Search

Wayne A. Lambert

Examiner (ID: 15419, Phone: (571)270-3516 , Office: P/3745 )

Most Active Art Unit
3745
Art Unit(s)
3745
Total Applications
610
Issued Applications
362
Pending Applications
54
Abandoned Applications
202

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 6603667 [patent_doc_number] => 20030209321 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-13 [patent_title] => 'Scanning type etcher design for precision process control' [patent_app_type] => new [patent_app_number] => 10/144015 [patent_app_country] => US [patent_app_date] => 2002-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3631 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0209/20030209321.pdf [firstpage_image] =>[orig_patent_app_number] => 10144015 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/144015
Scanning type etcher design for precision process control May 12, 2002 Abandoned
Array ( [id] => 1533312 [patent_doc_number] => 06488776 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2002-12-03 [patent_title] => 'Method and apparatus for forming insitu boron doped polycrystalline and amorphous silicon films' [patent_app_type] => B2 [patent_app_number] => 10/145469 [patent_app_country] => US [patent_app_date] => 2002-05-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5248 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 188 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/488/06488776.pdf [firstpage_image] =>[orig_patent_app_number] => 10145469 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/145469
Method and apparatus for forming insitu boron doped polycrystalline and amorphous silicon films May 12, 2002 Issued
Array ( [id] => 6423928 [patent_doc_number] => 20020174953 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-11-28 [patent_title] => 'Wafer chuck having refrigerating plate serving as chucking plate' [patent_app_type] => new [patent_app_number] => 10/141824 [patent_app_country] => US [patent_app_date] => 2002-05-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4111 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 84 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0174/20020174953.pdf [firstpage_image] =>[orig_patent_app_number] => 10141824 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/141824
Wafer chuck having refrigerating plate serving as chucking plate May 9, 2002 Abandoned
Array ( [id] => 1153234 [patent_doc_number] => 06761772 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-07-13 [patent_title] => 'Workpiece support' [patent_app_type] => B2 [patent_app_number] => 10/141432 [patent_app_country] => US [patent_app_date] => 2002-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 0 [patent_no_of_words] => 2484 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 204 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/761/06761772.pdf [firstpage_image] =>[orig_patent_app_number] => 10141432 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/141432
Workpiece support May 7, 2002 Issued
Array ( [id] => 1148743 [patent_doc_number] => 06767407 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-07-27 [patent_title] => 'Auto-centering device for mechanical clamp' [patent_app_type] => B2 [patent_app_number] => 10/140733 [patent_app_country] => US [patent_app_date] => 2002-05-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 11 [patent_no_of_words] => 3053 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/767/06767407.pdf [firstpage_image] =>[orig_patent_app_number] => 10140733 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/140733
Auto-centering device for mechanical clamp May 6, 2002 Issued
Array ( [id] => 6603731 [patent_doc_number] => 20030209326 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-13 [patent_title] => 'Process and system for heating semiconductor substrates in a processing chamber containing a susceptor' [patent_app_type] => new [patent_app_number] => 10/141515 [patent_app_country] => US [patent_app_date] => 2002-05-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4600 [patent_no_of_claims] => 41 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0209/20030209326.pdf [firstpage_image] =>[orig_patent_app_number] => 10141515 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/141515
Process and system for heating semiconductor substrates in a processing chamber containing a susceptor May 6, 2002 Abandoned
Array ( [id] => 6723012 [patent_doc_number] => 20030205324 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-06 [patent_title] => 'Wafer holder with stiffening rib' [patent_app_type] => new [patent_app_number] => 10/139098 [patent_app_country] => US [patent_app_date] => 2002-05-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 6134 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 41 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0205/20030205324.pdf [firstpage_image] =>[orig_patent_app_number] => 10139098 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/139098
Wafer holder with stiffening rib May 2, 2002 Issued
Array ( [id] => 989833 [patent_doc_number] => 06918351 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-07-19 [patent_title] => 'Apparatus for ion beam implantation' [patent_app_type] => utility [patent_app_number] => 10/133140 [patent_app_country] => US [patent_app_date] => 2002-04-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 4 [patent_no_of_words] => 4840 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/918/06918351.pdf [firstpage_image] =>[orig_patent_app_number] => 10133140 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/133140
Apparatus for ion beam implantation Apr 25, 2002 Issued
Array ( [id] => 6806665 [patent_doc_number] => 20030196604 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-10-23 [patent_title] => 'Padded clamp ring with edge exclusion for deposition of thick AlCu/AlSiCu/Cu metal alloy layers' [patent_app_type] => new [patent_app_number] => 10/131455 [patent_app_country] => US [patent_app_date] => 2002-04-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3159 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0196/20030196604.pdf [firstpage_image] =>[orig_patent_app_number] => 10131455 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/131455
Padded clamp ring with edge exclusion for deposition of thick AlCu/AlSiCu/Cu metal alloy layers Apr 21, 2002 Issued
Array ( [id] => 1343114 [patent_doc_number] => 06579408 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-06-17 [patent_title] => 'Apparatus and method for etching wafer backside' [patent_app_type] => B1 [patent_app_number] => 10/127389 [patent_app_country] => US [patent_app_date] => 2002-04-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 3553 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 304 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/579/06579408.pdf [firstpage_image] =>[orig_patent_app_number] => 10127389 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/127389
