Search

Sylvia Macarthur

Examiner (ID: 9146, Phone: (571)272-1438 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1763, 1716, 1792
Total Applications
1444
Issued Applications
898
Pending Applications
104
Abandoned Applications
457

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18600128 [patent_doc_number] => 20230274929 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-31 [patent_title] => METHOD AND SYSTEM FOR CHEMICAL MECHANICAL POLISHING PROCESS [patent_app_type] => utility [patent_app_number] => 18/312073 [patent_app_country] => US [patent_app_date] => 2023-05-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8858 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18312073 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/312073
Method and system for chemical mechanical polishing process May 3, 2023 Issued
Array ( [id] => 19543960 [patent_doc_number] => 20240360996 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-10-31 [patent_title] => ORIFICE SURROUNDED LOW PRESSURE HYDROXYL COMBUSTION [patent_app_type] => utility [patent_app_number] => 18/139057 [patent_app_country] => US [patent_app_date] => 2023-04-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8396 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 144 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18139057 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/139057
ORIFICE SURROUNDED LOW PRESSURE HYDROXYL COMBUSTION Apr 24, 2023 Pending
Array ( [id] => 20438951 [patent_doc_number] => 12509779 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-30 [patent_title] => Bowl, substrate processing apparatus, and method of manufacturing [patent_app_type] => utility [patent_app_number] => 18/302839 [patent_app_country] => US [patent_app_date] => 2023-04-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 0 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18302839 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/302839
Bowl, substrate processing apparatus, and method of manufacturing Apr 18, 2023 Issued
Array ( [id] => 20455924 [patent_doc_number] => 12518985 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-01-06 [patent_title] => Wafer heating apparatus and wafer processing apparatus using the same [patent_app_type] => utility [patent_app_number] => 18/126933 [patent_app_country] => US [patent_app_date] => 2023-03-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 0 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18126933 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/126933
Wafer heating apparatus and wafer processing apparatus using the same Mar 26, 2023 Issued
Array ( [id] => 20748450 [patent_doc_number] => 12648393 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-06-02 [patent_title] => Temperature regulating apparatus for semiconductor-device manufacturing equipment, and semiconductor-device manufacturing system [patent_app_type] => utility [patent_app_number] => 18/189639 [patent_app_country] => US [patent_app_date] => 2023-03-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 2250 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 250 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18189639 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/189639
Temperature regulating apparatus for semiconductor-device manufacturing equipment, and semiconductor-device manufacturing system Mar 23, 2023 Issued
Array ( [id] => 20413409 [patent_doc_number] => 12496674 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-12-16 [patent_title] => Gettering layer forming device and processing apparatus [patent_app_type] => utility [patent_app_number] => 18/187026 [patent_app_country] => US [patent_app_date] => 2023-03-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 2298 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 232 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18187026 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/187026
Gettering layer forming device and processing apparatus Mar 20, 2023 Issued
Array ( [id] => 18661249 [patent_doc_number] => 20230307262 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-28 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/123793 [patent_app_country] => US [patent_app_date] => 2023-03-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8278 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18123793 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/123793
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD Mar 19, 2023 Abandoned
Array ( [id] => 18570415 [patent_doc_number] => 20230260752 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-08-17 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/110470 [patent_app_country] => US [patent_app_date] => 2023-02-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5515 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18110470 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/110470
PLASMA PROCESSING APPARATUS Feb 15, 2023 Pending
Array ( [id] => 18434963 [patent_doc_number] => 20230182257 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-15 [patent_title] => SYSTEM AND METHOD FOR MONITORING CHEMICAL MECHANICAL POLISHING [patent_app_type] => utility [patent_app_number] => 18/103321 [patent_app_country] => US [patent_app_date] => 2023-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7115 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 264 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18103321 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/103321
System and method for monitoring chemical mechanical polishing Jan 29, 2023 Issued
Array ( [id] => 20534929 [patent_doc_number] => 12551982 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-02-17 [patent_title] => Polishing pad and substrate processing apparatus including the same [patent_app_type] => utility [patent_app_number] => 18/100937 [patent_app_country] => US [patent_app_date] => 2023-01-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 1236 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 201 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18100937 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/100937
Polishing pad and substrate processing apparatus including the same Jan 23, 2023 Issued
