Wayne A. Lambert

Array ( [id] => 7150226 [patent_doc_number] => 20040171273 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-09-02 [patent_title] => 'Specimen surface processing apparatus and surface processing method' [patent_app_type] => new [patent_app_number] => 10/375093 [patent_app_country] => US [patent_app_date] => 2003-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4822 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 67 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0171/20040171273.pdf [firstpage_image] =>[orig_patent_app_number] => 10375093 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7287356 [patent_doc_number] => 20040147131 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-07-29 [patent_title] => 'Plasma processing apparatus and plasma processing method' [patent_app_type] => new [patent_app_number] => 10/373097 [patent_app_country] => US [patent_app_date] => 2003-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 7534 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0147/20040147131.pdf [firstpage_image] =>[orig_patent_app_number] => 10373097 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7366819 [patent_doc_number] => 20040026372 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-02-12 [patent_title] => 'Plasma treatment method and apparatus' [patent_app_type] => new [patent_app_number] => 10/367246 [patent_app_country] => US [patent_app_date] => 2003-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 23 [patent_no_of_words] => 11921 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 131 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0026/20040026372.pdf [firstpage_image] =>[orig_patent_app_number] => 10367246 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7439739 [patent_doc_number] => 20040050495 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-18 [patent_title] => 'Plasma processing apparatus and plasma processing method' [patent_app_type] => new [patent_app_number] => 10/364464 [patent_app_country] => US [patent_app_date] => 2003-02-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4858 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0050/20040050495.pdf [firstpage_image] =>[orig_patent_app_number] => 10364464 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6737554 [patent_doc_number] => 20030154922 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-08-21 [patent_title] => 'C-chuck insulator strip' [patent_app_type] => new [patent_app_number] => 10/365950 [patent_app_country] => US [patent_app_date] => 2003-02-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2049 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 50 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0154/20030154922.pdf [firstpage_image] =>[orig_patent_app_number] => 10365950 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7364131 [patent_doc_number] => 20040025790 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-02-12 [patent_title] => 'Apparatus for supplying cooling gas in semiconductor device manufacturing equipment' [patent_app_type] => new [patent_app_number] => 10/360644 [patent_app_country] => US [patent_app_date] => 2003-02-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3365 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 279 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0025/20040025790.pdf [firstpage_image] =>[orig_patent_app_number] => 10360644 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7215693 [patent_doc_number] => 20040154647 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-08-12 [patent_title] => 'Method and apparatus of utilizing a coating for enhanced holding of a semiconductor substrate during high pressure processing' [patent_app_type] => new [patent_app_number] => 10/359965 [patent_app_country] => US [patent_app_date] => 2003-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3914 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0154/20040154647.pdf [firstpage_image] =>[orig_patent_app_number] => 10359965 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5627868 [patent_doc_number] => 20060144336 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-07-06 [patent_title] => 'Heater of chemical vapor deposition apparatus for manfuacturing a thin film' [patent_app_type] => utility [patent_app_number] => 10/544602 [patent_app_country] => US [patent_app_date] => 2003-02-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 1919 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0144/20060144336.pdf [firstpage_image] =>[orig_patent_app_number] => 10544602 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7256421 [patent_doc_number] => 20040149226 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-08-05 [patent_title] => 'Substrate clamp ring with removable contract pads' [patent_app_type] => new [patent_app_number] => 10/356260 [patent_app_country] => US [patent_app_date] => 2003-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 3518 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 35 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0149/20040149226.pdf [firstpage_image] =>[orig_patent_app_number] => 10356260 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6694380 [patent_doc_number] => 20030106574 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-06-12 [patent_title] => 'Clean method and apparatus for vacuum holding of substrates' [patent_app_type] => new [patent_app_number] => 10/349265 [patent_app_country] => US [patent_app_date] => 2003-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4652 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0106/20030106574.pdf [firstpage_image] =>[orig_patent_app_number] => 