSTEM | Jan 21, 1996 | Abandoned |
Array
(
[id] => 4124870
[patent_doc_number] => 06046811
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2000-04-04
[patent_title] => 'Method and apparatus for determining electrical conductivity of a surface of an object'
[patent_app_type] => 1
[patent_app_number] => 8/583865
[patent_app_country] => US
[patent_app_date] => 1996-01-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 14
[patent_no_of_words] => 5803
[patent_no_of_claims] => 26
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 84
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/046/06046811.pdf
[firstpage_image] =>[orig_patent_app_number] => 583865
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/583865 | Method and apparatus for determining electrical conductivity of a surface of an object | Jan 10, 1996 | Issued |
Array
(
[id] => 3630991
[patent_doc_number] => 05612784
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-03-18
[patent_title] => 'Digital signal processing technique for a FT-IR spectrometer using multiple modulations'
[patent_app_type] => 1
[patent_app_number] => 8/584217
[patent_app_country] => US
[patent_app_date] => 1996-01-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 11
[patent_no_of_words] => 3903
[patent_no_of_claims] => 6
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 261
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/612/05612784.pdf
[firstpage_image] =>[orig_patent_app_number] => 584217
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/584217 | Digital signal processing technique for a FT-IR spectrometer using multiple modulations | Jan 3, 1996 | Issued |
Array
(
[id] => 3754344
[patent_doc_number] => 05801833
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1998-09-01
[patent_title] => 'Method of producing master and working pattern plates for etching and photolithographic apparatus therefor'
[patent_app_type] => 1
[patent_app_number] => 8/580637
[patent_app_country] => US
[patent_app_date] => 1995-12-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 16
[patent_figures_cnt] => 20
[patent_no_of_words] => 9553
[patent_no_of_claims] => 2
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 345
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/801/05801833.pdf
[firstpage_image] =>[orig_patent_app_number] => 580637
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/580637 | Method of producing master and working pattern plates for etching and photolithographic apparatus therefor | Dec 28, 1995 | Issued |
Array
(
[id] => 3770135
[patent_doc_number] => 05742391
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1998-04-21
[patent_title] => 'Optical type sensor for use as an optical measuring head or optical pickup'
[patent_app_type] => 1
[patent_app_number] => 8/579347
[patent_app_country] => US
[patent_app_date] => 1995-12-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 7
[patent_no_of_words] => 2473
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 115
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/742/05742391.pdf
[firstpage_image] =>[orig_patent_app_number] => 579347
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/579347 | Optical type sensor for use as an optical measuring head or optical pickup | Dec 26, 1995 | Issued |
Array
(
[id] => 3689656
[patent_doc_number] => 05633713
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-05-27
[patent_title] => 'Method and system for evaluating distribution of absorption light amount in optical lithography'
[patent_app_type] => 1
[patent_app_number] => 8/578427
[patent_app_country] => US
[patent_app_date] => 1995-12-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 30
[patent_no_of_words] => 6281
[patent_no_of_claims] => 15
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 178
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/633/05633713.pdf
[firstpage_image] =>[orig_patent_app_number] => 578427
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/578427 | Method and system for evaluating distribution of absorption light amount in optical lithography | Dec 25, 1995 | Issued |
Array
(
[id] => 3542273
[patent_doc_number] => 05557411
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1996-09-17
[patent_title] => 'Position detection method'
[patent_app_type] => 1
[patent_app_number] => 8/577704
[patent_app_country] => US
[patent_app_date] => 1995-12-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 20
[patent_no_of_words] => 6928
[patent_no_of_claims] => 5
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 111
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/557/05557411.pdf
[firstpage_image] =>[orig_patent_app_number] => 577704
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/577704 | Position detection method | Dec 21, 1995 | Issued |
Array
(
[id] => 3499376
[patent_doc_number] => 05561525
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1996-10-01
[patent_title] => 'Interferometer for observing the interference pattern of a surface under test utilizing an adjustable aperture stop'
[patent_app_type] => 1
[patent_app_number] => 8/575442
[patent_app_country] => US
[patent_app_date] => 1995-12-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 4
[patent_no_of_words] => 4238
[patent_no_of_claims] => 28
[patent_no_of_ind_claims] => 20
[patent_words_short_claim] => 232
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/561/05561525.pdf
[firstpage_image] =>[orig_patent_app_number] => 575442
