Wayne A. Lambert

Array ( [id] => 7143681 [patent_doc_number] => 20040169012 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-02 [patent_title] => 'Cleaning of semiconductor wafers by contaminate encapsulation' [patent_app_type] => new [patent_app_number] => 10/798816 [patent_app_country] => US [patent_app_date] => 2004-03-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3580 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0169/20040169012.pdf [firstpage_image] =>[orig_patent_app_number] => 10798816 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7029760 [patent_doc_number] => 20050028934 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-02-10 [patent_title] => 'Apparatus and method for plasma etching' [patent_app_type] => utility [patent_app_number] => 10/793886 [patent_app_country] => US [patent_app_date] => 2004-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 10244 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0028/20050028934.pdf [firstpage_image] =>[orig_patent_app_number] => 10793886 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7142979 [patent_doc_number] => 20040168632 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-02 [patent_title] => 'Manufacturing system in electronic devices' [patent_app_type] => new [patent_app_number] => 10/794057 [patent_app_country] => US [patent_app_date] => 2004-03-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 13143 [patent_no_of_claims] => 60 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 54 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0168/20040168632.pdf [firstpage_image] =>[orig_patent_app_number] => 10794057 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6942047 [patent_doc_number] => 20050194095 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-09-08 [patent_title] => 'Semiconductor production apparatus' [patent_app_type] => utility [patent_app_number] => 10/790185 [patent_app_country] => US [patent_app_date] => 2004-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 10386 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0194/20050194095.pdf [firstpage_image] =>[orig_patent_app_number] => 10790185 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7212945 [patent_doc_number] => 20050054205 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-03-10 [patent_title] => 'Mask trimming apparatus and mask trimming method' [patent_app_type] => utility [patent_app_number] => 10/790212 [patent_app_country] => US [patent_app_date] => 2004-03-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 3925 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0054/20050054205.pdf [firstpage_image] =>[orig_patent_app_number] => 10790212 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7372696 [patent_doc_number] => 20040177922 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-16 [patent_title] => 'Method and apparatus for monitoring plasma conditions using a monitoring ring' [patent_app_type] => new [patent_app_number] => 10/788328 [patent_app_country] => US [patent_app_date] => 2004-03-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 1953 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 62 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0177/20040177922.pdf [firstpage_image] =>[orig_patent_app_number] => 10788328 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7465173 [patent_doc_number] => 20040166598 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-08-26 [patent_title] => 'processing method' [patent_app_type] => new [patent_app_number] => 10/779742 [patent_app_country] => US [patent_app_date] => 2004-02-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 10849 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 35 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0166/20040166598.pdf [firstpage_image] =>[orig_patent_app_number] => 10779742 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7429515 [patent_doc_number] => 20040161941 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-08-19 [patent_title] => 'Aspect ratio controlled etch selectivity using time modulated DC bias voltage' [patent_app_type] => new [patent_app_number] => 10/779843 [patent_app_country] => US [patent_app_date] => 2004-02-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4622 [patent_no_of_claims] => 63 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0161/20040161941.pdf [firstpage_image] =>[orig_patent_app_number] => 10779843 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7426173 [patent_doc_number] => 20040161533 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-08-19 [patent_title] => 'Processing apparatus, exhaust processing process and plasma processing process' [patent_app_type] => new [patent_app_number] => 10/776173 [patent_app_country] => US [patent_app_date] => 2004-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 30 [patent_figures_cnt] => 30 [patent_no_of_words] => 32073 [patent_no_of_claims] => 55 [patent_no_of_ind_claims] => 10 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0161/20040161533.pdf [firstpage_image] =>[orig_patent_app_number] => 10776173 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7443106 [patent_doc_number] => 20040185664 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-23 [patent_title] => 'Method of and apparatus for manufacturing a semiconductor device using a polysilicon hard mask' [patent_app_type] => new [patent_app_number] => 10/766932 [patent_app_country] => US [patent_app_date] => 2004-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4654 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0185/20040185664.pdf [firstpage_image] =>[orig_patent_app_number] => 10766932 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5831555 [patent_doc_number] => 20060243385 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-11-02 [patent_title] => 'Device for producing electroconductive passages in a semiconductor wafer by means of thermomigration' [patent_app_type] => utility [patent_app_number] => 10/542662 [patent_app_country] => US [patent_app_date] => 2004-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 8166 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0243/20060243385.pdf [firstpage_image] =>[orig_patent_app_number] => 10542662 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7035920 [patent_doc_number] => 20050155718 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-07-21 [patent_title] => 'Step edge insert ring for etch chamber' [patent_app_type] => utility [patent_app_number] => 10/761881 [patent_app_country] => US [patent_app_date] => 2004-01-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3091 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0155/20050155718.pdf [firstpage_image] =>[orig_patent_app_number] => 10761881 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7283102 [patent_doc_number] => 20040144493 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-07-29 [patent_title] => 'Moveable barrier for multiple etch processes' [patent_app_type] => new [patent_app_number] => 10/758629 [patent_app_country] => US [patent_app_date] => 2004-01-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3893 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0144/20040144493.pdf [firstpage_image] =>[orig_patent_app_number] => 10758629 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 90888 [patent_doc_number] => 07736462 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-06-15 [patent_title] => 'Installation for processing a substrate' [patent_app_type] => utility [patent_app_number] => 10/542075 [patent_app_country] => US [patent_app_date] => 2004-01-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 5 [patent_no_of_words] => 7360 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/736/07736462.pdf [firstpage_image] =>[orig_patent_app_number] => 10542075 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7282921 [patent_doc_number] => 20040144312 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-07-29 [patent_title] => 'Systems for producing semiconductors and members therefor' [patent_app_type] => new [patent_app_number] => 10/753625 [patent_app_country] => US [patent_app_date] => 2004-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4478 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 29 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0144/20040144312.pdf [firstpage_image] =>[orig_patent_app_number] => 10753625 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7331627 [patent_doc_number] => 20040187790 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-30 [patent_title] => 'Substrate holder' [patent_app_type] => new [patent_app_number] => 10/748305 [patent_app_country] => US [patent_app_date] => 2003-12-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4473 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0187/20040187790.pdf [firstpage_image] =>[orig_patent_app_number] => 10748305 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6993390 [patent_doc_number] => 20050133165 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-06-23 [patent_title] => 'Apparatus for the prevention of arcing in a CVD-TiN chamber' [patent_app_type] => utility [patent_app_number] => 10/744715 [patent_app_country] => US [patent_app_date] => 2003-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2149 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0133/20050133165.pdf [firstpage_image] =>[orig_patent_app_number] => 10744715 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7415661 [patent_doc_number] => 20040182316 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-23 [patent_title] => 'Processing equipment and processing method' [patent_app_type] => new [patent_app_number] => 10/743314 [patent_app_country] => US [patent_app_date] => 2003-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 15 [patent_no_of_words] => 12429 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0182/20040182316.pdf [firstpage_image] =>[orig_patent_app_number] => 10743314 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 531006 [patent_doc_number] => 07172675 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-02-06 [patent_title] => 'Observation window of plasma processing apparatus and plasma processing apparatus using the same' [patent_app_type] => utility [patent_app_number] => 10/742779 [patent_app_country] => US [patent_app_date] => 2003-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 8 [patent_no_of_words] => 5327 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 288 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/172/07172675.pdf [firstpage_image] =>[orig_patent_app_number] => 10742779 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 32225 [patent_doc_number] => 07785441 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-08-31 [patent_title] => 'Plasma generator, plasma control method, and method of producing substrate' [patent_app_type] => utility [patent_app_number] => 10/539254 [patent_app_country] => US [patent_app_date] => 2003-12-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 29 [patent_no_of_words] => 10182 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/785/07785441.pdf [firstpage_image] =>[orig_patent_app_number] => 10539254 [rel_patent_id] =>[rel_patent_doc_number] =>)