
Rudy Zervigon
Examiner (ID: 5194, Phone: (571)272-1442 , Office: P/1716 )
| Most Active Art Unit | 1716 |
| Art Unit(s) | 1763, 1792, 1716 |
| Total Applications | 1875 |
| Issued Applications | 1189 |
| Pending Applications | 147 |
| Abandoned Applications | 557 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 20297812
[patent_doc_number] => 20250323055
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2025-10-16
[patent_title] => ETCHING METHOD
[patent_app_type] => utility
[patent_app_number] => 19/245988
[patent_app_country] => US
[patent_app_date] => 2025-06-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 11119
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -26
[patent_words_short_claim] => 96
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 19245988
[rel_patent_id] =>[rel_patent_doc_number] =>) 19/245988 | ETCHING METHOD | Jun 22, 2025 | Pending |
Array
(
[id] => 19800985
[patent_doc_number] => 20250066910
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2025-02-27
[patent_title] => SYSTEM AND METHOD FOR RECLAIMING TUNGSTEN COMPOUNDS
[patent_app_type] => utility
[patent_app_number] => 18/773920
[patent_app_country] => US
[patent_app_date] => 2024-07-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7387
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -15
[patent_words_short_claim] => 54
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18773920
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/773920 | SYSTEM AND METHOD FOR RECLAIMING TUNGSTEN COMPOUNDS | Jul 15, 2024 | Pending |
Array
(
[id] => 19696332
[patent_doc_number] => 20250014877
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2025-01-09
[patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
[patent_app_type] => utility
[patent_app_number] => 18/761458
[patent_app_country] => US
[patent_app_date] => 2024-07-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 11808
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -16
[patent_words_short_claim] => 111
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18761458
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/761458 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | Jul 1, 2024 | Pending |
Array
(
[id] => 19479930
[patent_doc_number] => 20240327972
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-10-03
[patent_title] => COATING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 18/735190
[patent_app_country] => US
[patent_app_date] => 2024-06-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7467
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 84
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18735190
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/735190 | COATING APPARATUS | Jun 5, 2024 | Pending |
Array
(
[id] => 19961914
[patent_doc_number] => 12331402
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-06-17
[patent_title] => Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition
[patent_app_type] => utility
[patent_app_number] => 18/679771
[patent_app_country] => US
[patent_app_date] => 2024-05-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 19
[patent_no_of_words] => 1164
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 205
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18679771
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/679771 | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition | May 30, 2024 | Issued |
Array
(
[id] => 19957293
[patent_doc_number] => 12327710
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-06-10
[patent_title] => Apparatus for and method of manufacturing semiconductor device
[patent_app_type] => utility
[patent_app_number] => 18/679784
[patent_app_country] => US
[patent_app_date] => 2024-05-31
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 7
[patent_no_of_words] => 0
[patent_no_of_claims] => 6
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 202
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18679784
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/679784 | Apparatus for and method of manufacturing semiconductor device | May 30, 2024 | Issued |
Array
(
[id] => 20338910
[patent_doc_number] => 20250343030
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2025-11-06
[patent_title] => PROCESSING CHAMBER AND METHOD FOR INTEGRATED ETCHING AND DEPOSITION
[patent_app_type] => utility
[patent_app_number] => 18/652612
[patent_app_country] => US
[patent_app_date] => 2024-05-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 1139
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 53
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18652612
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/652612 | PROCESSING CHAMBER AND METHOD FOR INTEGRATED ETCHING AND DEPOSITION | Apr 30, 2024 | Pending |
Array
(
[id] => 19349120
[patent_doc_number] => 20240258084
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-08-01
[patent_title] => APPARATUS AND METHOD FOR PLASMA ETCHING
[patent_app_type] => utility
[patent_app_number] => 18/632060
[patent_app_country] => US
[patent_app_date] => 2024-04-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 10963
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -10
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18632060
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/632060 | Apparatus and method for plasma etching | Apr 9, 2024 | Issued |
Array
(
[id] => 19321394
[patent_doc_number] => 20240242941
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-07-18
[patent_title] => LIGHT EMITTING SEALED BODY, LIGHT EMITTING UNIT, AND LIGHT SOURCE DEVICE
[patent_app_type] => utility
[patent_app_number] => 18/618264
[patent_app_country] => US
[patent_app_date] => 2024-03-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12367
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -6
[patent_words_short_claim] => 174
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18618264
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/618264 | LIGHT EMITTING SEALED BODY, LIGHT EMITTING UNIT, AND LIGHT SOURCE DEVICE | Mar 26, 2024 | Pending |
Array
(
[id] => 19779504
[patent_doc_number] => 12228534
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-02-18
[patent_title] => Capacitive sensor for monitoring gas concentration
[patent_app_type] => utility
[patent_app_number] => 18/604257
[patent_app_country] => US
[patent_app_date] => 2024-03-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 18
[patent_no_of_words] => 5673
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 128
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18604257
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/604257 | Capacitive sensor for monitoring gas concentration | Mar 12, 2024 | Issued |
Array
(
[id] => 19781441
[patent_doc_number] => 12230479
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-02-18
