Search

Thi D. Dang

Examiner (ID: 4518)

Most Active Art Unit
1763
Art Unit(s)
1109, 1304, 1303, 1104, 1754, 1763
Total Applications
1224
Issued Applications
1013
Pending Applications
43
Abandoned Applications
167

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 1407553 [patent_doc_number] => 06521082 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-02-18 [patent_title] => 'Magnetically enhanced plasma apparatus and method with enhanced plasma uniformity and enhanced ion energy control' [patent_app_type] => B1 [patent_app_number] => 10/124161 [patent_app_country] => US [patent_app_date] => 2002-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 5 [patent_no_of_words] => 2980 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 121 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/521/06521082.pdf [firstpage_image] =>[orig_patent_app_number] => 10124161 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/124161
Magnetically enhanced plasma apparatus and method with enhanced plasma uniformity and enhanced ion energy control Apr 15, 2002 Issued
Array ( [id] => 6439376 [patent_doc_number] => 20020148561 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-17 [patent_title] => 'Plasma processing apparatus and method of processing' [patent_app_type] => new [patent_app_number] => 10/118244 [patent_app_country] => US [patent_app_date] => 2002-04-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3541 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 184 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0148/20020148561.pdf [firstpage_image] =>[orig_patent_app_number] => 10118244 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/118244
Plasma processing apparatus and method of processing Apr 8, 2002 Issued
Array ( [id] => 6298887 [patent_doc_number] => 20020092618 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-18 [patent_title] => 'Parallel-plate electrode plasma reactor having an inductive antenna coupling power through a parallel plate electrode' [patent_app_type] => new [patent_app_number] => 10/002940 [patent_app_country] => US [patent_app_date] => 2001-11-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 32 [patent_figures_cnt] => 32 [patent_no_of_words] => 15967 [patent_no_of_claims] => 91 [patent_no_of_ind_claims] => 34 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0092/20020092618.pdf [firstpage_image] =>[orig_patent_app_number] => 10002940 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/002940
Parallel-plate electrode plasma reactor having an inductive antenna coupling power through a parallel plate electrode Nov 26, 2001 Issued
Array ( [id] => 6329974 [patent_doc_number] => 20020033232 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-03-21 [patent_title] => 'Quartz wafer processing chamber' [patent_app_type] => new [patent_app_number] => 09/995323 [patent_app_country] => US [patent_app_date] => 2001-11-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 9183 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0033/20020033232.pdf [firstpage_image] =>[orig_patent_app_number] => 09995323 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/995323
Quartz wafer processing chamber Nov 25, 2001 Issued
Array ( [id] => 1368187 [patent_doc_number] => 06558506 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-05-06 [patent_title] => 'Etching system and etching chamber' [patent_app_type] => B1 [patent_app_number] => 09/889582 [patent_app_country] => US [patent_app_date] => 2001-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 16 [patent_no_of_words] => 9971 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/558/06558506.pdf [firstpage_image] =>[orig_patent_app_number] => 09889582 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/889582
Etching system and etching chamber Oct 23, 2001 Issued
Array ( [id] => 1348149 [patent_doc_number] => 06564744 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-05-20 [patent_title] => 'Plasma CVD method and apparatus' [patent_app_type] => B2 [patent_app_number] => 09/978545 [patent_app_country] => US [patent_app_date] => 2001-10-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 11217 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 207 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/564/06564744.pdf [firstpage_image] =>[orig_patent_app_number] => 09978545 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/978545
Plasma CVD method and apparatus Oct 17, 2001 Issued
Array ( [id] => 1371357 [patent_doc_number] => 06554952 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-04-29 [patent_title] => 'Method and apparatus for etching a gold metal layer using a titanium hardmask' [patent_app_type] => B1 [patent_app_number] => 09/952926 [patent_app_country] => US [patent_app_date] => 2001-09-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 12 [patent_no_of_words] => 3264 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/554/06554952.pdf [firstpage_image] =>[orig_patent_app_number] => 09952926 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/952926
Method and apparatus for etching a gold metal layer using a titanium hardmask Sep 13, 2001 Issued
Array ( [id] => 5947517 [patent_doc_number] => 20020005169 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-01-17 [patent_title] => 'Thin film electrostatic shield for inductive plasma processing' [patent_app_type] => new [patent_app_number] => 09/952640 [patent_app_country] => US [patent_app_date] => 2001-09-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4068 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 20 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0005/20020005169.pdf [firstpage_image] =>[orig_patent_app_number] => 09952640 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/952640
Thin film electrostatic shield for inductive plasma processing Sep 12, 2001 Issued
Array ( [id] => 1389590 [patent_doc_number] => 06537421 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-03-25 [patent_title] => 'RF bias control in plasma deposition and etch systems with multiple RF power sources' [patent_app_type] => B2 [patent_app_number] => 09/911654 [patent_app_country] => US [patent_app_date] => 2001-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 2662 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 143 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/537/06537421.pdf [firstpage_image] =>[orig_patent_app_number] => 09911654 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/911654
RF bias control in plasma deposition and etch systems with multiple RF power sources Jul 23, 2001 Issued
