Search

Wayne A. Lambert

Examiner (ID: 15419, Phone: (571)270-3516 , Office: P/3745 )

Most Active Art Unit
3745
Art Unit(s)
3745
Total Applications
610
Issued Applications
362
Pending Applications
54
Abandoned Applications
202

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 6453592 [patent_doc_number] => 20020020355 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-21 [patent_title] => 'Processing apparatus' [patent_app_type] => new [patent_app_number] => 09/851330 [patent_app_country] => US [patent_app_date] => 2001-05-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 12189 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 343 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0020/20020020355.pdf [firstpage_image] =>[orig_patent_app_number] => 09851330 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/851330
Processing apparatus May 8, 2001 Abandoned
Array ( [id] => 1244730 [patent_doc_number] => 06676759 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2004-01-13 [patent_title] => 'Wafer support device in semiconductor manufacturing device' [patent_app_type] => B1 [patent_app_number] => 09/830613 [patent_app_country] => US [patent_app_date] => 2001-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 8 [patent_no_of_words] => 3192 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 167 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/676/06676759.pdf [firstpage_image] =>[orig_patent_app_number] => 09830613 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/830613
Wafer support device in semiconductor manufacturing device Apr 29, 2001 Issued
Array ( [id] => 1198901 [patent_doc_number] => 06723202 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-04-20 [patent_title] => 'Worktable device and plasma processing apparatus for semiconductor process' [patent_app_type] => B2 [patent_app_number] => 09/840178 [patent_app_country] => US [patent_app_date] => 2001-04-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 11 [patent_no_of_words] => 5765 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 159 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/723/06723202.pdf [firstpage_image] =>[orig_patent_app_number] => 09840178 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/840178
Worktable device and plasma processing apparatus for semiconductor process Apr 23, 2001 Issued
Array ( [id] => 7090280 [patent_doc_number] => 20010032588 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-10-25 [patent_title] => 'Semiconductor film deposition apparatus' [patent_app_type] => new [patent_app_number] => 09/838215 [patent_app_country] => US [patent_app_date] => 2001-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4813 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 90 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0032/20010032588.pdf [firstpage_image] =>[orig_patent_app_number] => 09838215 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/838215
Semiconductor film deposition apparatus Apr 19, 2001 Abandoned
Array ( [id] => 6886625 [patent_doc_number] => 20010019894 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-09-06 [patent_title] => 'Pre-heat step (or chamber) implemented in pr dry ash machines to effectively eliminate pr extrusion (bubble) after alloy' [patent_app_type] => new [patent_app_number] => 09/838748 [patent_app_country] => US [patent_app_date] => 2001-04-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4225 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0019/20010019894.pdf [firstpage_image] =>[orig_patent_app_number] => 09838748 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/838748
Pre-heat step (or chamber) implemented in pr dry ash machines to effectively eliminate pr extrusion (bubble) after alloy Apr 19, 2001 Abandoned
09/807902 Wafer support in semiconductor manufacturing system Apr 18, 2001 Abandoned
Array ( [id] => 6168829 [patent_doc_number] => 20020153100 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-24 [patent_title] => 'Cooling system' [patent_app_type] => new [patent_app_number] => 09/837943 [patent_app_country] => US [patent_app_date] => 2001-04-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4379 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0153/20020153100.pdf [firstpage_image] =>[orig_patent_app_number] => 09837943 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/837943
Cooling system Apr 17, 2001 Issued
Array ( [id] => 1020531 [patent_doc_number] => 06887316 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-05-03 [patent_title] => 'Ceramic heater' [patent_app_type] => utility [patent_app_number] => 09/926730 [patent_app_country] => US [patent_app_date] => 2001-04-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 8151 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/887/06887316.pdf [firstpage_image] =>[orig_patent_app_number] => 09926730 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/926730
Ceramic heater Apr 15, 2001 Issued
Array ( [id] => 6152811 [patent_doc_number] => 20020144783 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-10 [patent_title] => 'Apparatus and method for accelerating process stability of high temperature vacuum processes after chamber cleaning' [patent_app_type] => new [patent_app_number] => 09/827877 [patent_app_country] => US [patent_app_date] => 2001-04-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4639 [patent_no_of_claims] => 38 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0144/20020144783.pdf [firstpage_image] =>[orig_patent_app_number] => 09827877 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/827877
Apparatus and method for accelerating process stability of high temperature vacuum processes after chamber cleaning Apr 4, 2001 Abandoned
Array ( [id] => 6453645 [patent_doc_number] => 20020020360 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-21 [patent_title] => 'Silicon wafer supporting device for supporting a silicon wafer subjected to an evaporation process on its underside' [patent_app_type] => new [patent_app_number] => 09/826562 [patent_app_country] => US [patent_app_date] => 2001-04-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 1681 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0020/20020020360.pdf [firstpage_image] =>[orig_patent_app_number] => 09826562 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/826562
Silicon wafer supporting device for supporting a silicon wafer subjected to an evaporation process on its underside Apr 3, 2001 Abandoned
