
Sylvia Macarthur
Examiner (ID: 9146, Phone: (571)272-1438 , Office: P/1716 )
| Most Active Art Unit | 1716 |
| Art Unit(s) | 1763, 1716, 1792 |
| Total Applications | 1444 |
| Issued Applications | 898 |
| Pending Applications | 104 |
| Abandoned Applications | 457 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 18600128
[patent_doc_number] => 20230274929
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-08-31
[patent_title] => METHOD AND SYSTEM FOR CHEMICAL MECHANICAL POLISHING PROCESS
[patent_app_type] => utility
[patent_app_number] => 18/312073
[patent_app_country] => US
[patent_app_date] => 2023-05-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8858
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 63
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18312073
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/312073 | Method and system for chemical mechanical polishing process | May 3, 2023 | Issued |
Array
(
[id] => 19543960
[patent_doc_number] => 20240360996
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-10-31
[patent_title] => ORIFICE SURROUNDED LOW PRESSURE HYDROXYL COMBUSTION
[patent_app_type] => utility
[patent_app_number] => 18/139057
[patent_app_country] => US
[patent_app_date] => 2023-04-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8396
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 144
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18139057
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/139057 | ORIFICE SURROUNDED LOW PRESSURE HYDROXYL COMBUSTION | Apr 24, 2023 | Pending |
Array
(
[id] => 20438951
[patent_doc_number] => 12509779
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-12-30
[patent_title] => Bowl, substrate processing apparatus, and method of manufacturing
[patent_app_type] => utility
[patent_app_number] => 18/302839
[patent_app_country] => US
[patent_app_date] => 2023-04-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 10
[patent_no_of_words] => 0
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 83
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18302839
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/302839 | Bowl, substrate processing apparatus, and method of manufacturing | Apr 18, 2023 | Issued |
Array
(
[id] => 20455924
[patent_doc_number] => 12518985
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2026-01-06
[patent_title] => Wafer heating apparatus and wafer processing apparatus using the same
[patent_app_type] => utility
[patent_app_number] => 18/126933
[patent_app_country] => US
[patent_app_date] => 2023-03-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 0
[patent_no_of_claims] => 16
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 111
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18126933
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/126933 | Wafer heating apparatus and wafer processing apparatus using the same | Mar 26, 2023 | Issued |
Array
(
[id] => 20748450
[patent_doc_number] => 12648393
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2026-06-02
[patent_title] => Temperature regulating apparatus for semiconductor-device manufacturing equipment, and semiconductor-device manufacturing system
[patent_app_type] => utility
[patent_app_number] => 18/189639
[patent_app_country] => US
[patent_app_date] => 2023-03-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 8
[patent_figures_cnt] => 8
[patent_no_of_words] => 2250
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 250
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18189639
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/189639 | Temperature regulating apparatus for semiconductor-device manufacturing equipment, and semiconductor-device manufacturing system | Mar 23, 2023 | Issued |
Array
(
[id] => 20413409
[patent_doc_number] => 12496674
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-12-16
[patent_title] => Gettering layer forming device and processing apparatus
[patent_app_type] => utility
[patent_app_number] => 18/187026
[patent_app_country] => US
[patent_app_date] => 2023-03-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 11
[patent_no_of_words] => 2298
[patent_no_of_claims] => 7
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 232
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18187026
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/187026 | Gettering layer forming device and processing apparatus | Mar 20, 2023 | Issued |
Array
(
[id] => 18661249
[patent_doc_number] => 20230307262
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-09-28
[patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
[patent_app_type] => utility
[patent_app_number] => 18/123793
[patent_app_country] => US
[patent_app_date] => 2023-03-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8278
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -9
[patent_words_short_claim] => 99
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18123793
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/123793 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD | Mar 19, 2023 | Abandoned |
Array
(
[id] => 18570415
[patent_doc_number] => 20230260752
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-08-17
[patent_title] => PLASMA PROCESSING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 18/110470
[patent_app_country] => US
[patent_app_date] => 2023-02-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5515
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 152
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18110470
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/110470 | PLASMA PROCESSING APPARATUS | Feb 15, 2023 | Pending |
Array
(
[id] => 18434963
[patent_doc_number] => 20230182257
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-06-15
[patent_title] => SYSTEM AND METHOD FOR MONITORING CHEMICAL MECHANICAL POLISHING
[patent_app_type] => utility
[patent_app_number] => 18/103321
[patent_app_country] => US
[patent_app_date] => 2023-01-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7115
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 264
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18103321
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/103321 | System and method for monitoring chemical mechanical polishing | Jan 29, 2023 | Issued |
Array
(
[id] => 20534929
[patent_doc_number] => 12551982
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2026-02-17
[patent_title] => Polishing pad and substrate processing apparatus including the same
[patent_app_type] => utility
[patent_app_number] => 18/100937
[patent_app_country] => US
[patent_app_date] => 2023-01-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 14
[patent_no_of_words] => 1236
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 201
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18100937
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/100937 | Polishing pad and substrate processing apparatus including the same | Jan 23, 2023 | Issued |
