Search

Rudy Zervigon

Examiner (ID: 297, Phone: (571)272-1442 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1763, 1716, 1792
Total Applications
1840
Issued Applications
1165
Pending Applications
146
Abandoned Applications
556

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18817919 [patent_doc_number] => 20230392259 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-07 [patent_title] => HARDWARE TO PREVENT BOTTOM PURGE INCURSION IN APPLICATION VOLUME AND PROCESS GAS DIFFUSION BELOW HEATER [patent_app_type] => utility [patent_app_number] => 18/313736 [patent_app_country] => US [patent_app_date] => 2023-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7832 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18313736 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/313736
Hardware to prevent bottom purge incursion in application volume and process gas diffusion below heater May 7, 2023 Issued
Array ( [id] => 18743295 [patent_doc_number] => 20230352283 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-02 [patent_title] => SYSTEM AND METHOD FOR DETECTING ENDPOINT IN PLASMA PROCESSING [patent_app_type] => utility [patent_app_number] => 18/139470 [patent_app_country] => US [patent_app_date] => 2023-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8110 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18139470 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/139470
SYSTEM AND METHOD FOR DETECTING ENDPOINT IN PLASMA PROCESSING Apr 25, 2023 Pending
Array ( [id] => 19528677 [patent_doc_number] => 20240352579 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-24 [patent_title] => PROCESS CHAMBER [patent_app_type] => utility [patent_app_number] => 18/305750 [patent_app_country] => US [patent_app_date] => 2023-04-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8179 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18305750 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/305750
Process chamber Apr 23, 2023 Issued
Array ( [id] => 19130866 [patent_doc_number] => 20240136219 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-04-25 [patent_title] => WAFER PLACEMENT TABLE [patent_app_type] => utility [patent_app_number] => 18/299130 [patent_app_country] => US [patent_app_date] => 2023-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5622 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18299130 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/299130
WAFER PLACEMENT TABLE Apr 11, 2023 Pending
Array ( [id] => 19130866 [patent_doc_number] => 20240136219 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-04-25 [patent_title] => WAFER PLACEMENT TABLE [patent_app_type] => utility [patent_app_number] => 18/299130 [patent_app_country] => US [patent_app_date] => 2023-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5622 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18299130 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/299130
WAFER PLACEMENT TABLE Apr 10, 2023 Pending
Array ( [id] => 18743332 [patent_doc_number] => 20230352320 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-02 [patent_title] => GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 18/184736 [patent_app_country] => US [patent_app_date] => 2023-03-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13756 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18184736 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/184736
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE Mar 15, 2023 Pending
Array ( [id] => 18905927 [patent_doc_number] => 20240021412 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-18 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/119882 [patent_app_country] => US [patent_app_date] => 2023-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5018 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18119882 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/119882
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD Mar 9, 2023 Pending
Array ( [id] => 19435925 [patent_doc_number] => 20240304423 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-09-12 [patent_title] => SEMICONDUCTOR CHAMBER COMPONENTS WITH ADVANCED COATING TECHNIQUES [patent_app_type] => utility [patent_app_number] => 18/181077 [patent_app_country] => US [patent_app_date] => 2023-03-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10487 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18181077 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/181077
Semiconductor chamber components with advanced coating techniques Mar 8, 2023 Issued
Array ( [id] => 18801592 [patent_doc_number] => 11834744 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-05 [patent_title] => Ceramic showerheads with conductive electrodes [patent_app_type] => utility [patent_app_number] => 18/173704 [patent_app_country] => US [patent_app_date] => 2023-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 15 [patent_no_of_words] => 10214 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18173704 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/173704
Ceramic showerheads with conductive electrodes Feb 22, 2023 Issued
Array ( [id] => 19693373 [patent_doc_number] => 20250011918 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-01-09 [patent_title] => AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METHOD TO WHICH MACHINE LEARNING IS APPLIED [patent_app_type] => utility [patent_app_number] => 18/279027 [patent_app_country] => US [patent_app_date] => 2023-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8551 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18279027 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/279027
AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METHOD TO WHICH MACHINE LEARNING IS APPLIED Feb 22, 2023 Pending
