Satish Chandra

Array ( [id] => 5891346 [patent_doc_number] => 20060000412 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-05 [patent_title] => 'Systems and apparatus for atomic-layer deposition' [patent_app_type] => utility [patent_app_number] => 11/215451 [patent_app_country] => US [patent_app_date] => 2005-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3981 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20060000412.pdf [firstpage_image] =>[orig_patent_app_number] => 11215451 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5907012 [patent_doc_number] => 20060124061 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-15 [patent_title] => 'Molecule supply source for use in thin-film forming' [patent_app_type] => utility [patent_app_number] => 11/205734 [patent_app_country] => US [patent_app_date] => 2005-08-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4708 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0124/20060124061.pdf [firstpage_image] =>[orig_patent_app_number] => 11205734 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5796059 [patent_doc_number] => 20060032736 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-16 [patent_title] => 'Deformation reduction at the main chamber' [patent_app_type] => utility [patent_app_number] => 11/200886 [patent_app_country] => US [patent_app_date] => 2005-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2122 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0032/20060032736.pdf [firstpage_image] =>[orig_patent_app_number] => 11200886 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7710880 [patent_doc_number] => 08092598 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2012-01-10 [patent_title] => 'Apparatus and method for thin film deposition' [patent_app_type] => utility [patent_app_number] => 10/559944 [patent_app_country] => US [patent_app_date] => 2005-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 7413 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 392 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/08/092/08092598.pdf [firstpage_image] =>[orig_patent_app_number] => 10559944 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5817260 [patent_doc_number] => 20060021573 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-02 [patent_title] => 'Vapor deposition systems and methods' [patent_app_type] => utility [patent_app_number] => 11/167570 [patent_app_country] => US [patent_app_date] => 2005-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 30 [patent_figures_cnt] => 30 [patent_no_of_words] => 9193 [patent_no_of_claims] => 60 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0021/20060021573.pdf [firstpage_image] =>[orig_patent_app_number] => 11167570 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6922854 [patent_doc_number] => 20050236109 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-27 [patent_title] => 'Plasma etching apparatus and plasma etching method' [patent_app_type] => utility [patent_app_number] => 11/156477 [patent_app_country] => US [patent_app_date] => 2005-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 11474 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0236/20050236109.pdf [firstpage_image] =>[orig_patent_app_number] => 11156477 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4906339 [patent_doc_number] => 20080017105 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-01-24 [patent_title] => 'Substrate Processing Device' [patent_app_type] => utility [patent_app_number] => 11/579113 [patent_app_country] => US [patent_app_date] => 2005-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4569 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0017/20080017105.pdf [firstpage_image] =>[orig_patent_app_number] => 11579113 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5688492 [patent_doc_number] => 20060286807 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-12-21 [patent_title] => 'Use of active temperature control to provide emmisivity independent wafer temperature' [patent_app_type] => utility [patent_app_number] => 11/156381 [patent_app_country] => US [patent_app_date] => 2005-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 8829 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0286/20060286807.pdf [firstpage_image] =>[orig_patent_app_number] => 11156381 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6928250 [patent_doc_number] => 20050279282 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-22 [patent_title] => 'Method and apparatus for processing a semiconductor substrate' [patent_app_type] => utility [patent_app_number] => 11/155093 [patent_app_country] => US [patent_app_date] => 2005-06-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 8133 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0279/20050279282.pdf [firstpage_image] =>[orig_patent_app_number] => 11155093 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5822962 [patent_doc_number] => 20060060144 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-23 [patent_title] => 'Substrate processing apparatus and method using the same' [patent_app_type] => utility [patent_app_number] => 11/149340 [patent_app_country] => US [patent_app_date] => 2005-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5143 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0060/20060060144.pdf [firstpage_image] =>[orig_patent_app_number] => 11149340 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6928253 [patent_doc_number] => 20050279285 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-22 [patent_title] => 'Phosphor sheet manufacturing apparatus' [patent_app_type] => utility [patent_app_number] => 11/149424 [patent_app_country] => US [patent_app_date] => 2005-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 11088 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0279/20050279285.pdf [firstpage_image] =>[orig_patent_app_number] => 11149424 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6963124 [patent_doc_number] => 20050230048 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-20 [patent_title] => 'Liner for use in processing chamber' [patent_app_type] => utility [patent_app_number] => 11/149226 [patent_app_country] => US [patent_app_date] => 2005-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4374 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0230/20050230048.pdf [firstpage_image] =>[orig_patent_app_number] => 11149226 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4443272 [patent_doc_number] => 07862658 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-01-04 [patent_title] => 'Etching and cleaning methods and etching and cleaning apparatuses used therefor' [patent_app_type] => utility [patent_app_number] => 11/144692 [patent_app_country] => US [patent_app_date] => 2005-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 32 [patent_no_of_words] => 13214 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 278 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/862/07862658.pdf [firstpage_image] =>[orig_patent_app_number] => 11144692 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5883402 [patent_doc_number] => 20060272577 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-12-07 [patent_title] => 'Method and apparatus for decreasing deposition time of a thin film' [patent_app_type] => utility [patent_app_number] => 11/145273 [patent_app_country] => US [patent_app_date] => 2005-06-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4430 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0272/20060272577.pdf [firstpage_image] =>[orig_patent_app_number] => 11145273 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5862410 [patent_doc_number] => 20060096540 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-11 [patent_title] => 'Apparatus to manufacture semiconductor' [patent_app_type] => utility [patent_app_number] => 11/142246 [patent_app_country] => US [patent_app_date] => 2005-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2910 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0096/20060096540.pdf [firstpage_image] =>[orig_patent_app_number] => 11142246 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5888240 [patent_doc_number] => 20060275537 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-12-07 [patent_title] => 'Method and apparatus for field-emission high-pressure-discharge laser chemical vapor deposition of free-standing structures' [patent_app_type] => utility [patent_app_number] => 11/143179 [patent_app_country] => US [patent_app_date] => 2005-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5788 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0275/20060275537.pdf [firstpage_image] =>[orig_patent_app_number] => 11143179 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4438950 [patent_doc_number] => 07927423 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2011-04-19 [patent_title] => 'Vapor deposition of anti-stiction layer for micromechanical devices' [patent_app_type] => utility [patent_app_number] => 11/136922 [patent_app_country] => US [patent_app_date] => 2005-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 3252 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 225 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/927/07927423.pdf [firstpage_image] =>[orig_patent_app_number] => 11136922 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9375030 [patent_doc_number] => 08679287 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-03-25 [patent_title] => 'Method and apparatus for preventing ALD reactants from damaging vacuum pumps' [patent_app_type] => utility [patent_app_number] => 11/136610 [patent_app_country] => US [patent_app_date] => 2005-05-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4698 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 174 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 11136610 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5764400 [patent_doc_number] => 20050263072 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-01 [patent_title] => 'Uniformity control for low flow process and chamber to chamber matching' [patent_app_type] => utility [patent_app_number] => 11/130554 [patent_app_country] => US [patent_app_date] => 2005-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3741 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0263/20050263072.pdf [firstpage_image] =>[orig_patent_app_number] => 11130554 [rel_patent_id] =>[rel_patent_doc_number] =>)