Search

Rudy Zervigon

Examiner (ID: 10677, Phone: (571)272-1442 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1792, 1763, 1716
Total Applications
1836
Issued Applications
1162
Pending Applications
153
Abandoned Applications
556

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 20297812 [patent_doc_number] => 20250323055 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-10-16 [patent_title] => ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 19/245988 [patent_app_country] => US [patent_app_date] => 2025-06-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11119 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -26 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 19245988 [rel_patent_id] =>[rel_patent_doc_number] =>)
19/245988
ETCHING METHOD Jun 22, 2025 Pending
Array ( [id] => 20297812 [patent_doc_number] => 20250323055 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-10-16 [patent_title] => ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 19/245988 [patent_app_country] => US [patent_app_date] => 2025-06-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11119 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -26 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 19245988 [rel_patent_id] =>[rel_patent_doc_number] =>)
19/245988
ETCHING METHOD Jun 22, 2025 Pending
Array ( [id] => 19957293 [patent_doc_number] => 12327710 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-10 [patent_title] => Apparatus for and method of manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 18/679784 [patent_app_country] => US [patent_app_date] => 2024-05-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 0 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 202 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18679784 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/679784
Apparatus for and method of manufacturing semiconductor device May 30, 2024 Issued
Array ( [id] => 19961914 [patent_doc_number] => 12331402 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-17 [patent_title] => Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition [patent_app_type] => utility [patent_app_number] => 18/679771 [patent_app_country] => US [patent_app_date] => 2024-05-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 19 [patent_no_of_words] => 1164 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 205 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18679771 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/679771
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition May 30, 2024 Issued
Array ( [id] => 19349120 [patent_doc_number] => 20240258084 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-01 [patent_title] => APPARATUS AND METHOD FOR PLASMA ETCHING [patent_app_type] => utility [patent_app_number] => 18/632060 [patent_app_country] => US [patent_app_date] => 2024-04-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10963 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18632060 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/632060
Apparatus and method for plasma etching Apr 9, 2024 Issued
Array ( [id] => 19779504 [patent_doc_number] => 12228534 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-18 [patent_title] => Capacitive sensor for monitoring gas concentration [patent_app_type] => utility [patent_app_number] => 18/604257 [patent_app_country] => US [patent_app_date] => 2024-03-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 18 [patent_no_of_words] => 5673 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18604257 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/604257
Capacitive sensor for monitoring gas concentration Mar 12, 2024 Issued
Array ( [id] => 19781441 [patent_doc_number] => 12230479 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-18 [patent_title] => Processing chamber with multiple plasma units [patent_app_type] => utility [patent_app_number] => 18/599767 [patent_app_country] => US [patent_app_date] => 2024-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 5483 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18599767 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/599767
Processing chamber with multiple plasma units Mar 7, 2024 Issued
Array ( [id] => 19796214 [patent_doc_number] => 12237182 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-25 [patent_title] => Showerhead device for semiconductor processing system [patent_app_type] => utility [patent_app_number] => 18/589252 [patent_app_country] => US [patent_app_date] => 2024-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 6076 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 228 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18589252 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/589252
Showerhead device for semiconductor processing system Feb 26, 2024 Issued
Array ( [id] => 19392676 [patent_doc_number] => 20240282546 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-22 [patent_title] => PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION REACTORS AND ASSOCIATED METHODS [patent_app_type] => utility [patent_app_number] => 18/439532 [patent_app_country] => US [patent_app_date] => 2024-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 24543 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18439532 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/439532
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION REACTORS AND ASSOCIATED METHODS Feb 11, 2024 Pending
Array ( [id] => 19969935 [patent_doc_number] => 12338531 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-24 [patent_title] => Spatially tunable deposition to compensate within wafer differential bow [patent_app_type] => utility [patent_app_number] => 18/427348 [patent_app_country] => US [patent_app_date] => 2024-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 22 [patent_no_of_words] => 11420 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18427348 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/427348
