Search

Wayne A. Lambert

Examiner (ID: 15419, Phone: (571)270-3516 , Office: P/3745 )

Most Active Art Unit
3745
Art Unit(s)
3745
Total Applications
610
Issued Applications
362
Pending Applications
54
Abandoned Applications
202

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 6209312 [patent_doc_number] => 20020072201 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-06-13 [patent_title] => 'Method for electrostatic force bonding and a system thereof' [patent_app_type] => new [patent_app_number] => 10/016782 [patent_app_country] => US [patent_app_date] => 2001-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 6987 [patent_no_of_claims] => 76 [patent_no_of_ind_claims] => 10 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0072/20020072201.pdf [firstpage_image] =>[orig_patent_app_number] => 10016782 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/016782
Method for electrostatic force bonding and a system thereof Dec 9, 2001 Issued
Array ( [id] => 6691655 [patent_doc_number] => 20030039087 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-27 [patent_title] => 'Substrate support apparatus to facilitate particle removal' [patent_app_type] => new [patent_app_number] => 10/006022 [patent_app_country] => US [patent_app_date] => 2001-12-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 7758 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0039/20030039087.pdf [firstpage_image] =>[orig_patent_app_number] => 10006022 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/006022
Substrate support apparatus to facilitate particle removal Dec 5, 2001 Abandoned
Array ( [id] => 1073277 [patent_doc_number] => 06837940 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-01-04 [patent_title] => 'Film-forming device with a substrate rotating mechanism' [patent_app_type] => utility [patent_app_number] => 10/002177 [patent_app_country] => US [patent_app_date] => 2001-12-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 8912 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 251 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/837/06837940.pdf [firstpage_image] =>[orig_patent_app_number] => 10002177 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/002177
Film-forming device with a substrate rotating mechanism Dec 4, 2001 Issued
Array ( [id] => 6858449 [patent_doc_number] => 20030089457 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-05-15 [patent_title] => 'Apparatus for controlling a thermal conductivity profile for a pedestal in a semiconductor wafer processing chamber' [patent_app_type] => new [patent_app_number] => 09/993240 [patent_app_country] => US [patent_app_date] => 2001-11-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 1937 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 31 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0089/20030089457.pdf [firstpage_image] =>[orig_patent_app_number] => 09993240 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/993240
Apparatus for controlling a thermal conductivity profile for a pedestal in a semiconductor wafer processing chamber Nov 12, 2001 Abandoned
Array ( [id] => 6304891 [patent_doc_number] => 20020094196 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-18 [patent_title] => 'Conduction heater for the BOC Edwards Auto 306 evaporator' [patent_app_type] => new [patent_app_number] => 10/010079 [patent_app_country] => US [patent_app_date] => 2001-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 4991 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 37 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0094/20020094196.pdf [firstpage_image] =>[orig_patent_app_number] => 10010079 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/010079
Conduction heater for the BOC Edwards Auto 306 evaporator Nov 8, 2001 Abandoned
Array ( [id] => 6867000 [patent_doc_number] => 20030079689 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-05-01 [patent_title] => 'Induction heating devices and methods for controllably heating an article' [patent_app_type] => new [patent_app_number] => 10/017492 [patent_app_country] => US [patent_app_date] => 2001-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 4706 [patent_no_of_claims] => 42 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 53 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0079/20030079689.pdf [firstpage_image] =>[orig_patent_app_number] => 10017492 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/017492
Induction heating devices and methods for controllably heating an article Oct 29, 2001 Issued
Array ( [id] => 6298801 [patent_doc_number] => 20020092602 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-18 [patent_title] => 'Quartz glass wafer support jig and method for producing the same' [patent_app_type] => new [patent_app_number] => 10/012224 [patent_app_country] => US [patent_app_date] => 2001-10-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3263 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0092/20020092602.pdf [firstpage_image] =>[orig_patent_app_number] => 10012224 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/012224
Quartz glass wafer support jig and method for producing the same Oct 29, 2001 Abandoned
Array ( [id] => 993301 [patent_doc_number] => 06916400 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-07-12 [patent_title] => 'Device for the plasma treatment of gases' [patent_app_type] => utility [patent_app_number] => 09/983853 [patent_app_country] => US [patent_app_date] => 2001-10-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 19 [patent_no_of_words] => 5443 [patent_no_of_claims] => 38 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/916/06916400.pdf [firstpage_image] =>[orig_patent_app_number] => 09983853 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/983853
Device for the plasma treatment of gases Oct 25, 2001 Issued
Array ( [id] => 6314582 [patent_doc_number] => 20020195058 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-26 [patent_title] => 'Apparatus for holding a wafer for use in a process chamber for fabricating a semiconductor device' [patent_app_type] => new [patent_app_number] => 09/983126 [patent_app_country] => US [patent_app_date] => 2001-10-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3082 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 97 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0195/20020195058.pdf [firstpage_image] =>[orig_patent_app_number] => 09983126 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/983126
Apparatus for holding a wafer for use in a process chamber for fabricating a semiconductor device Oct 22, 2001 Abandoned
Array ( [id] => 497981 [patent_doc_number] => 07204887 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-04-17 [patent_title] => 'Wafer holding, wafer support member, wafer boat and heat treatment furnace' [patent_app_type] => utility [patent_app_number] => 10/149939 [patent_app_country] => US [patent_app_date] => 2001-10-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 30 [patent_no_of_words] => 12628 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 31 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/204/07204887.pdf [firstpage_image] =>[orig_patent_app_number] => 10149939 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/149939
