Search

Sylvia Macarthur

Examiner (ID: 9146, Phone: (571)272-1438 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1763, 1716, 1792
Total Applications
1444
Issued Applications
898
Pending Applications
104
Abandoned Applications
457

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16088213 [patent_doc_number] => 20200198093 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-25 [patent_title] => SUBSTRATE POLISHING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/784757 [patent_app_country] => US [patent_app_date] => 2020-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11076 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16784757 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/784757
Substrate polishing apparatus Feb 6, 2020 Issued
Array ( [id] => 16397830 [patent_doc_number] => 20200338688 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-29 [patent_title] => METHOD FOR AUTOMATICALLY VERIFYING AND CLEANING LARGE-SIZED PARTICLE COUNTER FOR ANALYZING CMP SLURRY AND VERIFICATION SYSTEM SUITABLE FOR SAME [patent_app_type] => utility [patent_app_number] => 16/777088 [patent_app_country] => US [patent_app_date] => 2020-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7305 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 180 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16777088 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/777088
METHOD FOR AUTOMATICALLY VERIFYING AND CLEANING LARGE-SIZED PARTICLE COUNTER FOR ANALYZING CMP SLURRY AND VERIFICATION SYSTEM SUITABLE FOR SAME Jan 29, 2020 Abandoned
Array ( [id] => 16976724 [patent_doc_number] => 20210220961 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-22 [patent_title] => REMOVABLE TRAY ASSEMBLY FOR CMP SYSTEMS [patent_app_type] => utility [patent_app_number] => 16/746609 [patent_app_country] => US [patent_app_date] => 2020-01-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8301 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16746609 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/746609
Removable tray assembly for CMP systems Jan 16, 2020 Issued
Array ( [id] => 17619379 [patent_doc_number] => 11338409 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-05-24 [patent_title] => Three-zone carrier head and flexible membrane [patent_app_type] => utility [patent_app_number] => 16/741570 [patent_app_country] => US [patent_app_date] => 2020-01-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2987 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 196 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16741570 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/741570
Three-zone carrier head and flexible membrane Jan 12, 2020 Issued
Array ( [id] => 16180321 [patent_doc_number] => 20200227290 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-16 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/737027 [patent_app_country] => US [patent_app_date] => 2020-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11641 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16737027 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/737027
Substrate processing apparatus Jan 7, 2020 Issued
Array ( [id] => 16080489 [patent_doc_number] => 20200194231 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-18 [patent_title] => Radio Frequency Electrode Assembly for Plasma Processing Apparatus, And Plasma Processing Apparatus [patent_app_type] => utility [patent_app_number] => 16/718056 [patent_app_country] => US [patent_app_date] => 2019-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7724 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16718056 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/718056
Radio frequency electrode assembly for plasma processing apparatus, and plasma processing apparatus Dec 16, 2019 Issued
Array ( [id] => 17623136 [patent_doc_number] => 11342199 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-05-24 [patent_title] => Wafer carrier assembly [patent_app_type] => utility [patent_app_number] => 16/716189 [patent_app_country] => US [patent_app_date] => 2019-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4968 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16716189 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/716189
Wafer carrier assembly Dec 15, 2019 Issued
Array ( [id] => 18277023 [patent_doc_number] => 11615971 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-03-28 [patent_title] => Substrate processing apparatus and processing liquid concentration method [patent_app_type] => utility [patent_app_number] => 16/712405 [patent_app_country] => US [patent_app_date] => 2019-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 9 [patent_no_of_words] => 10617 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 201 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16712405 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/712405
Substrate processing apparatus and processing liquid concentration method Dec 11, 2019 Issued
Array ( [id] => 16080597 [patent_doc_number] => 20200194285 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-18 [patent_title] => CATALYST USED FOR CATALYST-REFERRED ETCHING, PROCESSING PAD PROVIDED WITH CATALYST, AND CATALYST-REFERRED ETCHING DEVICE [patent_app_type] => utility [patent_app_number] => 16/696878 [patent_app_country] => US [patent_app_date] => 2019-11-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7147 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16696878 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/696878
CATALYST USED FOR CATALYST-REFERRED ETCHING, PROCESSING PAD PROVIDED WITH CATALYST, AND CATALYST-REFERRED ETCHING DEVICE Nov 25, 2019 Abandoned
Array ( [id] => 15991501 [patent_doc_number] => 20200171621 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-04 [patent_title] => POLISHING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/692092 [patent_app_country] => US [patent_app_date] => 2019-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7858 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16692092 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/692092
Polishing apparatus Nov 21, 2019 Issued
