Search

Thomas T. Pham

Examiner (ID: 1021, Phone: (571)270-7670 , Office: P/1713 )

Most Active Art Unit
1713
Art Unit(s)
1713
Total Applications
678
Issued Applications
307
Pending Applications
109
Abandoned Applications
276

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 18423926 [patent_doc_number] => 20230178390 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-06-08 [patent_title] => METHOD FOR ETCHING SILICON WAFER [patent_app_type] => utility [patent_app_number] => 17/924248 [patent_app_country] => US [patent_app_date] => 2021-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4320 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17924248 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/924248
METHOD FOR ETCHING SILICON WAFER Mar 1, 2021 Abandoned
Array ( [id] => 18361483 [patent_doc_number] => 20230143074 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-05-11 [patent_title] => POLISHING COMPOSITION AND POLISHING METHOD [patent_app_type] => utility [patent_app_number] => 17/911087 [patent_app_country] => US [patent_app_date] => 2021-03-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8772 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17911087 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/911087
POLISHING COMPOSITION AND POLISHING METHOD Feb 28, 2021 Pending
Array ( [id] => 17070586 [patent_doc_number] => 20210272803 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-09-02 [patent_title] => METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING APPARATUS, AND RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 17/185320 [patent_app_country] => US [patent_app_date] => 2021-02-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 15808 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17185320 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/185320
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Feb 24, 2021 Issued
Array ( [id] => 17448154 [patent_doc_number] => 20220068659 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-03 [patent_title] => WAFER PROCESSING APPARATUS AND WAFER PROCESSING METHOD USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/184279 [patent_app_country] => US [patent_app_date] => 2021-02-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9748 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17184279 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/184279
Wafer processing apparatus and wafer processing method using the same Feb 23, 2021 Issued
Array ( [id] => 18812456 [patent_doc_number] => 20230386793 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-11-30 [patent_title] => ETCHING METHOD AND ETCHING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/912943 [patent_app_country] => US [patent_app_date] => 2021-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4871 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17912943 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/912943
ETCHING METHOD AND ETCHING APPARATUS Feb 18, 2021 Pending
Array ( [id] => 17055703 [patent_doc_number] => 20210265137 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-26 [patent_title] => RECONDITIONING OF REACTIVE PROCESS CHAMBER COMPONENTS FOR REDUCED SURFACE OXIDATION [patent_app_type] => utility [patent_app_number] => 17/171894 [patent_app_country] => US [patent_app_date] => 2021-02-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7869 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -20 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17171894 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/171894
RECONDITIONING OF REACTIVE PROCESS CHAMBER COMPONENTS FOR REDUCED SURFACE OXIDATION Feb 8, 2021 Abandoned
Array ( [id] => 19376591 [patent_doc_number] => 12068171 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-08-20 [patent_title] => Method for etching oxide semiconductor film and plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 17/163102 [patent_app_country] => US [patent_app_date] => 2021-01-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 26 [patent_no_of_words] => 7309 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17163102 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/163102
Method for etching oxide semiconductor film and plasma processing apparatus Jan 28, 2021 Issued
Array ( [id] => 16995373 [patent_doc_number] => 20210233793 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-29 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/156068 [patent_app_country] => US [patent_app_date] => 2021-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7494 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 25 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17156068 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/156068
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM Jan 21, 2021 Abandoned
Array ( [id] => 17025393 [patent_doc_number] => 20210249265 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-12 [patent_title] => DEPOSITION METHOD AND DEPOSITION APPARATUS [patent_app_type] => utility [patent_app_number] => 17/155551 [patent_app_country] => US [patent_app_date] => 2021-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8133 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 190 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17155551 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/155551
Deposition method and deposition apparatus Jan 21, 2021 Issued
Array ( [id] => 18857179 [patent_doc_number] => 11854770 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2023-12-26 [patent_title] => Plasma processing with independent temperature control [patent_app_type] => utility [patent_app_number] => 17/149232 [patent_app_country] => US [patent_app_date] => 2021-01-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 16792 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 288 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17149232 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/149232
