Search

Rudy Zervigon

Examiner (ID: 297, Phone: (571)272-1442 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1763, 1716, 1792
Total Applications
1840
Issued Applications
1165
Pending Applications
146
Abandoned Applications
556

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17756416 [patent_doc_number] => 11396700 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-07-26 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/144927 [patent_app_country] => US [patent_app_date] => 2021-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 11384 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 441 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17144927 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/144927
Substrate processing apparatus Jan 7, 2021 Issued
Array ( [id] => 19196618 [patent_doc_number] => 11993847 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-05-28 [patent_title] => Injector [patent_app_type] => utility [patent_app_number] => 17/142790 [patent_app_country] => US [patent_app_date] => 2021-01-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 10 [patent_no_of_words] => 4532 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 181 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17142790 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/142790
Injector Jan 5, 2021 Issued
Array ( [id] => 17623103 [patent_doc_number] => 11342164 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-05-24 [patent_title] => High density plasma chemical vapor deposition chamber and method of using [patent_app_type] => utility [patent_app_number] => 17/141974 [patent_app_country] => US [patent_app_date] => 2021-01-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 4315 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17141974 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/141974
High density plasma chemical vapor deposition chamber and method of using Jan 4, 2021 Issued
Array ( [id] => 18399528 [patent_doc_number] => 11661656 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-05-30 [patent_title] => Thin film forming apparatus and radical unit for forming thin film [patent_app_type] => utility [patent_app_number] => 17/136479 [patent_app_country] => US [patent_app_date] => 2020-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 5238 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 322 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17136479 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/136479
Thin film forming apparatus and radical unit for forming thin film Dec 28, 2020 Issued
Array ( [id] => 18228585 [patent_doc_number] => 20230067579 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-02 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD [patent_app_type] => utility [patent_app_number] => 17/790386 [patent_app_country] => US [patent_app_date] => 2020-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13257 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17790386 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/790386
Substrate processing apparatus and method Dec 20, 2020 Issued
Array ( [id] => 17688308 [patent_doc_number] => 20220195600 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-23 [patent_title] => Apparatus and Methods for Improving Chemical Utilization Rate in Deposition Process [patent_app_type] => utility [patent_app_number] => 17/129660 [patent_app_country] => US [patent_app_date] => 2020-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6365 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17129660 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/129660
Apparatus and methods for improving chemical utilization rate in deposition process Dec 20, 2020 Issued
Array ( [id] => 18958912 [patent_doc_number] => 20240047239 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-08 [patent_title] => PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/641233 [patent_app_country] => US [patent_app_date] => 2020-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9335 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17641233 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/641233
PLASMA PROCESSING DEVICE AND PLASMA PROCESSING METHOD Dec 15, 2020 Pending
Array ( [id] => 17673200 [patent_doc_number] => 20220186367 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-16 [patent_title] => Deposition Apparatus and Methods Using Staggered Pumping Locations [patent_app_type] => utility [patent_app_number] => 17/120186 [patent_app_country] => US [patent_app_date] => 2020-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5845 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17120186 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/120186
Deposition apparatus and methods using staggered pumping locations Dec 12, 2020 Issued
Array ( [id] => 17998126 [patent_doc_number] => 11499223 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-15 [patent_title] => Continuous liner for use in a processing chamber [patent_app_type] => utility [patent_app_number] => 17/117514 [patent_app_country] => US [patent_app_date] => 2020-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 9 [patent_no_of_words] => 6124 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17117514 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/117514
Continuous liner for use in a processing chamber Dec 9, 2020 Issued
Array ( [id] => 18643531 [patent_doc_number] => 11767592 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-09-26 [patent_title] => Gas-dispersing apparatus for multiple chemical resources [patent_app_type] => utility [patent_app_number] => 17/110516 [patent_app_country] => US [patent_app_date] => 2020-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2670 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17110516 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/110516
