
Seth M. Dumbris
Examiner (ID: 13449, Phone: (571)272-5105 , Office: P/1784 )
| Most Active Art Unit | 1784 |
| Art Unit(s) | 1784 |
| Total Applications | 1031 |
| Issued Applications | 693 |
| Pending Applications | 116 |
| Abandoned Applications | 240 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 16986518
[patent_doc_number] => 11073686
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2021-07-27
[patent_title] => Monitoring of MEMS mirror properties
[patent_app_type] => utility
[patent_app_number] => 16/919326
[patent_app_country] => US
[patent_app_date] => 2020-07-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 10
[patent_no_of_words] => 11727
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 129
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16919326
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/919326 | Monitoring of MEMS mirror properties | Jul 1, 2020 | Issued |
Array
(
[id] => 17763039
[patent_doc_number] => 20220236651
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-07-28
[patent_title] => THERMO-MECHANICAL ACTUATOR
[patent_app_type] => utility
[patent_app_number] => 17/629202
[patent_app_country] => US
[patent_app_date] => 2020-06-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9643
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17629202
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/629202 | Thermo-mechanical actuator | Jun 29, 2020 | Issued |
Array
(
[id] => 17245192
[patent_doc_number] => 20210364935
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-11-25
[patent_title] => Non-Orthogonal Target and Method for Using the Same in Measuring Misregistration of Semiconductor Devices
[patent_app_type] => utility
[patent_app_number] => 16/964734
[patent_app_country] => US
[patent_app_date] => 2020-06-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 10142
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -22
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16964734
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/964734 | Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices | Jun 24, 2020 | Issued |
Array
(
[id] => 17515144
[patent_doc_number] => 11294290
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-04-05
[patent_title] => Reticle fabrication method and semiconductor device fabrication method including the same
[patent_app_type] => utility
[patent_app_number] => 16/911819
[patent_app_country] => US
[patent_app_date] => 2020-06-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 16
[patent_no_of_words] => 4436
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 222
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16911819
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/911819 | Reticle fabrication method and semiconductor device fabrication method including the same | Jun 24, 2020 | Issued |
Array
(
[id] => 17301243
[patent_doc_number] => 20210397082
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-12-23
[patent_title] => SYSTEMS AND METHODS FOR GENERATING DROP PATTERNS
[patent_app_type] => utility
[patent_app_number] => 16/906805
[patent_app_country] => US
[patent_app_date] => 2020-06-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 16542
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 177
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16906805
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/906805 | Systems and methods for generating drop patterns | Jun 18, 2020 | Issued |
Array
(
[id] => 16542862
[patent_doc_number] => 20200409277
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-12-31
[patent_title] => MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
[patent_app_type] => utility
[patent_app_number] => 16/906299
[patent_app_country] => US
[patent_app_date] => 2020-06-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9362
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -12
[patent_words_short_claim] => 88
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16906299
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/906299 | Measurement apparatus, lithography apparatus, and method of manufacturing article | Jun 18, 2020 | Issued |
Array
(
[id] => 18802713
[patent_doc_number] => 11835870
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-12-05
[patent_title] => Temperature conditioning system
[patent_app_type] => utility
[patent_app_number] => 17/627720
[patent_app_country] => US
[patent_app_date] => 2020-06-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 19
[patent_no_of_words] => 12224
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 147
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17627720
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/627720 | Temperature conditioning system | Jun 17, 2020 | Issued |
Array
(
[id] => 19061509
[patent_doc_number] => 11940738
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-03-26
[patent_title] => Droplet splash control for extreme ultra violet photolithography
[patent_app_type] => utility
[patent_app_number] => 16/902085
[patent_app_country] => US
[patent_app_date] => 2020-06-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 7853
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 108
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16902085
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/902085 | Droplet splash control for extreme ultra violet photolithography | Jun 14, 2020 | Issued |
Array
(
[id] => 18370338
[patent_doc_number] => 11650508
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-05-16
[patent_title] => Plasma position control for extreme ultraviolet lithography light sources
[patent_app_type] => utility
[patent_app_number] => 16/900735
[patent_app_country] => US
[patent_app_date] => 2020-06-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 6087
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 172
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16900735
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/900735 | Plasma position control for extreme ultraviolet lithography light sources | Jun 11, 2020 | Issued |
Array
(
[id] => 17939989
[patent_doc_number] => 11474439
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-10-18
[patent_title] => Exposure apparatus, exposure method, and method of manufacturing article
[patent_app_type] => utility
[patent_app_number] => 16/900209
[patent_app_country] => US
[patent_app_date] => 2020-06-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 17
[patent_no_of_words] => 7858
[patent_no_of_claims] => 32
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 191
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16900209
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/900209 | Exposure apparatus, exposure method, and method of manufacturing article | Jun 11, 2020 | Issued |
Array
(
[id] => 16330305
