Search

Sylvia Macarthur

Examiner (ID: 9146, Phone: (571)272-1438 , Office: P/1716 )

Most Active Art Unit
1716
Art Unit(s)
1763, 1716, 1792
Total Applications
1444
Issued Applications
898
Pending Applications
104
Abandoned Applications
457

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18456213 [patent_doc_number] => 20230197495 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-22 [patent_title] => SUBSTRATE SUPPORT GAP PUMPING TO PREVENT GLOW DISCHARGE AND LIGHT-UP [patent_app_type] => utility [patent_app_number] => 17/553305 [patent_app_country] => US [patent_app_date] => 2021-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4661 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17553305 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/553305
Substrate support gap pumping to prevent glow discharge and light-up Dec 15, 2021 Issued
Array ( [id] => 17523049 [patent_doc_number] => 20220108898 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-07 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/644378 [patent_app_country] => US [patent_app_date] => 2021-12-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10666 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17644378 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/644378
Substrate processing apparatus and substrate processing method Dec 14, 2021 Issued
Array ( [id] => 19964849 [patent_doc_number] => 12334366 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-17 [patent_title] => Substrate processing apparatus and substrate processing method [patent_app_type] => utility [patent_app_number] => 17/550076 [patent_app_country] => US [patent_app_date] => 2021-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 22 [patent_figures_cnt] => 27 [patent_no_of_words] => 11984 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 222 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17550076 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/550076
Substrate processing apparatus and substrate processing method Dec 13, 2021 Issued
Array ( [id] => 17708518 [patent_doc_number] => 20220208526 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-30 [patent_title] => PROCESS CHAMBER HAVING A TEMPERATURE MEASURING UNIT AND APPARATUS FOR PROCESSING A SUBSTRATE HAVING A TEMPERATURE MEASURING UNIT [patent_app_type] => utility [patent_app_number] => 17/456180 [patent_app_country] => US [patent_app_date] => 2021-11-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4552 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17456180 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/456180
PROCESS CHAMBER HAVING A TEMPERATURE MEASURING UNIT AND APPARATUS FOR PROCESSING A SUBSTRATE HAVING A TEMPERATURE MEASURING UNIT Nov 22, 2021 Abandoned
Array ( [id] => 17477342 [patent_doc_number] => 20220084846 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-17 [patent_title] => SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE [patent_app_type] => utility [patent_app_number] => 17/532074 [patent_app_country] => US [patent_app_date] => 2021-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4746 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -1 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17532074 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/532074
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE Nov 21, 2021 Abandoned
Array ( [id] => 18528670 [patent_doc_number] => 11715672 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-08-01 [patent_title] => Endpoint detection for chemical mechanical polishing based on spectrometry [patent_app_type] => utility [patent_app_number] => 17/530390 [patent_app_country] => US [patent_app_date] => 2021-11-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 24 [patent_no_of_words] => 8660 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17530390 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/530390
Endpoint detection for chemical mechanical polishing based on spectrometry Nov 17, 2021 Issued
Array ( [id] => 18970988 [patent_doc_number] => 20240051080 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-02-15 [patent_title] => SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 18/257898 [patent_app_country] => US [patent_app_date] => 2021-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7207 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18257898 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/257898
Substrate processing apparatus and substrate processing method Nov 8, 2021 Issued
Array ( [id] => 18679766 [patent_doc_number] => 20230317423 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-10-05 [patent_title] => MAGNESIUM ALUMINUM OXYNITRIDE COMPONENT FOR USE IN A PLASMA PROCESSING CHAMBER [patent_app_type] => utility [patent_app_number] => 18/021757 [patent_app_country] => US [patent_app_date] => 2021-10-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3621 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18021757 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/021757
MAGNESIUM ALUMINUM OXYNITRIDE COMPONENT FOR USE IN A PLASMA PROCESSING CHAMBER Oct 26, 2021 Abandoned
Array ( [id] => 19507814 [patent_doc_number] => 12119244 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-10-15 [patent_title] => Semiconductor manufacturing apparatus [patent_app_type] => utility [patent_app_number] => 17/501774 [patent_app_country] => US [patent_app_date] => 2021-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 15 [patent_no_of_words] => 5959 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 204 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17501774 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/501774
Semiconductor manufacturing apparatus Oct 13, 2021 Issued
Array ( [id] => 19737654 [patent_doc_number] => 12214469 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-04 [patent_title] => Polishing head retaining ring tilting moment control [patent_app_type] => utility [patent_app_number] => 17/501687 [patent_app_country] => US [patent_app_date] => 2021-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 12 [patent_no_of_words] => 8575 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17501687 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/501687