Gas-dispersing apparatus for multiple chemical resources Dec 2, 2020 Issued
Array ( [id] => 18110021 [patent_doc_number] => 20230002901 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-05 [patent_title] => PRESSURE BATCH COMPENSATION TO STABILIZE CD VARIATION FOR TRIM AND DEPOSITION PROCESSES [patent_app_type] => utility [patent_app_number] => 17/781447 [patent_app_country] => US [patent_app_date] => 2020-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7681 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17781447 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/781447
PRESSURE BATCH COMPENSATION TO STABILIZE CD VARIATION FOR TRIM AND DEPOSITION PROCESSES Dec 2, 2020 Pending
Array ( [id] => 16873458 [patent_doc_number] => 20210166925 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-03 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/102419 [patent_app_country] => US [patent_app_date] => 2020-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11966 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17102419 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/102419
Substrate processing apparatus Nov 22, 2020 Issued
Array ( [id] => 16858307 [patent_doc_number] => 20210159052 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-27 [patent_title] => Processing Chamber With Multiple Plasma Units [patent_app_type] => utility [patent_app_number] => 17/101074 [patent_app_country] => US [patent_app_date] => 2020-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5453 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 20 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17101074 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/101074
Processing Chamber With Multiple Plasma Units Nov 22, 2020 Abandoned
Array ( [id] => 17769674 [patent_doc_number] => 11401605 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-08-02 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/100936 [patent_app_country] => US [patent_app_date] => 2020-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 17 [patent_no_of_words] => 9624 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17100936 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/100936
Substrate processing apparatus Nov 21, 2020 Issued
Array ( [id] => 16712379 [patent_doc_number] => 20210079526 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-18 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SHOWER HEAD [patent_app_type] => utility [patent_app_number] => 16/953363 [patent_app_country] => US [patent_app_date] => 2020-11-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10456 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 267 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16953363 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/953363
SUBSTRATE PROCESSING APPARATUS AND SHOWER HEAD Nov 19, 2020 Abandoned
Array ( [id] => 18153362 [patent_doc_number] => 11566327 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-31 [patent_title] => Methods and apparatus to reduce pressure fluctuations in an ampoule of a chemical delivery system [patent_app_type] => utility [patent_app_number] => 17/100249 [patent_app_country] => US [patent_app_date] => 2020-11-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 3386 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17100249 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/100249
Methods and apparatus to reduce pressure fluctuations in an ampoule of a chemical delivery system Nov 19, 2020 Issued
Array ( [id] => 18080966 [patent_doc_number] => 20220406578 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-22 [patent_title] => DETECTION AND LOCATION OF ANOMALOUS PLASMA EVENTS IN FABRICATION CHAMBERS [patent_app_type] => utility [patent_app_number] => 17/756081 [patent_app_country] => US [patent_app_date] => 2020-11-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11633 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17756081 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/756081
Detection and location of anomalous plasma events in fabrication chambers Nov 17, 2020 Issued
Array ( [id] => 18801588 [patent_doc_number] => 11834740 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-05 [patent_title] => Apparatus, system, and method for generating gas for use in a process chamber [patent_app_type] => utility [patent_app_number] => 17/094208 [patent_app_country] => US [patent_app_date] => 2020-11-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4362 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17094208 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/094208
Apparatus, system, and method for generating gas for use in a process chamber Nov 9, 2020 Issued
Array ( [id] => 16827691 [patent_doc_number] => 20210142984 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-13 [patent_title] => CHAMBER COMPONENTS FOR GAS DELIVERY MODULATION [patent_app_type] => utility [patent_app_number] => 17/088834 [patent_app_country] => US [patent_app_date] => 2020-11-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7231 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17088834 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/088834
Chamber components for gas delivery modulation Nov 3, 2020 Issued
Array ( [id] => 18021124 [patent_doc_number] => 20220372623 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-24 [patent_title] => SUBSTRATE PROCESSING APPARATUS, PROCESSING GAS CONCENTRATING APPARATUS, AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/773985 [patent_app_country] => US [patent_app_date] => 2020-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7685 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17773985 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/773985
SUBSTRATE PROCESSING APPARATUS, PROCESSING GAS CONCENTRATING APPARATUS, AND SUBSTRATE PROCESSING METHOD Oct 25, 2020 Pending
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