
Wayne A. Lambert
Examiner (ID: 15419, Phone: (571)270-3516 , Office: P/3745 )
| Most Active Art Unit | 3745 |
| Art Unit(s) | 3745 |
| Total Applications | 610 |
| Issued Applications | 362 |
| Pending Applications | 54 |
| Abandoned Applications | 202 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 5326927
[patent_doc_number] => 20090107404
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2009-04-30
[patent_title] => 'EPITAXIAL REACTOR WITH SUSCEPTOR CONTROLLED POSITIONING'
[patent_app_type] => utility
[patent_app_number] => 11/658825
[patent_app_country] => US
[patent_app_date] => 2004-07-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 2263
[patent_no_of_claims] => 17
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0107/20090107404.pdf
[firstpage_image] =>[orig_patent_app_number] => 11658825
[rel_patent_id] =>[rel_patent_doc_number] =>) 11/658825 | EPITAXIAL REACTOR WITH SUSCEPTOR CONTROLLED POSITIONING | Jul 29, 2004 | Abandoned |
Array
(
[id] => 7029740
[patent_doc_number] => 20050028928
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-02-10
[patent_title] => 'Substrate processing apparatus and substrate processing method'
[patent_app_type] => utility
[patent_app_number] => 10/900880
[patent_app_country] => US
[patent_app_date] => 2004-07-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 12
[patent_figures_cnt] => 12
[patent_no_of_words] => 8983
[patent_no_of_claims] => 24
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0028/20050028928.pdf
[firstpage_image] =>[orig_patent_app_number] => 10900880
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/900880 | Substrate processing apparatus and substrate processing method | Jul 27, 2004 | Abandoned |
Array
(
[id] => 7058292
[patent_doc_number] => 20050000651
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-01-06
[patent_title] => 'High pressure processing chamber for semiconductor substrate'
[patent_app_type] => utility
[patent_app_number] => 10/897296
[patent_app_country] => US
[patent_app_date] => 2004-07-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
[patent_figures_cnt] => 13
[patent_no_of_words] => 5159
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0000/20050000651.pdf
[firstpage_image] =>[orig_patent_app_number] => 10897296
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/897296 | High pressure processing chamber for semiconductor substrate | Jul 20, 2004 | Issued |
Array
(
[id] => 7022288
[patent_doc_number] => 20050016682
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-01-27
[patent_title] => 'Method of setting etching parameters and system therefor'
[patent_app_type] => utility
[patent_app_number] => 10/893275
[patent_app_country] => US
[patent_app_date] => 2004-07-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 4155
[patent_no_of_claims] => 22
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0016/20050016682.pdf
[firstpage_image] =>[orig_patent_app_number] => 10893275
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/893275 | Method of setting etching parameters and system therefor | Jul 18, 2004 | Abandoned |
Array
(
[id] => 925485
[patent_doc_number] => 07316783
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2008-01-08
[patent_title] => 'Method of wiring formation and method for manufacturing electronic components'
[patent_app_type] => utility
[patent_app_number] => 10/885306
[patent_app_country] => US
[patent_app_date] => 2004-07-07
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 35
[patent_no_of_words] => 4145
[patent_no_of_claims] => 22
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 149
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/316/07316783.pdf
[firstpage_image] =>[orig_patent_app_number] => 10885306
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/885306 | Method of wiring formation and method for manufacturing electronic components | Jul 6, 2004 | Issued |
Array
(
[id] => 537972
[patent_doc_number] => 07166187
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2007-01-23
[patent_title] => 'Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling'
[patent_app_type] => utility
[patent_app_number] => 10/879463
[patent_app_country] => US
[patent_app_date] => 2004-06-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 12
[patent_no_of_words] => 7134
[patent_no_of_claims] => 7
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 240
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/166/07166187.pdf
[firstpage_image] =>[orig_patent_app_number] => 10879463
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/879463 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling | Jun 28, 2004 | Issued |
Array
(
[id] => 7275853
[patent_doc_number] => 20040235304
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-11-25
[patent_title] => 'Plasma treatment apparatus'
[patent_app_type] => new
[patent_app_number] => 10/876735
[patent_app_country] => US
[patent_app_date] => 2004-06-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 25
[patent_figures_cnt] => 25
[patent_no_of_words] => 8594
[patent_no_of_claims] => 18
