Search

Rudy Zervigon

Examiner (ID: 10677, Phone: (571)272-1442 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1792, 1763, 1716
Total Applications
1836
Issued Applications
1162
Pending Applications
153
Abandoned Applications
556

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18124457 [patent_doc_number] => 20230010069 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-12 [patent_title] => APPARATUS FOR SUBSTRATE PROCESSING [patent_app_type] => utility [patent_app_number] => 17/820670 [patent_app_country] => US [patent_app_date] => 2022-08-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 19012 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17820670 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/820670
APPARATUS FOR SUBSTRATE PROCESSING Aug 17, 2022 Issued
Array ( [id] => 20129486 [patent_doc_number] => 12371790 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-29 [patent_title] => Wafer carrier with adjustable alignment devices and deposition equipment using the same [patent_app_type] => utility [patent_app_number] => 17/889952 [patent_app_country] => US [patent_app_date] => 2022-08-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 0 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17889952 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/889952
Wafer carrier with adjustable alignment devices and deposition equipment using the same Aug 16, 2022 Issued
Array ( [id] => 18575841 [patent_doc_number] => 11732358 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-22 [patent_title] => High temperature chemical vapor deposition lid [patent_app_type] => utility [patent_app_number] => 17/889930 [patent_app_country] => US [patent_app_date] => 2022-08-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6232 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17889930 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/889930
High temperature chemical vapor deposition lid Aug 16, 2022 Issued
Array ( [id] => 18280608 [patent_doc_number] => 20230096080 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-30 [patent_title] => SUBSTRATE PROCESSING APPARATUS, PROCESS VESSEL, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND NON-TRANSITORY TANGIBLE MEDIUM [patent_app_type] => utility [patent_app_number] => 17/885636 [patent_app_country] => US [patent_app_date] => 2022-08-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8009 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 129 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17885636 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/885636
Substrate processing apparatus, process vessel, method of manufacturing semiconductor device and non-transitory tangible medium Aug 10, 2022 Issued
Array ( [id] => 18058492 [patent_doc_number] => 20220389578 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-08 [patent_title] => SEQUENTIAL INFILTRATION SYNTHESIS APPARATUS AND A METHOD OF FORMING A PATTERNED STRUCTURE [patent_app_type] => utility [patent_app_number] => 17/885810 [patent_app_country] => US [patent_app_date] => 2022-08-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7953 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 240 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17885810 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/885810
Sequential infiltration synthesis apparatus and a method of forming a patterned structure Aug 10, 2022 Issued
Array ( [id] => 18039935 [patent_doc_number] => 20220384152 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-01 [patent_title] => PROCESSING APPARATUS AND PROCESSING METHOD, AND GAS CLUSTER GENERATING APPARATUS AND GAS CLUSTER GENERATING METHOD [patent_app_type] => utility [patent_app_number] => 17/883997 [patent_app_country] => US [patent_app_date] => 2022-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10388 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 224 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17883997 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/883997
Processing apparatus and processing method, and gas cluster generating apparatus and gas cluster generating method Aug 8, 2022 Issued
Array ( [id] => 18198303 [patent_doc_number] => 20230051822 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-16 [patent_title] => FILM FORMING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/818547 [patent_app_country] => US [patent_app_date] => 2022-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7506 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17818547 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/818547
FILM FORMING APPARATUS Aug 8, 2022 Pending
Array ( [id] => 18545910 [patent_doc_number] => 11719255 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-08 [patent_title] => Pumping liner for improved flow uniformity [patent_app_type] => utility [patent_app_number] => 17/873706 [patent_app_country] => US [patent_app_date] => 2022-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 17 [patent_no_of_words] => 6426 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 138 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17873706 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/873706
Pumping liner for improved flow uniformity Jul 25, 2022 Issued
Array ( [id] => 18021120 [patent_doc_number] => 20220372619 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-24 [patent_title] => MANIFOLD VALVE FOR CONTROLLING MULTIPLE GASES [patent_app_type] => utility [patent_app_number] => 17/874188 [patent_app_country] => US [patent_app_date] => 2022-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4016 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17874188 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/874188
Manifold valve for controlling multiple gases Jul 25, 2022 Issued
Array ( [id] => 18199262 [patent_doc_number] => 20230052781 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-16 [patent_title] => DISCHARGE METHOD, DISCHARGE SYSTEM AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 17/864540 [patent_app_country] => US [patent_app_date] => 2022-07-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5565 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17864540 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/864540