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/575442 | Interferometer for observing the interference pattern of a surface under test utilizing an adjustable aperture stop | Dec 19, 1995 | Issued |
Array
(
[id] => 3669292
[patent_doc_number] => 05657124
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-08-12
[patent_title] => 'Method of measuring the thickness of a transparent material'
[patent_app_type] => 1
[patent_app_number] => 8/530378
[patent_app_country] => US
[patent_app_date] => 1995-12-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 6
[patent_no_of_words] => 3772
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 41
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/657/05657124.pdf
[firstpage_image] =>[orig_patent_app_number] => 530378
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/530378 | Method of measuring the thickness of a transparent material | Dec 14, 1995 | Issued |
| 08/570548 | ALIGNMENT DEVICE AND METHOD FOR PROJECTION EXPOSURE APPARATUS | Dec 10, 1995 | Abandoned |
Array
(
[id] => 3950516
[patent_doc_number] => 05973785
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1999-10-26
[patent_title] => 'Method of forming light beam, apparatus therefor, method of measuring sizes using the same, method of inspecting appearance, method of measuring height, method of exposure, and method of fabricating semiconductor integrated circuits'
[patent_app_type] => 1
[patent_app_number] => 8/568419
[patent_app_country] => US
[patent_app_date] => 1995-12-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 41
[patent_figures_cnt] => 66
[patent_no_of_words] => 21404
[patent_no_of_claims] => 22
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 165
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/973/05973785.pdf
[firstpage_image] =>[orig_patent_app_number] => 568419
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/568419 | Method of forming light beam, apparatus therefor, method of measuring sizes using the same, method of inspecting appearance, method of measuring height, method of exposure, and method of fabricating semiconductor integrated circuits | Dec 5, 1995 | Issued |
| 08/565805 | OPTICAL APPARATUS FOR ALIGNMENT IN A SCANNING TYPE EXPOSURE APPARATUS | Nov 29, 1995 | Abandoned |
Array
(
[id] => 3897999
[patent_doc_number] => 05777747
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1998-07-07
[patent_title] => 'Process for positioning a mask relative to a workpiece and device for performing the process'
[patent_app_type] => 1
[patent_app_number] => 8/564005
[patent_app_country] => US
[patent_app_date] => 1995-11-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 9441
[patent_no_of_claims] => 4
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 276
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/777/05777747.pdf
[firstpage_image] =>[orig_patent_app_number] => 564005
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/564005 | Process for positioning a mask relative to a workpiece and device for performing the process | Nov 28, 1995 | Issued |
Array
(
[id] => 3710923
[patent_doc_number] => 05675412
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-10-07
[patent_title] => 'System including unified beamsplitter and parallel reflecting element, and retroreflecting component'
[patent_app_type] => 1
[patent_app_number] => 8/562418
[patent_app_country] => US
[patent_app_date] => 1995-11-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 1
[patent_figures_cnt] => 1
[patent_no_of_words] => 2730
[patent_no_of_claims] => 5
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 263
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/675/05675412.pdf
[firstpage_image] =>[orig_patent_app_number] => 562418
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/562418 | System including unified beamsplitter and parallel reflecting element, and retroreflecting component | Nov 23, 1995 | Issued |
Array
(
[id] => 3689760
[patent_doc_number] => 05633720
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 1997-05-27
[patent_title] => 'Stage movement control apparatus and method therefor and projection exposure apparatus and method therefor'
[patent_app_type] => 1
[patent_app_number] => 8/587759
[patent_app_country] => US
[patent_app_date] => 1995-11-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 9
[patent_no_of_words] => 7651
[patent_no_of_claims] => 6
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 95
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/05/633/05633720.pdf
[firstpage_image] =>[orig_patent_app_number] => 587759
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/587759 | Stage movement control apparatus and method therefor and projection exposure apparatus and method therefor | Nov 21, 1995 | Issued |
Array
(
[id] => 4183035
[patent_doc_number] => 06141107
[patent_country] => US
[patent_kind] => NA
[patent_issue_date] => 2000-10-31
[patent_title] => 'Apparatus for detecting a position of an optical mark'
[patent_app_type] => 1
[patent_app_number] => 8/561158
[patent_app_country] => US
[patent_app_date] => 1995-11-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 26
[patent_no_of_words] => 12912
[patent_no_of_claims] => 29
[patent_no_of_ind_claims] => 8
[patent_words_short_claim] => 125
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/06/141/06141107.pdf
[firstpage_image] =>[orig_patent_app_number] => 561158
[rel_patent_id] =>[rel_patent_doc_number] =>) 08/561158 | Apparatus for detecting a position of an optical mark | Nov 20, 1995 | Issued |