Plasma processing with independent temperature control Jan 13, 2021 Issued
Array ( [id] => 17737963 [patent_doc_number] => 20220223425 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-14 [patent_title] => BY-SITE-COMPENSATED ETCH BACK FOR LOCAL PLANARIZATION/TOPOGRAPHY ADJUSTMENT [patent_app_type] => utility [patent_app_number] => 17/144628 [patent_app_country] => US [patent_app_date] => 2021-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6505 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17144628 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/144628
By-site-compensated etch back for local planarization/topography adjustment Jan 7, 2021 Issued
Array ( [id] => 17170204 [patent_doc_number] => 20210323874 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-21 [patent_title] => METHOD OF MAKING A THERMALLY STABLE POLYCRYSTALLINE SUPER HARD CONSTRUCTION [patent_app_type] => utility [patent_app_number] => 17/133048 [patent_app_country] => US [patent_app_date] => 2020-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12788 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17133048 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/133048
METHOD OF MAKING A THERMALLY STABLE POLYCRYSTALLINE SUPER HARD CONSTRUCTION Dec 22, 2020 Abandoned
Array ( [id] => 19703101 [patent_doc_number] => 12197125 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-01-14 [patent_title] => Mask and reticle protection with atomic layer deposition (ALD) [patent_app_type] => utility [patent_app_number] => 17/130503 [patent_app_country] => US [patent_app_date] => 2020-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 9 [patent_no_of_words] => 8548 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 386 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17130503 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/130503
Mask and reticle protection with atomic layer deposition (ALD) Dec 21, 2020 Issued
Array ( [id] => 16936344 [patent_doc_number] => 20210202233 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-07-01 [patent_title] => SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/128215 [patent_app_country] => US [patent_app_date] => 2020-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8094 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17128215 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/128215
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS Dec 20, 2020 Abandoned
Array ( [id] => 20161305 [patent_doc_number] => 12387939 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-08-12 [patent_title] => Substrate processing method [patent_app_type] => utility [patent_app_number] => 17/757026 [patent_app_country] => US [patent_app_date] => 2020-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 14 [patent_no_of_words] => 2605 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 489 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17757026 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/757026
Substrate processing method Dec 2, 2020 Issued
Array ( [id] => 17038708 [patent_doc_number] => 20210255667 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-19 [patent_title] => ELECTRONIC APPARATUS AND METHOD OF MANUFACTURING THE SAME [patent_app_type] => utility [patent_app_number] => 17/090717 [patent_app_country] => US [patent_app_date] => 2020-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8861 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17090717 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/090717
Electronic apparatus and method of manufacturing the same Nov 4, 2020 Issued
Array ( [id] => 16812716 [patent_doc_number] => 20210135271 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-06 [patent_title] => METHOD OF FABRICATING POROUS WAFER BATTERY [patent_app_type] => utility [patent_app_number] => 17/087617 [patent_app_country] => US [patent_app_date] => 2020-11-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2677 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 179 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17087617 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/087617
METHOD OF FABRICATING POROUS WAFER BATTERY Nov 1, 2020 Abandoned
Array ( [id] => 16624807 [patent_doc_number] => 20210043460 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-11 [patent_title] => MANUFACTURING METHOD OF A SEMICONDUCTOR SUBSTRATE [patent_app_type] => utility [patent_app_number] => 17/079116 [patent_app_country] => US [patent_app_date] => 2020-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8249 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 130 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17079116 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/079116
MANUFACTURING METHOD OF A SEMICONDUCTOR SUBSTRATE Oct 22, 2020 Abandoned
Array ( [id] => 18097325 [patent_doc_number] => 20220415666 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-29 [patent_title] => WAFER POLISHING METHOD AND SILICON WAFER [patent_app_type] => utility [patent_app_number] => 17/777395 [patent_app_country] => US [patent_app_date] => 2020-10-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5566 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17777395 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/777395
WAFER POLISHING METHOD AND SILICON WAFER Oct 20, 2020 Pending
Array ( [id] => 17295311 [patent_doc_number] => 20210391150 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => Plasma Source Configuration [patent_app_type] => utility [patent_app_number] => 17/064978 [patent_app_country] => US [patent_app_date] => 2020-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6245 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 51 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17064978 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/064978
Plasma Source Configuration Oct 6, 2020 Abandoned
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