DISCHARGE METHOD, DISCHARGE SYSTEM AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME Jul 13, 2022 Pending
Array ( [id] => 18123085 [patent_doc_number] => 20230008695 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-12 [patent_title] => INTEGRATED WET CLEAN FOR EPITAXIAL GROWTH [patent_app_type] => utility [patent_app_number] => 17/859752 [patent_app_country] => US [patent_app_date] => 2022-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5815 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17859752 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/859752
INTEGRATED WET CLEAN FOR EPITAXIAL GROWTH Jul 6, 2022 Pending
Array ( [id] => 17913666 [patent_doc_number] => 20220316061 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => Apparatus and Methods for Improving Chemical Utilization Rate in Deposition Process [patent_app_type] => utility [patent_app_number] => 17/845191 [patent_app_country] => US [patent_app_date] => 2022-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6393 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17845191 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/845191
Apparatus and methods for improving chemical utilization rate in deposition process Jun 20, 2022 Issued
Array ( [id] => 17917417 [patent_doc_number] => 20220319813 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => Processing Chamber With Multiple Plasma Units [patent_app_type] => utility [patent_app_number] => 17/844245 [patent_app_country] => US [patent_app_date] => 2022-06-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5468 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 22 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17844245 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/844245
Processing chamber with multiple plasma units Jun 19, 2022 Issued
Array ( [id] => 18604958 [patent_doc_number] => 11746414 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-09-05 [patent_title] => Temperature control assembly for substrate processing apparatus and method of using same [patent_app_type] => utility [patent_app_number] => 17/835082 [patent_app_country] => US [patent_app_date] => 2022-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5092 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17835082 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/835082
Temperature control assembly for substrate processing apparatus and method of using same Jun 7, 2022 Issued
Array ( [id] => 18363885 [patent_doc_number] => 20230145476 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-11 [patent_title] => CHUCK ASSEMBLY, FABRICATION SYSTEM THEREWITH, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/833438 [patent_app_country] => US [patent_app_date] => 2022-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5927 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17833438 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/833438
Chuck assembly, fabrication system therewith, and method of fabricating semiconductor device using the same Jun 5, 2022 Issued
Array ( [id] => 18363885 [patent_doc_number] => 20230145476 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-11 [patent_title] => CHUCK ASSEMBLY, FABRICATION SYSTEM THEREWITH, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/833438 [patent_app_country] => US [patent_app_date] => 2022-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5927 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17833438 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/833438
Chuck assembly, fabrication system therewith, and method of fabricating semiconductor device using the same Jun 5, 2022 Issued
Array ( [id] => 18363885 [patent_doc_number] => 20230145476 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-11 [patent_title] => CHUCK ASSEMBLY, FABRICATION SYSTEM THEREWITH, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/833438 [patent_app_country] => US [patent_app_date] => 2022-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5927 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17833438 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/833438
Chuck assembly, fabrication system therewith, and method of fabricating semiconductor device using the same Jun 5, 2022 Issued
Array ( [id] => 18210845 [patent_doc_number] => 20230057107 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-02-23 [patent_title] => WAFER PLACEMENT TABLE [patent_app_type] => utility [patent_app_number] => 17/805237 [patent_app_country] => US [patent_app_date] => 2022-06-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7327 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17805237 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/805237
WAFER PLACEMENT TABLE Jun 2, 2022 Pending
Array ( [id] => 18058498 [patent_doc_number] => 20220389584 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-08 [patent_title] => SHOWER HEAD, ELECTRODE UNIT, GAS SUPPLY UNIT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/830877 [patent_app_country] => US [patent_app_date] => 2022-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9446 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17830877 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/830877
SHOWER HEAD, ELECTRODE UNIT, GAS SUPPLY UNIT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING SYSTEM Jun 1, 2022 Pending
Array ( [id] => 18604957 [patent_doc_number] => 11746413 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-09-05 [patent_title] => Chemical delivery system and method of operating the chemical delivery system [patent_app_type] => utility [patent_app_number] => 17/829007 [patent_app_country] => US [patent_app_date] => 2022-05-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 8 [patent_no_of_words] => 5225 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17829007 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/829007
Chemical delivery system and method of operating the chemical delivery system May 30, 2022 Issued
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