William A. Powell

Array ( [id] => 1303986 [patent_doc_number] => 06616853 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-09-09 [patent_title] => 'Method for reducing leaching in metal-coated MEMS' [patent_app_type] => B1 [patent_app_number] => 09/799916 [patent_app_country] => US [patent_app_date] => 2001-03-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 16 [patent_no_of_words] => 5584 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/616/06616853.pdf [firstpage_image] =>[orig_patent_app_number] => 09799916 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1570332 [patent_doc_number] => 06498109 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2002-12-24 [patent_title] => 'System and method for plasma etching' [patent_app_type] => B2 [patent_app_number] => 09/796914 [patent_app_country] => US [patent_app_date] => 2001-03-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 2783 [patent_no_of_claims] => 50 [patent_no_of_ind_claims] => 13 [patent_words_short_claim] => 39 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/498/06498109.pdf [firstpage_image] =>[orig_patent_app_number] => 09796914 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6895036 [patent_doc_number] => 20010025826 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-10-04 [patent_title] => 'Dense-plasma etching of InP-based materials using chlorine and nitrogen' [patent_app_type] => new [patent_app_number] => 09/795715 [patent_app_country] => US [patent_app_date] => 2001-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6265 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0025/20010025826.pdf [firstpage_image] =>[orig_patent_app_number] => 09795715 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1449838 [patent_doc_number] => 06455333 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-09-24 [patent_title] => 'Method of achieving stable deep ultraviolet (DUV) resist etch rate for gate critical dimension (CD)' [patent_app_type] => B1 [patent_app_number] => 09/796382 [patent_app_country] => US [patent_app_date] => 2001-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 7 [patent_no_of_words] => 2351 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 113 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/455/06455333.pdf [firstpage_image] =>[orig_patent_app_number] => 09796382 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1528165 [patent_doc_number] => 06479396 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-11-12 [patent_title] => 'Dry polymer and oxide veil removal for post etch cleaning' [patent_app_type] => B1 [patent_app_number] => 09/794055 [patent_app_country] => US [patent_app_date] => 2001-02-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 10 [patent_no_of_words] => 3294 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/479/06479396.pdf [firstpage_image] =>[orig_patent_app_number] => 09794055 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6887806 [patent_doc_number] => 20010008800 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-07-19 [patent_title] => 'Removal of polishing residue from substrate using supercritical fluid process' [patent_app_type] => new-utility [patent_app_number] => 09/796300 [patent_app_country] => US [patent_app_date] => 2001-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 1764 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 36 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0008/20010008800.pdf [firstpage_image] =>[orig_patent_app_number] => 09796300 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1598454 [patent_doc_number] => 06475400 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2002-11-05 [patent_title] => 'Method for controlling the sheet resistance of thin film resistors' [patent_app_type] => B2 [patent_app_number] => 09/793252 [patent_app_country] => US [patent_app_date] => 2001-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 3 [patent_no_of_words] => 1734 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 153 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/475/06475400.pdf [firstpage_image] =>[orig_patent_app_number] => 09793252 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1507552 [patent_doc_number] => 06440873 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-08-27 [patent_title] => 'Post metal etch cleaning method' [patent_app_type] => B1 [patent_app_number] => 09/792952 [patent_app_country] => US [patent_app_date] => 2001-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 1 [patent_figures_cnt] => 1 [patent_no_of_words] => 1259 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/440/06440873.pdf [firstpage_image] =>[orig_patent_app_number] => 09792952 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1419548 [patent_doc_number] => 06506686 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-01-14 [patent_title] => 'Plasma processing apparatus and plasma processing method' [patent_app_type] => B2 [patent_app_number] => 09/790702 [patent_app_country] => US [patent_app_date] => 2001-02-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 10 [patent_no_of_words] => 7562 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/506/06506686.pdf [firstpage_image] =>[orig_patent_app_number] => 09790702 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1382730 [patent_doc_number] => 06551941 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-04-22 [patent_title] => 'Method of forming a notched silicon-containing gate structure' [patent_app_type] => B2 [patent_app_number] => 09/791446 [patent_app_country] => US [patent_app_date] => 2001-02-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 22 [patent_no_of_words] => 9776 [patent_no_of_claims] => 88 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 239 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/551/06551941.pdf [firstpage_image] =>[orig_patent_app_number] => 09791446 