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 110
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0235/20040235304.pdf
[firstpage_image] =>[orig_patent_app_number] => 10876735
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/876735 | Plasma treatment apparatus | Jun 27, 2004 | Abandoned |
Array
(
[id] => 7015352
[patent_doc_number] => 20050217794
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-10-06
[patent_title] => 'Semiconductor manufacturing apparatus and method for assisting monitoring and analysis of the same'
[patent_app_type] => utility
[patent_app_number] => 10/875232
[patent_app_country] => US
[patent_app_date] => 2004-06-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 4569
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 8
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0217/20050217794.pdf
[firstpage_image] =>[orig_patent_app_number] => 10875232
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/875232 | Semiconductor manufacturing apparatus and method for assisting monitoring and analysis of the same | Jun 24, 2004 | Abandoned |
Array
(
[id] => 7275852
[patent_doc_number] => 20040235303
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-11-25
[patent_title] => 'Endpoint determination of process residues in wafer-less auto clean process using optical emission spectroscopy'
[patent_app_type] => new
[patent_app_number] => 10/876442
[patent_app_country] => US
[patent_app_date] => 2004-06-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 8889
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 153
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0235/20040235303.pdf
[firstpage_image] =>[orig_patent_app_number] => 10876442
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/876442 | Endpoint determination of process residues in wafer-less auto clean process using optical emission spectroscopy | Jun 24, 2004 | Abandoned |
Array
(
[id] => 6974855
[patent_doc_number] => 20050284570
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-12-29
[patent_title] => 'Diagnostic plasma measurement device having patterned sensors and features'
[patent_app_type] => utility
[patent_app_number] => 10/875954
[patent_app_country] => US
[patent_app_date] => 2004-06-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
[patent_figures_cnt] => 13
[patent_no_of_words] => 7172
[patent_no_of_claims] => 34
[patent_no_of_ind_claims] => 4
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0284/20050284570.pdf
[firstpage_image] =>[orig_patent_app_number] => 10875954
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/875954 | Diagnostic plasma measurement device having patterned sensors and features | Jun 23, 2004 | Abandoned |
Array
(
[id] => 173422
[patent_doc_number] => 07658801
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2010-02-09
[patent_title] => 'Heat treatment apparatus'
[patent_app_type] => utility
[patent_app_number] => 10/561017
[patent_app_country] => US
[patent_app_date] => 2004-06-22
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 8
[patent_no_of_words] => 6160
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 261
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/658/07658801.pdf
[firstpage_image] =>[orig_patent_app_number] => 10561017
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/561017 | Heat treatment apparatus | Jun 21, 2004 | Issued |
Array
(
[id] => 6928421
[patent_doc_number] => 20050279453
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-12-22
[patent_title] => 'System and methods for surface cleaning'
[patent_app_type] => utility
[patent_app_number] => 10/870646
[patent_app_country] => US
[patent_app_date] => 2004-06-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 26
[patent_figures_cnt] => 26
[patent_no_of_words] => 10591
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 5
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0279/20050279453.pdf
[firstpage_image] =>[orig_patent_app_number] => 10870646
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/870646 | System and methods for surface cleaning | Jun 16, 2004 | Abandoned |
Array
(
[id] => 7022129
[patent_doc_number] => 20050016568
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-01-27
[patent_title] => 'Apparatus and method for cleaning of semiconductor device manufacturing equipment'
[patent_app_type] => utility
[patent_app_number] => 10/870309
[patent_app_country] => US
[patent_app_date] => 2004-06-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 4
[patent_no_of_words] => 2377
[patent_no_of_claims] => 25
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0016/20050016568.pdf
[firstpage_image] =>[orig_patent_app_number] => 10870309
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/870309 | Apparatus and method for cleaning of semiconductor device manufacturing equipment | Jun 15, 2004 | Abandoned |
Array
(
[id] => 8444537
[patent_doc_number] => 08286581
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2012-10-16
[patent_title] => 'High frequency power source and its control method, and plasma processing apparatus'
[patent_app_type] => utility
[patent_app_number] => 10/864538
