
Sylvia Macarthur
Examiner (ID: 9146, Phone: (571)272-1438 , Office: P/1716 )
| Most Active Art Unit | 1716 |
| Art Unit(s) | 1763, 1716, 1792 |
| Total Applications | 1444 |
| Issued Applications | 898 |
| Pending Applications | 104 |
| Abandoned Applications | 457 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 17874714
[patent_doc_number] => 11446712
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2022-09-20
[patent_title] => System for cleaning wafer in CMP process of semiconductor manufacturing fabrication
[patent_app_type] => utility
[patent_app_number] => 17/095938
[patent_app_country] => US
[patent_app_date] => 2020-11-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 13
[patent_no_of_words] => 6159
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 82
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17095938
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/095938 | System for cleaning wafer in CMP process of semiconductor manufacturing fabrication | Nov 11, 2020 | Issued |
Array
(
[id] => 18097356
[patent_doc_number] => 20220415697
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-12-29
[patent_title] => SUBSTRATE PROCESSING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 17/778895
[patent_app_country] => US
[patent_app_date] => 2020-11-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 14314
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -9
[patent_words_short_claim] => 224
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17778895
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/778895 | Substrate processing apparatus | Nov 4, 2020 | Issued |
Array
(
[id] => 17277851
[patent_doc_number] => 20210384049
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-12-09
[patent_title] => System and Method for Wet Chemical Etching in Semiconductor Processing
[patent_app_type] => utility
[patent_app_number] => 17/088339
[patent_app_country] => US
[patent_app_date] => 2020-11-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6481
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 118
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17088339
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/088339 | System and Method for Wet Chemical Etching in Semiconductor Processing | Nov 2, 2020 | Abandoned |
Array
(
[id] => 20760202
[patent_doc_number] => 12652997
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2026-06-09
[patent_title] => Coin-slot and ball-lock ceramic lift pin holders
[patent_app_type] => utility
[patent_app_number] => 17/776636
[patent_app_country] => US
[patent_app_date] => 2020-10-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 15
[patent_no_of_words] => 4597
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 159
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17776636
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/776636 | Coin-slot and ball-lock ceramic lift pin holders | Oct 27, 2020 | Issued |
Array
(
[id] => 16781622
[patent_doc_number] => 20210118701
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-04-22
[patent_title] => SUBSTRATE TREATMENT APPARATUS
[patent_app_type] => utility
[patent_app_number] => 17/073342
[patent_app_country] => US
[patent_app_date] => 2020-10-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4705
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 73
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17073342
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/073342 | Substrate treatment apparatus | Oct 16, 2020 | Issued |
Array
(
[id] => 19670844
[patent_doc_number] => 12183613
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-12-31
[patent_title] => Substrate processing system and substrate processing method
[patent_app_type] => utility
[patent_app_number] => 17/061967
[patent_app_country] => US
[patent_app_date] => 2020-10-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
[patent_figures_cnt] => 13
[patent_no_of_words] => 10122
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 294
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17061967
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/061967 | Substrate processing system and substrate processing method | Oct 1, 2020 | Issued |
Array
(
[id] => 18219472
[patent_doc_number] => 11594421
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-02-28
[patent_title] => Substrate treating apparatus and substrate treating method
[patent_app_type] => utility
[patent_app_number] => 17/030514
[patent_app_country] => US
[patent_app_date] => 2020-09-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 11
[patent_no_of_words] => 4760
[patent_no_of_claims] => 15
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 112
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17030514
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/030514 | Substrate treating apparatus and substrate treating method | Sep 23, 2020 | Issued |
Array
(
[id] => 17485939
[patent_doc_number] => 20220093443
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-03-24
[patent_title] => SUSCEPTOR WAFER CHUCKS FOR BOWED WAFERS
[patent_app_type] => utility
[patent_app_number] => 17/029648
[patent_app_country] => US
[patent_app_date] => 2020-09-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7977
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 185
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17029648
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/029648 | Susceptor wafer chucks for bowed wafers | Sep 22, 2020 | Issued |
Array
(
[id] => 16677311
[patent_doc_number] => 20210066077
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-03-04
[patent_title] => APPARATUS AND METHOD FOR TREATING SUBSTRATE
[patent_app_type] => utility
[patent_app_number] => 17/004079
[patent_app_country] => US
[patent_app_date] => 2020-08-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7415
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 115
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17004079
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/004079 | APPARATUS AND METHOD FOR TREATING SUBSTRATE | Aug 26, 2020 | Abandoned |
Array
(
[id] => 16627951
[patent_doc_number] => 20210046604
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-02-18
[patent_title] => APPARATUS AND METHOD FOR CMP TEMPERATURE CONTROL
[patent_app_type] => utility
[patent_app_number] => 16/989734
[patent_app_country] => US
[patent_app_date] => 2020-08-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6372
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 44
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16989734
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/989734 | Apparatus and method for CMP temperature control | Aug 9, 2020 | Issued |
Array
(
