Scott M. Richey

Array ( [id] => 405379 [patent_doc_number] => 07289214 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2007-10-30 [patent_title] => 'System and method for measuring overlay alignment using diffraction gratings' [patent_app_type] => utility [patent_app_number] => 10/997210 [patent_app_country] => US [patent_app_date] => 2004-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 17 [patent_no_of_words] => 5000 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 198 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/289/07289214.pdf [firstpage_image] =>[orig_patent_app_number] => 10997210 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7141500 [patent_doc_number] => 20050117168 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-02 [patent_title] => 'Measuring method and apparatus using shearing interferometry, exposure method and apparatus using the same, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 10/994331 [patent_app_country] => US [patent_app_date] => 2004-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4803 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0117/20050117168.pdf [firstpage_image] =>[orig_patent_app_number] => 10994331 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5746533 [patent_doc_number] => 20060109463 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-25 [patent_title] => 'Latent overlay metrology' [patent_app_type] => utility [patent_app_number] => 10/993416 [patent_app_country] => US [patent_app_date] => 2004-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6452 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0109/20060109463.pdf [firstpage_image] =>[orig_patent_app_number] => 10993416 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 383756 [patent_doc_number] => 07307708 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-12-11 [patent_title] => 'Eccentricity measuring method and eccentricity measuring apparatus' [patent_app_type] => utility [patent_app_number] => 10/983605 [patent_app_country] => US [patent_app_date] => 2004-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 10 [patent_no_of_words] => 9720 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 168 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/307/07307708.pdf [firstpage_image] =>[orig_patent_app_number] => 10983605 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 463087 [patent_doc_number] => 07242478 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2007-07-10 [patent_title] => 'Spatially corrected full-cubed hyperspectral imager' [patent_app_type] => utility [patent_app_number] => 10/984561 [patent_app_country] => US [patent_app_date] => 2004-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3443 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/242/07242478.pdf [firstpage_image] =>[orig_patent_app_number] => 10984561 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 405397 [patent_doc_number] => 07289232 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-10-30 [patent_title] => 'Dimension measurement method, method of manufacturing semiconductor device, dimension measurement apparatus and measurement mark' [patent_app_type] => utility [patent_app_number] => 10/980285 [patent_app_country] => US [patent_app_date] => 2004-11-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 22 [patent_no_of_words] => 6742 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 247 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/289/07289232.pdf [firstpage_image] =>[orig_patent_app_number] => 10980285 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5032839 [patent_doc_number] => 20070097378 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-05-03 [patent_title] => 'Interferometer' [patent_app_type] => utility [patent_app_number] => 10/577463 [patent_app_country] => US [patent_app_date] => 2004-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 5243 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0097/20070097378.pdf [firstpage_image] =>[orig_patent_app_number] => 10577463 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 455031 [patent_doc_number] => 07248357 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-07-24 [patent_title] => 'Method and apparatus for optically measuring the heating value of a multi-component fuel gas using nir absorption spectroscopy' [patent_app_type] => utility [patent_app_number] => 10/978320 [patent_app_country] => US [patent_app_date] => 2004-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4100 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 201 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/248/07248357.pdf [firstpage_image] =>[orig_patent_app_number] => 10978320 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 353442 [patent_doc_number] => 07492468 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-02-17 [patent_title] => 'Free-form optical surface measuring apparatus and method' [patent_app_type] => utility [patent_app_number] => 10/573763 [patent_app_country] => US [patent_app_date] => 2004-09-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 8 [patent_no_of_words] => 4840 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 213 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/492/07492468.pdf [firstpage_image] =>[orig_patent_app_number] => 10573763 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5829510 [patent_doc_number] => 20060063989 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-03-23 [patent_title] => 'Compact non-invasive analysis system' [patent_app_type] => utility [patent_app_number] => 10/949917 [patent_app_country] => US [patent_app_date] => 2004-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 3077 [patent_no_of_claims] => 63 