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1411092 [patent_doc_number] => 06511609 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-01-28 [patent_title] => 'Cu seed layer deposition for ULSI metalization' [patent_app_type] => B2 [patent_app_number] => 09/785170 [patent_app_country] => US [patent_app_date] => 2001-02-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 9 [patent_no_of_words] => 2363 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/511/06511609.pdf [firstpage_image] =>[orig_patent_app_number] => 09785170 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6900134 [patent_doc_number] => 20010009810 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-07-26 [patent_title] => 'Etching process using a buffer layer' [patent_app_type] => new [patent_app_number] => 09/785728 [patent_app_country] => US [patent_app_date] => 2001-02-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4077 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 115 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0009/20010009810.pdf [firstpage_image] =>[orig_patent_app_number] => 09785728 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6548464 [patent_doc_number] => 20020111031 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-08-15 [patent_title] => 'Deep reactive ion etching process and microelectromechanical devices formed thereby' [patent_app_type] => new [patent_app_number] => 09/782394 [patent_app_country] => US [patent_app_date] => 2001-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 7425 [patent_no_of_claims] => 34 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 220 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0111/20020111031.pdf [firstpage_image] =>[orig_patent_app_number] => 09782394 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6455069 [patent_doc_number] => 20020020495 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-21 [patent_title] => 'Apparatus and methods for chemical-mechanical polishing of semiconductor wafers' [patent_app_type] => new [patent_app_number] => 09/776279 [patent_app_country] => US [patent_app_date] => 2001-02-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 5180 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 52 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0020/20020020495.pdf [firstpage_image] =>[orig_patent_app_number] => 09776279 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6908172 [patent_doc_number] => 20010010939 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-08-02 [patent_title] => 'Method of detecting etching depth' [patent_app_type] => new [patent_app_number] => 09/769307 [patent_app_country] => US [patent_app_date] => 2001-01-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 8613 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0010/20010010939.pdf [firstpage_image] =>[orig_patent_app_number] => 09769307 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5981399 [patent_doc_number] => 20020096488 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-25 [patent_title] => 'Method for fabricating a micro-electro-mechanical fluid ejector' [patent_app_type] => new [patent_app_number] => 09/768688 [patent_app_country] => US [patent_app_date] => 2001-01-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2802 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0096/20020096488.pdf [firstpage_image] =>[orig_patent_app_number] => 09768688 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1394904 [patent_doc_number] => 06541381 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-04-01 [patent_title] => 'Finishing method for semiconductor wafers using a lubricating boundary layer' [patent_app_type] => B2 [patent_app_number] => 09/766958 [patent_app_country] => US [patent_app_date] => 2001-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 6 [patent_no_of_words] => 24349 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 74 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/541/06541381.pdf [firstpage_image] =>[orig_patent_app_number] => 09766958 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5986493 [patent_doc_number] => 20020098699 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-25 [patent_title] => 'METHOD OF FORMING A BIT LINE AND A NODE CONTACT HOLE' [patent_app_type] => new [patent_app_number] => 09/764335 [patent_app_country] => US [patent_app_date] => 2001-01-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2622 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 187 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0098/20020098699.pdf [firstpage_image] =>[orig_patent_app_number] => 09764335 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5986481 [patent_doc_number] => 20020098694 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-07-25 [patent_title] => 'Method of making a local interconnect in an embedded memory' [patent_app_type] => new [patent_app_number] => 09/764326 [patent_app_country] => US [patent_app_date] => 2001-01-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 2381 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 274 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0098/20020098694.pdf [firstpage_image] =>[orig_patent_app_number] => 09764326 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6900133 [patent_doc_number] => 20010009809 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-07-26 [patent_title] => 'Method for forming a shallow trench isolation structure in a semiconductor device' [patent_app_type] => new [patent_app_number] => 09/766206 [patent_app_country] => US [patent_app_date] => 2001-01-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 7765 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 248 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0009/20010009809.pdf [firstpage_image] =>[orig_patent_app_number] => 09766206 [rel_patent_id] =>[rel_patent_doc_number] =>)