Search

Rudy Zervigon

Examiner (ID: 297, Phone: (571)272-1442 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1763, 1716, 1792
Total Applications
1840
Issued Applications
1165
Pending Applications
146
Abandoned Applications
556

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18199013 [patent_doc_number] => 20230052532 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-16 [patent_title] => VAPOR DEPOSITION APPARATUS [patent_app_type] => utility [patent_app_number] => 16/768539 [patent_app_country] => US [patent_app_date] => 2020-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3707 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16768539 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/768539
VAPOR DEPOSITION APPARATUS May 19, 2020 Abandoned
Array ( [id] => 17620433 [patent_doc_number] => 11339472 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-05-24 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 16/868825 [patent_app_country] => US [patent_app_date] => 2020-05-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7172 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 250 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16868825 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/868825
Substrate processing apparatus May 6, 2020 Issued
Array ( [id] => 16394363 [patent_doc_number] => 20200335304 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-22 [patent_title] => SYSTEMS AND METHODS FOR SUPPRESSING PARASITIC PLASMA AND REDUCING WITHIN-WAFER NON-UNIFORMITY [patent_app_type] => utility [patent_app_number] => 16/866065 [patent_app_country] => US [patent_app_date] => 2020-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5690 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -23 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16866065 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/866065
Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformity May 3, 2020 Issued
Array ( [id] => 16506629 [patent_doc_number] => 20200385885 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-12-10 [patent_title] => CYCLICAL EPITAXIAL DEPOSITION SYSTEM [patent_app_type] => utility [patent_app_number] => 16/862760 [patent_app_country] => US [patent_app_date] => 2020-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5939 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16862760 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/862760
CYCLICAL EPITAXIAL DEPOSITION SYSTEM Apr 29, 2020 Abandoned
Array ( [id] => 16437510 [patent_doc_number] => 20200354836 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-12 [patent_title] => CHEMICAL SOURCE VESSEL WITH DIP TUBE [patent_app_type] => utility [patent_app_number] => 16/860973 [patent_app_country] => US [patent_app_date] => 2020-04-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2504 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 128 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16860973 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/860973
Chemical source vessel with dip tube Apr 27, 2020 Issued
Array ( [id] => 16424941 [patent_doc_number] => 20200350139 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-05 [patent_title] => HIGH POWER WAFER COOLING [patent_app_type] => utility [patent_app_number] => 16/860386 [patent_app_country] => US [patent_app_date] => 2020-04-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6228 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16860386 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/860386
High power wafer cooling Apr 27, 2020 Issued
Array ( [id] => 17330295 [patent_doc_number] => 11220748 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-01-11 [patent_title] => Gas supply and layer deposition apparatus including the same [patent_app_type] => utility [patent_app_number] => 16/858054 [patent_app_country] => US [patent_app_date] => 2020-04-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 23 [patent_no_of_words] => 11888 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 228 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16858054 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/858054
Gas supply and layer deposition apparatus including the same Apr 23, 2020 Issued
Array ( [id] => 17692085 [patent_doc_number] => 20220199378 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-23 [patent_title] => ELECTROSTATIC CHUCK WITH SPATIALLY TUNABLE RF COUPLING TO A WAFER [patent_app_type] => utility [patent_app_number] => 17/603636 [patent_app_country] => US [patent_app_date] => 2020-04-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10467 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -34 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17603636 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/603636
Electrostatic chuck with spatially tunable RF coupling to a wafer Apr 13, 2020 Issued
Array ( [id] => 16205313 [patent_doc_number] => 20200238303 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-30 [patent_title] => SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE [patent_app_type] => utility [patent_app_number] => 16/846000 [patent_app_country] => US [patent_app_date] => 2020-04-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3974 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16846000 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/846000
Showerhead having a detachable gas distribution plate Apr 9, 2020 Issued
Array ( [id] => 16455960 [patent_doc_number] => 20200365386 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-19 [patent_title] => DYNAMIC MULTI ZONE FLOW CONTROL FOR A PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 16/844794 [patent_app_country] => US [patent_app_date] => 2020-04-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6369 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16844794 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/844794
