Search

Rudy Zervigon

Examiner (ID: 297, Phone: (571)272-1442 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1763, 1716, 1792
Total Applications
1840
Issued Applications
1165
Pending Applications
146
Abandoned Applications
556

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 15775625 [patent_doc_number] => 20200118830 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-16 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 16/710791 [patent_app_country] => US [patent_app_date] => 2019-12-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10040 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16710791 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/710791
Substrate processing apparatus and substrate processing method Dec 10, 2019 Issued
Array ( [id] => 17497872 [patent_doc_number] => 11286565 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-03-29 [patent_title] => Apparatus and method for semiconductor fabrication [patent_app_type] => utility [patent_app_number] => 16/708737 [patent_app_country] => US [patent_app_date] => 2019-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7193 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16708737 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/708737
Apparatus and method for semiconductor fabrication Dec 9, 2019 Issued
Array ( [id] => 15775655 [patent_doc_number] => 20200118845 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-16 [patent_title] => SYSTEMS AND METHODS FOR IMPROVED SEMICONDUCTOR ETCHING AND COMPONENT PROTECTION [patent_app_type] => utility [patent_app_number] => 16/707379 [patent_app_country] => US [patent_app_date] => 2019-12-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10767 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16707379 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/707379
Systems and methods for improved semiconductor etching and component protection Dec 8, 2019 Issued
Array ( [id] => 16020835 [patent_doc_number] => 20200185261 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-11 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 16/707051 [patent_app_country] => US [patent_app_date] => 2019-12-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10854 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16707051 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/707051
Substrate processing apparatus and substrate processing method Dec 8, 2019 Issued
Array ( [id] => 17210649 [patent_doc_number] => 11171025 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-09 [patent_title] => Substrate processing device [patent_app_type] => utility [patent_app_number] => 16/704835 [patent_app_country] => US [patent_app_date] => 2019-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 17 [patent_no_of_words] => 9234 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16704835 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/704835
Substrate processing device Dec 4, 2019 Issued
Array ( [id] => 19196620 [patent_doc_number] => 11993849 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-05-28 [patent_title] => Carbon hard mask, film forming apparatus, and film forming method [patent_app_type] => utility [patent_app_number] => 17/415104 [patent_app_country] => US [patent_app_date] => 2019-12-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 13 [patent_no_of_words] => 7429 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17415104 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/415104
Carbon hard mask, film forming apparatus, and film forming method Dec 3, 2019 Issued
Array ( [id] => 19428119 [patent_doc_number] => 12087552 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-09-10 [patent_title] => Plasma processing apparatus and plasma processing method [patent_app_type] => utility [patent_app_number] => 17/299721 [patent_app_country] => US [patent_app_date] => 2019-11-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6725 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 182 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17299721 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/299721
Plasma processing apparatus and plasma processing method Nov 25, 2019 Issued
Array ( [id] => 16771231 [patent_doc_number] => 10982326 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-04-20 [patent_title] => Counter-flow multi inject for atomic layer deposition chamber [patent_app_type] => utility [patent_app_number] => 16/693631 [patent_app_country] => US [patent_app_date] => 2019-11-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 21 [patent_no_of_words] => 9712 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 190 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16693631 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/693631
Counter-flow multi inject for atomic layer deposition chamber Nov 24, 2019 Issued
Array ( [id] => 16157439 [patent_doc_number] => 20200216952 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-09 [patent_title] => PUMPING APPARATUS AND METHOD FOR SUBSTRATE PROCESSING CHAMBERS [patent_app_type] => utility [patent_app_number] => 16/685340 [patent_app_country] => US [patent_app_date] => 2019-11-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5999 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16685340 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/685340
Pumping apparatus and method for substrate processing chambers Nov 14, 2019 Issued
Array ( [id] => 18804282 [patent_doc_number] => 11837445 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-05 [patent_title] => Substrate processing device and substrate processing method [patent_app_type] => utility [patent_app_number] => 17/284438 [patent_app_country] => US [patent_app_date] => 2019-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 20 [patent_no_of_words] => 12606 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17284438 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/284438
Substrate processing device and substrate processing method Nov 13, 2019 Issued