Spatially tunable deposition to compensate within wafer differential bow Jan 29, 2024 Issued
Array ( [id] => 19172943 [patent_doc_number] => 20240158917 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-16 [patent_title] => SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 18/419890 [patent_app_country] => US [patent_app_date] => 2024-01-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10082 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 175 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18419890 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/419890
Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium Jan 22, 2024 Issued
Array ( [id] => 19679246 [patent_doc_number] => 12191118 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-07 [patent_title] => Monolithic modular microwave source with integrated process gas distribution [patent_app_type] => utility [patent_app_number] => 18/419389 [patent_app_country] => US [patent_app_date] => 2024-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 10 [patent_no_of_words] => 6260 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18419389 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/419389
Monolithic modular microwave source with integrated process gas distribution Jan 21, 2024 Issued
Array ( [id] => 19234159 [patent_doc_number] => 20240191352 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-13 [patent_title] => METHODS AND APPARATUS FOR SOLID SOURCE REFILL [patent_app_type] => utility [patent_app_number] => 18/530321 [patent_app_country] => US [patent_app_date] => 2023-12-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5207 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18530321 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/530321
METHODS AND APPARATUS FOR SOLID SOURCE REFILL Dec 5, 2023 Pending
Array ( [id] => 19086089 [patent_doc_number] => 20240112890 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-04-04 [patent_title] => Showerhead Faceplate Having Flow Apertures Configured for Hollow Cathode Discharge Suppression [patent_app_type] => utility [patent_app_number] => 18/529576 [patent_app_country] => US [patent_app_date] => 2023-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 19847 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18529576 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/529576
Showerhead Faceplate Having Flow Apertures Configured for Hollow Cathode Discharge Suppression Dec 4, 2023 Abandoned
Array ( [id] => 19738600 [patent_doc_number] => 12215421 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-04 [patent_title] => Systems and methods for pulse width modulated dose control [patent_app_type] => utility [patent_app_number] => 18/526411 [patent_app_country] => US [patent_app_date] => 2023-12-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 32 [patent_no_of_words] => 11049 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18526411 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/526411
Systems and methods for pulse width modulated dose control Nov 30, 2023 Issued
Array ( [id] => 19738601 [patent_doc_number] => 12215422 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-04 [patent_title] => Shower head structure and plasma processing apparatus using the same [patent_app_type] => utility [patent_app_number] => 18/516991 [patent_app_country] => US [patent_app_date] => 2023-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 13 [patent_no_of_words] => 5531 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18516991 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/516991
Shower head structure and plasma processing apparatus using the same Nov 21, 2023 Issued
Array ( [id] => 19034634 [patent_doc_number] => 20240084449 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-14 [patent_title] => PRECURSOR CONTAINER [patent_app_type] => utility [patent_app_number] => 18/516087 [patent_app_country] => US [patent_app_date] => 2023-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3496 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18516087 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/516087
Precursor container Nov 20, 2023 Issued
Array ( [id] => 19203228 [patent_doc_number] => 20240175127 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-30 [patent_title] => PROCESSING APPARATUS AND PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/513994 [patent_app_country] => US [patent_app_date] => 2023-11-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6968 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18513994 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/513994
PROCESSING APPARATUS AND PROCESSING METHOD Nov 19, 2023 Pending
Array ( [id] => 19034633 [patent_doc_number] => 20240084448 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-14 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 18/514494 [patent_app_country] => US [patent_app_date] => 2023-11-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11163 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 191 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18514494 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/514494
Substrate processing apparatus and method of manufacturing semiconductor device Nov 19, 2023 Issued
Array ( [id] => 19203228 [patent_doc_number] => 20240175127 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-30 [patent_title] => PROCESSING APPARATUS AND PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/513994 [patent_app_country] => US [patent_app_date] => 2023-11-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6968 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18513994 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/513994
PROCESSING APPARATUS AND PROCESSING METHOD Nov 19, 2023 Pending
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