William W. Lewis

Array ( [id] => 5797574 [patent_doc_number] => 20020007795 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-01-24 [patent_title] => 'Temperature control system for plasma processing apparatus' [patent_app_type] => new [patent_app_number] => 09/943806 [patent_app_country] => US [patent_app_date] => 2001-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 7346 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 37 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0007/20020007795.pdf [firstpage_image] =>[orig_patent_app_number] => 09943806 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5811851 [patent_doc_number] => 20020038689 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-04-04 [patent_title] => 'Reduced and atmospheric pressure process capable epitaxial chamber' [patent_app_type] => new [patent_app_number] => 09/935445 [patent_app_country] => US [patent_app_date] => 2001-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2183 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 26 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0038/20020038689.pdf [firstpage_image] =>[orig_patent_app_number] => 09935445 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6685841 [patent_doc_number] => 20030029563 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-13 [patent_title] => 'Corrosion resistant coating for semiconductor processing chamber' [patent_app_type] => new [patent_app_number] => 09/927244 [patent_app_country] => US [patent_app_date] => 2001-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 6155 [patent_no_of_claims] => 15 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 33 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0029/20030029563.pdf [firstpage_image] =>[orig_patent_app_number] => 09927244 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 12474 [patent_doc_number] => 07807019 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2010-10-05 [patent_title] => 'Radial antenna and plasma processing apparatus comprising the same' [patent_app_type] => utility [patent_app_number] => 10/343201 [patent_app_country] => US [patent_app_date] => 2001-08-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 4729 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 23 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/807/07807019.pdf [firstpage_image] =>[orig_patent_app_number] => 10343201 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7062848 [patent_doc_number] => 20010042513 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-11-22 [patent_title] => 'Apparatus for improved remote microwave plasma source for use with substrate processing systems' [patent_app_type] => new [patent_app_number] => 09/916967 [patent_app_country] => US [patent_app_date] => 2001-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 13028 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 178 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0042/20010042513.pdf [firstpage_image] =>[orig_patent_app_number] => 09916967 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6136704 [patent_doc_number] => 20020000199 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-01-03 [patent_title] => 'Film forming apparatus and method for producing tungsten nitride film' [patent_app_type] => new [patent_app_number] => 09/912504 [patent_app_country] => US [patent_app_date] => 2001-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4252 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0000/20020000199.pdf [firstpage_image] =>[orig_patent_app_number] => 09912504 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6469285 [patent_doc_number] => 20020023589 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-28 [patent_title] => 'Plasma generating apparatus' [patent_app_type] => new [patent_app_number] => 09/902217 [patent_app_country] => US [patent_app_date] => 2001-07-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 20 [patent_figures_cnt] => 20 [patent_no_of_words] => 20180 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 31 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0023/20020023589.pdf [firstpage_image] =>[orig_patent_app_number] => 09902217 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6043911 [patent_doc_number] => 20020166838 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-11-14 [patent_title] => 'Sloped trench etching process' [patent_app_type] => new [patent_app_number] => 09/900293 [patent_app_country] => US [patent_app_date] => 2001-07-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 4750 [patent_no_of_claims] => 24 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 89 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0166/20020166838.pdf [firstpage_image] =>[orig_patent_app_number] => 09900293 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6453597 [patent_doc_number] => 20020020356 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-21 [patent_title] => 'Vacuum arc evaporation source and film formation apparatus using the same' [patent_app_type] => new [patent_app_number] => 09/897900 [patent_app_country] => US [patent_app_date] => 2001-07-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 5406 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 44 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0020/20020020356.pdf [firstpage_image] =>[orig_patent_app_number] => 09897900 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1271558 [patent_doc_number] => 06649020 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-11-18 [patent_title] => 'Plasma processing apparatus' [patent_app_type] => B1 [patent_app_number] => 09/897961 [patent_app_country] => US [patent_app_date] => 2001-07-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 10110 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/649/06649020.pdf [firstpage_image] =>[orig_patent_app_number] => 09897961 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7062840 [patent_doc_number] => 20010042510 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-11-22 [patent_title] => 'Hollow containers with inert or impermeable