Array ( [id] => 5906982 [patent_doc_number] => 20020142611 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-03 [patent_title] => 'Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof' [patent_app_type] => new [patent_app_number] => 09/820693 [patent_app_country] => US [patent_app_date] => 2001-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5625 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 42 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0142/20020142611.pdf [firstpage_image] =>[orig_patent_app_number] => 09820693 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/820693
Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereof Mar 29, 2001 Issued
Array ( [id] => 5906983 [patent_doc_number] => 20020142612 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-03 [patent_title] => 'Shielding plate in plasma for uniformity improvement' [patent_app_type] => new [patent_app_number] => 09/823528 [patent_app_country] => US [patent_app_date] => 2001-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3445 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 29 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0142/20020142612.pdf [firstpage_image] =>[orig_patent_app_number] => 09823528 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/823528
Shielding plate in plasma for uniformity improvement Mar 29, 2001 Abandoned
Array ( [id] => 6027821 [patent_doc_number] => 20020017363 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-14 [patent_title] => 'Substrate processing apparatus and substrate processing method' [patent_app_type] => new [patent_app_number] => 09/816643 [patent_app_country] => US [patent_app_date] => 2001-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 18 [patent_figures_cnt] => 18 [patent_no_of_words] => 13965 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 78 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0017/20020017363.pdf [firstpage_image] =>[orig_patent_app_number] => 09816643 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/816643
Substrate processing apparatus and substrate processing method Mar 22, 2001 Abandoned
Array ( [id] => 1204356 [patent_doc_number] => 06716301 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-04-06 [patent_title] => 'Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe' [patent_app_type] => B2 [patent_app_number] => 09/799527 [patent_app_country] => US [patent_app_date] => 2001-03-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 12201 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 149 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/716/06716301.pdf [firstpage_image] =>[orig_patent_app_number] => 09799527 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/799527
Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe Mar 6, 2001 Issued
Array ( [id] => 1306719 [patent_doc_number] => 06613151 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-09-02 [patent_title] => 'Single disc vapor lubrication' [patent_app_type] => B1 [patent_app_number] => 09/798934 [patent_app_country] => US [patent_app_date] => 2001-03-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 2 [patent_no_of_words] => 5606 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 180 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/613/06613151.pdf [firstpage_image] =>[orig_patent_app_number] => 09798934 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/798934
Single disc vapor lubrication Mar 5, 2001 Issued
Array ( [id] => 1352511 [patent_doc_number] => 06572708 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-06-03 [patent_title] => 'Semiconductor wafer support lift-pin assembly' [patent_app_type] => B2 [patent_app_number] => 09/797214 [patent_app_country] => US [patent_app_date] => 2001-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 9 [patent_no_of_words] => 5144 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/572/06572708.pdf [firstpage_image] =>[orig_patent_app_number] => 09797214 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/797214
Semiconductor wafer support lift-pin assembly Feb 27, 2001 Issued
Array ( [id] => 6267742 [patent_doc_number] => 20020104619 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-08-08 [patent_title] => 'Method and system for rotating a semiconductor wafer in processing chambers' [patent_app_type] => new [patent_app_number] => 09/776241 [patent_app_country] => US [patent_app_date] => 2001-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6200 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 104 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0104/20020104619.pdf [firstpage_image] =>[orig_patent_app_number] => 09776241 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/776241
Method and system for rotating a semiconductor wafer in processing chambers Feb 1, 2001 Issued
Array ( [id] => 7039698 [patent_doc_number] => 20010004880 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-06-28 [patent_title] => 'Pedestal with a thermally controlled platen' [patent_app_type] => new-utility [patent_app_number] => 09/776002 [patent_app_country] => US [patent_app_date] => 2001-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2922 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0004/20010004880.pdf [firstpage_image] =>[orig_patent_app_number] => 09776002 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/776002
Pedestal with a thermally controlled platen Feb 1, 2001 Issued
Array ( [id] => 7093201 [patent_doc_number] => 20010034111 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-10-25 [patent_title] => 'METHOD AND APPARATUS DIFFFUSING ZINC INTO GROUPS III-V COMPOUND SEMICONDUCTOR CRYSTALS' [patent_app_type] => new [patent_app_number] => 09/773545 [patent_app_country] => US [patent_app_date] => 2001-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 12379 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0034/20010034111.pdf [firstpage_image] =>[orig_patent_app_number] => 09773545 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/773545
Method and apparatus diffusing zinc into groups III-V compound semiconductor crystals Feb 1, 2001 Issued
Array ( [id] => 1342767 [patent_doc_number] => 06579374 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-06-17 [patent_title] => 'Apparatus for fabrication of thin films' [patent_app_type] => B2 [patent_app_number] => 09/769562 [patent_app_country] => US [patent_app_date] => 2001-01-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 7429 [patent_no_of_claims] => 75 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/579/06579374.pdf [firstpage_image] =>[orig_patent_app_number] => 09769562 [rel_patent_id] =>[rel_patent_doc_number] =>)
09/769562
Apparatus for fabrication of thin films Jan 24, 2001 Issued
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