Search

Wayne A. Lambert

Examiner (ID: 15419, Phone: (571)270-3516 , Office: P/3745 )

Most Active Art Unit
3745
Art Unit(s)
3745
Total Applications
610
Issued Applications
362
Pending Applications
54
Abandoned Applications
202

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 7166997 [patent_doc_number] => 20050120962 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-09 [patent_title] => 'Substrate supporting table, method for producing same, and processing system' [patent_app_type] => utility [patent_app_number] => 11/032138 [patent_app_country] => US [patent_app_date] => 2005-01-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5501 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0120/20050120962.pdf [firstpage_image] =>[orig_patent_app_number] => 11032138 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/032138
Substrate supporting table, method for producing same, and processing system Jan 10, 2005 Abandoned
Array ( [id] => 5691284 [patent_doc_number] => 20060151429 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-07-13 [patent_title] => 'Plasma processing method' [patent_app_type] => utility [patent_app_number] => 11/032000 [patent_app_country] => US [patent_app_date] => 2005-01-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7461 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0151/20060151429.pdf [firstpage_image] =>[orig_patent_app_number] => 11032000 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/032000
Plasma processing method Jan 10, 2005 Abandoned
Array ( [id] => 6980689 [patent_doc_number] => 20050150757 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-07-14 [patent_title] => 'Heated and cooled vacuum chamber shield' [patent_app_type] => utility [patent_app_number] => 11/028889 [patent_app_country] => US [patent_app_date] => 2005-01-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5017 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0150/20050150757.pdf [firstpage_image] =>[orig_patent_app_number] => 11028889 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/028889
Heated and cooled vacuum chamber shield Jan 3, 2005 Abandoned
Array ( [id] => 5817657 [patent_doc_number] => 20060021970 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-02-02 [patent_title] => 'Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters' [patent_app_type] => utility [patent_app_number] => 11/023548 [patent_app_country] => US [patent_app_date] => 2004-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3230 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0021/20060021970.pdf [firstpage_image] =>[orig_patent_app_number] => 11023548 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/023548
Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters Dec 28, 2004 Abandoned
Array ( [id] => 363033 [patent_doc_number] => 07481887 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2009-01-27 [patent_title] => 'Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces' [patent_app_type] => utility [patent_app_number] => 11/027809 [patent_app_country] => US [patent_app_date] => 2004-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 5638 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 393 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/481/07481887.pdf [firstpage_image] =>[orig_patent_app_number] => 11027809 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/027809
Apparatus for controlling gas pulsing in processes for depositing materials onto micro-device workpieces Dec 28, 2004 Issued
Array ( [id] => 7047934 [patent_doc_number] => 20050183821 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-08-25 [patent_title] => 'Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters' [patent_app_type] => utility [patent_app_number] => 11/023383 [patent_app_country] => US [patent_app_date] => 2004-12-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3244 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0183/20050183821.pdf [firstpage_image] =>[orig_patent_app_number] => 11023383 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/023383
Method and apparatus for non-invasive measurement and analysis of semiconductor process parameters Dec 28, 2004 Abandoned
Array ( [id] => 7100126 [patent_doc_number] => 20050103261 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-05-19 [patent_title] => 'Epitaxially coated semiconductor wafer' [patent_app_type] => utility [patent_app_number] => 11/020947 [patent_app_country] => US [patent_app_date] => 2004-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4927 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0103/20050103261.pdf [firstpage_image] =>[orig_patent_app_number] => 11020947 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/020947
Epitaxially coated semiconductor wafer Dec 22, 2004 Abandoned
Array ( [id] => 6993182 [patent_doc_number] => 20050132957 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-23 [patent_title] => 'CARRIER BODY AND METHOD' [patent_app_type] => utility [patent_app_number] => 10/905226 [patent_app_country] => US [patent_app_date] => 2004-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3214 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0132/20050132957.pdf [firstpage_image] =>[orig_patent_app_number] => 10905226 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/905226
CARRIER BODY AND METHOD Dec 21, 2004 Abandoned
Array ( [id] => 7100476 [patent_doc_number] => 20050103439 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-05-19 [patent_title] => 'Stabilization of electronegative plasmas with feedback control of RF generator systems' [patent_app_type] => utility [patent_app_number] => 11/020376 [patent_app_country] => US [patent_app_date] => 2004-12-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4204 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0103/20050103439.pdf [firstpage_image] =>[orig_patent_app_number] => 11020376 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/020376
Stabilization of electronegative plasmas with feedback control of RF generator systems Dec 21, 2004 Abandoned
Array ( [id] => 6905754 [patent_doc_number] => 20050101149 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-05-12 [patent_title] => 'Dry etching method and apparatus for use in the LCD device' [patent_app_type] => utility [patent_app_number] => 11/014801 [patent_app_country] => US [patent_app_date] => 2004-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2583 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0101/20050101149.pdf [firstpage_image] =>[orig_patent_app_number] => 11014801 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/014801
Dry etching method and apparatus for use in the LCD device Dec 19, 2004 Issued