[patent_app_country] => US
[patent_app_date] => 2004-06-10
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 9
[patent_no_of_words] => 6987
[patent_no_of_claims] => 5
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 229
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 10864538
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/864538 | High frequency power source and its control method, and plasma processing apparatus | Jun 9, 2004 | Issued |
Array
(
[id] => 7359824
[patent_doc_number] => 20040216678
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2004-11-04
[patent_title] => 'Wafer Holder for Semiconductor Manufacturing Equipment and Semiconductor Manufacturing Equipment in Which It Is Installed'
[patent_app_type] => new
[patent_app_number] => 10/709957
[patent_app_country] => US
[patent_app_date] => 2004-06-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 3
[patent_no_of_words] => 7368
[patent_no_of_claims] => 8
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 50
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0216/20040216678.pdf
[firstpage_image] =>[orig_patent_app_number] => 10709957
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/709957 | Wafer Holder for Semiconductor Manufacturing Equipment and Semiconductor Manufacturing Equipment in Which It Is Installed | Jun 8, 2004 | Abandoned |
Array
(
[id] => 6925540
[patent_doc_number] => 20050238795
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-10-27
[patent_title] => 'Method and arrangement for the regulation of the layer thickness of a coating material on a web moved in its longitudinal direction'
[patent_app_type] => utility
[patent_app_number] => 10/855984
[patent_app_country] => US
[patent_app_date] => 2004-05-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 2527
[patent_no_of_claims] => 16
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0238/20050238795.pdf
[firstpage_image] =>[orig_patent_app_number] => 10855984
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/855984 | Method and arrangement for the regulation of the layer thickness of a coating material on a web moved in its longitudinal direction | May 25, 2004 | Abandoned |
Array
(
[id] => 386280
[patent_doc_number] => 07303648
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2007-12-04
[patent_title] => 'Via etch process'
[patent_app_type] => utility
[patent_app_number] => 10/854541
[patent_app_country] => US
[patent_app_date] => 2004-05-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 3
[patent_figures_cnt] => 8
[patent_no_of_words] => 1160
[patent_no_of_claims] => 10
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 155
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] => patents/07/303/07303648.pdf
[firstpage_image] =>[orig_patent_app_number] => 10854541
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/854541 | Via etch process | May 24, 2004 | Issued |
Array
(
[id] => 7058069
[patent_doc_number] => 20050000428
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-01-06
[patent_title] => 'Method and apparatus for vaporizing and delivering reactant'
[patent_app_type] => utility
[patent_app_number] => 10/846206
[patent_app_country] => US
[patent_app_date] => 2004-05-14
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 10
[patent_no_of_words] => 8165
[patent_no_of_claims] => 25
[patent_no_of_ind_claims] => 6
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0000/20050000428.pdf
[firstpage_image] =>[orig_patent_app_number] => 10846206
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/846206 | Method and apparatus for vaporizing and delivering reactant | May 13, 2004 | Abandoned |
Array
(
[id] => 7058181
[patent_doc_number] => 20050000540
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2005-01-06
[patent_title] => ' In Situ module for particle removal from solid-state surfaces'
[patent_app_type] => utility
[patent_app_number] => 10/845377
[patent_app_country] => US
[patent_app_date] => 2004-05-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 10
[patent_no_of_words] => 4291
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0000/20050000540.pdf
[firstpage_image] =>[orig_patent_app_number] => 10845377
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/845377 | In situ module for particle removal from solid-state surfaces | May 12, 2004 | Issued |
Array
(
[id] => 5222186
[patent_doc_number] => 20070251452
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2007-11-01
[patent_title] => 'Processing Apparatus Using Source Gas and Reactive Gas'
[patent_app_type] => utility
[patent_app_number] => 10/555813
[patent_app_country] => US
[patent_app_date] => 2004-05-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 10
[patent_no_of_words] => 11381
[patent_no_of_claims] => 23
[patent_no_of_ind_claims] => 7
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] => publications/A1/0251/20070251452.pdf
[firstpage_image] =>[orig_patent_app_number] => 10555813
[rel_patent_id] =>[rel_patent_doc_number] =>) 10/555813 | Processing Apparatus Using Source Gas and Reactive Gas | May 12, 2004 | Abandoned |