[id] => 16715590
[patent_doc_number] => 20210082737
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-03-18
[patent_title] => EDGE RING AND HEAT TREATMENT APPARATUS HAVING THE SAME
[patent_app_type] => utility
[patent_app_number] => 16/989864
[patent_app_country] => US
[patent_app_date] => 2020-08-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7622
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -9
[patent_words_short_claim] => 97
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16989864
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/989864 | Edge ring and heat treatment apparatus having the same | Aug 9, 2020 | Issued |
Array
(
[id] => 16469888
[patent_doc_number] => 20200371425
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-11-26
[patent_title] => METHOD OF MANUFACTURING PHASE SHIFT PHOTO MASKS
[patent_app_type] => utility
[patent_app_number] => 16/989744
[patent_app_country] => US
[patent_app_date] => 2020-08-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6817
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 131
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16989744
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/989744 | Method of manufacturing phase shift photo masks | Aug 9, 2020 | Issued |
Array
(
[id] => 18874664
[patent_doc_number] => 11862486
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-01-02
[patent_title] => Substrate liquid processing apparatus, substrate liquid processing method and recording medium
[patent_app_type] => utility
[patent_app_number] => 16/985424
[patent_app_country] => US
[patent_app_date] => 2020-08-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 6
[patent_no_of_words] => 7290
[patent_no_of_claims] => 5
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 343
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16985424
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/985424 | Substrate liquid processing apparatus, substrate liquid processing method and recording medium | Aug 4, 2020 | Issued |
Array
(
[id] => 16624814
[patent_doc_number] => 20210043467
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-02-11
[patent_title] => SUBSTRATE PROCESSING APPARATUS AND MANUFACTURING METHOD THEREFOR
[patent_app_type] => utility
[patent_app_number] => 16/984386
[patent_app_country] => US
[patent_app_date] => 2020-08-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5535
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -15
[patent_words_short_claim] => 151
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16984386
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/984386 | Substrate processing apparatus and manufacturing method therefor | Aug 3, 2020 | Issued |
Array
(
[id] => 18979276
[patent_doc_number] => 11904431
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-02-20
[patent_title] => Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing
[patent_app_type] => utility
[patent_app_number] => 16/942546
[patent_app_country] => US
[patent_app_date] => 2020-07-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 10
[patent_no_of_words] => 7561
[patent_no_of_claims] => 13
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 175
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16942546
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/942546 | Method and apparatus for insitu adjustment of wafer slip detection during work piece polishing | Jul 28, 2020 | Issued |
Array
(
[id] => 17735147
[patent_doc_number] => 20220220606
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-07-14
[patent_title] => METHOD AND DEVICE FOR SUBSTRATE PROCESSING
[patent_app_type] => utility
[patent_app_number] => 17/638736
[patent_app_country] => US
[patent_app_date] => 2020-07-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6877
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 156
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17638736
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/638736 | Method and device for substrate processing | Jul 20, 2020 | Issued |
Array
(
[id] => 16715581
[patent_doc_number] => 20210082728
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-03-18
[patent_title] => SUBSTRATE PROCESSING DEVICE
[patent_app_type] => utility
[patent_app_number] => 16/931723
[patent_app_country] => US
[patent_app_date] => 2020-07-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8061
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -19
[patent_words_short_claim] => 152
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16931723
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/931723 | Substrate processing device | Jul 16, 2020 | Issued |
Array
(
[id] => 16569679
[patent_doc_number] => 20210008685
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-01-14
[patent_title] => CHEMICAL MECHANICAL POLISHING APPARATUS, CHEMICAL MECHANICAL POLISHING METHOD AND METHOD OF MANUFACTURING DISPLAY APPARATUS USING THE SAME
[patent_app_type] => utility
[patent_app_number] => 16/926034
[patent_app_country] => US
[patent_app_date] => 2020-07-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7824
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -20
[patent_words_short_claim] => 67
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16926034
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/926034 | CHEMICAL MECHANICAL POLISHING APPARATUS, CHEMICAL MECHANICAL POLISHING METHOD AND METHOD OF MANUFACTURING DISPLAY APPARATUS USING THE SAME | Jul 9, 2020 | Abandoned |
Array
(
[id] => 19425364
[patent_doc_number] => 12084767
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-09-10
[patent_title] => Gas-inlet element for a CVD reactor
[patent_app_type] => utility
[patent_app_number] => 17/626113
[patent_app_country] => US
[patent_app_date] => 2020-07-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 5
[patent_no_of_words] => 4213
[patent_no_of_claims] => 15
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 219
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17626113
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/626113 | Gas-inlet element for a CVD reactor | Jul 9, 2020 | Issued |
Array
(
[id] => 17195995
[patent_doc_number] => 11164760
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2021-11-02
[patent_title] => Etching apparatus and etching method
[patent_app_type] => utility
[patent_app_number] => 16/919167
[patent_app_country] => US
[patent_app_date] => 2020-07-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 16
[patent_no_of_words] => 9561
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 428
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16919167
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/919167 | Etching apparatus and etching method | Jul 1, 2020 | Issued |