Search

Sangeeta Bahl

Examiner (ID: 10585, Phone: (571)270-7779 , Office: P/3629 )

Most Active Art Unit
3629
Art Unit(s)
3629, 3626
Total Applications
499
Issued Applications
89
Pending Applications
78
Abandoned Applications
355

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 19935033 [patent_doc_number] => 12308241 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-05-20 [patent_title] => Plasma processing method and plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 17/560228 [patent_app_country] => US [patent_app_date] => 2021-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 27 [patent_no_of_words] => 5936 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17560228 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/560228
Plasma processing method and plasma processing apparatus Dec 21, 2021 Issued
Array ( [id] => 19964795 [patent_doc_number] => 12334312 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-17 [patent_title] => Configurable faraday shield [patent_app_type] => utility [patent_app_number] => 17/544433 [patent_app_country] => US [patent_app_date] => 2021-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 1145 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17544433 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/544433
Configurable faraday shield Dec 6, 2021 Issued
Array ( [id] => 17660728 [patent_doc_number] => 20220181193 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-09 [patent_title] => HIGH PERFORMANCE SUSCEPTOR APPARATUS [patent_app_type] => utility [patent_app_number] => 17/457605 [patent_app_country] => US [patent_app_date] => 2021-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9554 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17457605 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/457605
HIGH PERFORMANCE SUSCEPTOR APPARATUS Dec 2, 2021 Pending
Array ( [id] => 17660728 [patent_doc_number] => 20220181193 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-09 [patent_title] => HIGH PERFORMANCE SUSCEPTOR APPARATUS [patent_app_type] => utility [patent_app_number] => 17/457605 [patent_app_country] => US [patent_app_date] => 2021-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9554 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17457605 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/457605
HIGH PERFORMANCE SUSCEPTOR APPARATUS Dec 2, 2021 Pending
Array ( [id] => 18882801 [patent_doc_number] => 20240006170 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-04 [patent_title] => SEMICONDUCTOR PROCESS APPARATUS AND POWER CONTROL METHOD [patent_app_type] => utility [patent_app_number] => 18/254062 [patent_app_country] => US [patent_app_date] => 2021-11-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5325 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18254062 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/254062
SEMICONDUCTOR PROCESS APPARATUS AND POWER CONTROL METHOD Nov 24, 2021 Pending
Array ( [id] => 18882801 [patent_doc_number] => 20240006170 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-04 [patent_title] => SEMICONDUCTOR PROCESS APPARATUS AND POWER CONTROL METHOD [patent_app_type] => utility [patent_app_number] => 18/254062 [patent_app_country] => US [patent_app_date] => 2021-11-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5325 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18254062 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/254062
SEMICONDUCTOR PROCESS APPARATUS AND POWER CONTROL METHOD Nov 24, 2021 Pending
Array ( [id] => 17615365 [patent_doc_number] => 20220157645 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-19 [patent_title] => SUPPORT UNIT AND APPARATUS FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/531626 [patent_app_country] => US [patent_app_date] => 2021-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9185 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 37 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17531626 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/531626
SUPPORT UNIT AND APPARATUS FOR TREATING SUBSTRATE Nov 18, 2021 Pending
Array ( [id] => 17615365 [patent_doc_number] => 20220157645 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-19 [patent_title] => SUPPORT UNIT AND APPARATUS FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/531626 [patent_app_country] => US [patent_app_date] => 2021-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9185 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 37 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17531626 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/531626
SUPPORT UNIT AND APPARATUS FOR TREATING SUBSTRATE Nov 18, 2021 Pending
Array ( [id] => 18833738 [patent_doc_number] => 20230402265 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-14 [patent_title] => PROCESS CHAMBER AND SEMICONDUCTOR PROCESS DEVICE [patent_app_type] => utility [patent_app_number] => 18/253423 [patent_app_country] => US [patent_app_date] => 2021-11-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5600 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18253423 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/253423
PROCESS CHAMBER AND SEMICONDUCTOR PROCESS DEVICE Nov 16, 2021 Pending
Array ( [id] => 17830597 [patent_doc_number] => 20220267901 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-25 [patent_title] => WAFER-HOLDING DEVICE AND DEPOSITION EQUIPMENT USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/517441 [patent_app_country] => US [patent_app_date] => 2021-11-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5516 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17517441 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/517441
WAFER-HOLDING DEVICE AND DEPOSITION EQUIPMENT USING THE SAME Nov 1, 2021 Abandoned