Polishing head retaining ring tilting moment control Oct 13, 2021 Issued
Array ( [id] => 19741134 [patent_doc_number] => 12217978 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-04 [patent_title] => Etching device and etching method using the same [patent_app_type] => utility [patent_app_number] => 17/501374 [patent_app_country] => US [patent_app_date] => 2021-10-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 19 [patent_no_of_words] => 7545 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17501374 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/501374
Etching device and etching method using the same Oct 13, 2021 Issued
Array ( [id] => 18162077 [patent_doc_number] => 20230028669 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-01-26 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/498798 [patent_app_country] => US [patent_app_date] => 2021-10-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5009 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17498798 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/498798
PLASMA PROCESSING APPARATUS Oct 11, 2021 Abandoned
Array ( [id] => 18817916 [patent_doc_number] => 20230392256 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-12-07 [patent_title] => AN ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD [patent_app_type] => utility [patent_app_number] => 18/248424 [patent_app_country] => US [patent_app_date] => 2021-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17279 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18248424 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/248424
Atomic layer deposition apparatus and a method Oct 10, 2021 Issued
Array ( [id] => 17551482 [patent_doc_number] => 20220122824 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-21 [patent_title] => THIN FILM MANUFACTURING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/495796 [patent_app_country] => US [patent_app_date] => 2021-10-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5952 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17495796 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/495796
Thin film manufacturing apparatus Oct 5, 2021 Issued
Array ( [id] => 19670783 [patent_doc_number] => 12183552 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-12-31 [patent_title] => Substrate processing apparatus [patent_app_type] => utility [patent_app_number] => 17/491685 [patent_app_country] => US [patent_app_date] => 2021-10-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 5337 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 283 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17491685 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/491685
Substrate processing apparatus Sep 30, 2021 Issued
Array ( [id] => 18347140 [patent_doc_number] => 20230135250 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-04 [patent_title] => SEMICONDUCTOR EDGE PROCESSING APPARATUS AND METHODS [patent_app_type] => utility [patent_app_number] => 17/915523 [patent_app_country] => US [patent_app_date] => 2021-09-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12304 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17915523 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/915523
Semiconductor edge processing apparatus and methods Sep 13, 2021 Issued
Array ( [id] => 19444445 [patent_doc_number] => 12094734 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-09-17 [patent_title] => Wet etching control system, wet etching machine and wet etching control method [patent_app_type] => utility [patent_app_number] => 17/408652 [patent_app_country] => US [patent_app_date] => 2021-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6424 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 311 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17408652 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/408652
Wet etching control system, wet etching machine and wet etching control method Aug 22, 2021 Issued
Array ( [id] => 19639595 [patent_doc_number] => 12170209 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-12-17 [patent_title] => Substrate processing apparatus and substrate processing method [patent_app_type] => utility [patent_app_number] => 17/443358 [patent_app_country] => US [patent_app_date] => 2021-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 7310 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 352 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17443358 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/443358
Substrate processing apparatus and substrate processing method Jul 25, 2021 Issued
Array ( [id] => 18882835 [patent_doc_number] => 20240006204 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2024-01-04 [patent_title] => HEAD FOR HOLDING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 18/034350 [patent_app_country] => US [patent_app_date] => 2021-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7355 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 18034350 [rel_patent_id] =>[rel_patent_doc_number] =>)
18/034350
HEAD FOR HOLDING SUBSTRATE AND SUBSTRATE PROCESSING APPARATUS Jul 19, 2021 Pending
Array ( [id] => 17373656 [patent_doc_number] => 20220028708 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-27 [patent_title] => SUPPORT UNIT AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 17/380339 [patent_app_country] => US [patent_app_date] => 2021-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8515 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 42 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17380339 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/380339
Support unit and substrate treating apparatus including the same Jul 19, 2021 Issued
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