Search

Wayne A. Lambert

Examiner (ID: 15419, Phone: (571)270-3516 , Office: P/3745 )

Most Active Art Unit
3745
Art Unit(s)
3745
Total Applications
610
Issued Applications
362
Pending Applications
54
Abandoned Applications
202

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 7278279 [patent_doc_number] => 20040060656 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-04-01 [patent_title] => 'Method and apparatus for an improved bellows shield in a plasma processing system' [patent_app_type] => new [patent_app_number] => 10/259306 [patent_app_country] => US [patent_app_date] => 2002-09-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3943 [patent_no_of_claims] => 61 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0060/20040060656.pdf [firstpage_image] =>[orig_patent_app_number] => 10259306 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/259306
Method and apparatus for an improved bellows shield in a plasma processing system Sep 29, 2002 Issued
Array ( [id] => 1315549 [patent_doc_number] => 06605177 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-08-12 [patent_title] => 'Substrate support with gas feed-through and method' [patent_app_type] => B2 [patent_app_number] => 10/256441 [patent_app_country] => US [patent_app_date] => 2002-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 12 [patent_no_of_words] => 5974 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/605/06605177.pdf [firstpage_image] =>[orig_patent_app_number] => 10256441 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/256441
Substrate support with gas feed-through and method Sep 26, 2002 Issued
Array ( [id] => 7185697 [patent_doc_number] => 20040083976 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-06 [patent_title] => 'Modified deposition ring to eliminate backside and wafer edge coating' [patent_app_type] => new [patent_app_number] => 10/255545 [patent_app_country] => US [patent_app_date] => 2002-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2462 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0083/20040083976.pdf [firstpage_image] =>[orig_patent_app_number] => 10255545 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/255545
Modified deposition ring to eliminate backside and wafer edge coating Sep 24, 2002 Abandoned
Array ( [id] => 7267123 [patent_doc_number] => 20040055708 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-25 [patent_title] => 'Apparatus and method for in-situ cleaning of borosilicate (BSG) and borophosphosilicate (BPSG) films from CVD chambers' [patent_app_type] => new [patent_app_number] => 10/253206 [patent_app_country] => US [patent_app_date] => 2002-09-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4019 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0055/20040055708.pdf [firstpage_image] =>[orig_patent_app_number] => 10253206 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/253206
Apparatus and method for in-situ cleaning of borosilicate (BSG) and borophosphosilicate (BPSG) films from CVD chambers Sep 23, 2002 Abandoned
Array ( [id] => 435543 [patent_doc_number] => 07261796 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-08-28 [patent_title] => 'Method and apparatus for aligning a machine tool' [patent_app_type] => utility [patent_app_number] => 10/252910 [patent_app_country] => US [patent_app_date] => 2002-09-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 2953 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/261/07261796.pdf [firstpage_image] =>[orig_patent_app_number] => 10252910 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/252910
Method and apparatus for aligning a machine tool Sep 22, 2002 Issued
Array ( [id] => 445001 [patent_doc_number] => 07252738 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-08-07 [patent_title] => 'Apparatus for reducing polymer deposition on a substrate and substrate support' [patent_app_type] => utility [patent_app_number] => 10/251179 [patent_app_country] => US [patent_app_date] => 2002-09-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 6 [patent_no_of_words] => 3163 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/252/07252738.pdf [firstpage_image] =>[orig_patent_app_number] => 10251179 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/251179
Apparatus for reducing polymer deposition on a substrate and substrate support Sep 19, 2002 Issued
Array ( [id] => 7267124 [patent_doc_number] => 20040055709 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-25 [patent_title] => 'Electrostatic chuck having a low level of particle generation and method of fabricating same' [patent_app_type] => new [patent_app_number] => 10/247499 [patent_app_country] => US [patent_app_date] => 2002-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3879 [patent_no_of_claims] => 38 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 32 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0055/20040055709.pdf [firstpage_image] =>[orig_patent_app_number] => 10247499 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/247499
Electrostatic chuck having a low level of particle generation and method of fabricating same Sep 18, 2002 Abandoned
Array ( [id] => 6718127 [patent_doc_number] => 20030051814 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-20 [patent_title] => 'Manufacturing apparatus of a semiconductor device having a sensing system' [patent_app_type] => new [patent_app_number] => 10/246254 [patent_app_country] => US [patent_app_date] => 2002-09-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3274 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0051/20030051814.pdf [firstpage_image] =>[orig_patent_app_number] => 10246254 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/246254
Manufacturing apparatus of a semiconductor device having a sensing system Sep 16, 2002 Abandoned
Array ( [id] => 6771956 [patent_doc_number] => 20030015294 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-23 [patent_title] => 'Rapid heating and cooling of workpiece chucks' [patent_app_type] => new [patent_app_number] => 10/244713 [patent_app_country] => US [patent_app_date] => 2002-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 6280 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0015/20030015294.pdf [firstpage_image] =>[orig_patent_app_number] => 10244713 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/244713
Rapid heating and cooling of workpiece chucks Sep 15, 2002 Abandoned
Array ( [id] => 6838942 [patent_doc_number] => 20030036282 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-20 [patent_title] => 'Etching end point judging device' [patent_app_type] => new [patent_app_number] => 10/242425 [patent_app_country] => US [patent_app_date] => 2002-09-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 11836 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0036/20030036282.pdf [firstpage_image] =>[orig_patent_app_number] => 10242425 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/242425