Array ( [id] => 17983027 [patent_doc_number] => 20220349063 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-03 [patent_title] => SEMICONDUCTOR MANUFACTURING APPARATUS HAVING TRANSFER UNIT AND METHOD FOR FORMING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/510496 [patent_app_country] => US [patent_app_date] => 2021-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4679 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17510496 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/510496
SEMICONDUCTOR MANUFACTURING APPARATUS HAVING TRANSFER UNIT AND METHOD FOR FORMING SEMICONDUCTOR DEVICE Oct 25, 2021 Pending
Array ( [id] => 19670790 [patent_doc_number] => 12183559 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-12-31 [patent_title] => Apparatus for temperature control in a substrate processing chamber [patent_app_type] => utility [patent_app_number] => 17/508493 [patent_app_country] => US [patent_app_date] => 2021-10-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4843 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 162 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17508493 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/508493
Apparatus for temperature control in a substrate processing chamber Oct 21, 2021 Issued
Array ( [id] => 19943610 [patent_doc_number] => 12315746 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-05-27 [patent_title] => Bottom cover plate to reduce wafer planar nonuniformity [patent_app_type] => utility [patent_app_number] => 17/508581 [patent_app_country] => US [patent_app_date] => 2021-10-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 26 [patent_no_of_words] => 3384 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17508581 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/508581
Bottom cover plate to reduce wafer planar nonuniformity Oct 21, 2021 Issued
Array ( [id] => 18831221 [patent_doc_number] => 20230399747 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-14 [patent_title] => PEDESTAL HEATER BLOCK HAVING ASYMMETRIC HEATING WIRE STRUCTURE [patent_app_type] => utility [patent_app_number] => 18/248069 [patent_app_country] => US [patent_app_date] => 2021-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5947 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 173 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18248069 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/248069
PEDESTAL HEATER BLOCK HAVING ASYMMETRIC HEATING WIRE STRUCTURE Oct 6, 2021 Pending
Array ( [id] => 18279623 [patent_doc_number] => 20230095095 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-30 [patent_title] => METHOD OF ISOLATING THE CHAMBER VOLUME TO PROCESS VOLUME WITH INTERNAL WAFER TRANSFER CAPABILITY [patent_app_type] => utility [patent_app_number] => 17/486616 [patent_app_country] => US [patent_app_date] => 2021-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12721 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17486616 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/486616
METHOD OF ISOLATING THE CHAMBER VOLUME TO PROCESS VOLUME WITH INTERNAL WAFER TRANSFER CAPABILITY Sep 26, 2021 Pending
Array ( [id] => 18279623 [patent_doc_number] => 20230095095 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-30 [patent_title] => METHOD OF ISOLATING THE CHAMBER VOLUME TO PROCESS VOLUME WITH INTERNAL WAFER TRANSFER CAPABILITY [patent_app_type] => utility [patent_app_number] => 17/486616 [patent_app_country] => US [patent_app_date] => 2021-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12721 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17486616 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/486616
METHOD OF ISOLATING THE CHAMBER VOLUME TO PROCESS VOLUME WITH INTERNAL WAFER TRANSFER CAPABILITY Sep 26, 2021 Pending
Array ( [id] => 17673192 [patent_doc_number] => 20220186359 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-16 [patent_title] => FIXTURE, TRAY AND SPUTTERING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/485170 [patent_app_country] => US [patent_app_date] => 2021-09-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7345 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17485170 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/485170
FIXTURE, TRAY AND SPUTTERING SYSTEM Sep 23, 2021 Abandoned
Array ( [id] => 17339397 [patent_doc_number] => 20220005728 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-06 [patent_title] => WAFER SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS [patent_app_type] => utility [patent_app_number] => 17/478638 [patent_app_country] => US [patent_app_date] => 2021-09-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1861 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17478638 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/478638
WAFER SUSCEPTOR AND CHEMICAL VAPOR DEPOSITION APPARATUS Sep 16, 2021 Abandoned
Array ( [id] => 18712746 [patent_doc_number] => 20230335379 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-19 [patent_title] => PLASMA PROCESSING DEVICE [patent_app_type] => utility [patent_app_number] => 18/027302 [patent_app_country] => US [patent_app_date] => 2021-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3379 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18027302 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/027302
PLASMA PROCESSING DEVICE Sep 15, 2021 Pending
Array ( [id] => 17339380 [patent_doc_number] => 20220005711 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-06 [patent_title] => SYSTEMS FOR PROCESSING ONE OR MORE SEMICONDUCTOR DEVICES, AND RELATED METHODS [patent_app_type] => utility [patent_app_number] => 17/447760 [patent_app_country] => US [patent_app_date] => 2021-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13208 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17447760 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/447760
Systems for processing one or more semiconductor devices, and related methods Sep 14, 2021 Issued
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