Search

Stephen Luther Blau

Examiner (ID: 14211, Phone: (571)272-4406 , Office: P/3711 )

Most Active Art Unit
3711
Art Unit(s)
3304, 3711
Total Applications
2532
Issued Applications
1715
Pending Applications
84
Abandoned Applications
734

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18827633 [patent_doc_number] => 11842923 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-12 [patent_title] => Methods for forming elongated contact hole ends [patent_app_type] => utility [patent_app_number] => 17/744050 [patent_app_country] => US [patent_app_date] => 2022-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 17 [patent_no_of_words] => 3651 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17744050 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/744050
Methods for forming elongated contact hole ends May 12, 2022 Issued
Array ( [id] => 19536877 [patent_doc_number] => 12129418 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-10-29 [patent_title] => Selective etchant compositions and methods [patent_app_type] => utility [patent_app_number] => 17/743080 [patent_app_country] => US [patent_app_date] => 2022-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6345 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17743080 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/743080
Selective etchant compositions and methods May 11, 2022 Issued
Array ( [id] => 17810809 [patent_doc_number] => 20220262644 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-18 [patent_title] => SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF [patent_app_type] => utility [patent_app_number] => 17/738030 [patent_app_country] => US [patent_app_date] => 2022-05-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7345 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 117 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17738030 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/738030
Semiconductor device and manufacturing method thereof May 5, 2022 Issued
Array ( [id] => 18743294 [patent_doc_number] => 20230352282 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-02 [patent_title] => AUTONOMOUS OPERATION OF PLASMA PROCESSING TOOL [patent_app_type] => utility [patent_app_number] => 17/730751 [patent_app_country] => US [patent_app_date] => 2022-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10337 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17730751 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/730751
Autonomous operation of plasma processing tool Apr 26, 2022 Issued
Array ( [id] => 19260877 [patent_doc_number] => 12020942 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-06-25 [patent_title] => Etching method [patent_app_type] => utility [patent_app_number] => 17/728524 [patent_app_country] => US [patent_app_date] => 2022-04-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 29 [patent_no_of_words] => 28315 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17728524 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/728524
Etching method Apr 24, 2022 Issued
Array ( [id] => 18888066 [patent_doc_number] => 11866831 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-01-09 [patent_title] => Methods for wet atomic layer etching of copper [patent_app_type] => utility [patent_app_number] => 17/725072 [patent_app_country] => US [patent_app_date] => 2022-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 20 [patent_no_of_words] => 12569 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 168 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17725072 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/725072
Methods for wet atomic layer etching of copper Apr 19, 2022 Issued
Array ( [id] => 18712768 [patent_doc_number] => 20230335401 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-19 [patent_title] => ION IMPLANTATION METHOD FOR REDUCING ROUGHNESS OF PATTERNED RESIST LINES [patent_app_type] => utility [patent_app_number] => 17/659283 [patent_app_country] => US [patent_app_date] => 2022-04-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8187 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17659283 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/659283
Ion implantation method for reducing roughness of patterned resist lines Apr 13, 2022 Issued
Array ( [id] => 19234166 [patent_doc_number] => 20240191359 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-06-13 [patent_title] => ETCHING METHOD AND PROCESSING DEVICE [patent_app_type] => utility [patent_app_number] => 18/554225 [patent_app_country] => US [patent_app_date] => 2022-04-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5022 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18554225 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/554225
ETCHING METHOD AND PROCESSING DEVICE Apr 3, 2022 Pending
Array ( [id] => 19389678 [patent_doc_number] => 20240279548 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-08-22 [patent_title] => ETCHING SOLUTION COMPOSITION [patent_app_type] => utility [patent_app_number] => 18/569249 [patent_app_country] => US [patent_app_date] => 2022-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9638 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18569249 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/569249
ETCHING SOLUTION COMPOSITION Mar 29, 2022 Pending
Array ( [id] => 17930015 [patent_doc_number] => 20220325140 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-13 [patent_title] => COMPOSITION FOR SURFACE TREATMENT, SURFACE TREATMENT METHOD, AND METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/707003 [patent_app_country] => US [patent_app_date] => 2022-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10910 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17707003 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/707003
COMPOSITION FOR SURFACE TREATMENT, SURFACE TREATMENT METHOD, AND METHOD FOR PRODUCING SEMICONDUCTOR SUBSTRATE Mar 28, 2022 Pending
