Search

Rudy Zervigon

Examiner (ID: 5194, Phone: (571)272-1442 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1763, 1792, 1716
Total Applications
1875
Issued Applications
1189
Pending Applications
147
Abandoned Applications
557

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 20297812 [patent_doc_number] => 20250323055 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-10-16 [patent_title] => ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 19/245988 [patent_app_country] => US [patent_app_date] => 2025-06-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11119 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -26 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 19245988 [rel_patent_id] =>[rel_patent_doc_number] =>)
19/245988
ETCHING METHOD Jun 22, 2025 Pending
Array ( [id] => 19800985 [patent_doc_number] => 20250066910 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-02-27 [patent_title] => SYSTEM AND METHOD FOR RECLAIMING TUNGSTEN COMPOUNDS [patent_app_type] => utility [patent_app_number] => 18/773920 [patent_app_country] => US [patent_app_date] => 2024-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7387 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18773920 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/773920
SYSTEM AND METHOD FOR RECLAIMING TUNGSTEN COMPOUNDS Jul 15, 2024 Pending
Array ( [id] => 19696332 [patent_doc_number] => 20250014877 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-01-09 [patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/761458 [patent_app_country] => US [patent_app_date] => 2024-07-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11808 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18761458 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/761458
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD Jul 1, 2024 Pending
Array ( [id] => 19479930 [patent_doc_number] => 20240327972 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-03 [patent_title] => COATING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/735190 [patent_app_country] => US [patent_app_date] => 2024-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7467 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18735190 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/735190
COATING APPARATUS Jun 5, 2024 Pending
Array ( [id] => 19961914 [patent_doc_number] => 12331402 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-17 [patent_title] => Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition [patent_app_type] => utility [patent_app_number] => 18/679771 [patent_app_country] => US [patent_app_date] => 2024-05-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 19 [patent_no_of_words] => 1164 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 205 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18679771 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/679771
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition May 30, 2024 Issued
Array ( [id] => 19957293 [patent_doc_number] => 12327710 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-10 [patent_title] => Apparatus for and method of manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 18/679784 [patent_app_country] => US [patent_app_date] => 2024-05-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 0 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 202 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18679784 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/679784
Apparatus for and method of manufacturing semiconductor device May 30, 2024 Issued
Array ( [id] => 20338910 [patent_doc_number] => 20250343030 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-11-06 [patent_title] => PROCESSING CHAMBER AND METHOD FOR INTEGRATED ETCHING AND DEPOSITION [patent_app_type] => utility [patent_app_number] => 18/652612 [patent_app_country] => US [patent_app_date] => 2024-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1139 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18652612 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/652612
PROCESSING CHAMBER AND METHOD FOR INTEGRATED ETCHING AND DEPOSITION Apr 30, 2024 Pending
Array ( [id] => 19349120 [patent_doc_number] => 20240258084 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-01 [patent_title] => APPARATUS AND METHOD FOR PLASMA ETCHING [patent_app_type] => utility [patent_app_number] => 18/632060 [patent_app_country] => US [patent_app_date] => 2024-04-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10963 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18632060 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/632060
Apparatus and method for plasma etching Apr 9, 2024 Issued
Array ( [id] => 19321394 [patent_doc_number] => 20240242941 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-07-18 [patent_title] => LIGHT EMITTING SEALED BODY, LIGHT EMITTING UNIT, AND LIGHT SOURCE DEVICE [patent_app_type] => utility [patent_app_number] => 18/618264 [patent_app_country] => US [patent_app_date] => 2024-03-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12367 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18618264 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/618264
LIGHT EMITTING SEALED BODY, LIGHT EMITTING UNIT, AND LIGHT SOURCE DEVICE Mar 26, 2024 Pending
Array ( [id] => 19779504 [patent_doc_number] => 12228534 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-18 [patent_title] => Capacitive sensor for monitoring gas concentration [patent_app_type] => utility [patent_app_number] => 18/604257 [patent_app_country] => US [patent_app_date] => 2024-03-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 18 [patent_no_of_words] => 5673 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18604257 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/604257
Capacitive sensor for monitoring gas concentration Mar 12, 2024 Issued
