Search

Sylvia Macarthur

Examiner (ID: 9146, Phone: (571)272-1438 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1763, 1716, 1792
Total Applications
1444
Issued Applications
898
Pending Applications
104
Abandoned Applications
457

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 17874714 [patent_doc_number] => 11446712 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-09-20 [patent_title] => System for cleaning wafer in CMP process of semiconductor manufacturing fabrication [patent_app_type] => utility [patent_app_number] => 17/095938 [patent_app_country] => US [patent_app_date] => 2020-11-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 13 [patent_no_of_words] => 6159 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17095938 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/095938
System for cleaning wafer in CMP process of semiconductor manufacturing fabrication Nov 11, 2020 Issued
Array ( [id] => 18097356 [patent_doc_number] => 20220415697 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-29 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/778895 [patent_app_country] => US [patent_app_date] => 2020-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14314 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 224 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17778895 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/778895
Substrate processing apparatus Nov 4, 2020 Issued
Array ( [id] => 17277851 [patent_doc_number] => 20210384049 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-09 [patent_title] => System and Method for Wet Chemical Etching in Semiconductor Processing [patent_app_type] => utility [patent_app_number] => 17/088339 [patent_app_country] => US [patent_app_date] => 2020-11-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6481 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 118 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17088339 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/088339
System and Method for Wet Chemical Etching in Semiconductor Processing Nov 2, 2020 Abandoned
Array ( [id] => 20760202 [patent_doc_number] => 12652997 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-06-09 [patent_title] => Coin-slot and ball-lock ceramic lift pin holders [patent_app_type] => utility [patent_app_number] => 17/776636 [patent_app_country] => US [patent_app_date] => 2020-10-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 15 [patent_no_of_words] => 4597 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17776636 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/776636
Coin-slot and ball-lock ceramic lift pin holders Oct 27, 2020 Issued
Array ( [id] => 16781622 [patent_doc_number] => 20210118701 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-22 [patent_title] => SUBSTRATE TREATMENT APPARATUS [patent_app_type] => utility [patent_app_number] => 17/073342 [patent_app_country] => US [patent_app_date] => 2020-10-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4705 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17073342 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/073342
Substrate treatment apparatus Oct 16, 2020 Issued
Array ( [id] => 19670844 [patent_doc_number] => 12183613 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-12-31 [patent_title] => Substrate processing system and substrate processing method [patent_app_type] => utility [patent_app_number] => 17/061967 [patent_app_country] => US [patent_app_date] => 2020-10-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 10122 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 294 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17061967 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/061967
Substrate processing system and substrate processing method Oct 1, 2020 Issued
Array ( [id] => 18219472 [patent_doc_number] => 11594421 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-02-28 [patent_title] => Substrate treating apparatus and substrate treating method [patent_app_type] => utility [patent_app_number] => 17/030514 [patent_app_country] => US [patent_app_date] => 2020-09-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 11 [patent_no_of_words] => 4760 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17030514 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/030514
Substrate treating apparatus and substrate treating method Sep 23, 2020 Issued
Array ( [id] => 17485939 [patent_doc_number] => 20220093443 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-24 [patent_title] => SUSCEPTOR WAFER CHUCKS FOR BOWED WAFERS [patent_app_type] => utility [patent_app_number] => 17/029648 [patent_app_country] => US [patent_app_date] => 2020-09-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7977 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 185 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17029648 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/029648
Susceptor wafer chucks for bowed wafers Sep 22, 2020 Issued
Array ( [id] => 16677311 [patent_doc_number] => 20210066077 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-04 [patent_title] => APPARATUS AND METHOD FOR TREATING SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/004079 [patent_app_country] => US [patent_app_date] => 2020-08-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7415 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 115 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17004079 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/004079
APPARATUS AND METHOD FOR TREATING SUBSTRATE Aug 26, 2020 Abandoned
Array ( [id] => 16627951 [patent_doc_number] => 20210046604 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-18 [patent_title] => APPARATUS AND METHOD FOR CMP TEMPERATURE CONTROL [patent_app_type] => utility [patent_app_number] => 16/989734 [patent_app_country] => US [patent_app_date] => 2020-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6372 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16989734 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/989734
