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Array ( [id] => 4802920 [patent_doc_number] => 20080014508 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2008-01-17 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/484855 [patent_app_country] => US [patent_app_date] => 2006-07-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7090 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0014/20080014508.pdf [firstpage_image] =>[orig_patent_app_number] => 11484855 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 8106119 [patent_doc_number] => 08154708 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2012-04-10 [patent_title] => 'Lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/482122 [patent_app_country] => US [patent_app_date] => 2006-07-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 22 [patent_no_of_words] => 9259 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 132 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/08/154/08154708.pdf [firstpage_image] =>[orig_patent_app_number] => 11482122 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6560693 [patent_doc_number] => 20100045956 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-02-25 [patent_title] => 'Lithographic Apparatus, Method for Determining at Least One Polarization Property Thereof, Polarization Analyzer and Polarization Sensor Thereof' [patent_app_type] => utility [patent_app_number] => 11/922056 [patent_app_country] => US [patent_app_date] => 2006-06-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 20057 [patent_no_of_claims] => 42 [patent_no_of_ind_claims] => 16 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0045/20100045956.pdf [firstpage_image] =>[orig_patent_app_number] => 11922056 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6227144 [patent_doc_number] => 20100182582 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-07-22 [patent_title] => 'Passive reticle tool, a lithographic apparatus and a method of patterning a device in a lithography tool' [patent_app_type] => utility [patent_app_number] => 11/922018 [patent_app_country] => US [patent_app_date] => 2006-06-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 20037 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 9 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0182/20100182582.pdf [firstpage_image] =>[orig_patent_app_number] => 11922018 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6275690 [patent_doc_number] => 20100118288 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-05-13 [patent_title] => 'Lithographic projection system and projection lens polarization sensor' [patent_app_type] => utility [patent_app_number] => 11/922020 [patent_app_country] => US [patent_app_date] => 2006-06-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 20007 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0118/20100118288.pdf [firstpage_image] =>[orig_patent_app_number] => 11922020 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5165489 [patent_doc_number] => 20070287075 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-12-13 [patent_title] => 'Mask arrangement, optical projection system and method for obtaining grating parameters and absorption properties of a diffractive optical element' [patent_app_type] => utility [patent_app_number] => 11/451618 [patent_app_country] => US [patent_app_date] => 2006-06-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 9182 [patent_no_of_claims] => 33 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0287/20070287075.pdf [firstpage_image] =>[orig_patent_app_number] => 11451618 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5073915 [patent_doc_number] => 20070013890 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-01-18 [patent_title] => 'Stage apparatus, lithographic apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/445466 [patent_app_country] => US [patent_app_date] => 2006-06-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 24 [patent_no_of_words] => 15625 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0013/20070013890.pdf [firstpage_image] =>[orig_patent_app_number] => 11445466 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9824595 [patent_doc_number] => 08934084 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2015-01-13 [patent_title] => 'System and method for printing interference patterns having a pitch in a lithography system' [patent_app_type] => utility [patent_app_number] => 11/443431 [patent_app_country] => US [patent_app_date] => 2006-05-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 5551 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 11443431 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5209194 [patent_doc_number] => 20070247778 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-25 [patent_title] => 'Z-STAGE WITH DYNAMICALLY DRIVEN STAGE MIRROR AND CHUCK ASSEMBLY' [patent_app_type] => utility [patent_app_number] => 11/420985 [patent_app_country] => US [patent_app_date] => 2006-05-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 5413 [patent_no_of_claims] => 39 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0247/20070247778.pdf [firstpage_image] =>[orig_patent_app_number] => 11420985 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 186437 [patent_doc_number] => 07649614 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-01-19 [patent_title] => 'Method of characterization, method of characterizing a process operation, and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 11/440436 [patent_app_country] => US [patent_app_date] => 2006-05-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 17 [patent_no_of_words] => 7363 