Etching end point judging device Sep 12, 2002 Abandoned
Array ( [id] => 1020533 [patent_doc_number] => 06887317 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-05-03 [patent_title] => 'Reduced friction lift pin' [patent_app_type] => utility [patent_app_number] => 10/241005 [patent_app_country] => US [patent_app_date] => 2002-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 2279 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/887/06887317.pdf [firstpage_image] =>[orig_patent_app_number] => 10241005 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/241005
Reduced friction lift pin Sep 9, 2002 Issued
Array ( [id] => 6671121 [patent_doc_number] => 20030056724 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-27 [patent_title] => 'Manufacturing device for substrate with transparent conductive film' [patent_app_type] => new [patent_app_number] => 10/149728 [patent_app_country] => US [patent_app_date] => 2002-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 5696 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 23 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0056/20030056724.pdf [firstpage_image] =>[orig_patent_app_number] => 10149728 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/149728
Manufacturing device for substrate with transparent conductive film Sep 5, 2002 Abandoned
Array ( [id] => 978482 [patent_doc_number] => 06929712 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-08-16 [patent_title] => 'Plasma processing apparatus capable of evaluating process performance' [patent_app_type] => utility [patent_app_number] => 10/235783 [patent_app_country] => US [patent_app_date] => 2002-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 27 [patent_figures_cnt] => 30 [patent_no_of_words] => 14219 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 141 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/929/06929712.pdf [firstpage_image] =>[orig_patent_app_number] => 10235783 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/235783
Plasma processing apparatus capable of evaluating process performance Sep 5, 2002 Issued
Array ( [id] => 6752872 [patent_doc_number] => 20030000648 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-02 [patent_title] => ' Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates ' [patent_app_type] => new [patent_app_number] => 10/234135 [patent_app_country] => US [patent_app_date] => 2002-09-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7051 [patent_no_of_claims] => 42 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20030000648.pdf [firstpage_image] =>[orig_patent_app_number] => 10234135 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/234135
Process chamber used in manufacture of semiconductor device, capable of reducing contamination by particulates Sep 4, 2002 Abandoned
Array ( [id] => 6778856 [patent_doc_number] => 20030049937 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-13 [patent_title] => 'Apparatus and method for surface treatment to substrate' [patent_app_type] => new [patent_app_number] => 10/233440 [patent_app_country] => US [patent_app_date] => 2002-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6043 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0049/20030049937.pdf [firstpage_image] =>[orig_patent_app_number] => 10233440 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/233440
Apparatus and method for surface treatment to substrate Sep 3, 2002 Abandoned
Array ( [id] => 7129271 [patent_doc_number] => 20040040509 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Apparatus and method for preventing etchant condensation on wafer in a cooling chamber' [patent_app_type] => new [patent_app_number] => 10/235120 [patent_app_country] => US [patent_app_date] => 2002-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3062 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040509.pdf [firstpage_image] =>[orig_patent_app_number] => 10235120 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/235120
Apparatus and method for preventing etchant condensation on wafer in a cooling chamber Sep 3, 2002 Abandoned
Array ( [id] => 7129272 [patent_doc_number] => 20040040510 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Semiconductor wafer susceptor' [patent_app_type] => new [patent_app_number] => 10/233483 [patent_app_country] => US [patent_app_date] => 2002-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 3082 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040510.pdf [firstpage_image] =>[orig_patent_app_number] => 10233483 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/233483
Semiconductor wafer susceptor Sep 3, 2002 Issued
Array ( [id] => 6686110 [patent_doc_number] => 20030029833 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-13 [patent_title] => 'High speed photoresist stripping chamber' [patent_app_type] => new [patent_app_number] => 10/204448 [patent_app_country] => US [patent_app_date] => 2002-09-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3178 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 36 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0029/20030029833.pdf [firstpage_image] =>[orig_patent_app_number] => 10204448 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/204448
High speed photoresist stripping chamber Sep 2, 2002 Abandoned
Array ( [id] => 7129538 [patent_doc_number] => 20040040658 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process' [patent_app_type] => new [patent_app_number] => 10/230309 [patent_app_country] => US [patent_app_date] => 2002-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8668 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040658.pdf [firstpage_image] =>[orig_patent_app_number] => 10230309 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/230309
Semiconductor fabricating apparatus and method and apparatus for determining state of semiconductor fabricating process Aug 28, 2002 Abandoned
Array ( [id] => 7129546 [patent_doc_number] => 20040040663 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => new [patent_app_number] => 10/230299 [patent_app_country] => US [patent_app_date] => 2002-08-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4220 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 176 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040663.pdf [firstpage_image] =>[orig_patent_app_number] => 10230299 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/230299
Plasma processing apparatus Aug 28, 2002 Abandoned
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