Apparatus and method for etching wafer backside Apr 21, 2002 Issued
Array ( [id] => 6168848 [patent_doc_number] => 20020153104 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-24 [patent_title] => 'Plasma etching chamber and method for manufacturing photomask using the same' [patent_app_type] => new [patent_app_number] => 10/124578 [patent_app_country] => US [patent_app_date] => 2002-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3939 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0153/20020153104.pdf [firstpage_image] =>[orig_patent_app_number] => 10124578 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/124578
Plasma etching chamber and method for manufacturing photomask using the same Apr 17, 2002 Abandoned
Array ( [id] => 491584 [patent_doc_number] => 07211153 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-05-01 [patent_title] => 'Ceramic joined body, substrate holding structure and substrate processing apparatus' [patent_app_type] => utility [patent_app_number] => 10/276394 [patent_app_country] => US [patent_app_date] => 2002-04-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 12951 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 179 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/211/07211153.pdf [firstpage_image] =>[orig_patent_app_number] => 10276394 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/276394
Ceramic joined body, substrate holding structure and substrate processing apparatus Apr 10, 2002 Issued
Array ( [id] => 6685847 [patent_doc_number] => 20030029569 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-13 [patent_title] => 'Substrate processing apparatus' [patent_app_type] => new [patent_app_number] => 10/119955 [patent_app_country] => US [patent_app_date] => 2002-04-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8595 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0029/20030029569.pdf [firstpage_image] =>[orig_patent_app_number] => 10119955 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/119955
Substrate processing apparatus Apr 8, 2002 Issued
Array ( [id] => 6863304 [patent_doc_number] => 20030188830 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-10-09 [patent_title] => 'Substrate support having barrier capable of detecting fluid leakage' [patent_app_type] => new [patent_app_number] => 10/118758 [patent_app_country] => US [patent_app_date] => 2002-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4547 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0188/20030188830.pdf [firstpage_image] =>[orig_patent_app_number] => 10118758 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/118758
Substrate support having barrier capable of detecting fluid leakage Apr 7, 2002 Issued
Array ( [id] => 6863161 [patent_doc_number] => 20030188687 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-10-09 [patent_title] => 'Gas driven planetary rotation apparatus and methods for forming silicon carbide layers' [patent_app_type] => new [patent_app_number] => 10/117858 [patent_app_country] => US [patent_app_date] => 2002-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 6088 [patent_no_of_claims] => 39 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0188/20030188687.pdf [firstpage_image] =>[orig_patent_app_number] => 10117858 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/117858
Gas driven planetary rotation apparatus and methods for forming silicon carbide layers Apr 7, 2002 Issued
Array ( [id] => 5899418 [patent_doc_number] => 20020139304 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-03 [patent_title] => 'Semiconductor manufacturing apparatus' [patent_app_type] => new [patent_app_number] => 10/105437 [patent_app_country] => US [patent_app_date] => 2002-03-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5953 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 200 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0139/20020139304.pdf [firstpage_image] =>[orig_patent_app_number] => 10105437 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/105437
Semiconductor manufacturing apparatus Mar 25, 2002 Abandoned
Array ( [id] => 6152817 [patent_doc_number] => 20020144787 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-10 [patent_title] => 'Supporting structure for a ceramic susceptor' [patent_app_type] => new [patent_app_number] => 10/105881 [patent_app_country] => US [patent_app_date] => 2002-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3537 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0144/20020144787.pdf [firstpage_image] =>[orig_patent_app_number] => 10105881 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/105881
Supporting structure for a ceramic susceptor Mar 24, 2002 Issued
Array ( [id] => 6827087 [patent_doc_number] => 20030178145 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-09-25 [patent_title] => 'Closed hole edge lift pin and susceptor for wafer process chambers' [patent_app_type] => new [patent_app_number] => 10/106666 [patent_app_country] => US [patent_app_date] => 2002-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 5274 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0178/20030178145.pdf [firstpage_image] =>[orig_patent_app_number] => 10106666 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/106666
Closed hole edge lift pin and susceptor for wafer process chambers Mar 24, 2002 Abandoned
Array ( [id] => 6694452 [patent_doc_number] => 20030106646 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-06-12 [patent_title] => 'Plasma chamber insert ring' [patent_app_type] => new [patent_app_number] => 10/106008 [patent_app_country] => US [patent_app_date] => 2002-03-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5789 [patent_no_of_claims] => 76 [patent_no_of_ind_claims] => 12 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0106/20030106646.pdf [firstpage_image] =>[orig_patent_app_number] => 10106008 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/106008
Plasma chamber insert ring Mar 20, 2002 Abandoned
Array ( [id] => 6826923 [patent_doc_number] => 20030177981 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-09-25 [patent_title] => 'Anti-binding deposition ring' [patent_app_type] => new [patent_app_number] => 10/106128 [patent_app_country] => US [patent_app_date] => 2002-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2291 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0177/20030177981.pdf [firstpage_image] =>[orig_patent_app_number] => 10106128 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/106128
Anti-binding deposition ring Mar 18, 2002 Issued
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