[patent_doc_number] => 20200301271
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-09-24
[patent_title] => PATTERN FORMATION METHOD, LITHOGRAPHY APPARATUS, LITHOGRAPHY SYSTEM, AND ARTICLE MANUFACTURING METHOD
[patent_app_type] => utility
[patent_app_number] => 16/898739
[patent_app_country] => US
[patent_app_date] => 2020-06-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8441
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -15
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16898739
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/898739 | Pattern formation method, lithography apparatus, lithography system, and article manufacturing method | Jun 10, 2020 | Issued |
Array
(
[id] => 18561168
[patent_doc_number] => 11726411
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-08-15
[patent_title] => Substrate shape measuring device, substrate handling device, substrate shape measuring unit and method to handle substrates
[patent_app_type] => utility
[patent_app_number] => 17/625467
[patent_app_country] => US
[patent_app_date] => 2020-06-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 9
[patent_no_of_words] => 9074
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 189
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17625467
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/625467 | Substrate shape measuring device, substrate handling device, substrate shape measuring unit and method to handle substrates | Jun 7, 2020 | Issued |
Array
(
[id] => 17961734
[patent_doc_number] => 20220342315
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-10-27
[patent_title] => A LITHOGRAPHIC APPARATUS
[patent_app_type] => utility
[patent_app_number] => 17/621472
[patent_app_country] => US
[patent_app_date] => 2020-06-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 13002
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17621472
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/621472 | Lithographic apparatus | Jun 4, 2020 | Issued |
Array
(
[id] => 16299432
[patent_doc_number] => 20200285155
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-09-10
[patent_title] => Projection System and Mirror and Radiation Source for a Lithographic Apparatus
[patent_app_type] => utility
[patent_app_number] => 16/881109
[patent_app_country] => US
[patent_app_date] => 2020-05-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8578
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -7
[patent_words_short_claim] => 82
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16881109
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/881109 | Projection system and mirror and radiation source for a lithographic apparatus | May 21, 2020 | Issued |
Array
(
[id] => 16299431
[patent_doc_number] => 20200285154
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-09-10
[patent_title] => EXTRACTION BODY FOR LITHOGRAPHIC APPARATUS
[patent_app_type] => utility
[patent_app_number] => 16/879961
[patent_app_country] => US
[patent_app_date] => 2020-05-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 13711
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16879961
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/879961 | Extraction body for lithographic apparatus | May 20, 2020 | Issued |
Array
(
[id] => 16299437
[patent_doc_number] => 20200285160
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-09-10
[patent_title] => MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND CONTROL METHOD, OVERLAY MEASUREMENT METHOD AND DEVICE MANUFACTURING METHOD
[patent_app_type] => utility
[patent_app_number] => 16/878963
[patent_app_country] => US
[patent_app_date] => 2020-05-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 28984
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -42
[patent_words_short_claim] => 160
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16878963
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/878963 | Measurement device, lithography system and exposure apparatus, and control method, overlay measurement method and device manufacturing method | May 19, 2020 | Issued |
Array
(
[id] => 17763037
[patent_doc_number] => 20220236649
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-07-28
[patent_title] => SPLIT DOUBLE SIDED WAFER AND RETICLE CLAMPS
[patent_app_type] => utility
[patent_app_number] => 17/613972
[patent_app_country] => US
[patent_app_date] => 2020-05-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12671
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 36
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17613972
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/613972 | SPLIT DOUBLE SIDED WAFER AND RETICLE CLAMPS | May 10, 2020 | Pending |
Array
(
[id] => 16239975
[patent_doc_number] => 20200257209
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-08-13
[patent_title] => MEASUREMENT DEVICE, LITHOGRAPHY SYSTEM AND EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
[patent_app_type] => utility
[patent_app_number] => 16/864250
[patent_app_country] => US
[patent_app_date] => 2020-05-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 24301
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -27
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16864250
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/864250 | Measurement device, lithography system and exposure apparatus, and device manufacturing method | Apr 30, 2020 | Issued |
Array
(
[id] => 18414480
[patent_doc_number] => 11669019
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-06-06
[patent_title] => Method for determining stochastic variation associated with desired pattern
[patent_app_type] => utility
[patent_app_number] => 17/610481
[patent_app_country] => US
[patent_app_date] => 2020-04-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 21
[patent_figures_cnt] => 25
[patent_no_of_words] => 26743
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 135
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17610481
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/610481 | Method for determining stochastic variation associated with desired pattern | Apr 27, 2020 | Issued |
Array
(
[id] => 17337765
[patent_doc_number] => 20220004096
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-01-06
[patent_title] => SYSTEMS AND METHODS FOR FEEDFORWARD PROCESS CONTROL IN THE MANUFACTURE OF SEMICONDUCTOR DEVICES
[patent_app_type] => utility
[patent_app_number] => 16/766807
[patent_app_country] => US
[patent_app_date] => 2020-04-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 3553
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 97
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16766807
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/766807 | Systems and methods for feedforward process control in the manufacture of semiconductor devices | Apr 22, 2020 | Issued |