William W. Lewis

Array ( [id] => 6747284 [patent_doc_number] => 20030041804 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-06 [patent_title] => 'HDP-CVD apparatus' [patent_app_type] => new [patent_app_number] => 10/199360 [patent_app_country] => US [patent_app_date] => 2002-07-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 1869 [patent_no_of_claims] => 4 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0041/20030041804.pdf [firstpage_image] =>[orig_patent_app_number] => 10199360 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7346401 [patent_doc_number] => 20040011464 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-01-22 [patent_title] => 'Promotion of independence between degree of dissociation of reactive gas and the amount of ionization of dilutant gas via diverse gas injection' [patent_app_type] => new [patent_app_number] => 10/198268 [patent_app_country] => US [patent_app_date] => 2002-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 6191 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0011/20040011464.pdf [firstpage_image] =>[orig_patent_app_number] => 10198268 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6713552 [patent_doc_number] => 20030024900 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-06 [patent_title] => 'Variable aspect ratio plasma source' [patent_app_type] => new [patent_app_number] => 10/195553 [patent_app_country] => US [patent_app_date] => 2002-07-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4242 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 42 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0024/20030024900.pdf [firstpage_image] =>[orig_patent_app_number] => 10195553 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6381491 [patent_doc_number] => 20020179603 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-05 [patent_title] => 'Container with a coating of barrier effect material, and method and apparatus for manufacturing the same' [patent_app_type] => new [patent_app_number] => 10/194248 [patent_app_country] => US [patent_app_date] => 2002-07-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 5455 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 14 [patent_words_short_claim] => 29 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0179/20020179603.pdf [firstpage_image] =>[orig_patent_app_number] => 10194248 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1174387 [patent_doc_number] => 06743328 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2004-06-01 [patent_title] => 'Grounded centering ring for inhibiting polymer build-up on the diaphragm of a manometer' [patent_app_type] => B1 [patent_app_number] => 10/187225 [patent_app_country] => US [patent_app_date] => 2002-06-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 1772 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/743/06743328.pdf [firstpage_image] =>[orig_patent_app_number] => 10187225 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7419270 [patent_doc_number] => 20040000375 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-01-01 [patent_title] => 'Plasma etch chamber equipped with multi-layer insert ring' [patent_app_type] => new [patent_app_number] => 10/184606 [patent_app_country] => US [patent_app_date] => 2002-06-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 4184 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 99 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20040000375.pdf [firstpage_image] =>[orig_patent_app_number] => 10184606 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6048143 [patent_doc_number] => 20020168814 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-11-14 [patent_title] => 'Plasma processing method and apparatus' [patent_app_type] => new [patent_app_number] => 10/179857 [patent_app_country] => US [patent_app_date] => 2002-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5569 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 155 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0168/20020168814.pdf [firstpage_image] =>[orig_patent_app_number] => 10179857 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6259118 [patent_doc_number] => 20020187280 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-12 [patent_title] => 'Method and system for reducing damage to substrates during plasma processing with a resonator source' [patent_app_type] => new [patent_app_number] => 10/175806 [patent_app_country] => US [patent_app_date] => 2002-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5006 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 87 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0187/20020187280.pdf [firstpage_image] =>[orig_patent_app_number] => 10175806 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6487637 [patent_doc_number] => 20020189763 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-19 [patent_title] => 'Plasma processing apparatus having parallel resonance antenna for very high frequency' [patent_app_type] => new [patent_app_number] => 10/174900 [patent_app_country] => US [patent_app_date] => 2002-06-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 2287 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 115 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0189/20020189763.pdf [firstpage_image] =>[orig_patent_app_number] => 10174900 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6802991 [patent_doc_number] => 20030230385 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-12-18 [patent_title] => 'Electro-magnetic configuration for uniformity enhancement in a dual chamber plasma processing system' [patent_app_type] => new [patent_app_number] => 10/172534 [patent_app_country] => US [patent_app_date] => 2002-06-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 10071 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0230/20030230385.pdf [firstpage_image] =>[orig_patent_app_number] => 10172534 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1271808 [patent_doc_number] => 06649076 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-11-18 [patent_title] => 'Method for performing plasma process on particles' [patent_app_type] => B2 [patent_app_number] => 10/164707 [patent_app_country] => US [patent_app_date] => 2002-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 2640 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/649/06649076.pdf [firstpage_image] =>[orig_patent_app_number] => 10164707 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6676501 [patent_doc_number] => 20030226641 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-12-11 [patent_title] => 'Externally excited torroidal plasma source with magnetic control of ion distribution' [patent_app_type] => new [patent_app_number] => 10/164327 [patent_app_country] => US [patent_app_date] => 2002-06-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 61 [patent_figures_cnt] => 61 [patent_no_of_words] => 20127 [patent_no_of_claims] => 68 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0226/20030226641.pdf [firstpage_image] =>[orig_patent_app_number] => 10164327 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5899786 [patent_doc_number] => 20020139480 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-03 [patent_title] => 'Methods for actively controlling RF peak-to-peak voltage in an inductively coupled plasma etching system' [patent_app_type] => new [patent_app_number] => 10/160746 [patent_app_country] => US [patent_app_date] => 2002-05-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 7096 [patent_no_of_claims] => 2 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0139/20020139480.pdf [firstpage_image] =>[orig_patent_app_number] => 10160746 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6379188 [patent_doc_number] => 20020179246 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-05 [patent_title] => 'Removable shield arrangement for ICP-RIE reactors' [patent_app_type] => new [patent_app_number] => 10/157198 [patent_app_country] => US [patent_app_date] => 2002-05-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3137 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 93 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0179/20020179246.pdf [firstpage_image] =>[orig_patent_app_number] => 10157198 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6698902 [patent_doc_number] => 20030221782 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-12-04 [patent_title] => 'Structural improvement for wafer supporting apparatus' [patent_app_type] => new [patent_app_number] => 10/154805 [patent_app_country] => US [patent_app_date] => 2002-05-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 2170 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0221/20030221782.pdf [firstpage_image] =>[orig_patent_app_number] => 10154805 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6819652 [patent_doc_number] => 20030217813 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-27 [patent_title] => 'Plasma processing apparatus comprising radio frequency power circuit providing enhanced plasma control' [patent_app_type] => new [patent_app_number] => 10/153718 [patent_app_country] => US [patent_app_date] => 2002-05-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 1794 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0217/20030217813.pdf [firstpage_image] =>[orig_patent_app_number] => 10153718 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6767619 [patent_doc_number] => 20030213559 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-20 [patent_title] => 'Stabilization of electronegative plasmas with feedback control of RF generator systems' [patent_app_type] => new [patent_app_number] => 10/151722 [patent_app_country] => US [patent_app_date] => 2002-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4259 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 76 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0213/20030213559.pdf [firstpage_image] =>[orig_patent_app_number] => 10151722 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 9501426 [patent_doc_number] => 08739732 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2014-06-03 [patent_title] => 'Plasma treatment container internal member, and plasma treatment apparatus having the plasma treatment container internal member' [patent_app_type] => utility [patent_app_number] => 10/477759 [patent_app_country] => US [patent_app_date] => 2002-05-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 11 [patent_no_of_words] => 4391 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 79 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 10477759 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6767622 [patent_doc_number] => 20030213562 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-20 [patent_title] => 'High density plasma CVD chamber' [patent_app_type] => new [patent_app_number] => 10/150581 [patent_app_country] => US [patent_app_date] => 2002-05-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 5852 [patent_no_of_claims] => 26 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0213/20030213562.pdf [firstpage_image] =>[orig_patent_app_number] => 10150581 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6767494 [patent_doc_number] => 20030213434 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-11-20 [patent_title] => 'Upper chamber for high density plasma CVD' [patent_app_type] => new [patent_app_number] => 10/150458 [patent_app_country] => US [patent_app_date] => 2002-05-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5300 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0213/20030213434.pdf [firstpage_image] =>[orig_patent_app_number] => 10150458 [rel_patent_id] =>[rel_patent_doc_number] =>)