Wayne A. Lambert

Array ( [id] => 491647 [patent_doc_number] => 07211170 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2007-05-01 [patent_title] => 'Twist-N-Lock wafer area pressure ring and assembly' [patent_app_type] => utility [patent_app_number] => 09/916784 [patent_app_country] => US [patent_app_date] => 2001-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 27 [patent_no_of_words] => 2530 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 380 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/211/07211170.pdf [firstpage_image] =>[orig_patent_app_number] => 09916784 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6564331 [patent_doc_number] => 20020014311 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-07 [patent_title] => 'Substrate processing apparatus and method' [patent_app_type] => new [patent_app_number] => 09/911741 [patent_app_country] => US [patent_app_date] => 2001-07-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2749 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0014/20020014311.pdf [firstpage_image] =>[orig_patent_app_number] => 09911741 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 987848 [patent_doc_number] => 06921456 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-07-26 [patent_title] => 'High pressure processing chamber for semiconductor substrate' [patent_app_type] => utility [patent_app_number] => 09/912844 [patent_app_country] => US [patent_app_date] => 2001-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 17 [patent_no_of_words] => 5163 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/921/06921456.pdf [firstpage_image] =>[orig_patent_app_number] => 09912844 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6771801 [patent_doc_number] => 20030015139 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-23 [patent_title] => 'Protective packaging' [patent_app_type] => new [patent_app_number] => 09/907406 [patent_app_country] => US [patent_app_date] => 2001-07-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3159 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 72 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0015/20030015139.pdf [firstpage_image] =>[orig_patent_app_number] => 09907406 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1271295 [patent_doc_number] => 06648977 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-11-18 [patent_title] => 'Method of producing near-net shape free standing articles by chemical vapor deposition' [patent_app_type] => B2 [patent_app_number] => 09/907374 [patent_app_country] => US [patent_app_date] => 2001-07-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 7 [patent_no_of_words] => 4377 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/648/06648977.pdf [firstpage_image] =>[orig_patent_app_number] => 09907374 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6732657 [patent_doc_number] => 20030010292 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-16 [patent_title] => 'Electrostatic chuck with dielectric coating' [patent_app_type] => new [patent_app_number] => 09/907328 [patent_app_country] => US [patent_app_date] => 2001-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3458 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 51 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0010/20030010292.pdf [firstpage_image] =>[orig_patent_app_number] => 09907328 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5799794 [patent_doc_number] => 20020008891 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-01-24 [patent_title] => 'Substrate fixture for high-yield production of thin film based dense wavelength division multiplexers' [patent_app_type] => new [patent_app_number] => 09/902408 [patent_app_country] => US [patent_app_date] => 2001-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 2945 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 36 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0008/20020008891.pdf [firstpage_image] =>[orig_patent_app_number] => 09902408 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7426068 [patent_doc_number] => 20040007560 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-01-15 [patent_title] => 'Method for predicting consumption of consumable part, method for predicting deposited-film thickness, and plasma processor' [patent_app_type] => new [patent_app_number] => 10/312909 [patent_app_country] => US [patent_app_date] => 2003-06-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3918 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 1 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0007/20040007560.pdf [firstpage_image] =>[orig_patent_app_number] => 10312909 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6752871 [patent_doc_number] => 20030000647 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-02 [patent_title] => 'Substrate processing chamber' [patent_app_type] => new [patent_app_number] => 09/895036 [patent_app_country] => US [patent_app_date] => 2001-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3352 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 10 [patent_words_short_claim] => 58 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20030000647.pdf [firstpage_image] =>[orig_patent_app_number] => 09895036 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1252169 [patent_doc_number] => 06669783 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-12-30 [patent_title] => 'High temperature electrostatic chuck' [patent_app_type] => B2 [patent_app_number] => 09/892458 [patent_app_country] => US [patent_app_date] => 2001-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 6862 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 42 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/669/06669783.pdf [firstpage_image] =>[orig_patent_app_number] => 09892458 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1030515 [patent_doc_number] => 06878210 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-04-12 [patent_title] => 'Surface-treating holder having tubular structure and method using the same' [patent_app_type] => utility [patent_app_number] => 09/883232 [patent_app_country] => US [patent_app_date] => 2001-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 7221 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/878/06878210.pdf [firstpage_image] =>[orig_patent_app_number] => 09883232 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5839688 [patent_doc_number] => 20020130061 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-09-19 [patent_title] => 'Apparatus and method of making a slip free wafer boat' [patent_app_type] => new [patent_app_number] => 09/884720 [patent_app_country] => US [patent_app_date] => 2001-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4068 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0130/20020130061.pdf [firstpage_image] =>[orig_patent_app_number] => 09884720 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6933045 [patent_doc_number] => 20010054389 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-12-27 [patent_title] => 'Electro-static chucking mechanism and surface processing apparatus' [patent_app_type] => new [patent_app_number] => 09/879934 [patent_app_country] => US [patent_app_date] => 2001-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4826 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 135 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0054/20010054389.pdf [firstpage_image] =>[orig_patent_app_number] => 09879934 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6252709 [patent_doc_number] => 20020185230 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-12 [patent_title] => 'Article holders that use gas vortices to hold an article in a desired position' [patent_app_type] => new [patent_app_number] => 09/877366 [patent_app_country] => US [patent_app_date] => 2001-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2424 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0185/20020185230.pdf [firstpage_image] =>[orig_patent_app_number] => 09877366 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7065007 [patent_doc_number] => 20010044217 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-11-22 [patent_title] => 'Plasma deposition of spin chucks to reduce contamination of silicon wafers' [patent_app_type] => new [patent_app_number] => 09/874073 [patent_app_country] => US [patent_app_date] => 2001-06-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3432 [patent_no_of_claims] => 44 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 37 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0044/20010044217.pdf [firstpage_image] =>[orig_patent_app_number] => 09874073 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1274918 [patent_doc_number] => 06645344 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-11-11 [patent_title] => 'Universal backplane assembly and methods' [patent_app_type] => B2 [patent_app_number] => 09/861322 [patent_app_country] => US [patent_app_date] => 2001-05-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 7874 [patent_no_of_claims] => 55 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 350 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/645/06645344.pdf [firstpage_image] =>[orig_patent_app_number] => 09861322 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1259653 [patent_doc_number] => 06663714 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-12-16 [patent_title] => 'CVD apparatus' [patent_app_type] => B2 [patent_app_number] => 09/858239 [patent_app_country] => US [patent_app_date] => 2001-05-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 8166 [patent_no_of_claims] => 44 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 37 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/663/06663714.pdf [firstpage_image] =>[orig_patent_app_number] => 09858239 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1294181 [patent_doc_number] => 06626997 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-09-30 [patent_title] => 'Continuous processing chamber' [patent_app_type] => B2 [patent_app_number] => 09/861415 [patent_app_country] => US [patent_app_date] => 2001-05-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 15 [patent_no_of_words] => 4753 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/626/06626997.pdf [firstpage_image] =>[orig_patent_app_number] => 09861415 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6451620 [patent_doc_number] => 20020020189 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-21 [patent_title] => 'Temperature adjustment apparatus' [patent_app_type] => new [patent_app_number] => 09/858859 [patent_app_country] => US [patent_app_date] => 2001-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3791 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0020/20020020189.pdf [firstpage_image] =>[orig_patent_app_number] => 09858859 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6997842 [patent_doc_number] => 20010052321 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-12-20 [patent_title] => 'Single-substrate-processing apparatus for semiconductor' [patent_app_type] => new [patent_app_number] => 09/855493 [patent_app_country] => US [patent_app_date] => 2001-05-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 3940 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0052/20010052321.pdf [firstpage_image] =>[orig_patent_app_number] => 09855493 [rel_patent_id] =>[rel_patent_doc_number] =>)