10349265 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6703652 [patent_doc_number] => 20030150386 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-08-14 [patent_title] => 'Apparatus for fabricating a semiconductor device' [patent_app_type] => new [patent_app_number] => 10/345190 [patent_app_country] => US [patent_app_date] => 2003-01-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 4062 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0150/20030150386.pdf [firstpage_image] =>[orig_patent_app_number] => 10345190 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6694453 [patent_doc_number] => 20030106647 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-06-12 [patent_title] => 'Apparatus for holding an object to be processed' [patent_app_type] => new [patent_app_number] => 10/345294 [patent_app_country] => US [patent_app_date] => 2003-01-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4737 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0106/20030106647.pdf [firstpage_image] =>[orig_patent_app_number] => 10345294 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 707232 [patent_doc_number] => 07060422 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-06-13 [patent_title] => 'Method of supercritical processing of a workpiece' [patent_app_type] => utility [patent_app_number] => 10/346445 [patent_app_country] => US [patent_app_date] => 2003-01-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5585 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/060/07060422.pdf [firstpage_image] =>[orig_patent_app_number] => 10346445 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 848778 [patent_doc_number] => 07381293 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2008-06-03 [patent_title] => 'Convex insert ring for etch chamber' [patent_app_type] => utility [patent_app_number] => 10/340185 [patent_app_country] => US [patent_app_date] => 2003-01-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 12 [patent_no_of_words] => 2930 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 134 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/381/07381293.pdf [firstpage_image] =>[orig_patent_app_number] => 10340185 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7355425 [patent_doc_number] => 20040003896 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-01-08 [patent_title] => 'Controller for plasma processing apparatus performing good etching process' [patent_app_type] => new [patent_app_number] => 10/337343 [patent_app_country] => US [patent_app_date] => 2003-01-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4641 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 233 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0003/20040003896.pdf [firstpage_image] =>[orig_patent_app_number] => 10337343 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6767496 [patent_doc_number] => 20030213436 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-20 [patent_title] => 'Batch type atomic layer deposition apparatus' [patent_app_type] => new [patent_app_number] => 10/331729 [patent_app_country] => US [patent_app_date] => 2002-12-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5191 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 106 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0213/20030213436.pdf [firstpage_image] =>[orig_patent_app_number] => 10331729 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7675212 [patent_doc_number] => 20040126906 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-07-01 [patent_title] => 'Method and apparatus for monitoring a material processing system' [patent_app_type] => new [patent_app_number] => 10/331332 [patent_app_country] => US [patent_app_date] => 2002-12-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 7465 [patent_no_of_claims] => 84 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0126/20040126906.pdf [firstpage_image] =>[orig_patent_app_number] => 10331332 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7675087 [patent_doc_number] => 20040127031 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-07-01 [patent_title] => 'Method and apparatus for monitoring a plasma in a material processing system' [patent_app_type] => new [patent_app_number] => 10/331341 [patent_app_country] => US [patent_app_date] => 2002-12-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 7234 [patent_no_of_claims] => 85 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0127/20040127031.pdf [firstpage_image] =>[orig_patent_app_number] => 10331341 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7675088 [patent_doc_number] => 20040127030 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-07-01 [patent_title] => 'Method and apparatus for monitoring a material processing system' [patent_app_type] => new [patent_app_number] => 10/331330 [patent_app_country] => US [patent_app_date] => 2002-12-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 7698 [patent_no_of_claims] => 85 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0127/20040127030.pdf [firstpage_image] =>[orig_patent_app_number] => 10331330 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7058090 [patent_doc_number] => 20050000449 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2005-01-06 [patent_title] => 'Susceptor for epitaxial growth and epitaxial growth method' [patent_app_type] => utility [patent_app_number] => 10/483809 [patent_app_country] => US [patent_app_date] => 2002-12-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 11195 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20050000449.pdf [firstpage_image] =>[orig_patent_app_number] => 10483809 [rel_patent_id] =>[rel_patent_doc_number] =>)