Thi D. Dang

Array ( [id] => 1411572 [patent_doc_number] => 06514377 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-02-04 [patent_title] => 'Apparatus for and method of processing an object to be processed' [patent_app_type] => B1 [patent_app_number] => 09/657054 [patent_app_country] => US [patent_app_date] => 2000-09-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 16 [patent_no_of_words] => 6886 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 225 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/514/06514377.pdf [firstpage_image] =>[orig_patent_app_number] => 09657054 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1403387 [patent_doc_number] => 06524429 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-02-25 [patent_title] => 'Method of forming buried wiring, and apparatus for processing substratum' [patent_app_type] => B1 [patent_app_number] => 09/652262 [patent_app_country] => US [patent_app_date] => 2000-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 26 [patent_no_of_words] => 12719 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/524/06524429.pdf [firstpage_image] =>[orig_patent_app_number] => 09652262 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1516559 [patent_doc_number] => 06412437 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-07-02 [patent_title] => 'Plasma enhanced chemical vapor deposition reactor and plasma enhanced chemical vapor deposition process' [patent_app_type] => B1 [patent_app_number] => 09/642745 [patent_app_country] => US [patent_app_date] => 2000-08-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 2817 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 55 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/412/06412437.pdf [firstpage_image] =>[orig_patent_app_number] => 09642745 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1461147 [patent_doc_number] => 06350347 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-02-26 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => B1 [patent_app_number] => 09/640194 [patent_app_country] => US [patent_app_date] => 2000-08-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 30 [patent_no_of_words] => 11629 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/350/06350347.pdf [firstpage_image] =>[orig_patent_app_number] => 09640194 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1500515 [patent_doc_number] => 06486073 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-11-26 [patent_title] => 'Method for stripping a photo resist on an aluminum alloy' [patent_app_type] => B1 [patent_app_number] => 09/639113 [patent_app_country] => US [patent_app_date] => 2000-08-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 5 [patent_no_of_words] => 2913 [patent_no_of_claims] => 36 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 192 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/486/06486073.pdf [firstpage_image] =>[orig_patent_app_number] => 09639113 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1552167 [patent_doc_number] => 06348126 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-02-19 [patent_title] => 'Externally excited torroidal plasma source' [patent_app_type] => B1 [patent_app_number] => 09/636699 [patent_app_country] => US [patent_app_date] => 2000-08-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 39 [patent_figures_cnt] => 46 [patent_no_of_words] => 10622 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/348/06348126.pdf [firstpage_image] =>[orig_patent_app_number] => 09636699 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1412466 [patent_doc_number] => 06517913 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-02-11 [patent_title] => 'Method and apparatus for reducing perfluorocompound gases from substrate processing equipment emissions' [patent_app_type] => B1 [patent_app_number] => 09/632502 [patent_app_country] => US [patent_app_date] => 2000-08-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 44 [patent_no_of_words] => 25423 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/517/06517913.pdf [firstpage_image] =>[orig_patent_app_number] => 09632502 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1576296 [patent_doc_number] => 06447612 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-09-10 [patent_title] => 'Film-forming apparatus for forming a deposited film on a substrate, and vacuum-processing apparatus and method for vacuum-processing an object' [patent_app_type] => B1 [patent_app_number] => 09/625840 [patent_app_country] => US [patent_app_date] => 2000-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 12401 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/447/06447612.pdf [firstpage_image] =>[orig_patent_app_number] => 09625840 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1469180 [patent_doc_number] => 06406760 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-06-18 [patent_title] => 'Diamond film deposition on substrate arrays' [patent_app_type] => B1 [patent_app_number] => 09/618225 [patent_app_country] => US [patent_app_date] => 2000-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 11 [patent_no_of_words] => 3173 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/406/06406760.pdf [firstpage_image] =>[orig_patent_app_number] => 09618225 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1419605 [patent_doc_number] => 06503410 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-01-07 [patent_title] => 'Method of modifying an RF circuit of a plasma chamber to increase chamber life and process capabilities' [patent_app_type] => B1 [patent_app_number] => 09/613325 [patent_app_country] => US [patent_app_date] => 2000-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 3 [patent_no_of_words] => 2418 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/503/06503410.pdf [firstpage_image] =>[orig_patent_app_number] => 09613325 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1445639 [patent_doc_number] => 06368452 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-04-09 [patent_title] => 'Plasma treatment apparatus and method of semiconductor processing' [patent_app_type] => B1 [patent_app_number] => 09/608132 [patent_app_country] => US [patent_app_date] => 2000-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 2 [patent_no_of_words] => 1718 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/368/06368452.pdf [firstpage_image] =>[orig_patent_app_number] => 09608132 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1352503 [patent_doc_number] => 06572707 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-06-03 [patent_title] => 'Vaporizer for sensitive precursors' [patent_app_type] => B1 [patent_app_number] => 09/594887 [patent_app_country] => US [patent_app_date] => 2000-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2686 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 237 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/572/06572707.pdf [firstpage_image] =>[orig_patent_app_number] => 09594887 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4397991 [patent_doc_number] => 06270621 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-08-07 [patent_title] => 'Etch chamber' [patent_app_type] => 1 [patent_app_number] => 9/593018 [patent_app_country] => US [patent_app_date] => 2000-06-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 7 [patent_no_of_words] => 2209 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/270/06270621.pdf [firstpage_image] =>[orig_patent_app_number] => 593018 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1476681 [patent_doc_number] => 06344106 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-02-05 [patent_title] => 'Apparatus, and corresponding method, for chemically etching substrates' [patent_app_type] => B1 [patent_app_number] => 09/592656 [patent_app_country] => US [patent_app_date] => 2000-06-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4942 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/344/06344106.pdf [firstpage_image] =>[orig_patent_app_number] => 09592656 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1469168 [patent_doc_number] => 06386140 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-05-14 [patent_title] => 'Plasma spraying apparatus' [patent_app_type] => B1 [patent_app_number] => 09/579252 [patent_app_country] => US [patent_app_date] => 2000-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 8 [patent_no_of_words] => 2807 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 230 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/386/06386140.pdf [firstpage_image] =>[orig_patent_app_number] => 09579252 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4286056 [patent_doc_number] => 06197151 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-03-06 [patent_title] => 'Plasma processing apparatus and plasma processing method' [patent_app_type] => 1 [patent_app_number] => 9/564788 [patent_app_country] => US [patent_app_date] => 2000-05-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 31 [patent_figures_cnt] => 45 [patent_no_of_words] => 21738 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/197/06197151.pdf [firstpage_image] =>[orig_patent_app_number] => 564788 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1533412 [patent_doc_number] => 06488807 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-12-03 [patent_title] => 'Magnetic confinement in a plasma reactor having an RF bias electrode' [patent_app_type] => B1 [patent_app_number] => 09/563825 [patent_app_country] => US [patent_app_date] => 2000-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 20 [patent_no_of_words] => 12388 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/488/06488807.pdf [firstpage_image] =>[orig_patent_app_number] => 09563825 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1472650 [patent_doc_number] => 06387207 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-05-14 [patent_title] => 'Integration of remote plasma generator with semiconductor processing chamber' [patent_app_type] => B1 [patent_app_number] => 09/561325 [patent_app_country] => US [patent_app_date] => 2000-04-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 13 [patent_no_of_words] => 6539 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 170 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/387/06387207.pdf [firstpage_image] =>[orig_patent_app_number] => 09561325 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1476804 [patent_doc_number] => 06344151 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-02-05 [patent_title] => 'Gas purge protection of sensors and windows in a gas phase processing reactor' [patent_app_type] => B1 [patent_app_number] => 09/559795 [patent_app_country] => US [patent_app_date] => 2000-04-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 3 [patent_no_of_words] => 3000 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/344/06344151.pdf [firstpage_image] =>[orig_patent_app_number] => 09559795 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 4359429 [patent_doc_number] => 06273992 [patent_country] => US [patent_kind] => NA [patent_issue_date] => 2001-08-14 [patent_title] => 'Method and apparatus for decomposition of silicon oxide layers for impurity analysis of silicon wafers' [patent_app_type] => 1 [patent_app_number] => 9/557356 [patent_app_country] => US [patent_app_date] => 2000-04-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 5291 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 256 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/273/06273992.pdf [firstpage_image] =>[orig_patent_app_number] => 557356 [rel_patent_id] =>[rel_patent_doc_number] =>)