Array ( [id] => 5797864 [patent_doc_number] => 20020007915 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-01-24 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => new [patent_app_number] => 09/906731 [patent_app_country] => US [patent_app_date] => 2001-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4138 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0007/20020007915.pdf [firstpage_image] =>[orig_patent_app_number] => 09906731 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/906731
Plasma processing apparatus Jul 17, 2001 Issued
Array ( [id] => 1418942 [patent_doc_number] => 06503360 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-01-07 [patent_title] => 'Etching method and apparatus' [patent_app_type] => B2 [patent_app_number] => 09/905894 [patent_app_country] => US [patent_app_date] => 2001-07-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 37 [patent_no_of_words] => 8142 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/503/06503360.pdf [firstpage_image] =>[orig_patent_app_number] => 09905894 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/905894
Etching method and apparatus Jul 16, 2001 Issued
Array ( [id] => 1408509 [patent_doc_number] => 06517670 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-02-11 [patent_title] => 'Etching and cleaning apparatus' [patent_app_type] => B2 [patent_app_number] => 09/903069 [patent_app_country] => US [patent_app_date] => 2001-07-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 3473 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/517/06517670.pdf [firstpage_image] =>[orig_patent_app_number] => 09903069 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/903069
Etching and cleaning apparatus Jul 10, 2001 Issued
Array ( [id] => 6221046 [patent_doc_number] => 20020002947 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-01-10 [patent_title] => 'Inductive coupling plasma processing apparatus' [patent_app_type] => new [patent_app_number] => 09/897954 [patent_app_country] => US [patent_app_date] => 2001-07-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4296 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0002/20020002947.pdf [firstpage_image] =>[orig_patent_app_number] => 09897954 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/897954
Inductive coupling plasma processing apparatus Jul 4, 2001 Issued
Array ( [id] => 1401083 [patent_doc_number] => 06527911 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-03-04 [patent_title] => 'Configurable plasma volume etch chamber' [patent_app_type] => B1 [patent_app_number] => 09/895537 [patent_app_country] => US [patent_app_date] => 2001-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 5894 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/527/06527911.pdf [firstpage_image] =>[orig_patent_app_number] => 09895537 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/895537
Configurable plasma volume etch chamber Jun 28, 2001 Issued
Array ( [id] => 6329967 [patent_doc_number] => 20020033231 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-03-21 [patent_title] => 'Apparatus and method for plasma etching' [patent_app_type] => new [patent_app_number] => 09/892723 [patent_app_country] => US [patent_app_date] => 2001-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 7332 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0033/20020033231.pdf [firstpage_image] =>[orig_patent_app_number] => 09892723 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/892723
Apparatus and method for plasma etching Jun 27, 2001 Issued
Array ( [id] => 6933038 [patent_doc_number] => 20010054382 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-12-27 [patent_title] => 'Chemical vapor deposition system' [patent_app_type] => new [patent_app_number] => 09/886273 [patent_app_country] => US [patent_app_date] => 2001-06-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5403 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 27 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0054/20010054382.pdf [firstpage_image] =>[orig_patent_app_number] => 09886273 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/886273
Chemical vapor deposition system Jun 21, 2001 Issued
Array ( [id] => 1448449 [patent_doc_number] => 06454899 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-09-24 [patent_title] => 'Apparatus for filling trenches' [patent_app_type] => B1 [patent_app_number] => 09/885455 [patent_app_country] => US [patent_app_date] => 2001-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 3318 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/454/06454899.pdf [firstpage_image] =>[orig_patent_app_number] => 09885455 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/885455
Apparatus for filling trenches Jun 18, 2001 Issued
Array ( [id] => 6168839 [patent_doc_number] => 20020153101 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-24 [patent_title] => 'Semiconductor processing system and method' [patent_app_type] => new [patent_app_number] => 09/840349 [patent_app_country] => US [patent_app_date] => 2001-04-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5717 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 36 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0153/20020153101.pdf [firstpage_image] =>[orig_patent_app_number] => 09840349 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/840349
Semiconductor processing system and method Apr 20, 2001 Issued
Array ( [id] => 1401101 [patent_doc_number] => 06527912 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-03-04 [patent_title] => 'Stacked RF excitation coil for inductive plasma processor' [patent_app_type] => B2 [patent_app_number] => 09/821752 [patent_app_country] => US [patent_app_date] => 2001-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 6247 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/527/06527912.pdf [firstpage_image] =>[orig_patent_app_number] => 09821752 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/821752
Stacked RF excitation coil for inductive plasma processor Mar 29, 2001 Issued
Array ( [id] => 1384606 [patent_doc_number] => 06540839 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-04-01 [patent_title] => 'Apparatus and method to passivate magnets and magnetic materials' [patent_app_type] => B1 [patent_app_number] => 09/820550 [patent_app_country] => US [patent_app_date] => 2001-03-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2795 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/540/06540839.pdf [firstpage_image] =>[orig_patent_app_number] => 09820550 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/820550
Apparatus and method to passivate magnets and magnetic materials Mar 28, 2001 Issued
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