Array ( [id] => 20598163 [patent_doc_number] => 12581903 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2026-03-17 [patent_title] => Centering device, centering method, and substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 18/157970 [patent_app_country] => US [patent_app_date] => 2023-01-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 8 [patent_no_of_words] => 2373 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 506 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18157970 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/157970
Centering device, centering method, and substrate processing apparatus Jan 22, 2023 Issued
Array ( [id] => 18469385 [patent_doc_number] => 20230203669 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-29 [patent_title] => SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD [patent_app_type] => utility [patent_app_number] => 18/145138 [patent_app_country] => US [patent_app_date] => 2022-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12588 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18145138 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/145138
Substrate treating apparatus and substrate treating method Dec 21, 2022 Issued
Array ( [id] => 18377619 [patent_doc_number] => 20230152706 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-18 [patent_title] => IRRADIATING MODULE, AND APPARATUS FOR TREATING SUBSTRATE WITH THE SAME [patent_app_type] => utility [patent_app_number] => 17/988811 [patent_app_country] => US [patent_app_date] => 2022-11-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12804 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17988811 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/988811
IRRADIATING MODULE, AND APPARATUS FOR TREATING SUBSTRATE WITH THE SAME Nov 16, 2022 Issued
Array ( [id] => 19176034 [patent_doc_number] => 20240162008 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-16 [patent_title] => METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/988083 [patent_app_country] => US [patent_app_date] => 2022-11-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9265 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17988083 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/988083
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE Nov 15, 2022 Pending
Array ( [id] => 19746144 [patent_doc_number] => 20250034709 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-01-30 [patent_title] => DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUBSTRATE BY MEANS OF THE PROCESS GAS [patent_app_type] => utility [patent_app_number] => 18/713532 [patent_app_country] => US [patent_app_date] => 2022-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6553 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18713532 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/713532
Distribution body for distributing a process gas for treating a substrate by means of the process gas Nov 6, 2022 Issued
Array ( [id] => 19157543 [patent_doc_number] => 20240150250 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-05-09 [patent_title] => SYSTEMS AND METHODS FOR PRODUCING SILICON CARBIDE POWDER [patent_app_type] => utility [patent_app_number] => 18/053031 [patent_app_country] => US [patent_app_date] => 2022-11-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3560 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 77 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18053031 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/053031
SYSTEMS AND METHODS FOR PRODUCING SILICON CARBIDE POWDER Nov 6, 2022 Pending
Array ( [id] => 19305525 [patent_doc_number] => 20240234105 [patent_country] => US [patent_kind] => A9 [patent_issue_date] => 2024-07-11 [patent_title] => IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOSITION THEREON IN A LARGE PECVD CHAMBER [patent_app_type] => utility [patent_app_number] => 17/971205 [patent_app_country] => US [patent_app_date] => 2022-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4571 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17971205 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/971205
Impedance control of local areas of a substrate during plasma deposition thereon in a large PECVD chamber Oct 20, 2022 Issued
Array ( [id] => 19305525 [patent_doc_number] => 20240234105 [patent_country] => US [patent_kind] => A9 [patent_issue_date] => 2024-07-11 [patent_title] => IMPEDANCE CONTROL OF LOCAL AREAS OF A SUBSTRATE DURING PLASMA DEPOSITION THEREON IN A LARGE PECVD CHAMBER [patent_app_type] => utility [patent_app_number] => 17/971205 [patent_app_country] => US [patent_app_date] => 2022-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4571 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17971205 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/971205
Impedance control of local areas of a substrate during plasma deposition thereon in a large PECVD chamber Oct 20, 2022 Issued
Array ( [id] => 18655138 [patent_doc_number] => 20230300989 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-09-21 [patent_title] => CIRCUIT BOARD ETCHING DEVICE AND METHOD FOR IMPROVING ETCHING FACTOR [patent_app_type] => utility [patent_app_number] => 18/046742 [patent_app_country] => US [patent_app_date] => 2022-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3291 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18046742 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/046742
CIRCUIT BOARD ETCHING DEVICE AND METHOD FOR IMPROVING ETCHING FACTOR Oct 13, 2022 Abandoned
Array ( [id] => 19684520 [patent_doc_number] => 20250003065 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2025-01-02 [patent_title] => METHOD AND APPARATUS FOR GAS AND VAPOR DEPOSITION PRECURSOR DELIVERY HEATER [patent_app_type] => utility [patent_app_number] => 18/704824 [patent_app_country] => US [patent_app_date] => 2022-10-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15076 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18704824 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/704824
METHOD AND APPARATUS FOR GAS AND VAPOR DEPOSITION PRECURSOR DELIVERY HEATER Oct 12, 2022 Pending
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