
Sylvia Macarthur
Examiner (ID: 9146, Phone: (571)272-1438 , Office: P/1716 )
| Most Active Art Unit | 1716 |
| Art Unit(s) | 1763, 1716, 1792 |
| Total Applications | 1444 |
| Issued Applications | 898 |
| Pending Applications | 104 |
| Abandoned Applications | 457 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 18456213
[patent_doc_number] => 20230197495
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-06-22
[patent_title] => SUBSTRATE SUPPORT GAP PUMPING TO PREVENT GLOW DISCHARGE AND LIGHT-UP
[patent_app_type] => utility
[patent_app_number] => 17/553305
[patent_app_country] => US
[patent_app_date] => 2021-12-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4661
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 97
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17553305
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/553305 | Substrate support gap pumping to prevent glow discharge and light-up | Dec 15, 2021 | Issued |
Array
(
[id] => 17523049
[patent_doc_number] => 20220108898
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-04-07
[patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
[patent_app_type] => utility
[patent_app_number] => 17/644378
[patent_app_country] => US
[patent_app_date] => 2021-12-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 10666
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -4
[patent_words_short_claim] => 167
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17644378
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/644378 | Substrate processing apparatus and substrate processing method | Dec 14, 2021 | Issued |
Array
(
[id] => 19964849
[patent_doc_number] => 12334366
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-06-17
[patent_title] => Substrate processing apparatus and substrate processing method
[patent_app_type] => utility
[patent_app_number] => 17/550076
[patent_app_country] => US
[patent_app_date] => 2021-12-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 22
[patent_figures_cnt] => 27
[patent_no_of_words] => 11984
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 222
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17550076
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/550076 | Substrate processing apparatus and substrate processing method | Dec 13, 2021 | Issued |
Array
(
[id] => 17708518
[patent_doc_number] => 20220208526
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-06-30
[patent_title] => PROCESS CHAMBER HAVING A TEMPERATURE MEASURING UNIT AND APPARATUS FOR PROCESSING A SUBSTRATE HAVING A TEMPERATURE MEASURING UNIT
[patent_app_type] => utility
[patent_app_number] => 17/456180
[patent_app_country] => US
[patent_app_date] => 2021-11-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4552
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 44
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17456180
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/456180 | PROCESS CHAMBER HAVING A TEMPERATURE MEASURING UNIT AND APPARATUS FOR PROCESSING A SUBSTRATE HAVING A TEMPERATURE MEASURING UNIT | Nov 22, 2021 | Abandoned |
Array
(
[id] => 17477342
[patent_doc_number] => 20220084846
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-03-17
[patent_title] => SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
[patent_app_type] => utility
[patent_app_number] => 17/532074
[patent_app_country] => US
[patent_app_date] => 2021-11-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4746
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -1
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17532074
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/532074 | SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE | Nov 21, 2021 | Abandoned |
Array
(
[id] => 18528670
[patent_doc_number] => 11715672
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2023-08-01
[patent_title] => Endpoint detection for chemical mechanical polishing based on spectrometry
[patent_app_type] => utility
[patent_app_number] => 17/530390
[patent_app_country] => US
[patent_app_date] => 2021-11-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 16
[patent_figures_cnt] => 24
[patent_no_of_words] => 8660
[patent_no_of_claims] => 11
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 146
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17530390
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/530390 | Endpoint detection for chemical mechanical polishing based on spectrometry | Nov 17, 2021 | Issued |
Array
(
[id] => 18970988
[patent_doc_number] => 20240051080
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-02-15
[patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
[patent_app_type] => utility
[patent_app_number] => 18/257898
[patent_app_country] => US
[patent_app_date] => 2021-11-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7207
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -14
[patent_words_short_claim] => 87
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18257898
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/257898 | Substrate processing apparatus and substrate processing method | Nov 8, 2021 | Issued |
Array
(
[id] => 18679766
[patent_doc_number] => 20230317423
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-10-05
[patent_title] => MAGNESIUM ALUMINUM OXYNITRIDE COMPONENT FOR USE IN A PLASMA PROCESSING CHAMBER
[patent_app_type] => utility
[patent_app_number] => 18/021757
[patent_app_country] => US
[patent_app_date] => 2021-10-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 3621
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -11
[patent_words_short_claim] => 43
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18021757
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/021757 | MAGNESIUM ALUMINUM OXYNITRIDE COMPONENT FOR USE IN A PLASMA PROCESSING CHAMBER | Oct 26, 2021 | Abandoned |
Array
(
[id] => 19507814
[patent_doc_number] => 12119244
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-10-15
[patent_title] => Semiconductor manufacturing apparatus
[patent_app_type] => utility
[patent_app_number] => 17/501774
[patent_app_country] => US
[patent_app_date] => 2021-10-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 15
[patent_no_of_words] => 5959
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 204
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17501774
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/501774 | Semiconductor manufacturing apparatus | Oct 13, 2021 | Issued |
Array
(
[id] => 19737654
[patent_doc_number] => 12214469
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-02-04
[patent_title] => Polishing head retaining ring tilting moment control
[patent_app_type] => utility
[patent_app_number] => 17/501687
[patent_app_country] => US
[patent_app_date] => 2021-10-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 12