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/649/07649614.pdf [firstpage_image] =>[orig_patent_app_number] => 11440436 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5623803 [patent_doc_number] => 20060262308 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-11-23 [patent_title] => 'Stage apparatus and exposure apparatus' [patent_app_type] => utility [patent_app_number] => 11/411295 [patent_app_country] => US [patent_app_date] => 2006-04-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4687 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0262/20060262308.pdf [firstpage_image] =>[orig_patent_app_number] => 11411295 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5245058 [patent_doc_number] => 20070241292 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-18 [patent_title] => 'Optical system for increasing illumination efficiency of a patterning device' [patent_app_type] => utility [patent_app_number] => 11/403007 [patent_app_country] => US [patent_app_date] => 2006-04-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 9184 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0241/20070241292.pdf [firstpage_image] =>[orig_patent_app_number] => 11403007 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5245058 [patent_doc_number] => 20070241292 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-18 [patent_title] => 'Optical system for increasing illumination efficiency of a patterning device' [patent_app_type] => utility [patent_app_number] => 11/403007 [patent_app_country] => US [patent_app_date] => 2006-04-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 9184 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0241/20070241292.pdf [firstpage_image] =>[orig_patent_app_number] => 11403007 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5245058 [patent_doc_number] => 20070241292 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-18 [patent_title] => 'Optical system for increasing illumination efficiency of a patterning device' [patent_app_type] => utility [patent_app_number] => 11/403007 [patent_app_country] => US [patent_app_date] => 2006-04-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 9184 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0241/20070241292.pdf [firstpage_image] =>[orig_patent_app_number] => 11403007 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5245058 [patent_doc_number] => 20070241292 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2007-10-18 [patent_title] => 'Optical system for increasing illumination efficiency of a patterning device' [patent_app_type] => utility [patent_app_number] => 11/403007 [patent_app_country] => US [patent_app_date] => 2006-04-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 9184 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0241/20070241292.pdf [firstpage_image] =>[orig_patent_app_number] => 11403007 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5569705 [patent_doc_number] => 20090253083 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-10-08 [patent_title] => 'Exposure Apparatus, Exposure Method, and Method for Producing Device' [patent_app_type] => utility [patent_app_number] => 11/887565 [patent_app_country] => US [patent_app_date] => 2006-03-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 22019 [patent_no_of_claims] => 35 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0253/20090253083.pdf [firstpage_image] =>[orig_patent_app_number] => 11887565 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6602152 [patent_doc_number] => 20100002206 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2010-01-07 [patent_title] => 'EXPOSURE CONDITION DETERMINATION METHOD, EXPOSURE METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD' [patent_app_type] => utility [patent_app_number] => 11/887344 [patent_app_country] => US [patent_app_date] => 2006-03-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 15128 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0002/20100002206.pdf [firstpage_image] =>[orig_patent_app_number] => 11887344 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5665543 [patent_doc_number] => 20060170893 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-08-03 [patent_title] => 'Lithography exposure device' [patent_app_type] => utility [patent_app_number] => 11/392970 [patent_app_country] => US [patent_app_date] => 2006-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 7492 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0170/20060170893.pdf [firstpage_image] =>[orig_patent_app_number] => 11392970 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5308528 [patent_doc_number] => 20090015809 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2009-01-15 [patent_title] => 'Image Recording Method and Device' [patent_app_type] => utility [patent_app_number] => 11/887386 [patent_app_country] => US [patent_app_date] => 2006-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 25 [patent_no_of_words] => 5483 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0015/20090015809.pdf [firstpage_image] =>[orig_patent_app_number] => 11887386 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5870836 [patent_doc_number] => 20060164617 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2006-07-27 [patent_title] => 'Projection exposure apparatus, projection exposure method, and method for producing device' [patent_app_type] => utility [patent_app_number] => 11/390370 [patent_app_country] => US [patent_app_date] => 2006-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 12783 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0164/20060164617.pdf [firstpage_image] =>[orig_patent_app_number] => 11390370 [rel_patent_id] =>[rel_patent_doc_number] =>)