Wafer holding, wafer support member, wafer boat and heat treatment furnace Oct 15, 2001 Issued
Array ( [id] => 5916770 [patent_doc_number] => 20020112820 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-08-22 [patent_title] => 'Susceptors for semiconductor-producing apparatuses' [patent_app_type] => new [patent_app_number] => 09/981293 [patent_app_country] => US [patent_app_date] => 2001-10-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 2583 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 59 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0112/20020112820.pdf [firstpage_image] =>[orig_patent_app_number] => 09981293 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/981293
Susceptors for semiconductor-producing apparatuses Oct 15, 2001 Issued
Array ( [id] => 6585916 [patent_doc_number] => 20020062791 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-05-30 [patent_title] => 'Table' [patent_app_type] => new [patent_app_number] => 09/973846 [patent_app_country] => US [patent_app_date] => 2001-10-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 23 [patent_figures_cnt] => 23 [patent_no_of_words] => 6201 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 33 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0062/20020062791.pdf [firstpage_image] =>[orig_patent_app_number] => 09973846 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/973846
Table Oct 10, 2001 Abandoned
Array ( [id] => 7129540 [patent_doc_number] => 20040040660 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-03-04 [patent_title] => 'High pressure processing chamber for multiple semiconductor substrates' [patent_app_type] => new [patent_app_number] => 09/970309 [patent_app_country] => US [patent_app_date] => 2001-10-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 2508 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0040/20040040660.pdf [firstpage_image] =>[orig_patent_app_number] => 09970309 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/970309
High pressure processing chamber for multiple semiconductor substrates Oct 2, 2001 Abandoned
Array ( [id] => 6074554 [patent_doc_number] => 20020078886 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-06-27 [patent_title] => 'Silica glass jig for semiconductor industry and method for producing the same' [patent_app_type] => new [patent_app_number] => 09/962918 [patent_app_country] => US [patent_app_date] => 2001-09-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4089 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 38 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0078/20020078886.pdf [firstpage_image] =>[orig_patent_app_number] => 09962918 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/962918
Silica glass jig for semiconductor industry and method for producing the same Sep 24, 2001 Abandoned
Array ( [id] => 6718397 [patent_doc_number] => 20030052084 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-20 [patent_title] => 'In-situ or ex-situ profile monitoring of phase openings on alternating phase shifting masks by scatterometry' [patent_app_type] => new [patent_app_number] => 09/955517 [patent_app_country] => US [patent_app_date] => 2001-09-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 10204 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 51 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0052/20030052084.pdf [firstpage_image] =>[orig_patent_app_number] => 09955517 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/955517
In-situ or ex-situ profile monitoring of phase openings on alternating phase shifting masks by scatterometry Sep 17, 2001 Abandoned
Array ( [id] => 6776203 [patent_doc_number] => 20030047283 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-13 [patent_title] => 'Apparatus for supporting a substrate and method of fabricating same' [patent_app_type] => new [patent_app_number] => 09/953654 [patent_app_country] => US [patent_app_date] => 2001-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3089 [patent_no_of_claims] => 35 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 47 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0047/20030047283.pdf [firstpage_image] =>[orig_patent_app_number] => 09953654 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/953654
Apparatus for supporting a substrate and method of fabricating same Sep 9, 2001 Abandoned
Array ( [id] => 743039 [patent_doc_number] => 07025863 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-04-11 [patent_title] => 'Vacuum system with separable work piece support' [patent_app_type] => utility [patent_app_number] => 09/947454 [patent_app_country] => US [patent_app_date] => 2001-09-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 4164 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 229 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/025/07025863.pdf [firstpage_image] =>[orig_patent_app_number] => 09947454 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/947454
Vacuum system with separable work piece support Sep 4, 2001 Issued
Array ( [id] => 6074571 [patent_doc_number] => 20020078895 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-06-27 [patent_title] => 'Plasma treatment apparatus' [patent_app_type] => new [patent_app_number] => 09/924487 [patent_app_country] => US [patent_app_date] => 2001-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3284 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 55 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0078/20020078895.pdf [firstpage_image] =>[orig_patent_app_number] => 09924487 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/924487
Plasma treatment apparatus Aug 8, 2001 Abandoned
Array ( [id] => 6685663 [patent_doc_number] => 20030029384 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-13 [patent_title] => 'Rotating susceptor and method of processing substrates' [patent_app_type] => new [patent_app_number] => 09/927744 [patent_app_country] => US [patent_app_date] => 2001-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 9553 [patent_no_of_claims] => 45 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 25 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0029/20030029384.pdf [firstpage_image] =>[orig_patent_app_number] => 09927744 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/927744
Rotating susceptor Aug 8, 2001 Issued
Array ( [id] => 713956 [patent_doc_number] => 07052552 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-05-30 [patent_title] => 'Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD' [patent_app_type] => utility [patent_app_number] => 09/920891 [patent_app_country] => US [patent_app_date] => 2001-08-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 8815 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 232 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/052/07052552.pdf [firstpage_image] =>[orig_patent_app_number] => 09920891 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/920891
Gas chemistry cycling to achieve high aspect ratio gapfill with HDP-CVD Aug 1, 2001 Issued
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