Apparatus and method for CMP temperature control Aug 9, 2020 Issued
Array ( [id] => 16715590 [patent_doc_number] => 20210082737 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-18 [patent_title] => EDGE RING AND HEAT TREATMENT APPARATUS HAVING THE SAME [patent_app_type] => utility [patent_app_number] => 16/989864 [patent_app_country] => US [patent_app_date] => 2020-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7622 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16989864 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/989864
Edge ring and heat treatment apparatus having the same Aug 9, 2020 Issued
Array ( [id] => 16469888 [patent_doc_number] => 20200371425 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-26 [patent_title] => METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKS [patent_app_type] => utility [patent_app_number] => 16/989744 [patent_app_country] => US [patent_app_date] => 2020-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6817 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16989744 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/989744
Method of manufacturing phase shift photo masks Aug 9, 2020 Issued
Array ( [id] => 18874664 [patent_doc_number] => 11862486 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-01-02 [patent_title] => Substrate liquid processing apparatus, substrate liquid processing method and recording medium [patent_app_type] => utility [patent_app_number] => 16/985424 [patent_app_country] => US [patent_app_date] => 2020-08-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 7290 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 343 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16985424 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/985424
Substrate liquid processing apparatus, substrate liquid processing method and recording medium Aug 4, 2020 Issued
Array ( [id] => 16624814 [patent_doc_number] => 20210043467 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-11 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREFOR [patent_app_type] => utility [patent_app_number] => 16/984386 [patent_app_country] => US [patent_app_date] => 2020-08-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5535 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16984386 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/984386
Substrate processing apparatus and manufacturing method therefor Aug 3, 2020 Issued
Array ( [id] => 18979276 [patent_doc_number] => 11904431 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-02-20 [patent_title] => Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing [patent_app_type] => utility [patent_app_number] => 16/942546 [patent_app_country] => US [patent_app_date] => 2020-07-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 7561 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 175 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16942546 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/942546
Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing Jul 28, 2020 Issued
Array ( [id] => 17735147 [patent_doc_number] => 20220220606 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-14 [patent_title] => METHOD AND DEVICE FOR SUBSTRATE PROCESSING [patent_app_type] => utility [patent_app_number] => 17/638736 [patent_app_country] => US [patent_app_date] => 2020-07-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6877 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 156 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17638736 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/638736
Method and device for substrate processing Jul 20, 2020 Issued
Array ( [id] => 16715581 [patent_doc_number] => 20210082728 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-03-18 [patent_title] => SUBSTRATE PROCESSING DEVICE [patent_app_type] => utility [patent_app_number] => 16/931723 [patent_app_country] => US [patent_app_date] => 2020-07-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8061 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16931723 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/931723
Substrate processing device Jul 16, 2020 Issued
Array ( [id] => 16569679 [patent_doc_number] => 20210008685 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-01-14 [patent_title] => CHEMICAL MECHANICAL POLISHING APPARATUS, CHEMICAL MECHANICAL POLISHING METHOD AND METHOD OF MANUFACTURING DISPLAY APPARATUS USING THE SAME [patent_app_type] => utility [patent_app_number] => 16/926034 [patent_app_country] => US [patent_app_date] => 2020-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7824 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16926034 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/926034
CHEMICAL MECHANICAL POLISHING APPARATUS, CHEMICAL MECHANICAL POLISHING METHOD AND METHOD OF MANUFACTURING DISPLAY APPARATUS USING THE SAME Jul 9, 2020 Abandoned
Array ( [id] => 19425364 [patent_doc_number] => 12084767 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-09-10 [patent_title] => Gas-inlet element for a CVD reactor [patent_app_type] => utility [patent_app_number] => 17/626113 [patent_app_country] => US [patent_app_date] => 2020-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 4213 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 219 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17626113 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/626113
Gas-inlet element for a CVD reactor Jul 9, 2020 Issued
Array ( [id] => 17195995 [patent_doc_number] => 11164760 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-02 [patent_title] => Etching apparatus and etching method [patent_app_type] => utility [patent_app_number] => 16/919167 [patent_app_country] => US [patent_app_date] => 2020-07-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 9561 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 428 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16919167 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/919167
Etching apparatus and etching method Jul 1, 2020 Issued
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