Shane D. Woolwine

Array ( [id] => 15803651 [patent_doc_number] => 20200124968 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-23 [patent_title] => METHOD AND SYSTEM TO MONITOR A PROCESS APPARATUS [patent_app_type] => utility [patent_app_number] => 16/722557 [patent_app_country] => US [patent_app_date] => 2019-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 30152 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16722557 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16094411 [patent_doc_number] => 20200201192 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-25 [patent_title] => Methods and Apparatus for Metrology [patent_app_type] => utility [patent_app_number] => 16/720411 [patent_app_country] => US [patent_app_date] => 2019-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13582 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16720411 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17536651 [patent_doc_number] => 20220115260 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-14 [patent_title] => SUBSTRATE HOLDER FOR USE IN A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 17/421085 [patent_app_country] => US [patent_app_date] => 2019-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5113 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17421085 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 15803691 [patent_doc_number] => 20200124988 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-04-23 [patent_title] => MOVABLE BODY APPARATUS, EXPOSURE APPARATUS, MANUFACTURING METHOD OF FLAT PANEL DISPLAY, AND DEVICE MANUFACTURING METHOD [patent_app_type] => utility [patent_app_number] => 16/713603 [patent_app_country] => US [patent_app_date] => 2019-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10360 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 169 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16713603 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17514734 [patent_doc_number] => 11293877 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-04-05 [patent_title] => Defect detecting device and defect detecting method [patent_app_type] => utility [patent_app_number] => 16/713835 [patent_app_country] => US [patent_app_date] => 2019-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 7183 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 236 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16713835 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17445822 [patent_doc_number] => 20220066327 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => IMPROVED IMAGING VIA ZEROTH ORDER SUPPRESSION [patent_app_type] => utility [patent_app_number] => 17/415101 [patent_app_country] => US [patent_app_date] => 2019-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 41542 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17415101 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18135810 [patent_doc_number] => 11561480 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-24 [patent_title] => System and method for inspecting a wafer [patent_app_type] => utility [patent_app_number] => 16/712397 [patent_app_country] => US [patent_app_date] => 2019-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 7855 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16712397 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17401266 [patent_doc_number] => 20220043356 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-10 [patent_title] => DETERMINING PATTERN RANKING BASED ON MEASUREMENT FEEDBACK FROM PRINTED SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/312709 [patent_app_country] => US [patent_app_date] => 2019-12-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 29433 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17312709 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18118826 [patent_doc_number] => 11550216 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-01-10 [patent_title] => Systems and methods for curing a shaped film [patent_app_type] => utility [patent_app_number] => 16/693599 [patent_app_country] => US [patent_app_date] => 2019-11-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 30 [patent_no_of_words] => 8050 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16693599 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17529892 [patent_doc_number] => 11302590 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-04-12 [patent_title] => Delivery of light into a vacuum chamber using an optical fiber [patent_app_type] => utility [patent_app_number] => 16/691843 [patent_app_country] => US [patent_app_date] => 2019-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4438 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16691843 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17136142 [patent_doc_number] => 11137693 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-10-05 [patent_title] => Pellicle holder, pellicle inspection apparatus, and pellicle inspection method [patent_app_type] => utility [patent_app_number] => 16/690254 [patent_app_country] => US [patent_app_date] => 2019-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 6747 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16690254 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17468842 [patent_doc_number] => 11275319 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-03-15 [patent_title] => Lithography apparatus, determination method, and method of manufacturing an article [patent_app_type] => utility [patent_app_number] => 16/691334 [patent_app_country] => US [patent_app_date] => 2019-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 15 [patent_no_of_words] => 9668 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 194 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16691334 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16075475 [patent_doc_number] => 20200191724 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-18 [patent_title] => OPTICAL DETECTING DEVICE AND CALIBRATING METHOD [patent_app_type] => utility [patent_app_number] => 16/687709 [patent_app_country] => US [patent_app_date] => 2019-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4586 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 120 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16687709 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18291015 [patent_doc_number] => 11619884 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-04-04 [patent_title] => Method for adjusting a target feature in a model of a patterning process based on local electric fields [patent_app_type] => utility [patent_app_number] => 17/298640 [patent_app_country] => US [patent_app_date] => 2019-11-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 22 [patent_no_of_words] => 20043 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17298640 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16423401 [patent_doc_number] => 20200348599 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-05 [patent_title] => FABRICATION SYSTEM OF SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING A SEMICONDUCTOR DEVICE USING THE SAME [patent_app_type] => utility [patent_app_number] => 16/676588 [patent_app_country] => US [patent_app_date] => 2019-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5784 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16676588 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19092388 [patent_doc_number] => 11953837 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-04-09 [patent_title] => Method, substrate and system for estimating stress in a substrate [patent_app_type] => utility [patent_app_number] => 17/423818 [patent_app_country] => US [patent_app_date] => 2019-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 10616 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17423818 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17351923 [patent_doc_number] => 11226554 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-01-18 [patent_title] => Imprint apparatus and product manufacturing method [patent_app_type] => utility [patent_app_number] => 16/673804 [patent_app_country] => US [patent_app_date] => 2019-11-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 23 [patent_no_of_words] => 12132 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 209 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16673804 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16493894 [patent_doc_number] => 10859930 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-12-08 [patent_title] => Methods and apparatus for calculating substrate model parameters and controlling lithographic processing [patent_app_type] => utility [patent_app_number] => 16/665022 [patent_app_country] => US [patent_app_date] => 2019-10-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 10911 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16665022 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17422729 [patent_doc_number] => 11256182 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-02-22 [patent_title] => Process for cleaning optical elements for the ultraviolet wavelength range [patent_app_type] => utility [patent_app_number] => 16/665615 [patent_app_country] => US [patent_app_date] => 2019-10-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 5861 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16665615 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17714903 [patent_doc_number] => 11378894 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-07-05 [patent_title] => Lithography system with an embedded cleaning module [patent_app_type] => utility [patent_app_number] => 16/665585 [patent_app_country] => US [patent_app_date] => 2019-10-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 18 [patent_no_of_words] => 6698 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 179 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16665585 [rel_patent_id] =>[rel_patent_doc_number] =>)