inner surface through plasma-assisted surface reaction or on-surface polymerization' [patent_app_type] => new [patent_app_number] => 09/895074 [patent_app_country] => US [patent_app_date] => 2001-07-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 4541 [patent_no_of_claims] => 31 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 91 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0042/20010042510.pdf [firstpage_image] =>[orig_patent_app_number] => 09895074 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6392312 [patent_doc_number] => 20020036064 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-03-28 [patent_title] => 'Reactor with heated and textured electrodes and surfaces' [patent_app_type] => new [patent_app_number] => 09/888365 [patent_app_country] => US [patent_app_date] => 2001-06-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 2618 [patent_no_of_claims] => 55 [patent_no_of_ind_claims] => 11 [patent_words_short_claim] => 23 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0036/20020036064.pdf [firstpage_image] =>[orig_patent_app_number] => 09888365 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6029780 [patent_doc_number] => 20020018025 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-02-14 [patent_title] => 'Power supply antenna and power supply method' [patent_app_type] => new [patent_app_number] => 09/881670 [patent_app_country] => US [patent_app_date] => 2001-06-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 7064 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 11 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0018/20020018025.pdf [firstpage_image] =>[orig_patent_app_number] => 09881670 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6897022 [patent_doc_number] => 20010045187 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-11-29 [patent_title] => 'Chemical vapor deposition methods and apparatus' [patent_app_type] => new [patent_app_number] => 09/882515 [patent_app_country] => US [patent_app_date] => 2001-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 2 [patent_figures_cnt] => 2 [patent_no_of_words] => 5565 [patent_no_of_claims] => 32 [patent_no_of_ind_claims] => 12 [patent_words_short_claim] => 38 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0045/20010045187.pdf [firstpage_image] =>[orig_patent_app_number] => 09882515 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6998018 [patent_doc_number] => 20010052394 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-12-20 [patent_title] => ' High density plasma processing apparatus' [patent_app_type] => new [patent_app_number] => 09/881908 [patent_app_country] => US [patent_app_date] => 2001-06-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 3884 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 160 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0052/20010052394.pdf [firstpage_image] =>[orig_patent_app_number] => 09881908 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1407537 [patent_doc_number] => 06521081 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2003-02-18 [patent_title] => 'Deposition shield for a plasma reactor' [patent_app_type] => B2 [patent_app_number] => 09/881425 [patent_app_country] => US [patent_app_date] => 2001-06-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 10 [patent_no_of_words] => 3964 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/521/06521081.pdf [firstpage_image] =>[orig_patent_app_number] => 09881425 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1543732 [patent_doc_number] => 06397776 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2002-06-04 [patent_title] => 'Apparatus for large area chemical vapor deposition using multiple expanding thermal plasma generators' [patent_app_type] => B1 [patent_app_number] => 09/681820 [patent_app_country] => US [patent_app_date] => 2001-06-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 13 [patent_no_of_words] => 5762 [patent_no_of_claims] => 23 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 103 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/397/06397776.pdf [firstpage_image] =>[orig_patent_app_number] => 09681820 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6252704 [patent_doc_number] => 20020185229 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-12 [patent_title] => 'Inductively-coupled plasma processing system' [patent_app_type] => new [patent_app_number] => 09/875339 [patent_app_country] => US [patent_app_date] => 2001-06-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 9964 [patent_no_of_claims] => 50 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 112 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0185/20020185229.pdf [firstpage_image] =>[orig_patent_app_number] => 09875339 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 5797567 [patent_doc_number] => 20020007792 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-01-24 [patent_title] => 'Cathode electrode for plasma sources and plasma source of a vacuum coating device, in particular for the application of coating layers on optical substrates' [patent_app_type] => new [patent_app_number] => 09/870571 [patent_app_country] => US [patent_app_date] => 2001-05-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 3 [patent_no_of_words] => 2165 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 50 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0007/20020007792.pdf [firstpage_image] =>[orig_patent_app_number] => 09870571 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7090474 [patent_doc_number] => 20010032708 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2001-10-25 [patent_title] => 'Electrode plate for plasma etching equipment for forming uniformly-etched surface' [patent_app_type] => new [patent_app_number] => 09/866639 [patent_app_country] => US [patent_app_date] => 2001-05-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 2572 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0032/20010032708.pdf [firstpage_image] =>[orig_patent_app_number] => 09866639 [rel_patent_id] =>[rel_patent_doc_number] =>)