Array
(
[id] => 20598163
[patent_doc_number] => 12581903
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2026-03-17
[patent_title] => Centering device, centering method, and substrate processing apparatus
[patent_app_type] => utility
[patent_app_number] => 18/157970
[patent_app_country] => US
[patent_app_date] => 2023-01-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 8
[patent_no_of_words] => 2373
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 506
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18157970
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/157970 | Centering device, centering method, and substrate processing apparatus | Jan 22, 2023 | Issued |
Array
(
[id] => 18469385
[patent_doc_number] => 20230203669
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-06-29
[patent_title] => SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
[patent_app_type] => utility
[patent_app_number] => 18/145138
[patent_app_country] => US
[patent_app_date] => 2022-12-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12588
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -9
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18145138
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/145138 | Substrate treating apparatus and substrate treating method | Dec 21, 2022 | Issued |
Array
(
[id] => 18377619
[patent_doc_number] => 20230152706
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-05-18
[patent_title] => IRRADIATING MODULE, AND APPARATUS FOR TREATING SUBSTRATE WITH THE SAME
[patent_app_type] => utility
[patent_app_number] => 17/988811
[patent_app_country] => US
[patent_app_date] => 2022-11-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12804
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 119
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17988811
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/988811 | IRRADIATING MODULE, AND APPARATUS FOR TREATING SUBSTRATE WITH THE SAME | Nov 16, 2022 | Issued |
Array
(
[id] => 19176034
[patent_doc_number] => 20240162008
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-05-16
[patent_title] => METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
[patent_app_type] => utility
[patent_app_number] => 17/988083
[patent_app_country] => US
[patent_app_date] => 2022-11-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9265
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 95
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17988083
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/988083 | METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE | Nov 15, 2022 | Pending |
Array
(
[id] => 19746144
[patent_doc_number] => 20250034709
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2025-01-30
[patent_title] => DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUBSTRATE BY MEANS OF THE PROCESS GAS
[patent_app_type] => utility
[patent_app_number] => 18/713532
[patent_app_country] => US
[patent_app_date] => 2022-11-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6553
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -16
[patent_words_short_claim] => 140
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18713532
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/713532 | Distribution body for distributing a process gas for treating a substrate by means of the process gas | Nov 6, 2022 | Issued |
Array
(
[id] => 19157543
[patent_doc_number] => 20240150250
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-05-09
[patent_title] => SYSTEMS AND METHODS FOR PRODUCING SILICON CARBIDE POWDER
[patent_app_type] => utility
[patent_app_number] => 18/053031
[patent_app_country] => US
[patent_app_date] => 2022-11-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 3560
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 77
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18053031
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/053031 | SYSTEMS AND METHODS FOR PRODUCING SILICON CARBIDE POWDER | Nov 6, 2022 | Pending |
Array
(
[id] => 19305525
[patent_doc_number] => 20240234105
[patent_country] => US
[patent_kind] => A9
[patent_issue_date] => 2024-07-11
[patent_title] => IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOSITION THEREON IN A LARGE PECVD CHAMBER
[patent_app_type] => utility
[patent_app_number] => 17/971205
[patent_app_country] => US
[patent_app_date] => 2022-10-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4571
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 143
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17971205
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/971205 | Impedance control of local areas of a substrate during plasma deposition thereon in a large PECVD chamber | Oct 20, 2022 | Issued |
Array
(
[id] => 19305525
[patent_doc_number] => 20240234105
[patent_country] => US
[patent_kind] => A9
[patent_issue_date] => 2024-07-11
[patent_title] => IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOSITION THEREON IN A LARGE PECVD CHAMBER
[patent_app_type] => utility
[patent_app_number] => 17/971205
[patent_app_country] => US
[patent_app_date] => 2022-10-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4571
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 143
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17971205
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/971205 | Impedance control of local areas of a substrate during plasma deposition thereon in a large PECVD chamber | Oct 20, 2022 | Issued |
Array
(
[id] => 18655138
[patent_doc_number] => 20230300989
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-09-21
[patent_title] => CIRCUIT BOARD ETCHING DEVICE AND METHOD FOR IMPROVING ETCHING FACTOR
[patent_app_type] => utility
[patent_app_number] => 18/046742
[patent_app_country] => US
[patent_app_date] => 2022-10-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 3291
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -9
[patent_words_short_claim] => 146
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18046742
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/046742 | CIRCUIT BOARD ETCHING DEVICE AND METHOD FOR IMPROVING ETCHING FACTOR | Oct 13, 2022 | Abandoned |
Array
(
[id] => 19684520
[patent_doc_number] => 20250003065
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2025-01-02
[patent_title] => METHOD AND APPARATUS FOR GAS AND VAPOR DEPOSITION PRECURSOR DELIVERY HEATER
[patent_app_type] => utility
[patent_app_number] => 18/704824
[patent_app_country] => US
[patent_app_date] => 2022-10-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 15076
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -21
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18704824
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/704824 | METHOD AND APPARATUS FOR GAS AND VAPOR DEPOSITION PRECURSOR DELIVERY HEATER | Oct 12, 2022 | Pending |