Array ( [id] => 19781441 [patent_doc_number] => 12230479 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-18 [patent_title] => Processing chamber with multiple plasma units [patent_app_type] => utility [patent_app_number] => 18/599767 [patent_app_country] => US [patent_app_date] => 2024-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 5483 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18599767 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/599767
Processing chamber with multiple plasma units Mar 7, 2024 Issued
Array ( [id] => 19796214 [patent_doc_number] => 12237182 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-25 [patent_title] => Showerhead device for semiconductor processing system [patent_app_type] => utility [patent_app_number] => 18/589252 [patent_app_country] => US [patent_app_date] => 2024-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 6076 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 228 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18589252 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/589252
Showerhead device for semiconductor processing system Feb 26, 2024 Issued
Array ( [id] => 20194024 [patent_doc_number] => 20250270734 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-08-28 [patent_title] => LINERS HAVING FLOW OPENINGS, AND RELATED CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR SEMICONDUCTOR MANUFACTURING [patent_app_type] => utility [patent_app_number] => 18/589251 [patent_app_country] => US [patent_app_date] => 2024-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2272 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18589251 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/589251
LINERS HAVING FLOW OPENINGS, AND RELATED CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR SEMICONDUCTOR MANUFACTURING Feb 26, 2024 Pending
Array ( [id] => 19392676 [patent_doc_number] => 20240282546 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-22 [patent_title] => PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION REACTORS AND ASSOCIATED METHODS [patent_app_type] => utility [patent_app_number] => 18/439532 [patent_app_country] => US [patent_app_date] => 2024-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 24543 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18439532 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/439532
Plasma-enhanced chemical vapor deposition reactors and associated methods Feb 11, 2024 Issued
Array ( [id] => 19206109 [patent_doc_number] => 20240178008 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-30 [patent_title] => COATING METHOD, PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM, SUBSTRATE PROCESSING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 18/430036 [patent_app_country] => US [patent_app_date] => 2024-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13199 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18430036 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/430036
COATING METHOD, PROCESSING APPARATUS, NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM, SUBSTRATE PROCESSING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Jan 31, 2024 Pending
Array ( [id] => 19969935 [patent_doc_number] => 12338531 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-24 [patent_title] => Spatially tunable deposition to compensate within wafer differential bow [patent_app_type] => utility [patent_app_number] => 18/427348 [patent_app_country] => US [patent_app_date] => 2024-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 22 [patent_no_of_words] => 11420 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18427348 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/427348
Spatially tunable deposition to compensate within wafer differential bow Jan 29, 2024 Issued
Array ( [id] => 19172943 [patent_doc_number] => 20240158917 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-16 [patent_title] => SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 18/419890 [patent_app_country] => US [patent_app_date] => 2024-01-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10082 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 175 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18419890 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/419890
Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium Jan 22, 2024 Issued
Array ( [id] => 20853350 [patent_doc_number] => 12690405 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-07-21 [patent_title] => Purge system to clean wafer backside for ring susceptor [patent_app_type] => utility [patent_app_number] => 18/418867 [patent_app_country] => US [patent_app_date] => 2024-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 2252 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18418867 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/418867
PURGE SYSTEM TO CLEAN WAFER BACKSIDE FOR RING SUSCEPTOR Jan 21, 2024 Issued
Array ( [id] => 19679246 [patent_doc_number] => 12191118 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-07 [patent_title] => Monolithic modular microwave source with integrated process gas distribution [patent_app_type] => utility [patent_app_number] => 18/419389 [patent_app_country] => US [patent_app_date] => 2024-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 10 [patent_no_of_words] => 6260 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18419389 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/419389
Monolithic modular microwave source with integrated process gas distribution Jan 21, 2024 Issued
Array ( [id] => 19364114 [patent_doc_number] => 20240266148 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-08 [patent_title] => SEMICONDUCTOR MANUFACTURING DEVICE [patent_app_type] => utility [patent_app_number] => 18/416990 [patent_app_country] => US [patent_app_date] => 2024-01-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8882 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18416990 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/416990
SEMICONDUCTOR MANUFACTURING DEVICE Jan 18, 2024 Pending
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