Array ( [id] => 7097871 [patent_doc_number] => 20050130330 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-16 [patent_title] => 'Method for etch processing with end point detection thereof' [patent_app_type] => utility [patent_app_number] => 11/008868 [patent_app_country] => US [patent_app_date] => 2004-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3460 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0130/20050130330.pdf [firstpage_image] =>[orig_patent_app_number] => 11008868 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/008868
Method for etch processing with end point detection thereof Dec 9, 2004 Issued
Array ( [id] => 4464407 [patent_doc_number] => 07942111 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2011-05-17 [patent_title] => 'Method and device for vacuum-coating a substrate' [patent_app_type] => utility [patent_app_number] => 11/008413 [patent_app_country] => US [patent_app_date] => 2004-12-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 7838 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/942/07942111.pdf [firstpage_image] =>[orig_patent_app_number] => 11008413 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/008413
Method and device for vacuum-coating a substrate Dec 8, 2004 Issued
Array ( [id] => 7166992 [patent_doc_number] => 20050120961 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-09 [patent_title] => 'Rapid thermal processing system, method for manufacuturing the same, and method for adjusting temperature' [patent_app_type] => utility [patent_app_number] => 11/005003 [patent_app_country] => US [patent_app_date] => 2004-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 26139 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0120/20050120961.pdf [firstpage_image] =>[orig_patent_app_number] => 11005003 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/005003
Rapid thermal processing system, method for manufacuturing the same, and method for adjusting temperature Dec 6, 2004 Abandoned
Array ( [id] => 5843619 [patent_doc_number] => 20060121704 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-06-08 [patent_title] => 'Plasma ion implantation system with axial electrostatic confinement' [patent_app_type] => utility [patent_app_number] => 11/005972 [patent_app_country] => US [patent_app_date] => 2004-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3873 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0121/20060121704.pdf [firstpage_image] =>[orig_patent_app_number] => 11005972 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/005972
Plasma ion implantation system with axial electrostatic confinement Dec 6, 2004 Abandoned
Array ( [id] => 389942 [patent_doc_number] => 07300537 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-11-27 [patent_title] => 'Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor' [patent_app_type] => utility [patent_app_number] => 11/000894 [patent_app_country] => US [patent_app_date] => 2004-12-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 7454 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 55 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/300/07300537.pdf [firstpage_image] =>[orig_patent_app_number] => 11000894 [rel_patent_id] =>[rel_patent_doc_number] =>)
11/000894
Productivity enhancing thermal sprayed yttria-containing coating for plasma reactor Dec 1, 2004 Issued
Array ( [id] => 6928348 [patent_doc_number] => 20050279380 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-12-22 [patent_title] => 'Method for surface cleaning' [patent_app_type] => utility [patent_app_number] => 10/998465 [patent_app_country] => US [patent_app_date] => 2004-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 26 [patent_figures_cnt] => 26 [patent_no_of_words] => 10631 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0279/20050279380.pdf [firstpage_image] =>[orig_patent_app_number] => 10998465 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/998465
Method for surface cleaning Nov 28, 2004 Issued
Array ( [id] => 5772778 [patent_doc_number] => 20060102282 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-18 [patent_title] => 'Method and apparatus for selectively filtering residue from a processing chamber' [patent_app_type] => utility [patent_app_number] => 10/990162 [patent_app_country] => US [patent_app_date] => 2004-11-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5575 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0102/20060102282.pdf [firstpage_image] =>[orig_patent_app_number] => 10990162 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/990162
Method and apparatus for selectively filtering residue from a processing chamber Nov 14, 2004 Abandoned
Array ( [id] => 7010532 [patent_doc_number] => 20050064248 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-03-24 [patent_title] => 'Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof' [patent_app_type] => utility [patent_app_number] => 10/983622 [patent_app_country] => US [patent_app_date] => 2004-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5570 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0064/20050064248.pdf [firstpage_image] =>[orig_patent_app_number] => 10983622 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/983622
Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof Nov 8, 2004 Abandoned
Array ( [id] => 6936395 [patent_doc_number] => 20050109956 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-05-26 [patent_title] => 'Precise, in-situ endpoint detection for charged particle beam processing' [patent_app_type] => utility [patent_app_number] => 10/984096 [patent_app_country] => US [patent_app_date] => 2004-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 6416 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0109/20050109956.pdf [firstpage_image] =>[orig_patent_app_number] => 10984096 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/984096
Precise, in-situ endpoint detection for charged particle beam processing Nov 8, 2004 Abandoned
Array ( [id] => 5862821 [patent_doc_number] => 20060096951 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-05-11 [patent_title] => 'APPARATUS AND METHOD FOR CONTROLLING PROCESS NON-UNIFORMITY' [patent_app_type] => utility [patent_app_number] => 10/904235 [patent_app_country] => US [patent_app_date] => 2004-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5194 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0096/20060096951.pdf [firstpage_image] =>[orig_patent_app_number] => 10904235 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/904235
APPARATUS AND METHOD FOR CONTROLLING PROCESS NON-UNIFORMITY Oct 28, 2004 Abandoned
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