[patent_title] => Processing chamber with multiple plasma units
[patent_app_type] => utility
[patent_app_number] => 18/599767
[patent_app_country] => US
[patent_app_date] => 2024-03-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 4
[patent_no_of_words] => 5483
[patent_no_of_claims] => 5
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 94
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18599767
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/599767 | Processing chamber with multiple plasma units | Mar 7, 2024 | Issued |
Array
(
[id] => 19796214
[patent_doc_number] => 12237182
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-02-25
[patent_title] => Showerhead device for semiconductor processing system
[patent_app_type] => utility
[patent_app_number] => 18/589252
[patent_app_country] => US
[patent_app_date] => 2024-02-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 9
[patent_no_of_words] => 6076
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 228
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18589252
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/589252 | Showerhead device for semiconductor processing system | Feb 26, 2024 | Issued |
Array
(
[id] => 20194024
[patent_doc_number] => 20250270734
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2025-08-28
[patent_title] => LINERS HAVING FLOW OPENINGS, AND RELATED CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR SEMICONDUCTOR MANUFACTURING
[patent_app_type] => utility
[patent_app_number] => 18/589251
[patent_app_country] => US
[patent_app_date] => 2024-02-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 2272
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 66
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18589251
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/589251 | LINERS HAVING FLOW OPENINGS, AND RELATED CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR SEMICONDUCTOR MANUFACTURING | Feb 26, 2024 | Pending |
Array
(
[id] => 19392676
[patent_doc_number] => 20240282546
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-08-22
[patent_title] => PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION REACTORS AND ASSOCIATED METHODS
[patent_app_type] => utility
[patent_app_number] => 18/439532
[patent_app_country] => US
[patent_app_date] => 2024-02-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 24543
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 97
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18439532
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/439532 | Plasma-enhanced chemical vapor deposition reactors and associated methods | Feb 11, 2024 | Issued |
Array
(
[id] => 19206109
[patent_doc_number] => 20240178008
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-05-30
[patent_title] => COATING METHOD, PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM, SUBSTRATE PROCESSING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
[patent_app_type] => utility
[patent_app_number] => 18/430036
[patent_app_country] => US
[patent_app_date] => 2024-02-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 13199
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 109
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18430036
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/430036 | COATING METHOD, PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM, SUBSTRATE PROCESSING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE | Jan 31, 2024 | Pending |
Array
(
[id] => 19969935
[patent_doc_number] => 12338531
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-06-24
[patent_title] => Spatially tunable deposition to compensate within wafer differential bow
[patent_app_type] => utility
[patent_app_number] => 18/427348
[patent_app_country] => US
[patent_app_date] => 2024-01-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 12
[patent_figures_cnt] => 22
[patent_no_of_words] => 11420
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 195
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18427348
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/427348 | Spatially tunable deposition to compensate within wafer differential bow | Jan 29, 2024 | Issued |
Array
(
[id] => 19172943
[patent_doc_number] => 20240158917
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-05-16
[patent_title] => SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM
[patent_app_type] => utility
[patent_app_number] => 18/419890
[patent_app_country] => US
[patent_app_date] => 2024-01-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 10082
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -19
[patent_words_short_claim] => 175
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18419890
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/419890 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium | Jan 22, 2024 | Issued |
Array
(
[id] => 20853350
[patent_doc_number] => 12690405
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2026-07-21
[patent_title] => Purge system to clean wafer backside for ring susceptor
[patent_app_type] => utility
[patent_app_number] => 18/418867
[patent_app_country] => US
[patent_app_date] => 2024-01-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 8
[patent_no_of_words] => 2252
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 149
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18418867
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/418867 | PURGE SYSTEM TO CLEAN WAFER BACKSIDE FOR RING SUSCEPTOR | Jan 21, 2024 | Issued |
Array
(
[id] => 19679246
[patent_doc_number] => 12191118
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-01-07
[patent_title] => Monolithic modular microwave source with integrated process gas distribution
[patent_app_type] => utility
[patent_app_number] => 18/419389
[patent_app_country] => US
[patent_app_date] => 2024-01-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 10
[patent_no_of_words] => 6260
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 140
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18419389
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/419389 | Monolithic modular microwave source with integrated process gas distribution | Jan 21, 2024 | Issued |
Array
(
[id] => 19364114
[patent_doc_number] => 20240266148
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-08-08
[patent_title] => SEMICONDUCTOR MANUFACTURING DEVICE
[patent_app_type] => utility
[patent_app_number] => 18/416990
[patent_app_country] => US
[patent_app_date] => 2024-01-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8882
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 195
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18416990
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/416990 | SEMICONDUCTOR MANUFACTURING DEVICE | Jan 18, 2024 | Pending |