Array ( [id] => 16088207 [patent_doc_number] => 20200198090 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-25 [patent_title] => CMP APPARATUS AND METHOD OF PERFORMING CERIA-BASED CMP PROCESS [patent_app_type] => utility [patent_app_number] => 16/692721 [patent_app_country] => US [patent_app_date] => 2019-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3935 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16692721 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/692721
CMP APPARATUS AND METHOD OF PERFORMING CERIA-BASED CMP PROCESS Nov 21, 2019 Abandoned
Array ( [id] => 18548206 [patent_doc_number] => 11721565 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-08 [patent_title] => Multi-chamber apparatus [patent_app_type] => utility [patent_app_number] => 16/690498 [patent_app_country] => US [patent_app_date] => 2019-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 13 [patent_no_of_words] => 8390 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 165 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16690498 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/690498
Multi-chamber apparatus Nov 20, 2019 Issued
Array ( [id] => 17890150 [patent_doc_number] => 11453097 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-09-27 [patent_title] => Chemical mechanical polishing apparatus and methods [patent_app_type] => utility [patent_app_number] => 16/691581 [patent_app_country] => US [patent_app_date] => 2019-11-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 16 [patent_no_of_words] => 6440 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 138 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16691581 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/691581
Chemical mechanical polishing apparatus and methods Nov 20, 2019 Issued
Array ( [id] => 16987913 [patent_doc_number] => 11075096 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-07-27 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 16/675551 [patent_app_country] => US [patent_app_date] => 2019-11-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 34 [patent_no_of_words] => 11352 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 228 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16675551 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/675551
Substrate processing apparatus Nov 5, 2019 Issued
Array ( [id] => 16421119 [patent_doc_number] => 20200346317 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-05 [patent_title] => CONDITIONER, CHEMICAL MECHANICAL POLISHING APPARATUS INCLUDING THE SAME AND METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE USING THE APPARATUS [patent_app_type] => utility [patent_app_number] => 16/662439 [patent_app_country] => US [patent_app_date] => 2019-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9291 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16662439 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/662439
Conditioner, chemical mechanical polishing apparatus including the same and method of manufacturing a semiconductor device using the apparatus Oct 23, 2019 Issued
Array ( [id] => 16098445 [patent_doc_number] => 20200203209 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-25 [patent_title] => APPARATUS AND SYSTEM FOR WAFER SPIN PROCESS [patent_app_type] => utility [patent_app_number] => 16/661962 [patent_app_country] => US [patent_app_date] => 2019-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1874 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 51 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16661962 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/661962
APPARATUS AND SYSTEM FOR WAFER SPIN PROCESS Oct 22, 2019 Abandoned
Array ( [id] => 18446976 [patent_doc_number] => 11682552 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-06-20 [patent_title] => Apparatus for chemical mechanical polishing process [patent_app_type] => utility [patent_app_number] => 16/659293 [patent_app_country] => US [patent_app_date] => 2019-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 16 [patent_no_of_words] => 8977 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 198 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16659293 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/659293
Apparatus for chemical mechanical polishing process Oct 20, 2019 Issued
Array ( [id] => 19229578 [patent_doc_number] => 12009221 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-06-11 [patent_title] => Performing planarization process controls in semiconductor fabrication [patent_app_type] => utility [patent_app_number] => 16/656393 [patent_app_country] => US [patent_app_date] => 2019-10-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 25 [patent_no_of_words] => 8616 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16656393 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/656393
Performing planarization process controls in semiconductor fabrication Oct 16, 2019 Issued
Array ( [id] => 20111408 [patent_doc_number] => 12362143 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-15 [patent_title] => Plasma processing apparatus and plasma processing method [patent_app_type] => utility [patent_app_number] => 17/288415 [patent_app_country] => US [patent_app_date] => 2019-10-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 12 [patent_no_of_words] => 4510 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 272 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17288415 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/288415
Plasma processing apparatus and plasma processing method Oct 14, 2019 Issued
Array ( [id] => 17816403 [patent_doc_number] => 11422008 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-08-23 [patent_title] => Rotation angle detection apparatus and rotation angle detection method, and substrate processing apparatus and substrate processing method using same [patent_app_type] => utility [patent_app_number] => 16/596001 [patent_app_country] => US [patent_app_date] => 2019-10-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 14 [patent_no_of_words] => 8009 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16596001 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/596001
Rotation angle detection apparatus and rotation angle detection method, and substrate processing apparatus and substrate processing method using same Oct 7, 2019 Issued
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