Array ( [id] => 17708549 [patent_doc_number] => 20220208557 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, RECORDING MEDIUM, AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/698593 [patent_app_country] => US [patent_app_date] => 2022-03-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11147 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 33 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17698593 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/698593
Method of processing substrate, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus Mar 17, 2022 Issued
Array ( [id] => 17882905 [patent_doc_number] => 20220298382 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-22 [patent_title] => CMP SLURRY COMPOSITION FOR POLISHING TUNGSTEN PATTERN WAFER AND METHOD OF POLISHING TUNGSTEN PATTERN WAFER USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/695022 [patent_app_country] => US [patent_app_date] => 2022-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4691 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 37 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17695022 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/695022
CMP slurry composition for polishing tungsten pattern wafer and method of polishing tungsten pattern wafer using the same Mar 14, 2022 Issued
Array ( [id] => 17882904 [patent_doc_number] => 20220298381 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-22 [patent_title] => CMP SLURRY COMPOSITION FOR POLISHING TUNGSTEN PATTERN WAFER AND METHOD OF POLISHING TUNGSTEN PATTERN WAFER USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/695006 [patent_app_country] => US [patent_app_date] => 2022-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4134 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 28 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17695006 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/695006
CMP SLURRY COMPOSITION FOR POLISHING TUNGSTEN PATTERN WAFER AND METHOD OF POLISHING TUNGSTEN PATTERN WAFER USING THE SAME Mar 14, 2022 Abandoned
Array ( [id] => 17687954 [patent_doc_number] => 20220195246 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-23 [patent_title] => CHEMICAL MECHANICAL POLISHING SLURRY COMPOSITION AND METHOD OF POLISHING METAL LAYER [patent_app_type] => utility [patent_app_number] => 17/688869 [patent_app_country] => US [patent_app_date] => 2022-03-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5691 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17688869 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/688869
Chemical mechanical polishing slurry composition and method of polishing metal layer Mar 6, 2022 Issued
Array ( [id] => 19014501 [patent_doc_number] => 11921428 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-03-05 [patent_title] => Substrate processing method and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/680396 [patent_app_country] => US [patent_app_date] => 2022-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 50 [patent_no_of_words] => 13157 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 257 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17680396 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/680396
Substrate processing method and substrate processing apparatus Feb 24, 2022 Issued
Array ( [id] => 17855123 [patent_doc_number] => 20220285166 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-08 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/652320 [patent_app_country] => US [patent_app_date] => 2022-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10258 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 172 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17652320 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/652320
Substrate processing method and substrate processing apparatus Feb 23, 2022 Issued
Array ( [id] => 18469089 [patent_doc_number] => 20230203373 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => ETCHANT COMPOSITION FOR PRODUCING GRAPHENE WITH LOW SHEET RESISTANCE [patent_app_type] => utility [patent_app_number] => 17/678377 [patent_app_country] => US [patent_app_date] => 2022-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2671 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 29 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17678377 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/678377
ETCHANT COMPOSITION FOR PRODUCING GRAPHENE WITH LOW SHEET RESISTANCE Feb 22, 2022 Abandoned
Array ( [id] => 18653056 [patent_doc_number] => 20230298896 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-21 [patent_title] => METAL-BASED LINER PROTECTION FOR HIGH ASPECT RATIO PLASMA ETCH [patent_app_type] => utility [patent_app_number] => 18/003877 [patent_app_country] => US [patent_app_date] => 2022-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17858 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -24 [patent_words_short_claim] => 110 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18003877 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/003877
METAL-BASED LINER PROTECTION FOR HIGH ASPECT RATIO PLASMA ETCH Feb 21, 2022 Abandoned
Array ( [id] => 17658855 [patent_doc_number] => 20220179320 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-09 [patent_title] => STORAGE CONTAINER STORING TREATMENT LIQUID FOR MANUFACTURING SEMICONDUCTOR [patent_app_type] => utility [patent_app_number] => 17/676235 [patent_app_country] => US [patent_app_date] => 2022-02-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 33202 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17676235 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/676235
Storage container storing treatment liquid for manufacturing semiconductor Feb 20, 2022 Issued
Array ( [id] => 18779225 [patent_doc_number] => 11820919 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-11-21 [patent_title] => Ruthenium CMP chemistry based on halogenation [patent_app_type] => utility [patent_app_number] => 17/674593 [patent_app_country] => US [patent_app_date] => 2022-02-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 5179 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17674593 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/674593
Ruthenium CMP chemistry based on halogenation Feb 16, 2022 Issued
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