Array ( [id] => 20080771 [patent_doc_number] => 12354848 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-08 [patent_title] => Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium [patent_app_type] => utility [patent_app_number] => 18/105404 [patent_app_country] => US [patent_app_date] => 2023-02-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 12097 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 213 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18105404 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/105404
Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium Feb 2, 2023 Issued
Array ( [id] => 18567542 [patent_doc_number] => 20230257877 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-17 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/163949 [patent_app_country] => US [patent_app_date] => 2023-02-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8021 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18163949 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/163949
Substrate processing apparatus and substrate processing method Feb 2, 2023 Issued
Array ( [id] => 18439893 [patent_doc_number] => 20230187188 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-15 [patent_title] => SUBSTRATE PROCESSING APPARATUS, SUBSTRATE HOLDER, AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 18/164085 [patent_app_country] => US [patent_app_date] => 2023-02-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10893 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 42 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18164085 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/164085
Substrate processing apparatus, substrate holder, and method of manufacturing semiconductor device Feb 2, 2023 Issued
Array ( [id] => 18420671 [patent_doc_number] => 20230175134 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-08 [patent_title] => INTEGRATED SHOWERHEAD WITH THERMAL CONTROL FOR DELIVERING RADICAL AND PRECURSOR GAS TO A DOWNSTREAM CHAMBER TO ENABLE REMOTE PLASMA FILM DEPOSITION [patent_app_type] => utility [patent_app_number] => 18/163828 [patent_app_country] => US [patent_app_date] => 2023-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6158 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 126 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18163828 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/163828
Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition Feb 1, 2023 Issued
Array ( [id] => 18516373 [patent_doc_number] => 20230232697 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-07-20 [patent_title] => ORGANIC VAPOR JET PRINTING SYSTEM [patent_app_type] => utility [patent_app_number] => 18/103667 [patent_app_country] => US [patent_app_date] => 2023-01-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10102 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18103667 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/103667
Organic vapor jet printing system Jan 30, 2023 Issued
Array ( [id] => 18540747 [patent_doc_number] => 20230245858 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-03 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 18/159865 [patent_app_country] => US [patent_app_date] => 2023-01-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10333 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18159865 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/159865
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE Jan 25, 2023 Pending
Array ( [id] => 18391846 [patent_doc_number] => 20230160064 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-25 [patent_title] => BOTTOM FED SUBLIMATION BED FOR HIGH SATURATION EFFICIENCY IN SEMICONDUCTOR APPLICATIONS [patent_app_type] => utility [patent_app_number] => 18/095053 [patent_app_country] => US [patent_app_date] => 2023-01-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5903 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 232 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18095053 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/095053
Bottom fed sublimation bed for high saturation efficiency in semiconductor applications Jan 9, 2023 Issued
Array ( [id] => 18801584 [patent_doc_number] => 11834736 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-05 [patent_title] => Systems and methods for pulse width modulated dose control [patent_app_type] => utility [patent_app_number] => 18/092413 [patent_app_country] => US [patent_app_date] => 2023-01-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 32 [patent_no_of_words] => 11003 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18092413 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/092413
Systems and methods for pulse width modulated dose control Jan 1, 2023 Issued
Array ( [id] => 18469372 [patent_doc_number] => 20230203656 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => GAS SUPPLY UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING GAS SUPPLY UNIT [patent_app_type] => utility [patent_app_number] => 18/088255 [patent_app_country] => US [patent_app_date] => 2022-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3104 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18088255 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/088255
GAS SUPPLY UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING GAS SUPPLY UNIT Dec 22, 2022 Pending
Array ( [id] => 19067727 [patent_doc_number] => 20240102153 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-03-28 [patent_title] => PROTECTIVE GAS FLOW DURING WAFER DECHUCKING IN PVD CHAMBER [patent_app_type] => utility [patent_app_number] => 18/084671 [patent_app_country] => US [patent_app_date] => 2022-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1528 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 42 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18084671 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/084671
PROTECTIVE GAS FLOW DURING WAFER DECHUCKING IN PVD CHAMBER Dec 19, 2022 Pending
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