William A. Powell

Array ( [id] => 5986483 [patent_doc_number] => 20020098696 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-25 [patent_title] => 'Method and apparatus for chemical-mechanical planarization of microelectronic substrates with selected planarizing liquids' [patent_app_type] => new [patent_app_number] => 10/102401 [patent_app_country] => US [patent_app_date] => 2002-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 6097 [patent_no_of_claims] => 98 [patent_no_of_ind_claims] => 19 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0098/20020098696.pdf [firstpage_image] =>[orig_patent_app_number] => 10102401 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6867396 [patent_doc_number] => 20030080085 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-05-01 [patent_title] => 'Coated microfluidic delivery system' [patent_app_type] => new [patent_app_number] => 10/096183 [patent_app_country] => US [patent_app_date] => 2002-03-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5367 [patent_no_of_claims] => 45 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0080/20030080085.pdf [firstpage_image] =>[orig_patent_app_number] => 10096183 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1259978 [patent_doc_number] => 06663785 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-12-16 [patent_title] => 'Broad spectrum emitter array and methods for fabrication thereof' [patent_app_type] => B1 [patent_app_number] => 10/092018 [patent_app_country] => US [patent_app_date] => 2002-03-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 7 [patent_no_of_words] => 4125 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 85 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/663/06663785.pdf [firstpage_image] =>[orig_patent_app_number] => 10092018 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1239725 [patent_doc_number] => 06686284 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-02-03 [patent_title] => 'Chemical mechanical polisher equipped with chilled retaining ring and method of using' [patent_app_type] => B2 [patent_app_number] => 10/072244 [patent_app_country] => US [patent_app_date] => 2002-02-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 5 [patent_no_of_words] => 4368 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 94 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/686/06686284.pdf [firstpage_image] =>[orig_patent_app_number] => 10072244 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1253398 [patent_doc_number] => 06670279 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-12-30 [patent_title] => 'Method of forming shallow trench isolation with rounded corners and divot-free by using in-situ formed spacers' [patent_app_type] => B1 [patent_app_number] => 10/068055 [patent_app_country] => US [patent_app_date] => 2002-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 15 [patent_figures_cnt] => 46 [patent_no_of_words] => 4146 [patent_no_of_claims] => 58 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 236 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/670/06670279.pdf [firstpage_image] =>[orig_patent_app_number] => 10068055 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1278022 [patent_doc_number] => 06645864 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-11-11 [patent_title] => 'Physical vapor deposition of an amorphous silicon liner to eliminate resist poisoning' [patent_app_type] => B1 [patent_app_number] => 10/068045 [patent_app_country] => US [patent_app_date] => 2002-02-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 11 [patent_no_of_words] => 2680 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 175 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/645/06645864.pdf [firstpage_image] =>[orig_patent_app_number] => 10068045 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1376552 [patent_doc_number] => 06559063 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-05-06 [patent_title] => 'Method for manufacturing semiconductor wafer having resist mask with measurement marks for measuring the accuracy of overlay of a photomask' [patent_app_type] => B2 [patent_app_number] => 10/061332 [patent_app_country] => US [patent_app_date] => 2002-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 10 [patent_no_of_words] => 2092 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 137 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/559/06559063.pdf [firstpage_image] =>[orig_patent_app_number] => 10061332 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5859373 [patent_doc_number] => 20020123232 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-09-05 [patent_title] => 'High density wafer production method' [patent_app_type] => new [patent_app_number] => 09/683692 [patent_app_country] => US [patent_app_date] => 2002-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 2510 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 98 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0123/20020123232.pdf [firstpage_image] =>[orig_patent_app_number] => 09683692 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1259974 [patent_doc_number] => 06663784 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-12-16 [patent_title] => 'Method for producing three-dimensional structures by means of an etching process' [patent_app_type] => B1 [patent_app_number] => 09/890080 [patent_app_country] => US [patent_app_date] => 2002-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 5 [patent_no_of_words] => 4648 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/663/06663784.pdf [firstpage_image] =>[orig_patent_app_number] => 09890080 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6631423 [patent_doc_number] => 20020086549 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-04 [patent_title] => 'Resist mask having measurement marks for measuring the accuracy of overlay of a photomask disposed on semiconductor wafer' [patent_app_type] => new [patent_app_number] => 10/061285 [patent_app_country] => US [patent_app_date] => 2002-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2102 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0086/20020086549.pdf [firstpage_image] =>[orig_patent_app_number] => 10061285 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1416595 [patent_doc_number] => 06518188 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-02-11 [patent_title] => 'Apparatus and methods for chemical-mechanical polishing of semiconductor wafers' [patent_app_type] => B2 [patent_app_number] => 10/061783 [patent_app_country] => US [patent_app_date] => 2002-02-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 4 [patent_no_of_words] => 5158 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/518/06518188.pdf [firstpage_image] =>[orig_patent_app_number] => 10061783 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6654984 [patent_doc_number] => 20030132191 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-07-17 [patent_title] => 'Method for fabricating a scanning probe microscope probe' [patent_app_type] => new [patent_app_number] => 10/053314 [patent_app_country] => US [patent_app_date] => 2002-01-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2826 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0132/20030132191.pdf [firstpage_image] =>[orig_patent_app_number] => 10053314 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6870229 [patent_doc_number] => 20030082918 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-05-01 [patent_title] => 'Harm-removing agent and method for rendering halogen-containing gas harmless and uses thereof' [patent_app_type] => new [patent_app_number] => 10/030248 [patent_app_country] => US [patent_app_date] => 2002-01-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 10910 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 11 [patent_words_short_claim] => 25 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0082/20030082918.pdf [firstpage_image] =>[orig_patent_app_number] => 10030248 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6853926 [patent_doc_number] => 20030127427 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-07-10 [patent_title] => 'Method of increasing the etch selectivity of a contact sidewall to a preclean etchant' [patent_app_type] => new [patent_app_number] => 10/041550 [patent_app_country] => US [patent_app_date] => 2002-01-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3841 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0127/20030127427.pdf [firstpage_image] =>[orig_patent_app_number] => 10041550 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1267942 [patent_doc_number] => 06652708 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-11-25 [patent_title] => 'Methods and apparatus for conditioning and temperature control of a processing surface' [patent_app_type] => B2 [patent_app_number] => 10/041027 [patent_app_country] => US [patent_app_date] => 2001-12-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 11 [patent_no_of_words] => 6563 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/652/06652708.pdf [firstpage_image] =>[orig_patent_app_number] => 10041027 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1372167 [patent_doc_number] => 06562722 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-05-13 [patent_title] => 'Method and apparatus for dry etching' [patent_app_type] => B2 [patent_app_number] => 10/024580 [patent_app_country] => US [patent_app_date] => 2001-12-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 29 [patent_no_of_words] => 11395 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 69 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/562/06562722.pdf [firstpage_image] =>[orig_patent_app_number] => 10024580 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6666457 [patent_doc_number] => 20030111440 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-06-19 [patent_title] => 'Method of fabricating and a device that includes nanosize pores having well controlled geometries' [patent_app_type] => new [patent_app_number] => 10/027598 [patent_app_country] => US [patent_app_date] => 2001-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 5327 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0111/20030111440.pdf [firstpage_image] =>[orig_patent_app_number] => 10027598 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1299858 [patent_doc_number] => 06624077 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-09-23 [patent_title] => 'Integrated circuit waveguide' [patent_app_type] => B2 [patent_app_number] => 10/023571 [patent_app_country] => US [patent_app_date] => 2001-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 16 [patent_no_of_words] => 6594 [patent_no_of_claims] => 30 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/624/06624077.pdf [firstpage_image] =>[orig_patent_app_number] => 10023571 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1256181 [patent_doc_number] => 06667245 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-12-23 [patent_title] => 'CMOS-compatible MEM switches and method of making' [patent_app_type] => B2 [patent_app_number] => 10/016894 [patent_app_country] => US [patent_app_date] => 2001-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 7 [patent_no_of_words] => 2588 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 125 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/667/06667245.pdf [firstpage_image] =>[orig_patent_app_number] => 10016894 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1416654 [patent_doc_number] => 06518192 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-02-11 [patent_title] => 'Two etchant etch method' [patent_app_type] => B2 [patent_app_number] => 10/013115 [patent_app_country] => US [patent_app_date] => 2001-12-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 15412 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/518/06518192.pdf [firstpage_image] =>[orig_patent_app_number] => 10013115 [rel_patent_id] =>[rel_patent_doc_number] =>)