Array ( [id] => 16682013 [patent_doc_number] => 10941481 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-03-09 [patent_title] => Nozzle geometry for organic vapor jet printing [patent_app_type] => utility [patent_app_number] => 16/683389 [patent_app_country] => US [patent_app_date] => 2019-11-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 24 [patent_no_of_words] => 14411 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16683389 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/683389
Nozzle geometry for organic vapor jet printing Nov 13, 2019 Issued
Array ( [id] => 16808400 [patent_doc_number] => 20210130953 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-06 [patent_title] => PROCESS KIT FOR IMPROVING EDGE FILM THICKNESS UNIFORMITY ON A SUBSTRATE [patent_app_type] => utility [patent_app_number] => 16/672327 [patent_app_country] => US [patent_app_date] => 2019-11-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4501 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16672327 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/672327
Process kit for improving edge film thickness uniformity on a substrate Oct 31, 2019 Issued
Array ( [id] => 18665192 [patent_doc_number] => 11772058 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-10-03 [patent_title] => Gas mixing system for semiconductor fabrication [patent_app_type] => utility [patent_app_number] => 16/657016 [patent_app_country] => US [patent_app_date] => 2019-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 7114 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16657016 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/657016
Gas mixing system for semiconductor fabrication Oct 17, 2019 Issued
Array ( [id] => 15503205 [patent_doc_number] => 20200051791 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-13 [patent_title] => Etch Process With Rotatable Shower Head [patent_app_type] => utility [patent_app_number] => 16/657503 [patent_app_country] => US [patent_app_date] => 2019-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6895 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16657503 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/657503
Etch process with rotatable shower head Oct 17, 2019 Issued
Array ( [id] => 15455251 [patent_doc_number] => 20200040450 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-02-06 [patent_title] => System and Method for Supplying a Precursor for an Atomic Layer Deposition (ALD) Process [patent_app_type] => utility [patent_app_number] => 16/600648 [patent_app_country] => US [patent_app_date] => 2019-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5841 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16600648 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/600648
System and method for supplying a precursor for an atomic layer deposition (ALD) process Oct 13, 2019 Issued
Array ( [id] => 15769543 [patent_doc_number] => 20200115789 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-16 [patent_title] => LATERAL-TYPE VACUUM DEPOSITION APPARATUS, AND SOURCE BLOCK AND SOURCE ASSEMBLY FOR THE SAME [patent_app_type] => utility [patent_app_number] => 16/596558 [patent_app_country] => US [patent_app_date] => 2019-10-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5930 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16596558 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/596558
Lateral-type vacuum deposition apparatus, and source block and source assembly for the same Oct 7, 2019 Issued
Array ( [id] => 17407424 [patent_doc_number] => 11248296 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-15 [patent_title] => Source gas supply apparatus, film forming apparatus, and source gas supply method [patent_app_type] => utility [patent_app_number] => 16/589410 [patent_app_country] => US [patent_app_date] => 2019-10-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 9 [patent_no_of_words] => 6445 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 281 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16589410 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/589410
Source gas supply apparatus, film forming apparatus, and source gas supply method Sep 30, 2019 Issued
Array ( [id] => 16731083 [patent_doc_number] => 20210098231 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-01 [patent_title] => MONOLITHIC MODULAR MICROWAVE SOURCE WITH INTEGRATED PROCESS GAS DISTRIBUTION [patent_app_type] => utility [patent_app_number] => 16/586482 [patent_app_country] => US [patent_app_date] => 2019-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6228 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16586482 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/586482
Monolithic modular microwave source with integrated process gas distribution Sep 26, 2019 Issued
Array ( [id] => 15717483 [patent_doc_number] => 20200105509 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-02 [patent_title] => VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP [patent_app_type] => utility [patent_app_number] => 16/584095 [patent_app_country] => US [patent_app_date] => 2019-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15203 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16584095 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/584095
Vacuum pump protection against deposition byproduct buildup Sep 25, 2019 Issued
Array ( [id] => 16941361 [patent_doc_number] => 11053590 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-07-06 [patent_title] => Nozzle for uniform plasma processing [patent_app_type] => utility [patent_app_number] => 16/584707 [patent_app_country] => US [patent_app_date] => 2019-09-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 13 [patent_no_of_words] => 11035 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16584707 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/584707
Nozzle for uniform plasma processing Sep 25, 2019 Issued
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