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0063/20060063989.pdf [firstpage_image] =>[orig_patent_app_number] => 10949917 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5797480 [patent_doc_number] => 20060033921 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-16 [patent_title] => 'Method and apparatus for angular-resolved spectroscopic lithography characterization' [patent_app_type] => utility [patent_app_number] => 10/918742 [patent_app_country] => US [patent_app_date] => 2004-08-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 6814 [patent_no_of_claims] => 46 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0033/20060033921.pdf [firstpage_image] =>[orig_patent_app_number] => 10918742 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5065552 [patent_doc_number] => 20070186653 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-08-16 [patent_title] => 'Speed measurement' [patent_app_type] => utility [patent_app_number] => 10/566075 [patent_app_country] => US [patent_app_date] => 2004-07-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 7181 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0186/20070186653.pdf [firstpage_image] =>[orig_patent_app_number] => 10566075 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7033460 [patent_doc_number] => 20050031969 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-02-10 [patent_title] => 'Marker structure, mask pattern, alignment method and lithographic method and apparatus' [patent_app_type] => utility [patent_app_number] => 10/887323 [patent_app_country] => US [patent_app_date] => 2004-07-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7924 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0031/20050031969.pdf [firstpage_image] =>[orig_patent_app_number] => 10887323 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 221838 [patent_doc_number] => 07609384 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-10-27 [patent_title] => 'Device for generating a carrier in an interferogram' [patent_app_type] => utility [patent_app_number] => 10/547966 [patent_app_country] => US [patent_app_date] => 2004-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 2466 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 183 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/609/07609384.pdf [firstpage_image] =>[orig_patent_app_number] => 10547966 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 803575 [patent_doc_number] => 07423279 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-09-09 [patent_title] => 'Systems and methods that detect changes in incident optical radiation' [patent_app_type] => utility [patent_app_number] => 10/532453 [patent_app_country] => US [patent_app_date] => 2003-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 12 [patent_no_of_words] => 7413 [patent_no_of_claims] => 44 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/423/07423279.pdf [firstpage_image] =>[orig_patent_app_number] => 10532453 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5767870 [patent_doc_number] => 20060019372 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-01-26 [patent_title] => 'Laser system' [patent_app_type] => utility [patent_app_number] => 10/528662 [patent_app_country] => US [patent_app_date] => 2003-10-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2373 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0019/20060019372.pdf [firstpage_image] =>[orig_patent_app_number] => 10528662 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7053719 [patent_doc_number] => 20050274890 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-15 [patent_title] => 'Detection device' [patent_app_type] => utility [patent_app_number] => 10/524596 [patent_app_country] => US [patent_app_date] => 2003-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 7593 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0274/20050274890.pdf [firstpage_image] =>[orig_patent_app_number] => 10524596 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5818911 [patent_doc_number] => 20060023224 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-02 [patent_title] => 'Method, system and device for measuring the polarisation mode dispersion of an optical fibre' [patent_app_type] => utility [patent_app_number] => 10/520687 [patent_app_country] => US [patent_app_date] => 2003-07-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4919 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0023/20060023224.pdf [firstpage_image] =>[orig_patent_app_number] => 10520687 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7109270 [patent_doc_number] => 20050206724 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-09-22 [patent_title] => 'Device to position liquid crystal panels in a color liquid crystal projector' [patent_app_type] => utility [patent_app_number] => 10/517476 [patent_app_country] => US [patent_app_date] => 2003-05-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4785 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0206/20050206724.pdf [firstpage_image] =>[orig_patent_app_number] => 10517476 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6950675 [patent_doc_number] => 20050225769 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-10-13 [patent_title] => 'Surface profiling apparatus' [patent_app_type] => utility [patent_app_number] => 10/507837 [patent_app_country] => US [patent_app_date] => 2003-03-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 35 [patent_figures_cnt] => 35 [patent_no_of_words] => 17564 [patent_no_of_claims] => 96 [patent_no_of_ind_claims] => 15 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0225/20050225769.pdf [firstpage_image] =>[orig_patent_app_number] => 10507837 [rel_patent_id] =>[rel_patent_doc_number] =>)