[patent_no_of_words] => 8575
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 153
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17501687
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/501687 | Polishing head retaining ring tilting moment control | Oct 13, 2021 | Issued |
Array
(
[id] => 19741134
[patent_doc_number] => 12217978
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2025-02-04
[patent_title] => Etching device and etching method using the same
[patent_app_type] => utility
[patent_app_number] => 17/501374
[patent_app_country] => US
[patent_app_date] => 2021-10-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
[patent_figures_cnt] => 19
[patent_no_of_words] => 7545
[patent_no_of_claims] => 11
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 130
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17501374
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/501374 | Etching device and etching method using the same | Oct 13, 2021 | Issued |
Array
(
[id] => 18162077
[patent_doc_number] => 20230028669
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-01-26
[patent_title] => PLASMA PROCESSING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 17/498798
[patent_app_country] => US
[patent_app_date] => 2021-10-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5009
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -14
[patent_words_short_claim] => 104
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17498798
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/498798 | PLASMA PROCESSING APPARATUS | Oct 11, 2021 | Abandoned |
Array
(
[id] => 18817916
[patent_doc_number] => 20230392256
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-12-07
[patent_title] => AN ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD
[patent_app_type] => utility
[patent_app_number] => 18/248424
[patent_app_country] => US
[patent_app_date] => 2021-10-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 17279
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -15
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18248424
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/248424 | Atomic layer deposition apparatus and a method | Oct 10, 2021 | Issued |
Array
(
[id] => 17551482
[patent_doc_number] => 20220122824
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-04-21
[patent_title] => THIN FILM MANUFACTURING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 17/495796
[patent_app_country] => US
[patent_app_date] => 2021-10-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 5952
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -16
[patent_words_short_claim] => 108
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17495796
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/495796 | Thin film manufacturing apparatus | Oct 5, 2021 | Issued |
Array
(
[id] => 19670783
[patent_doc_number] => 12183552
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-12-31
[patent_title] => Substrate processing apparatus
[patent_app_type] => utility
[patent_app_number] => 17/491685
[patent_app_country] => US
[patent_app_date] => 2021-10-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 1
[patent_figures_cnt] => 1
[patent_no_of_words] => 5337
[patent_no_of_claims] => 5
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 283
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17491685
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/491685 | Substrate processing apparatus | Sep 30, 2021 | Issued |
Array
(
[id] => 18347140
[patent_doc_number] => 20230135250
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-05-04
[patent_title] => SEMICONDUCTOR EDGE PROCESSING APPARATUS AND METHODS
[patent_app_type] => utility
[patent_app_number] => 17/915523
[patent_app_country] => US
[patent_app_date] => 2021-09-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12304
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -16
[patent_words_short_claim] => 133
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17915523
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/915523 | Semiconductor edge processing apparatus and methods | Sep 13, 2021 | Issued |
Array
(
[id] => 19444445
[patent_doc_number] => 12094734
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-09-17
[patent_title] => Wet etching control system, wet etching machine and wet etching control method
[patent_app_type] => utility
[patent_app_number] => 17/408652
[patent_app_country] => US
[patent_app_date] => 2021-08-23
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 6424
[patent_no_of_claims] => 15
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 311
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17408652
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/408652 | Wet etching control system, wet etching machine and wet etching control method | Aug 22, 2021 | Issued |
Array
(
[id] => 19639595
[patent_doc_number] => 12170209
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-12-17
[patent_title] => Substrate processing apparatus and substrate processing method
[patent_app_type] => utility
[patent_app_number] => 17/443358
[patent_app_country] => US
[patent_app_date] => 2021-07-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 7310
[patent_no_of_claims] => 8
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 352
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17443358
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/443358 | Substrate processing apparatus and substrate processing method | Jul 25, 2021 | Issued |
Array
(
[id] => 18882835
[patent_doc_number] => 20240006204
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2024-01-04
[patent_title] => HEAD FOR HOLDING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 18/034350
[patent_app_country] => US
[patent_app_date] => 2021-07-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7355
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -6
[patent_words_short_claim] => 63
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18034350
[rel_patent_id] =>[rel_patent_doc_number] =>) 18/034350 | HEAD FOR HOLDING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS | Jul 19, 2021 | Pending |
Array
(
[id] => 17373656
[patent_doc_number] => 20220028708
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-01-27
[patent_title] => SUPPORT UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME
[patent_app_type] => utility
[patent_app_number] => 17/380339
[patent_app_country] => US
[patent_app_date] => 2021-07-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 8515
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 42
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17380339
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/380339 | Support unit and substrate treating apparatus including the same | Jul 19, 2021 | Issued |