Dynamic multi zone flow control for a processing system Apr 8, 2020 Issued
Array ( [id] => 17156526 [patent_doc_number] => 20210317577 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-14 [patent_title] => HIGH TEMPERATURE VACUUM SEAL [patent_app_type] => utility [patent_app_number] => 16/844601 [patent_app_country] => US [patent_app_date] => 2020-04-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6306 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16844601 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/844601
High temperature vacuum seal Apr 8, 2020 Issued
Array ( [id] => 17158930 [patent_doc_number] => 20210319981 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-14 [patent_title] => FACEPLATE WITH LOCALIZED FLOW CONTROL [patent_app_type] => utility [patent_app_number] => 16/844106 [patent_app_country] => US [patent_app_date] => 2020-04-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7529 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16844106 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/844106
Faceplate with localized flow control Apr 8, 2020 Issued
Array ( [id] => 17178685 [patent_doc_number] => 11155920 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-26 [patent_title] => Substrate processing apparatus, and method for manufacturing semiconductor device [patent_app_type] => utility [patent_app_number] => 16/843620 [patent_app_country] => US [patent_app_date] => 2020-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 9609 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 265 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16843620 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/843620
Substrate processing apparatus, and method for manufacturing semiconductor device Apr 7, 2020 Issued
Array ( [id] => 16194125 [patent_doc_number] => 20200234974 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-23 [patent_title] => Etching Method and Etching Apparatus [patent_app_type] => utility [patent_app_number] => 16/839176 [patent_app_country] => US [patent_app_date] => 2020-04-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9943 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16839176 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/839176
Etching Method and Etching Apparatus Apr 2, 2020 Abandoned
Array ( [id] => 16881105 [patent_doc_number] => 11031262 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-06-08 [patent_title] => Loadlock integrated bevel etcher system [patent_app_type] => utility [patent_app_number] => 16/838128 [patent_app_country] => US [patent_app_date] => 2020-04-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 8 [patent_no_of_words] => 6376 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16838128 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/838128
Loadlock integrated bevel etcher system Apr 1, 2020 Issued
Array ( [id] => 20204051 [patent_doc_number] => 12406834 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-09-02 [patent_title] => Substrate processing apparatus and substrate processing method [patent_app_type] => utility [patent_app_number] => 17/617982 [patent_app_country] => US [patent_app_date] => 2020-04-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 0 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 216 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17617982 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/617982
Substrate processing apparatus and substrate processing method Mar 31, 2020 Issued
Array ( [id] => 18518753 [patent_doc_number] => 11708636 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-07-25 [patent_title] => Reaction gas supply system and control method thereof [patent_app_type] => utility [patent_app_number] => 17/603057 [patent_app_country] => US [patent_app_date] => 2020-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 5585 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 330 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17603057 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/603057
Reaction gas supply system and control method thereof Mar 30, 2020 Issued
Array ( [id] => 16162941 [patent_doc_number] => 20200219703 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-09 [patent_title] => DOGBONE INLET CONE PROFILE FOR REMOTE PLASMA OXIDATION CHAMBER [patent_app_type] => utility [patent_app_number] => 16/823936 [patent_app_country] => US [patent_app_date] => 2020-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5887 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16823936 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/823936
Dogbone inlet cone profile for remote plasma oxidation chamber Mar 18, 2020 Issued
Array ( [id] => 16162969 [patent_doc_number] => 20200219717 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-09 [patent_title] => SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 16/820047 [patent_app_country] => US [patent_app_date] => 2020-03-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14038 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 184 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16820047 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/820047
Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium Mar 15, 2020 Issued
Array ( [id] => 17047974 [patent_doc_number] => 11101164 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-08-24 [patent_title] => Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition [patent_app_type] => utility [patent_app_number] => 16/820003 [patent_app_country] => US [patent_app_date] => 2020-03-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 19 [patent_no_of_words] => 6147 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 207 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16820003 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/820003
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Mar 15, 2020 Issued
Menu